CN206331231U - A kind of single sweep drive shaft may move polygon prism light path direct write equipment - Google Patents

A kind of single sweep drive shaft may move polygon prism light path direct write equipment Download PDF

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Publication number
CN206331231U
CN206331231U CN201621246458.6U CN201621246458U CN206331231U CN 206331231 U CN206331231 U CN 206331231U CN 201621246458 U CN201621246458 U CN 201621246458U CN 206331231 U CN206331231 U CN 206331231U
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CN
China
Prior art keywords
stomata
light path
polygon prism
prism light
drive shaft
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CN201621246458.6U
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Chinese (zh)
Inventor
沈小宏
赵华
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Wuxi Speed Semiconductor Technology Co Ltd
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Wuxi Speed Semiconductor Technology Co Ltd
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Abstract

Polygon prism light path direct write equipment is may move the utility model discloses a kind of single sweep drive shaft, belongs to direct write exposure technique field.Single sweep drive shaft of the present utility model may move polygon prism light path direct write equipment, and mainly vacuum cup structure is improved, and efficiently solve the problem of suction caused during production platelet due to gas leakage is not enough.Further, the gas cell distribution on sucker for it is middle dredge, it is four careful, effectively prevented the problem of board edge is tilted, saved stomata quantity, reduce cost.

Description

A kind of single sweep drive shaft may move polygon prism light path direct write equipment
Technical field
The utility model is related to a kind of single sweep drive shaft and may move polygon prism light path direct write equipment, belongs to direct write exposure skill Art field.
Background technology
PCB (printed circuit board (PCB)) is the supporter of electronic component, while being also the carrier of electronic component electrical connection. Common PCB production equipments have traditional exposure machine, polygon prism structure laser direct-writing exposure machine, the exposure of DMD structures laser direct-writing Machine etc..Image directly can be imaged by laser direct-writing exposure machine on pcb board, relative to traditional exposure machine, it is not necessary to use The film, the image of formation is apparent.
With functional requirement more and more higher of the market to pcb board, pcb board also becomes to become increasingly complex, and system compatibility is got over It is high, it is sometimes necessary to size very big substrate, still, 48 inches of super large plate is more than for size, is not had also in the prior art Can be with the technology and equipment of high-quality processing.Traditional exposure machine can produce super large plate, but its machining accuracy is poor, does not reach The requirement of high density, thin space.
Circuit board full-size (610 × 530) that current laser direct writing equipment can expose, with the size of circuit board Increase, it will cause contour size of the unit(s) to become big, influence splicing precision and aligning accuracy cause yields to decline.
If laser direct-writing exposure machine is prepared by increasing the method for the size that sucker can expose, due to required vacuum Sucker size is that, than larger, sometimes more than 55 inches, there are the following problems for meeting:(1) when the pcb board actual size exposed When smaller, and sucker structure supports larger vacuum range, and the region for being not covered with plank can produce gas leakage, and influence is inhaled Absorption of the disk to substrate;(2) tilted due to might have corner during substrate transport, if pull of vacuum is not enough, sucker can not Plank is inhaled flat, influences whether to expose the quality of pcb board, substrate can be caused to scrap.To solve this problem, current method has Three kinds:
Method one:Directly ignore the problem, but can require very high to client factory pcb board, plank usually, can not come back and forth Return and plank is bent manually, have a strong impact on production efficiency.
Method two:For various sizes of plank, different sucker backing plates are designed.The hole covering model of vacuum is inhaled on backing plate Enclose, it is in the same size with plank.This method is simple, and operation is somewhat bothered, but when producing 55 inches of plank, it is necessary to change 55 inches of backing plate, difficulty is multiplied, and changes the time of backing plate, can increase by 150%~200%, have a strong impact on production efficiency.
Method three:Do not covered for plank and vacuumize region, blocked with article, conventional is to cut the used film. This method very economical material benefit, but it is pretty troublesome, and different size of pcb board is, it is necessary to the film be cut into different sizes, for a long time Get off, the film accumulation after the cutting of board producing region can be caused, the size that finding needs also is bothered.
As can be seen here, generally suitably given up using the replacing suitable sucker of size or searching shape size in the prior art Abandon the film to block the mode of air leakage point, can all substantially reduce production efficiency.
To sum up, current polygon prism light path direct write equipment there are problems that super large plate, vacuum cup can not be produced urgently It is to be solved.
Utility model content
For problem above, the utility model provides vacuum cup and a kind of single sweep driving containing the vacuum cup Axle may move polygon prism light path direct write equipment, and super large plate, vacuum cup gas leakage, exposure process can not be produced to solve prior art Middle focusing and the problems such as position inaccurate.
First purpose of the present utility model be to provide a kind of vacuum cup, the vacuum cup, including suction cup main body and Vacuum generating device;A number of stomata, each each correspondence one in promoting the circulation of qi hole are distributed in suction cup main body in terms of rows and columns Relay, each row stomata also each one relay of correspondence;Air vent switch is each connected between stomata and vacuum generating device; The relay and the relay of the stomata column that air vent switch is expert at the stomata simultaneously are connected.
In a kind of embodiment of the present utility model, the air vent switch is located at what stomata was connected with vacuum generating device On vacuum line.
In a kind of embodiment of the present utility model, the air vent switch is electromagnetic switch.
In a kind of embodiment of the present utility model, the relay is connected with master control device.
In a kind of embodiment of the present utility model, the stomata is in suction cup main body in middle thin, four careful points Cloth form.
In a kind of embodiment of the present utility model, the line space and column pitch of the stomata by the middle of suction cup main body to Both sides are in the form uniformly successively decreased.
In a kind of embodiment of the present utility model, between the line space or row of the stomata of suction cup main body central region Away from being 1-3 inches to the maximum, positioned at the minimum 5.4mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the present utility model, between the line space or row of the stomata of suction cup main body central region Away from being 3.3 inches to the maximum, positioned at the minimum 5-8mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the present utility model, opening shape of the stomata in suction cup main body can be round The arbitrary shapes such as shape, ellipse, square, rectangle, such as it is circular.
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 10mm2~ 500mm2
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 50mm2~ 350mm2
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 100mm2~ 250mm2
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 200mm2
In a kind of embodiment of the present utility model, the Breadth Maximum of the suction cup main body is 55 inches.
In a kind of embodiment of the present utility model, the card of the suction cup main body is integral card or by polylith disk Face is combined.
In a kind of embodiment of the present utility model, the card of the suction cup main body is by the big disk assembled of two pieces of grades Into.
In a kind of embodiment of the present utility model, the suction cup main body can be divided into chuck support structure and backing plate, It can also be the integral structure that backing plate is integrated with chuck support structure.When suction cup main body is chuck support structure and backing plate During separated structure, backing plate is arranged on chuck support structure surface, and pad surfaces are designed with below equally distributed stomata, backing plate It is the vacuum air-channel being connected with stomata.
Second purpose of the present utility model is to provide the device containing vacuum cup of the present utility model.
In a kind of embodiment of the present utility model, described device can be various types of exposure machines.
3rd purpose of the present utility model is to provide the single sweep drive shaft containing vacuum cup of the present utility model can Mobile polygon prism light path direct write equipment.
The single sweep drive shaft, which may move polygon prism light path direct write equipment, includes base, polygon prism light path, stepper drive Axle, connecting plate, vacuum cup, moving parts, a camera;The moving parts include a turntable driving Y-axis and one rises Drop driving Z axis;Vacuum cup is located above moving parts.
In a kind of embodiment of the present utility model, the vacuum cup be it is above-mentioned refer to it is of the present utility model any A kind of vacuum cup.
In a kind of embodiment of the present utility model, the polygon prism light path is connected by connecting plate and stepper drive axle Connect.Polygon prism light path can be moved with the sliding block of stepper drive axle along guide rail.
In the utility model, single sweep drive shaft refers to containing a moving parts, and moving parts include a scanning Drive Y-axis and a lifting driving Z axis;It is removable to refer to that polygon prism light path be transported with the sliding block of stepper drive axle along guide rail It is dynamic.
In a kind of embodiment of the present utility model, the vacuum cup is objective table, the lifting with moving parts Drive Z axis connection.
In a kind of embodiment of the present utility model, the card of the suction cup main body of the vacuum cup is integral card Or formed by polylith disk assembled.
In a kind of embodiment of the present utility model, the camera is located above vacuum cup.
In a kind of embodiment of the present utility model, the turntable driving Y-axis is located at below lifting driving Z axis, with liter Drop driving Z axis connection.
Advantage and effect of the present utility model:
(1) single sweep drive shaft of the present utility model may move polygon prism light path direct write equipment, mainly to vacuum cup knot Structure is improved.Vacuum cup of the present utility model is the vacuum cup of automation, and a series of gas is distributed with chuck surface Hole, when having pcb board covering above stomata, stomata closed-circuit working, when not having pcb board covering above stomata, stomata closure has When effect solves production platelet, the problem of suction caused due to gas leakage is not enough.Further, the gas cell distribution on sucker is Centre is dredged, four carefully, both cause different size of pcb board when placing, and there is stomata marginal portion all the time, effectively prevents plank side The problem of edge is tilted, can save stomata quantity in the middle place for not needing too many stomata again, reduce cost, improve effect Rate.
(2) single sweep drive shaft of the present utility model may move polygon prism light path direct write equipment, and exposure machine sucker width can To be arranged to 55 inches, 55 inches of super large plate can be produced, at the same can guarantee that again high accuracy, high density, fine rule away from etc. demand.
(3) direct write equipment light path of the present utility model may move, and can cover the whole width of table top, it is possible to reduce light The use on road, reduces cost;Can be by changing the height of lifting shaft, the different thicknesss of slab of correspondence so that light path optimal focal plane is protected Hold constant.
(4) the utility model can support 1.2m × 1m backboard, both can be that one piece big plate or platelet are spelled Big plate is constituted together.The utility model greatly supplements the vacancy in market.
(5) polygon prism light path direct write equipment of the present utility model, polygon prism light path, can edge under the driving of stepper drive axle Horizontal direction is moved freely, and extends horizontal exposure range, increases the flexible property of exposure, and stepping axle is arranged on gantry structure Top, simplifies the moving parts structure of lower section;The design of the 1 group of moving parts in equipment bottom, solves component of doing more physical exercises in work When making, exposed because the influences such as distortion, inclination occurs in the substrate position that the motion of moving parts can not realize absolute synchronization and bring The problem of light quality even results in product rejection.
Brief description of the drawings
Fig. 1 is vacuum cup structural representation of the present utility model;Wherein, 1 suction cup main body, 3 stomatas, 4 relays, 6 total Control device;
Fig. 2 is the vacuum generating device and stomata connection diagram of vacuum cup of the present utility model;Wherein, 2 vacuum are sent out Generating apparatus, 5 air vent switch;
Fig. 3 places the structural representation after substrate for traditional vacuum cup;Wherein, 14 substrate;
Fig. 4 is that vacuum cup of the present utility model places a kind of structural representation after substrate;
Fig. 5 is a kind of structural representation after the substrate position on adjustment vacuum cup of the present utility model;
Fig. 6 is that the single sweep drive shaft containing vacuum cup of the present utility model may move polygon prism light path direct write equipment; Wherein, 7 bases, 8 polygon prism light paths, 9 stepper drive axles, 10 vacuum cups, 12 turntable driving Y-axis, 15 connecting plates, 16 cameras;
Fig. 7 is that the removable polygon prism light path direct write equipment of single sweep drive shaft takes down the schematic diagram after vacuum cup;Wherein, 13 lifting driving Z axis.
Specific embodiment
Polygon prism light path:Exposure figure is changed by polygon prism upset;
Stepper drive axle:Linear induction motor system, light path be arranged on motor motion parts, also cry X-axis motion platform or Stepping axle, for doing step motion.
Turntable driving Y-axis:Also scan axis or Y-axis are, for doing the continuous scanning motion of constant speed, driving sucker Motion.
Lifting driving Z axis:Also lifting shaft or Z axis are, for controlling the lifting of sucker.
Sucker:For adsorbing, the objective table of fixed pcb board;Pcb board can be adsorbed above by negative pressure, it is real in exposure The fixation of existing pcb board and the flatness on pcb board surface;
Base:Marble support base;
Here is that the utility model is specifically described.
Embodiment 1:Vacuum cup
Vacuum cup structure of the present utility model is as shown in Figure 1-2.
The utility model vacuum cup, including suction cup main body 1 and vacuum generating device 2;With row and column in suction cup main body 1 The a number of stomata 3 of formal distribution, each each one relay 4 of correspondence in promoting the circulation of qi hole 3, each row stomata also each correspondence one after Electrical equipment;Air vent switch 5 is each connected between stomata 3 and vacuum generating device 2;Air vent switch 5 is expert at the stomata simultaneously Relay and the stomata column relay connect.
Each relay is connected with master control device 6.Air vent switch is located at the vacuum tube that stomata is connected with vacuum generating device Lu Shang.The air vent switch can be electromagnetic switch.The stomata, can be uniformly distributed in suction cup main body.
Using such structure and connected mode, when vacuum cup works, a certain size substrate is placed on vacuum suction On disk, for the stomata row or stomata row for thering is substrate to cover, the relay path corresponding to the row or column;For certain stomata Speech, only when it is expert at and column corresponding to relay all make for path, the air vent switch of the stomata is just opened, and then Vacuum generating device and stomata UNICOM, stomata work.In the case of this, the air vent switch for the stomata not covered substantially For closed mode, so as to solve leakage problem existing during larger utilization vacuum cup production PCB.
Embodiment 2:Vacuum cup
The vacuum cup of the present embodiment, is made that on the basis of the vacuum cup as shown in Figure 1-2 of embodiment 1 and changes Enter.
The stomata 3 is in suction cup main body 1 in middle thin, four careful distribution forms.
Traditional vacuum cup, stomata is usually to use equally distributed form, may when producing less pcb board After substrate 14 is placed in suction cup main body, the lucky position in certain edge where substrate far from both sides stomata farther out (as shown in Figure 3) so that Cause the marginal portion to be tilted because of no pull of vacuum, production is impacted.Using this centre of the utility model After thin, four careful distribution forms, as illustrated in figures 4-5, when smaller substrate is placed on vacuum cup, select substrate is close Suction cup main body edge is placed, if the substrate edges now close to intermediate region in suction cup main body are lucky from both sides stomata farther out, It can so select the substrate edges being moved in nearest a line or a row stomata and be allowed to covering just;Due to sucker master The surrounding stomata of body is closeer, and this movement will not cause phenomenon of another lateral edges of substrate from stomata farther out.
Alternatively, the line space and column pitch of the stomata are by being in the form uniformly successively decreased to both sides in the middle of suction cup main body.
Alternatively, positioned at suction cup main body central region stomata line space or column pitch be 1-3 inches to the maximum, positioned at suction The minimum 5-8mm of line space or column pitch of the stomata of disc main body fringe region.Opening shape of the stomata in suction cup main body can It is to be the arbitrary shapes such as circle, ellipse, square, rectangle, such as circular.Opening surface of the stomata in suction cup main body Product can be arbitrary, such as 10mm2~500mm2
Alternatively, the card of the suction cup main body is integral card or formed by polylith disk assembled.
Embodiment 3:Single sweep drive shaft may move polygon prism light path direct write equipment
As shown in fig. 6-7, it may move polygon prism light path for the single sweep drive shaft containing vacuum cup of the present utility model Direct write equipment.
The single sweep drive shaft, which may move polygon prism light path direct write equipment, includes base 7, polygon prism light path 8, stepping drive Moving axis 9, moving parts, vacuum cup 10, connecting plate 15, a camera 16;The moving parts include a turntable driving Y-axis 12 and one lifting driving Z axis 13;Vacuum cup 10 is located above moving parts.
The polygon prism light path 8 is connected by connecting plate 15 with stepper drive axle 9, can be with the sliding block of stepper drive axle 9 Moved along guide rail.The turntable driving Y-axis 12 is located at the lower section of lifting driving Z axis 13, is connected with lifting driving Z axis 13;It is described Vacuum cup 10, as objective table, the lifting driving Z axis 13 with moving parts are connected.Vacuum cup, with turntable driving Y-axis, Lifting drives the movement of Z axis 13 and occurs corresponding change in location.
Base has function of shock insulation, and horizontal positioned, all parts are respectively mounted above it.
The camera 16 is located at the top of vacuum cup 10, for capturing the exposure area of the big plates of PCB.
Pcb board is placed on vacuum cup 10 (objective table), the height of the lifting driving control objective table 10 of Z axis 13 finds light Road optimal focal plane;Determination pcb board exposure original position is found by camera 16, stepper drive axle 9 moves polygon prism light path 8 To exposure original position, objective table is moved to exposure original position by turntable driving Y-axis 12;Polygon prism light path 8 starts exposure, together When turntable driving Y-axis 12 control objective table scanning until end exposure position stops.Equipment of the present utility model, can be by changing Become the height of lifting shaft, the different thickness of slab of correspondence so that light path optimal focal plane keeps constant.
Alternatively, the card of the suction cup main body of the vacuum cup is integral card.
Although the utility model is disclosed as above with preferred embodiment, it is not limited to the utility model, any Person skilled in the art, is not departing from spirit and scope of the present utility model, can all do various changes and modification, therefore this What the protection domain of utility model should be defined by claims is defined.

Claims (6)

1. a kind of single sweep drive shaft may move polygon prism light path direct write equipment, it is characterised in that the single sweep drive shaft can Mobile polygon prism light path direct write equipment includes base, polygon prism light path, stepper drive axle, connecting plate, vacuum cup, a motion Component, camera;The moving parts include a turntable driving Y-axis and a lifting driving Z axis;Vacuum cup is located at exercise group Above part;The polygon prism light path is connected by connecting plate with stepper drive axle;
The vacuum cup includes suction cup main body and vacuum generating device;A fixed number is distributed in suction cup main body in terms of rows and columns The stomata of amount, each each one relay of correspondence in promoting the circulation of qi hole, each row stomata also each one relay of correspondence;Each stomata with it is true Air vent switch is connected between empty generating means;Relay and the stomata column that air vent switch is expert at the stomata simultaneously Relay connection;
The stomata is in suction cup main body in middle thin, four careful distribution forms.
2. single sweep drive shaft according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that described Air vent switch is located on the vacuum line that stomata is connected with vacuum generating device.
3. single sweep drive shaft according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that be located at The line space or column pitch of the stomata of suction cup main body central region are 3.3 inches to the maximum.
4. single sweep drive shaft according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that be located at The minimum 5.4mm of line space or column pitch of the stomata of suction cup main body fringe region.
5. single sweep drive shaft according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that described Camera is located above vacuum cup.
6. single sweep drive shaft according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that described Turntable driving Y-axis is located at below lifting driving Z axis, is connected with lifting driving Z axis.
CN201621246458.6U 2016-11-22 2016-11-22 A kind of single sweep drive shaft may move polygon prism light path direct write equipment Active CN206331231U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621246458.6U CN206331231U (en) 2016-11-22 2016-11-22 A kind of single sweep drive shaft may move polygon prism light path direct write equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621246458.6U CN206331231U (en) 2016-11-22 2016-11-22 A kind of single sweep drive shaft may move polygon prism light path direct write equipment

Publications (1)

Publication Number Publication Date
CN206331231U true CN206331231U (en) 2017-07-14

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201621246458.6U Active CN206331231U (en) 2016-11-22 2016-11-22 A kind of single sweep drive shaft may move polygon prism light path direct write equipment

Country Status (1)

Country Link
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