CN206363074U - A kind of single sweep drive shaft fixes polygon prism light path direct write equipment - Google Patents

A kind of single sweep drive shaft fixes polygon prism light path direct write equipment Download PDF

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Publication number
CN206363074U
CN206363074U CN201621246473.0U CN201621246473U CN206363074U CN 206363074 U CN206363074 U CN 206363074U CN 201621246473 U CN201621246473 U CN 201621246473U CN 206363074 U CN206363074 U CN 206363074U
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China
Prior art keywords
light path
stomata
polygon prism
drive shaft
direct write
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CN201621246473.0U
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Chinese (zh)
Inventor
沈小宏
赵华
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Wuxi Speed Semiconductor Technology Co Ltd
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Wuxi Speed Semiconductor Technology Co Ltd
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Abstract

Polygon prism light path direct write equipment is fixed the utility model discloses a kind of single sweep drive shaft, belongs to direct write exposure technique field.Single sweep drive shaft of the present utility model fixes polygon prism light path direct write equipment, and mainly vacuum cup structure is improved, and efficiently solves the problem of suction caused during production platelet due to gas leakage is not enough.Further, the gas cell distribution on sucker for it is middle dredge, it is four careful, effectively prevented the problem of board edge is tilted, saved stomata quantity, reduce cost.

Description

A kind of single sweep drive shaft fixes polygon prism light path direct write equipment
Technical field
The utility model is related to a kind of single sweep drive shaft and fixes polygon prism light path direct write equipment, belongs to direct write exposure technique Field.
Background technology
PCB (printed circuit board (PCB)) is the supporter of electronic component, while being also the carrier of electronic component electrical connection. Common PCB production equipments have traditional exposure machine, polygon prism structure laser direct-writing exposure machine, the exposure of DMD structures laser direct-writing Machine etc..Image directly can be imaged by laser direct-writing exposure machine on pcb board, relative to traditional exposure machine, it is not necessary to use The film, the image of formation is apparent.
With functional requirement more and more higher of the market to pcb board, pcb board also becomes to become increasingly complex, and system compatibility is got over It is high, it is sometimes necessary to size very big substrate, still, 48 inches of super large plate is more than for size, is not had also in the prior art Can be with the technology and equipment of high-quality processing.Traditional exposure machine can produce super large plate, but its machining accuracy is poor, does not reach The requirement of high density, thin space.
Circuit board full-size (610 × 530) that current laser direct writing equipment can expose, with the size of circuit board Increase, it will cause contour size of the unit(s) to become big, influence splicing precision and aligning accuracy cause yields to decline.
If laser direct-writing exposure machine is prepared by increasing the method for the size that sucker can expose, due to required vacuum Sucker size is that, than larger, sometimes more than 55 inches, there are the following problems for meeting:(1) when the pcb board actual size exposed When smaller, and sucker structure supports larger vacuum range, and the region for being not covered with plank can produce gas leakage, and influence is inhaled Absorption of the disk to substrate;(2) tilted due to might have corner during substrate transport, if pull of vacuum is not enough, sucker can not Plank is inhaled flat, influences whether to expose the quality of pcb board, substrate can be caused to scrap.To solve this problem, current method has Three kinds:
Method one:Directly ignore the problem, but can require very high to client factory pcb board, plank usually, can not come back and forth Return and plank is bent manually, have a strong impact on production efficiency.
Method two:For various sizes of plank, different sucker backing plates are designed.The hole covering model of vacuum is inhaled on backing plate Enclose, it is in the same size with plank.This method is simple, and operation is somewhat bothered, but when producing 55 inches of plank, it is necessary to change 55 inches of backing plate, difficulty is multiplied, and changes the time of backing plate, can increase by 150%~200%, have a strong impact on production efficiency.
Method three:Do not covered for plank and vacuumize region, blocked with article, conventional is to cut the used film. This method very economical material benefit, but it is pretty troublesome, and different size of pcb board is, it is necessary to the film be cut into different sizes, for a long time Get off, the film accumulation after the cutting of board producing region can be caused, the size that finding needs also is bothered.
As can be seen here, generally suitably given up using the replacing suitable sucker of size or searching shape size in the prior art Abandon the film to block the mode of air leakage point, can all substantially reduce production efficiency.
To sum up, current polygon prism light path direct write equipment there are problems that super large plate, vacuum cup can not be produced urgently It is to be solved.
Utility model content
For problem above, the utility model provides vacuum cup and a kind of single sweep driving containing the vacuum cup Axle fixes polygon prism light path direct write equipment, can not be produced in super large plate, vacuum cup gas leakage, exposure process with solving prior art The problems such as focusing and position inaccurate.
First purpose of the present utility model be to provide a kind of vacuum cup, the vacuum cup, including suction cup main body and Vacuum generating device;A number of stomata, each each correspondence one in promoting the circulation of qi hole are distributed in suction cup main body in terms of rows and columns Relay, each row stomata also each one relay of correspondence;Air vent switch is each connected between stomata and vacuum generating device; The relay and the relay of the stomata column that air vent switch is expert at the stomata simultaneously are connected.
In a kind of embodiment of the present utility model, the air vent switch is located at what stomata was connected with vacuum generating device On vacuum line.
In a kind of embodiment of the present utility model, the air vent switch is electromagnetic switch.
In a kind of embodiment of the present utility model, the relay is connected with master control device.
In a kind of embodiment of the present utility model, the stomata is in suction cup main body in middle thin, four careful points Cloth form.
In a kind of embodiment of the present utility model, the line space and column pitch of the stomata in the middle of suction cup main body to Both sides are in the form uniformly successively decreased.
In a kind of embodiment of the present utility model, between the line space or row of the stomata of suction cup main body central region Away from being 1-3 inches to the maximum, positioned at the minimum 5-8mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the present utility model, between the line space or row of the stomata of suction cup main body central region Away from being 3.1 inches to the maximum, positioned at the minimum 5.1mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the present utility model, opening shape of the stomata in suction cup main body can be round The arbitrary shapes such as shape, ellipse, square, rectangle, such as it is circular.
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 10mm2~ 500mm2
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 50mm2~ 350mm2
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 100mm2~ 250mm2
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 200mm2
In a kind of embodiment of the present utility model, the Breadth Maximum of the suction cup main body is 55 inches.
In a kind of embodiment of the present utility model, the card of the suction cup main body is integral card or by polylith disk Face is combined.
In a kind of embodiment of the present utility model, the card of the suction cup main body by the big disk assembled of two pieces of grades and Into.
In a kind of embodiment of the present utility model, the suction cup main body can be divided into chuck support structure and backing plate, It can also be the integral structure that backing plate is integrated with chuck support structure.When suction cup main body is chuck support structure and backing plate During separated structure, backing plate is arranged on chuck support structure surface, and pad surfaces are designed with below equally distributed stomata, backing plate It is the vacuum air-channel being connected with stomata.
Second purpose of the present utility model is to provide the device containing vacuum cup of the present utility model.
In a kind of embodiment of the present utility model, described device can be various types of exposure machines.
3rd purpose of the present utility model is to provide the single sweep drive shaft containing vacuum cup of the present utility model and consolidated Determine polygon prism light path direct write equipment.
The single sweep drive shaft, which fixes polygon prism light path direct write equipment, includes base, polygon prism light path, connecting plate, vacuum Sucker, moving parts, a camera;The moving parts include a turntable driving Y-axis and a lifting driving Z axis;Vacuum Sucker is located above moving parts.
In a kind of embodiment of the present utility model, the vacuum cup be it is above-mentioned refer to it is of the present utility model any A kind of vacuum cup.
In a kind of embodiment of the present utility model, the polygon prism light path is connected by connecting plate with base.
In the utility model, single sweep turntable driving axle refers to containing a moving parts, and moving parts include one Turntable driving Y-axis and a lifting driving Z axis;Fixation refers to that polygon prism light path is fixed on certain position, it is impossible to mobile.
In a kind of embodiment of the present utility model, the vacuum cup is objective table, the lifting with moving parts Drive Z axis connection.
In a kind of embodiment of the present utility model, the card of the suction cup main body of the vacuum cup is integral card Or formed by polylith disk assembled.
In a kind of embodiment of the present utility model, the camera is located above vacuum cup.
In a kind of embodiment of the present utility model, the turntable driving Y-axis is located at below lifting driving Z axis, with liter Drop driving Z axis connection.
Advantage and effect of the present utility model:
(1) single sweep drive shaft of the present utility model fixes polygon prism light path direct write equipment, mainly to vacuum cup structure Improved.Vacuum cup of the present utility model is the vacuum cup of automation, and a series of stomata is distributed with chuck surface, When having pcb board covering above stomata, stomata closed-circuit working, when there is no pcb board covering above stomata, stomata closure, effectively When solving production platelet, the problem of suction caused due to gas leakage is not enough.Further, during the gas cell distribution on sucker is Between dredge, it is four careful, both caused different size of pcb board when placing, there is stomata marginal portion all the time, effectively prevents board edge The problem of tilting, stomata quantity can be saved in the middle place for not needing too many stomata again, reduce cost, improve effect Rate.
(2) single sweep drive shaft of the present utility model fixes polygon prism light path direct write equipment, and exposure machine sucker width can be with Be arranged to 55 inches, 55 inches of super large plate can be produced, at the same can guarantee that again high accuracy, high density, fine rule away from etc. demand, exposure Line spacing is up to less than 30 microns, and ill-exposed rate drops to less than 0.1%.
(3) polygon prism light path direct write equipment of the present utility model can be by changing the height of lifting shaft, and correspondence is different Thickness of slab so that light path optimal focal plane keeps constant;Fixed polygon prism light path, light path can form a long sections band, due to solid Fixed, light path resistance to overturning is preferable
(4) the utility model can support 1.2m × 1m backboard, both can be that one piece big plate or platelet are spelled Big plate is constituted together.The utility model greatly supplements the vacancy in market.
(5) polygon prism light path direct write equipment of the present utility model is using fixed polygon prism light path design, and light path is irremovable, Disposable exposure is completed, and effectively prevent the problem of exposure brought due to light path displacement error is inaccurate;1 group of equipment bottom fortune The design of dynamic component, solves and does more physical exercises component operationally, due to the motion of moving parts can not realize absolute synchronization and band There is the problem of influence exposure quality such as distortion, inclination even results in product rejection in the substrate position come.
Brief description of the drawings
Fig. 1 is vacuum cup structural representation of the present utility model;Wherein, 1 suction cup main body, 3 stomatas, 4 relays, 6 total Control device;
Fig. 2 is the vacuum generating device and stomata connection diagram of vacuum cup of the present utility model;Wherein, 2 vacuum are sent out Generating apparatus, 5 air vent switch;
Fig. 3 places the structural representation after substrate for traditional vacuum cup;Wherein, 14 substrate;
Fig. 4 is that vacuum cup of the present utility model places a kind of structural representation after substrate;
Fig. 5 is a kind of structural representation after the substrate position on adjustment vacuum cup of the present utility model;
Fig. 6 fixes polygon prism light path direct write equipment for the single sweep drive shaft containing vacuum cup of the present utility model;Its In, 7 bases, 8 polygon prism light paths, 10 vacuum cups, 12 turntable driving Y-axis, 15 connecting plates, 16 cameras;
Fig. 7 is that single sweep drive shaft fixation polygon prism light path direct write equipment takes down the schematic diagram after vacuum cup;Wherein, 13 Lifting driving Z axis.
Specific embodiment
Polygon prism light path:Exposure figure is changed by polygon prism upset;
Turntable driving Y-axis:Also scan axis or Y-axis are, for doing the continuous scanning motion of constant speed, driving sucker Motion.
Lifting driving Z axis:Also lifting shaft or Z axis are, for controlling the lifting of sucker.
Sucker:For adsorbing, the objective table of fixed pcb board;Pcb board can be adsorbed above by negative pressure, it is real in exposure The fixation of existing pcb board and the flatness on pcb board surface;
Base:Marble support base;
Here is that the utility model is specifically described.
Embodiment 1:Vacuum cup
Vacuum cup structure of the present utility model is as shown in Figure 1-2.
The utility model vacuum cup, including suction cup main body 1 and vacuum generating device 2;With row and column in suction cup main body 1 The a number of stomata 3 of formal distribution, each each one relay 4 of correspondence in promoting the circulation of qi hole 3, each row stomata also each correspondence one after Electrical equipment;Air vent switch 5 is each connected between stomata 3 and vacuum generating device 2;Air vent switch 5 is expert at the stomata simultaneously Relay and the stomata column relay connect.
Each relay is connected with master control device 6.Air vent switch is located at the vacuum tube that stomata is connected with vacuum generating device Lu Shang.The air vent switch can be electromagnetic switch.The stomata, can be uniformly distributed in suction cup main body.
Using such structure and connected mode, when vacuum cup works, a certain size substrate is placed on vacuum suction On disk, for the stomata row or stomata row for thering is substrate to cover, the relay path corresponding to the row or column;For certain stomata Speech, only when it is expert at and column corresponding to relay all make for path, the air vent switch of the stomata is just opened, and then Vacuum generating device and stomata UNICOM, stomata work.In the case of this, the air vent switch for the stomata not covered substantially For closed mode, so as to solve leakage problem existing during larger utilization vacuum cup production PCB.
Embodiment 2:Vacuum cup
The vacuum cup of the present embodiment, is made that on the basis of the vacuum cup as shown in Figure 1-2 of embodiment 1 and changes Enter.
The stomata 3 is in suction cup main body 1 in middle thin, four careful distribution forms.
Traditional vacuum cup, stomata is usually to use equally distributed form, may when producing less pcb board After substrate 14 is placed in suction cup main body, the lucky position in certain edge where substrate far from both sides stomata farther out (as shown in Figure 3) so that Cause the marginal portion to be tilted because of no pull of vacuum, production is impacted.Using this centre of the utility model After thin, four careful distribution forms, as illustrated in figures 4-5, when smaller substrate is placed on vacuum cup, select substrate is close Suction cup main body edge is placed, if the substrate edges now close to intermediate region in suction cup main body are lucky from both sides stomata farther out, It can so select the substrate edges being moved in nearest a line or a row stomata and be allowed to covering just;Due to sucker master The surrounding stomata of body is closeer, and this movement will not cause phenomenon of another lateral edges of substrate from stomata farther out.
Alternatively, the line space and column pitch of the stomata are in the form uniformly successively decreased to both sides in the middle of suction cup main body.
Alternatively, positioned at suction cup main body central region stomata line space or column pitch be 1-3 inches to the maximum, positioned at suction The minimum 5-8mm of line space or column pitch of the stomata of disc main body fringe region.Opening shape of the stomata in suction cup main body can It is to be the arbitrary shapes such as circle, ellipse, square, rectangle, such as circular.Opening surface of the stomata in suction cup main body Product can be arbitrary, such as 10mm2~500mm2
Alternatively, the card of the suction cup main body is integral card or formed by polylith disk assembled.
Embodiment 3:Single sweep drive shaft fixes polygon prism light path direct write equipment
As shown in fig. 6-7, it is straight for the single sweep drive shaft fixation polygon prism light path containing vacuum cup of the present utility model Write device.
The single sweep drive shaft, which fixes polygon prism light path direct write equipment, includes base 7, polygon prism light path 8, a motion Component, vacuum cup 10, connecting plate 15, camera 16;The moving parts include a turntable driving Y-axis 12 and a lifting is driven Dynamic Z axis 13;Vacuum cup 10 is located above moving parts.
The polygon prism light path 8 is connected by connecting plate 15 with base 7.The turntable driving Y-axis 12 is located at lifting driving Z The lower section of axle 13, is connected with lifting driving Z axis 13;The vacuum cup 10, as objective table, the lifting with moving parts drive Z Axle 13 is connected.Vacuum cup, occurs corresponding change in location as turntable driving Y-axis, lifting drive the movement of Z axis 13.
Base has function of shock insulation, and horizontal positioned, all parts are respectively mounted above it.
The camera 16 is located at the top of vacuum cup 10, for capturing the exposure area of the big plates of PCB.
Pcb board is placed on vacuum cup 10 (objective table), the height of the lifting driving control objective table 10 of Z axis 13 finds light Road optimal focal plane;Determination pcb board exposure original position is found by camera 16, objective table is moved to by turntable driving Y-axis 12 Expose original position;Polygon prism light path 8 starts exposure, while the control objective table scanning of turntable driving Y-axis 12 is until end exposure Position stops.Equipment of the present utility model, can be by changing the height of lifting shaft, the different thicknesss of slab of correspondence so that light path is most Good focal plane keeps constant.
Alternatively, the card of the suction cup main body of the vacuum cup is integral card.
Although the utility model is disclosed as above with preferred embodiment, it is not limited to the utility model, any Person skilled in the art, is not departing from spirit and scope of the present utility model, can all do various changes and modification, therefore this What the protection domain of utility model should be defined by claims is defined.

Claims (7)

1. a kind of single sweep drive shaft fixes polygon prism light path direct write equipment, it is characterised in that the single sweep drive shaft is fixed Polygon prism light path direct write equipment includes base, polygon prism light path, connecting plate, vacuum cup, moving parts, a camera;It is described Moving parts include a turntable driving Y-axis and a lifting driving Z axis;Vacuum cup is located above moving parts;It is described many Optical path prism is connected by connecting plate with base;
The vacuum cup includes suction cup main body and vacuum generating device;A fixed number is distributed in suction cup main body in terms of rows and columns The stomata of amount, each each one relay of correspondence in promoting the circulation of qi hole, each row stomata also each one relay of correspondence;Each stomata with it is true Air vent switch is connected between empty generating means;Relay and the stomata column that air vent switch is expert at the stomata simultaneously Relay connection.
2. single sweep drive shaft according to claim 1 fixes polygon prism light path direct write equipment, it is characterised in that the gas Hole switch is located on the vacuum line that stomata is connected with vacuum generating device.
3. single sweep drive shaft according to claim 1 fixes polygon prism light path direct write equipment, it is characterised in that the gas The line space and column pitch in hole are in the form uniformly successively decreased to both sides in the middle of suction cup main body.
4. single sweep drive shaft according to claim 1 fixes polygon prism light path direct write equipment, it is characterised in that positioned at suction The line space or column pitch of the stomata of disc main body central region are 3.1 inches to the maximum.
5. single sweep drive shaft according to claim 1 fixes polygon prism light path direct write equipment, it is characterised in that positioned at suction The minimum 5.1mm of line space or column pitch of the stomata of disc main body fringe region.
6. single sweep drive shaft according to claim 1 fixes polygon prism light path direct write equipment, it is characterised in that the phase Machine is located above vacuum cup.
7. single sweep drive shaft according to claim 1 fixes polygon prism light path direct write equipment, it is characterised in that described to sweep Retouch driving Y-axis to be located at below lifting driving Z axis, be connected with lifting driving Z axis.
CN201621246473.0U 2016-11-22 2016-11-22 A kind of single sweep drive shaft fixes polygon prism light path direct write equipment Active CN206363074U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621246473.0U CN206363074U (en) 2016-11-22 2016-11-22 A kind of single sweep drive shaft fixes polygon prism light path direct write equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621246473.0U CN206363074U (en) 2016-11-22 2016-11-22 A kind of single sweep drive shaft fixes polygon prism light path direct write equipment

Publications (1)

Publication Number Publication Date
CN206363074U true CN206363074U (en) 2017-07-28

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