CN206331232U - A kind of many turntable driving axles of XYZ may move polygon prism light path direct write equipment - Google Patents
A kind of many turntable driving axles of XYZ may move polygon prism light path direct write equipment Download PDFInfo
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- CN206331232U CN206331232U CN201621246474.5U CN201621246474U CN206331232U CN 206331232 U CN206331232 U CN 206331232U CN 201621246474 U CN201621246474 U CN 201621246474U CN 206331232 U CN206331232 U CN 206331232U
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- light path
- stomata
- polygon prism
- turntable driving
- prism light
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Abstract
Polygon prism light path direct write equipment is may move the utility model discloses a kind of many turntable driving axles of XYZ, belongs to direct write exposure technique field.The many turntable driving axles of XYZ of the present utility model may move polygon prism light path direct write equipment, and mainly vacuum cup structure is improved, and efficiently solve the problem of suction caused during production platelet due to gas leakage is not enough.Further, the gas cell distribution on sucker for it is middle dredge, it is four careful, effectively prevented the problem of board edge is tilted, saved stomata quantity, reduce cost.
Description
Technical field
The utility model is related to a kind of many turntable driving axles of XYZ and may move polygon prism light path direct write equipment, belongs to direct write exposure
Light technical field.
Background technology
PCB (printed circuit board (PCB)) is the supporter of electronic component, while being also the carrier of electronic component electrical connection.
Common PCB production equipments have traditional exposure machine, polygon prism structure laser direct-writing exposure machine, the exposure of DMD structures laser direct-writing
Machine etc..Image directly can be imaged by laser direct-writing exposure machine on pcb board, relative to traditional exposure machine, it is not necessary to use
The film, the image of formation is apparent.
With functional requirement more and more higher of the market to pcb board, pcb board also becomes to become increasingly complex, and system compatibility is got over
It is high, it is sometimes necessary to size very big substrate, still, 48 inches of super large plate is more than for size, is not had also in the prior art
Can be with the technology and equipment of high-quality processing.Traditional exposure machine can produce super large plate, but its machining accuracy is poor, does not reach
The requirement of high density, thin space.
Circuit board full-size (610 × 530) that current laser direct writing equipment can expose, with the size of circuit board
Increase, it will cause contour size of the unit(s) to become big, influence splicing precision and aligning accuracy cause yields to decline.
If laser direct-writing exposure machine is prepared by increasing the method for the size that sucker can expose, due to required vacuum
Sucker size is that, than larger, sometimes more than 55 inches, there are the following problems for meeting：(1) when the pcb board actual size exposed
When smaller, and sucker structure supports larger vacuum range, and the region for being not covered with plank can produce gas leakage, and influence is inhaled
Absorption of the disk to substrate；(2) tilted due to might have corner during substrate transport, if pull of vacuum is not enough, sucker can not
Plank is inhaled flat, influences whether to expose the quality of pcb board, substrate can be caused to scrap.To solve this problem, current method has
Three kinds：
Method one：Directly ignore the problem, but can require very high to client factory pcb board, plank usually, can not come back and forth
Return and plank is bent manually, have a strong impact on production efficiency.
Method two：For various sizes of plank, different sucker backing plates are designed.The hole covering model of vacuum is inhaled on backing plate
Enclose, it is in the same size with plank.This method is simple, and operation is somewhat bothered, but when producing 55 inches of plank, it is necessary to change
55 inches of backing plate, difficulty is multiplied, and changes the time of backing plate, can increase by 150%~200%, have a strong impact on production efficiency.
Method three：Do not covered for plank and vacuumize region, blocked with article, conventional is to cut the used film.
This method very economical material benefit, but it is pretty troublesome, and different size of pcb board is, it is necessary to the film be cut into different sizes, for a long time
Get off, the film accumulation after the cutting of board producing region can be caused, the size that finding needs also is bothered.
As can be seen here, generally suitably given up using the replacing suitable sucker of size or searching shape size in the prior art
Abandon the film to block the mode of air leakage point, can all substantially reduce production efficiency.
To sum up, current polygon prism light path direct write equipment there are problems that super large plate, vacuum cup can not be produced urgently
It is to be solved.
Utility model content
For problem above, being scanned a kind of XYZ of the utility model there is provided vacuum cup and containing the vacuum cup more
Drive shaft may move polygon prism light path direct write equipment, and super large plate, vacuum cup gas leakage, exposure can not be produced to solve prior art
During the problems such as focus and position inaccurate.
First purpose of the present utility model be to provide a kind of vacuum cup, the vacuum cup, including suction cup main body and
Vacuum generating device；A number of stomata, each each correspondence one in promoting the circulation of qi hole are distributed in suction cup main body in terms of rows and columns
Relay, each row stomata also each one relay of correspondence；Air vent switch is each connected between stomata and vacuum generating device；
The relay and the relay of the stomata column that air vent switch is expert at the stomata simultaneously are connected.
In a kind of embodiment of the present utility model, the air vent switch is located at what stomata was connected with vacuum generating device
On vacuum line.
In a kind of embodiment of the present utility model, the air vent switch is electromagnetic switch.
In a kind of embodiment of the present utility model, the relay is connected with master control device.
In a kind of embodiment of the present utility model, the stomata is in suction cup main body in middle thin, four careful points
Cloth form.
In a kind of embodiment of the present utility model, the line space and column pitch of the stomata by the middle of suction cup main body to
Both sides are in the form uniformly successively decreased.
In a kind of embodiment of the present utility model, between the line space or row of the stomata of suction cup main body central region
Away from being 0.5-3.5 inches to the maximum, positioned at the minimum 3-9mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the present utility model, between the line space or row of the stomata of suction cup main body central region
Away from being 1-3 inches to the maximum, positioned at the minimum 5-8mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the present utility model, between the line space or row of the stomata of suction cup main body central region
Away from being 3.2 inches to the maximum, positioned at the minimum 5.5mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the present utility model, opening shape of the stomata in suction cup main body can be round
The arbitrary shapes such as shape, ellipse, square, rectangle, such as it is circular.Using square or rectangular opening shape, its
The linear shape of edge of opening, it is easier to being equally that the substrate edges that edge is linear agree with.
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 10mm2~
500mm2。
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 50mm2~
350mm2。
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 100mm2~
250mm2。
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 200mm2。
In a kind of embodiment of the present utility model, the Breadth Maximum of the suction cup main body is 55 inches.
In a kind of embodiment of the present utility model, the card of the suction cup main body is integral card or by polylith disk
Face is combined.
In a kind of embodiment of the present utility model, the card of the suction cup main body is by the big disk assembled of two pieces of grades
Into.
In a kind of embodiment of the present utility model, the suction cup main body can be divided into chuck support structure and backing plate,
It can also be the integral structure that backing plate is integrated with chuck support structure.When suction cup main body is chuck support structure and backing plate
During separated structure, backing plate is arranged on chuck support structure surface, and pad surfaces are designed with below equally distributed stomata, backing plate
It is the vacuum air-channel being connected with stomata.
Second purpose of the present utility model is to provide the device containing vacuum cup of the present utility model.
In a kind of embodiment of the present utility model, described device can be various types of exposure machines.
3rd purpose of the present utility model is to provide many turntable driving axles of the XYZ containing vacuum cup of the present utility model
Removable polygon prism light path direct write equipment.
The many turntable driving axles of XYZ, which may move polygon prism light path direct write equipment, includes base, polygon prism light path, stepping drive
Moving axis, connecting plate, vacuum cup, multiple moving parts, camera；The moving parts are swept including a turntable driving X-axis, one
Retouch driving Y-axis and a lifting driving Z axis；Vacuum cup is located above moving parts.
In a kind of embodiment of the present utility model, the vacuum cup be it is above-mentioned refer to it is of the present utility model any
A kind of vacuum cup.
In a kind of embodiment of the present utility model, the polygon prism light path is connected by connecting plate and stepper drive axle
Connect.Polygon prism light path can be moved with the sliding block of stepper drive axle along guide rail.
In the utility model, many turntable driving axles of XYZ refer to containing two or more moving parts, and moving parts include one
Individual turntable driving X-axis, a turntable driving Y-axis and a lifting driving Z axis；It is removable to refer to that polygon prism light path be with stepping
The sliding block of drive shaft is moved along guide rail.
In a kind of embodiment of the present utility model, many turntable driving axles of XYZ may move polygon prism light path direct write
Equipment contains two moving parts.
In a kind of embodiment of the present utility model, the vacuum cup is objective table, the lifting with moving parts
Drive Z axis connection.
In a kind of embodiment of the present utility model, it is set up in parallel between the multiple moving parts along X-direction.
In a kind of embodiment of the present utility model, the number of the multiple moving parts is two.
In a kind of embodiment of the present utility model, the card of the suction cup main body of the vacuum cup is integral card
Or formed by polylith disk assembled.When being formed by polylith disk assembled, one or more corresponding moving parts of every piece of card.
In a kind of embodiment of the present utility model, the suction cup main body of the vacuum cup is identical by the size of left and right two
Card merge form；One moving parts of each card correspondence.
In a kind of embodiment of the present utility model, any connection is not taken between described two cards, or use
Ball pivot chain structure is connected, or uses Hard link.
In a kind of embodiment of the present utility model, the camera is located above vacuum cup.
In a kind of embodiment of the present utility model, the turntable driving X-axis is located at below lifting driving Z axis, with liter
Drop driving Z axis connection.
In a kind of embodiment of the present utility model, the turntable driving Y-axis is located at below turntable driving X-axis, with sweeping
Retouch driving X-axis connection.
Advantage and effect of the present utility model：
(1) many turntable driving axles of XYZ of the present utility model may move polygon prism light path direct write equipment, mainly to vacuum cup
Structure is improved.Vacuum cup of the present utility model is the vacuum cup of automation, and chuck surface is distributed with a series of
Stomata, when having pcb board covering above stomata, stomata closed-circuit working, when there is no pcb board covering above stomata, stomata closure,
When efficiently solving production platelet, the problem of suction caused due to gas leakage is not enough.Further, the gas cell distribution on sucker
Dredged for centre, four carefully, both cause different size of pcb board when placing, there is stomata marginal portion all the time, effectively prevents plank
The problem of edge is tilted, can save stomata quantity in the middle place for not needing too many stomata again, reduce cost, improve
Efficiency.
(2) many turntable driving axles of XYZ of the present utility model may move polygon prism light path direct write equipment, exposure machine sucker width
55 inches can be arranged to, 55 inches of super large plate can be produced, at the same can guarantee that again high accuracy, high density, fine rule away from etc. demand；
And multigroup moving parts are connected below sucker, the kinematic axis of multigroup moving parts is synchronized with the movement, and improves exposure accuracy and operation
Stability, exposed lines spacing is up to less than 30 microns, and ill-exposed rate drops to less than 0.1%.
(3) direct write equipment light path of the present utility model may move, and can cover the whole width of table top, it is possible to reduce light
The use on road, reduces cost；Containing turntable driving X-axis, light path displacement is reduced.Can by changing the height of lifting shaft,
The different thickness of slab of correspondence so that light path optimal focal plane keeps constant；Meanwhile, using many lifting shafts, objective table support can be strengthened,
Reduce deformation.
(4) the utility model can support 1.2m × 1m backboard, both can be that one piece big plate or platelet are spelled
Big plate is constituted together.The utility model greatly supplements the vacancy in market.
(5) direct write equipment of the present utility model is using top polygon prism light path stepper drive axle and lower scan driving X-axis
With reference to so that top polygon prism light path and lower vacuum sucker can be moved freely in transverse direction, and transverse direction is extended to greatest extent
On exposure range, increase exposure flexible property；The design of the multigroup moving parts in equipment bottom, possesses vacuum cup many
The individual strong point, makes sucker have more preferable stability in motion process, while avoiding to go out during the unimodule larger sucker of support
Caused by existing connection is insecure the problems such as sucker run-off the straight, rotation.
Brief description of the drawings
Fig. 1 is vacuum cup structural representation of the present utility model；Wherein, 1 suction cup main body, 3 stomatas, 4 relays, 6 total
Control device；
Fig. 2 is the vacuum generating device and stomata connection diagram of vacuum cup of the present utility model；Wherein, 2 vacuum are sent out
Generating apparatus, 5 air vent switch；
Fig. 3 places the structural representation after substrate for traditional vacuum cup；Wherein, 14 substrate；
Fig. 4 is that vacuum cup of the present utility model places a kind of structural representation after substrate；
Fig. 5 is a kind of structural representation after the substrate position on adjustment vacuum cup of the present utility model；
Fig. 6 is that the removable polygon prism light path direct write of the double turntable driving axles of the XYZ containing vacuum cup of the present utility model is set
It is standby；Wherein, 7 bases, 8 polygon prism light paths, 9 stepper drive axles, 10 vacuum cups, 12 turntable driving Y-axis, 15 connecting plates, 16 phases
Machine；
Fig. 7 is that the removable polygon prism light path direct write equipment of the double turntable driving axles of XYZ takes down the schematic diagram after vacuum cup；Its
In, 11 turntable driving X-axis, 13 lifting driving Z axis.
Specific embodiment
Polygon prism light path：Exposure figure is changed by polygon prism upset；
Stepper drive axle：Linear induction motor system, light path be arranged on motor motion parts, also cry X-axis motion platform or
Stepping axle, for doing step motion.
Turntable driving X-axis：Also scan axis or X-axis are, for doing the continuous scanning motion of constant speed, driving sucker
Motion.
Turntable driving Y-axis：Also scan axis or Y-axis are, for doing the continuous scanning motion of constant speed, driving sucker
Motion.
Lifting driving Z axis：Also lifting shaft or Z axis are, for controlling the lifting of sucker.
Sucker：For adsorbing, the objective table of fixed pcb board；Pcb board can be adsorbed above by negative pressure, it is real in exposure
The fixation of existing pcb board and the flatness on pcb board surface；
Base：Marble support base；
Here is that the utility model is specifically described.
Embodiment 1：Vacuum cup
Vacuum cup structure of the present utility model is as shown in Figure 1-2.
The utility model vacuum cup, including suction cup main body 1 and vacuum generating device 2；With row and column in suction cup main body 1
The a number of stomata 3 of formal distribution, each each one relay 4 of correspondence in promoting the circulation of qi hole 3, each row stomata also each correspondence one after
Electrical equipment；Air vent switch 5 is each connected between stomata 3 and vacuum generating device 2；Air vent switch 5 is expert at the stomata simultaneously
Relay and the stomata column relay connect.
Each relay is connected with master control device 6.Air vent switch is located at the vacuum tube that stomata is connected with vacuum generating device
Lu Shang.The air vent switch can be electromagnetic switch.The stomata, can be uniformly distributed in suction cup main body.
Using such structure and connected mode, when vacuum cup works, a certain size substrate is placed on vacuum suction
On disk, for the stomata row or stomata row for thering is substrate to cover, the relay path corresponding to the row or column；For certain stomata
Speech, only when it is expert at and column corresponding to relay all make for path, the air vent switch of the stomata is just opened, and then
Vacuum generating device and stomata UNICOM, stomata work.In the case of this, the air vent switch not covered by substrate is closing
State, so as to solve leakage problem existing during larger utilization vacuum cup production PCB.
Embodiment 2：Vacuum cup
The vacuum cup of the present embodiment, is made that on the basis of the vacuum cup as shown in Figure 1-2 of embodiment 1 and changes
Enter.
The stomata 3 is in suction cup main body 1 in middle thin, four careful distribution forms.
Traditional vacuum cup, stomata is usually to use equally distributed form, may when producing less pcb board
After substrate 14 is placed in suction cup main body, the lucky position in certain edge where substrate far from both sides stomata farther out (as shown in Figure 3) so that
Cause the marginal portion to be tilted because of no pull of vacuum, production is impacted.Using this centre of the utility model
After thin, four careful distribution forms, as illustrated in figures 4-5, when smaller substrate is placed on vacuum cup, select substrate is close
Suction cup main body edge is placed, if the substrate edges now close to intermediate region in suction cup main body are lucky from both sides stomata farther out,
It can so select the substrate edges being moved in nearest a line or a row stomata and be allowed to covering just；Due to sucker master
The surrounding stomata of body is closeer, and this movement will not cause phenomenon of another lateral edges of substrate from stomata farther out.
Alternatively, the line space and column pitch of the stomata are by being in the form uniformly successively decreased to both sides in the middle of suction cup main body.
Alternatively, positioned at suction cup main body central region stomata line space or column pitch be 1-3 inches to the maximum, positioned at suction
The minimum 5-8mm of line space or column pitch of the stomata of disc main body fringe region.Opening shape of the stomata in suction cup main body can
It is to be the arbitrary shapes such as circle, ellipse, square, rectangle, such as circular.Opening surface of the stomata in suction cup main body
Product can be arbitrary, such as 10mm2~500mm2。
Alternatively, the card of the suction cup main body is integral card or formed by polylith disk assembled.
Embodiment 3：The double turntable driving axles of XYZ may move polygon prism light path direct write equipment
Lifted so that the double turntable driving axles of the XYZ containing two moving parts may move polygon prism light path direct write equipment as an example
Example explanation.
As shown in fig. 6-7, it may move polygon prism light for the double turntable driving axles of the XYZ containing vacuum cup of the present utility model
Road direct write equipment.
The double turntable driving axles of the XYZ, which may move polygon prism light path direct write equipment, includes base 7, polygon prism light path 8, stepping
Drive shaft 9, moving parts, vacuum cup 10, connecting plate 15, a camera 16；The moving parts include a turntable driving X
Axle 11, a turntable driving Y-axis 12 and a lifting driving Z axis 13；Vacuum cup 10 is located above moving parts.
The polygon prism light path 8 is connected by connecting plate 15 with stepper drive axle 9, can be with the sliding block of stepper drive axle 9
Moved along guide rail.The turntable driving X-axis 11 is located at the lower section of lifting driving Z axis 13, is connected with lifting driving Z axis；Scanning is driven
Dynamic Y-axis 12 is located at the lower section of turntable driving X-axis 11, is connected with turntable driving X-axis；The vacuum cup 10, as objective table, with fortune
The lifting driving Z axis 13 of dynamic component is connected.Vacuum cup, with turntable driving X-axis, turntable driving Y-axis, lifting driving Z axis 13
Movement and occur corresponding change in location.
Base has function of shock insulation, and horizontal positioned, all parts are respectively mounted above it.
The camera 16 is located at the top of vacuum cup 10, for capturing the exposure area of the big plates of PCB.
Pcb board is placed on vacuum cup 10 (objective table), the height of the lifting driving control objective table 10 of Z axis 13 finds light
Road optimal focal plane；Determination pcb board exposure original position is found by camera 16, stepper drive axle 9 moves polygon prism light path 8
To exposure original position, objective table is moved to exposure original position by turntable driving X-axis and turntable driving Y-axis 12；Polygon prism light
Road 8 starts exposure, while turntable driving X-axis and the control objective table scanning of turntable driving Y-axis 12 are until end exposure position stops；
Expose behind a region, polygon prism light path 8 is in polygon prism light path 8 with stepper drive axle 9 stepping, one fixed range
The unexposed region of pcb board starts exposure；After repeating 1~5N times, whole plate end exposure.Equipment of the present utility model, Ke Yitong
Cross the height for changing lifting shaft, the different thickness of slab of correspondence so that light path optimal focal plane keeps constant；Meanwhile, using double lifting shafts,
Objective table support can be strengthened, deformation is reduced.
Alternatively, the card of the suction cup main body of the vacuum cup is integral card.
Embodiment 4：The double turntable driving axles of XYZ may move polygon prism light path direct write equipment
Lifted so that the double turntable driving axles of the XYZ containing two moving parts may move polygon prism light path direct write equipment as an example
Example explanation.
The double turntable driving axles of the XYZ of the present embodiment may move polygon prism light path direct write equipment, be done on the basis of embodiment 3
Improvement is gone out.
The card of the suction cup main body of the vacuum cup is formed by polylith disk assembled；Corresponding one of every piece of card is more
Individual moving parts.
Alternatively, the suction cup main body of the vacuum cup is merged by the size identical card of left and right two and formed；Each disk
Face one moving parts of correspondence.
Any connection is not taken between two cards of the composition suction cup main body, or using the connection of ball pivot chain structure,
Or use Hard link.
For 55*40 inch of pcb board of production, because of the limitation of domestic processing technology level, it is impossible to produce high precision, area greatly
Sucker, therefore can only take the mode of two pieces of sucker card splicings.In the utility model, two pieces of left and right sucker, if respectively with
The screw of dry quantity is fixed on corresponding Z axis mounting surface, and then the connected mode between two pieces of suckers, can there is following 3 kinds：
(1) any connection is not taken between sucker, the simple precision by the Y-axis of platform courses two.Advantage be it is simple in construction,
It is economical and practical, when producing less than 24 inches of plank, it is only necessary to expose a sucker scope, it is not necessary to which two suckers are all
It is exposed, production plank size is more flexible, closer to client's use demand.
(2) connected between sucker using ball pivot chain structure, two sucker Z-directions can have the inconsistent situation of slight height, Y
Uniformity is realized by platform courses in the motion process of direction.Advantage is unlocked once there is some Y-axis, passes through the company of two suckers
Connect, another Y-axis can be driven to unlock, the damage of plank is prevented effectively from.Because two Z axis difference in height conventional methods can not be surveyed accurately
Amount more or less can all have certain altitude poor to micron level.This method can effectively reduce that Z axis is highly inconsistent to be caused
Situations such as stuck during existing Z axis motion；
(3) Hard link is used between sucker, i.e., is fixed two suckers extremely with modes such as screws.Advantage is that whether Y-axis is dashed forward
So power-off, or Z axis are highly inconsistent, are scrapped all without plank is caused.
Above-mentioned three kinds of connection methods, can select one way in which to be attached according to actual conditions.
Although the utility model is disclosed as above with preferred embodiment, it is not limited to the utility model, any
Person skilled in the art, is not departing from spirit and scope of the present utility model, can all do various changes and modification, therefore this
What the protection domain of utility model should be defined by claims is defined.
Claims (8)
1. a kind of many turntable driving axles of XYZ may move polygon prism light path direct write equipment, it is characterised in that drive is scanned the XYZ more
Moving axis may move polygon prism light path direct write equipment include base, it is polygon prism light path, stepper drive axle, connecting plate, vacuum cup, many
Individual moving parts, camera；The moving parts include a turntable driving X-axis, a turntable driving Y-axis and a lifting driving
Z axis；Vacuum cup is located above moving parts；The polygon prism light path is connected by connecting plate with stepper drive axle；
The vacuum cup includes suction cup main body and vacuum generating device；A fixed number is distributed in suction cup main body in terms of rows and columns
The stomata of amount, each each one relay of correspondence in promoting the circulation of qi hole, each row stomata also each one relay of correspondence；Each stomata with it is true
Air vent switch is connected between empty generating means；Relay and the stomata column that air vent switch is expert at the stomata simultaneously
Relay connection；
The stomata is in suction cup main body in middle thin, four careful distribution forms.
2. many turntable driving axles of XYZ according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that
The air vent switch is located on the vacuum line that stomata is connected with vacuum generating device.
3. many turntable driving axles of XYZ according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that
The opening shape of the stomata is square.
4. many turntable driving axles of XYZ according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that
Line space or column pitch positioned at the stomata of suction cup main body central region are 3.2 inches to the maximum.
5. many turntable driving axles of XYZ according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that
Positioned at the minimum 5.5mm of line space or column pitch of the stomata of suction cup main body fringe region.
6. many turntable driving axles of XYZ according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that
The many turntable driving axles of XYZ may move polygon prism light path direct write equipment and contain two moving parts.
7. many turntable driving axles of XYZ according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that
The camera is located above vacuum cup.
8. many turntable driving axles of XYZ according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that
The turntable driving X-axis is located at below lifting driving Z axis, is connected with lifting driving Z axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621246474.5U CN206331232U (en) | 2016-11-22 | 2016-11-22 | A kind of many turntable driving axles of XYZ may move polygon prism light path direct write equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621246474.5U CN206331232U (en) | 2016-11-22 | 2016-11-22 | A kind of many turntable driving axles of XYZ may move polygon prism light path direct write equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206331232U true CN206331232U (en) | 2017-07-14 |
Family
ID=59287756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621246474.5U Active CN206331232U (en) | 2016-11-22 | 2016-11-22 | A kind of many turntable driving axles of XYZ may move polygon prism light path direct write equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206331232U (en) |
-
2016
- 2016-11-22 CN CN201621246474.5U patent/CN206331232U/en active Active
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