CN206331236U - A kind of many turntable driving axles may move polygon prism light path direct write equipment - Google Patents

A kind of many turntable driving axles may move polygon prism light path direct write equipment Download PDF

Info

Publication number
CN206331236U
CN206331236U CN201621246490.4U CN201621246490U CN206331236U CN 206331236 U CN206331236 U CN 206331236U CN 201621246490 U CN201621246490 U CN 201621246490U CN 206331236 U CN206331236 U CN 206331236U
Authority
CN
China
Prior art keywords
light path
polygon prism
prism light
stomata
turntable driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201621246490.4U
Other languages
Chinese (zh)
Inventor
李显杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Yingsu integrated circuit equipment Co., Ltd
Original Assignee
JIANGSU YINGSU PHOTOELECTRIC TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JIANGSU YINGSU PHOTOELECTRIC TECHNOLOGY Co Ltd filed Critical JIANGSU YINGSU PHOTOELECTRIC TECHNOLOGY Co Ltd
Priority to CN201621246490.4U priority Critical patent/CN206331236U/en
Application granted granted Critical
Publication of CN206331236U publication Critical patent/CN206331236U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)

Abstract

Polygon prism light path direct write equipment is may move the utility model discloses a kind of many turntable driving axles, belongs to direct write exposure technique field.Many turntable driving axles of the present utility model may move polygon prism light path direct write equipment, and mainly vacuum cup structure is improved, and efficiently solve the problem of suction caused during production platelet due to gas leakage is not enough.Further, the gas cell distribution on sucker for it is middle dredge, it is four careful, effectively prevented the problem of board edge is tilted, saved stomata quantity, reduce cost.Many turntable driving axles of the present utility model may move polygon prism light path direct write equipment, can produce super large plate;And multigroup moving parts are connected below sucker, the kinematic axis of multigroup moving parts is synchronized with the movement, and improves the stability of exposure accuracy and operation.

Description

A kind of many turntable driving axles may move polygon prism light path direct write equipment
Technical field
The utility model is related to a kind of many turntable driving axles and may move polygon prism light path direct write equipment, belongs to direct write exposure skill Art field.
Background technology
PCB (printed circuit board (PCB)) is the supporter of electronic component, while being also the carrier of electronic component electrical connection. Common PCB production equipments have traditional exposure machine, polygon prism structure laser direct-writing exposure machine, the exposure of DMD structures laser direct-writing Machine etc..Image directly can be imaged by laser direct-writing exposure machine on pcb board, relative to traditional exposure machine, it is not necessary to use The film, the image of formation is apparent.
With functional requirement more and more higher of the market to pcb board, pcb board also becomes to become increasingly complex, and system compatibility is got over It is high, it is sometimes necessary to size very big substrate, still, 48 inches of super large plate is more than for size, is not had also in the prior art Can be with the technology and equipment of high-quality processing.Traditional exposure machine can produce super large plate, but its machining accuracy is poor, does not reach The requirement of high density, thin space.
Circuit board full-size (610 × 530) that current laser direct writing equipment can expose, with the size of circuit board Increase, it will cause contour size of the unit(s) to become big, influence splicing precision and aligning accuracy cause yields to decline.
If laser direct-writing exposure machine is prepared by increasing the method for the size that sucker can expose, due to required vacuum Sucker size is that, than larger, sometimes more than 55 inches, there are the following problems for meeting:(1) when the pcb board actual size exposed When smaller, and sucker structure supports larger vacuum range, and the region for being not covered with plank can produce gas leakage, and influence is inhaled Absorption of the disk to substrate;(2) tilted due to might have corner during substrate transport, if pull of vacuum is not enough, sucker can not Plank is inhaled flat, influences whether to expose the quality of pcb board, substrate can be caused to scrap.To solve this problem, current method has Three kinds:
Method one:Directly ignore the problem, but can require very high to client factory pcb board, plank usually, can not come back and forth Return and plank is bent manually, have a strong impact on production efficiency.
Method two:For various sizes of plank, different sucker backing plates are designed.The hole covering model of vacuum is inhaled on backing plate Enclose, it is in the same size with plank.This method is simple, and operation is somewhat bothered, but when producing 55 inches of plank, it is necessary to change 55 inches of backing plate, difficulty is multiplied, and changes the time of backing plate, can increase by 150%~200%, have a strong impact on production efficiency.
Method three:Do not covered for plank and vacuumize region, blocked with article, conventional is to cut the used film. This method very economical material benefit, but it is pretty troublesome, and different size of pcb board is, it is necessary to the film be cut into different sizes, for a long time Get off, the film accumulation after the cutting of board producing region can be caused, the size that finding needs also is bothered.
As can be seen here, generally suitably given up using the replacing suitable sucker of size or searching shape size in the prior art Abandon the film to block the mode of air leakage point, can all substantially reduce production efficiency.
To sum up, current polygon prism light path direct write equipment there are problems that super large plate, vacuum cup can not be produced urgently It is to be solved.
Utility model content
For problem above, the utility model provides vacuum cup and a kind of many turntable drivings containing the vacuum cup Axle may move polygon prism light path direct write equipment, to solve the problems such as prior art can not produce super large plate, vacuum cup gas leakage.
First purpose of the present utility model be to provide a kind of vacuum cup, the vacuum cup, including suction cup main body and Vacuum generating device;A number of stomata, each each correspondence one in promoting the circulation of qi hole are distributed in suction cup main body in terms of rows and columns Relay, each row stomata also each one relay of correspondence;Air vent switch is each connected between stomata and vacuum generating device; The relay and the relay of the stomata column that air vent switch is expert at the stomata simultaneously are connected.
In a kind of embodiment of the present utility model, the air vent switch is located at what stomata was connected with vacuum generating device On vacuum line.
In a kind of embodiment of the present utility model, the air vent switch is electromagnetic switch.
In a kind of embodiment of the present utility model, the relay is connected with master control device.
In a kind of embodiment of the present utility model, the stomata is in suction cup main body in middle thin, four careful points Cloth form.
In a kind of embodiment of the present utility model, the line space and column pitch of the stomata by the middle of suction cup main body to Both sides are in the form uniformly successively decreased.Adopt in such a way, suction cup main body is more attractive in appearance, design processing method is simple.
In a kind of embodiment of the present utility model, between the line space or row of the stomata of suction cup main body central region Away from being 1-3 inches to the maximum, positioned at the minimum 5-8mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the present utility model, opening shape of the stomata in suction cup main body can be round The arbitrary shapes such as shape, ellipse, square, rectangle, such as it is circular.
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 10mm2~ 500mm2
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 50mm2~ 350mm2
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 100mm2~ 250mm2
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 200mm2
In a kind of embodiment of the present utility model, the Breadth Maximum of the suction cup main body is 55 inches.
In a kind of embodiment of the present utility model, the card of the suction cup main body is integral card or by polylith disk Face is combined.
In a kind of embodiment of the present utility model, the card of the suction cup main body is by the big disk assembled of two pieces of grades Into.
In a kind of embodiment of the present utility model, the suction cup main body can be divided into chuck support structure and backing plate, It can also be the integral structure that backing plate is integrated with chuck support structure.When suction cup main body is chuck support structure and backing plate During separated structure, backing plate is arranged on chuck support structure surface, and pad surfaces are designed with below equally distributed stomata, backing plate It is the vacuum air-channel being connected with stomata.
Second purpose of the present utility model is to provide the device containing vacuum cup of the present utility model.
In a kind of embodiment of the present utility model, described device can be various types of exposure machines.
3rd purpose of the present utility model is to provide many turntable driving axles containing vacuum cup of the present utility model can Mobile polygon prism light path direct write equipment.
Many turntable driving axles, which may move polygon prism light path direct write equipment, includes base, polygon prism light path, stepper drive Axle, connecting plate, vacuum cup, multiple moving parts, camera;The moving parts include a turntable driving Y-axis and one rises Drop driving Z axis;Vacuum cup is located above moving parts.
In a kind of embodiment of the present utility model, the vacuum cup be it is above-mentioned refer to it is of the present utility model any A kind of vacuum cup.
The polygon prism light path is connected by connecting plate with stepper drive axle.Polygon prism light path can be with stepper drive axle Sliding block is moved along guide rail.
In the utility model, many turntable driving axles refer to containing two or more moving parts, and moving parts include one Turntable driving Y-axis and a lifting driving Z axis;It is removable to refer to that polygon prism light path be as the sliding block of stepper drive axle is along leading Rail is moved.
In a kind of embodiment of the present utility model, many turntable driving axles may move polygon prism light path direct write equipment Contain two moving parts.
In a kind of embodiment of the present utility model, the vacuum cup is objective table, the lifting with moving parts Drive Z axis connection.
In a kind of embodiment of the present utility model, the camera is located above vacuum cup.
In a kind of embodiment of the present utility model, the turntable driving Y-axis is located at below lifting driving Z axis, with liter Drop driving Z axis connection.
In a kind of embodiment of the present utility model, it is set up in parallel between the multiple moving parts along X-direction.
In a kind of embodiment of the present utility model, the number of the multiple moving parts is two.
In a kind of embodiment of the present utility model, the card of the suction cup main body of the vacuum cup is integral card Or formed by polylith disk assembled.When being formed by polylith disk assembled, one or more corresponding moving parts of every piece of card.
In a kind of embodiment of the present utility model, the suction cup main body of the vacuum cup is identical by the size of left and right two Card merge form;One moving parts of each card correspondence.
In a kind of embodiment of the present utility model, any connection is not taken between described two cards, or use Ball pivot chain structure is connected, or uses Hard link.
Advantage and effect of the present utility model:
(1) many turntable driving axles of the present utility model may move polygon prism light path direct write equipment, mainly to vacuum cup knot Structure is improved.Vacuum cup of the present utility model is the vacuum cup of automation, and a series of gas is distributed with chuck surface Hole, when having pcb board covering above stomata, stomata closed-circuit working, when not having pcb board covering above stomata, stomata closure has When effect solves production platelet, the problem of suction caused due to gas leakage is not enough.Further, the gas cell distribution on sucker is Centre is dredged, four carefully, both cause different size of pcb board when placing, and there is stomata marginal portion all the time, effectively prevents plank side The problem of edge is tilted, can save stomata quantity in the middle place for not needing too many stomata again, reduce cost, improve effect Rate.
(2) many turntable driving axles of the present utility model may move polygon prism light path direct write equipment, and exposure machine sucker width can To be arranged to 55 inches, 55 inches of super large plate can be produced, at the same can guarantee that again high accuracy, high density, fine rule away from etc. demand;And The multigroup moving parts of connection below sucker, the kinematic axis of multigroup moving parts is synchronized with the movement, and improves exposure accuracy and operation Stability, exposed lines spacing is up to less than 30 microns, and ill-exposed rate drops to less than 0.1%.
(3) direct write equipment light path of the present utility model may move, and can cover the whole width of table top, it is possible to reduce light The use on road, reduces cost;Can be by changing the height of lifting shaft, the different thicknesss of slab of correspondence so that light path optimal focal plane is protected Hold constant;Meanwhile, using many lifting shafts, objective table support can be strengthened, deformation is reduced.
(4) the utility model can support 1.2m × 1m backboard, both can be that one piece big plate or platelet are spelled Big plate is constituted together.The utility model greatly supplements the vacancy in market.
(5) many turntable driving axles of the present utility model may move polygon prism light path direct write equipment, and polygon prism light path is in stepping It under the driving of drive shaft, can in transverse direction move freely, extend horizontal exposure range, increase the flexible property of exposure, Stepping axle is arranged on above gantry structure, simplify the moving parts structure of lower section, it is to avoid moved simultaneously in component of doing more physical exercises When, the asynchronous problem of motion being likely to occur in transverse direction, it is to avoid may bring the exposure inaccurate, or even product rejection situation Occur;Using component design of doing more physical exercises, vacuum cup is possessed multiple strong points, sucker is had in motion process preferably steady It is qualitative, while avoiding the unstable problem of connection that unimodule is likely to occur when supporting larger sucker;Structure setting meets many ribs The requirement of mirror light path exposure.
Brief description of the drawings
Fig. 1 is vacuum cup structural representation of the present utility model;Wherein, 1 suction cup main body, 3 stomatas, 4 relays, 6 total Control device;
Fig. 2 is the vacuum generating device and stomata connection diagram of vacuum cup of the present utility model;Wherein, 2 vacuum are sent out Generating apparatus, 5 air vent switch;
Fig. 3 places the structural representation after substrate for traditional vacuum cup;Wherein, 14 substrate;
Fig. 4 is that vacuum cup of the present utility model places a kind of structural representation after substrate;
Fig. 5 is a kind of structural representation after the substrate position on adjustment vacuum cup of the present utility model;
Fig. 6 is that double turntable driving axles containing vacuum cup of the present utility model may move polygon prism light path direct write equipment; Wherein, 7 bases, 8 polygon prism light paths, 9 stepper drive axles, 10 vacuum cups, 12 turntable driving Y-axis, 15 connecting plates, 16 cameras;
Fig. 7 is that double removable polygon prism light path direct write equipment of turntable driving axles take down the schematic diagram after vacuum cup;Wherein, 13 lifting driving Z axis.
Specific embodiment
Polygon prism light path:Exposure figure is changed by polygon prism upset;
Stepper drive axle:Linear induction motor system, light path be arranged on motor motion parts, also cry X-axis motion platform or Stepping axle, for doing step motion.
Turntable driving X-axis:Also scan axis or X-axis are, for doing the continuous scanning motion of constant speed, driving sucker Motion.
Turntable driving Y-axis:Also scan axis or Y-axis are, for doing the continuous scanning motion of constant speed, driving sucker Motion.
Lifting driving Z axis:Also lifting shaft or Z axis are, for controlling the lifting of sucker.
Sucker:For adsorbing, the objective table of fixed pcb board;Pcb board can be adsorbed above by negative pressure, it is real in exposure The fixation of existing pcb board and the flatness on pcb board surface;
Base:Marble support base;
Here is that the utility model is specifically described.
Embodiment 1:Vacuum cup
Vacuum cup structure of the present utility model is as shown in Figure 1-2.
The utility model vacuum cup, including suction cup main body 1 and vacuum generating device 2;With row and column in suction cup main body 1 The a number of stomata 3 of formal distribution, each each one relay 4 of correspondence in promoting the circulation of qi hole 3, each row stomata also each correspondence one after Electrical equipment;Air vent switch 5 is each connected between stomata 3 and vacuum generating device 2;Air vent switch 5 is expert at the stomata simultaneously Relay and the stomata column relay connect.
Each relay is connected with master control device 6.Air vent switch is located at the vacuum tube that stomata is connected with vacuum generating device Lu Shang.The air vent switch can be electromagnetic switch.The stomata, can be uniformly distributed in suction cup main body.
Using such structure and connected mode, when vacuum cup works, a certain size substrate is placed on vacuum suction On disk, for the stomata row or stomata row for thering is substrate to cover, the relay path corresponding to the row or column;For certain stomata Speech, only when it is expert at and column corresponding to relay all make for path, the air vent switch of the stomata is just opened, and then Vacuum generating device and stomata UNICOM, stomata work.In the case of this, the air vent switch for the stomata not covered substantially For closed mode, so as to solve leakage problem existing during larger utilization vacuum cup production PCB.
Embodiment 2:Vacuum cup
The vacuum cup of the present embodiment, is made that on the basis of the vacuum cup as shown in Figure 1-2 of embodiment 1 and changes Enter.
The stomata 3 is in suction cup main body 1 in middle thin, four careful distribution forms.
Traditional vacuum cup, stomata is usually to use equally distributed form, may when producing less pcb board After substrate 14 is placed in suction cup main body, the lucky position in certain edge where substrate far from both sides stomata farther out (as shown in Figure 3) so that Cause the marginal portion to be tilted because of no pull of vacuum, production is impacted.Using this centre of the utility model After thin, four careful distribution forms, as illustrated in figures 4-5, when smaller substrate is placed on vacuum cup, select substrate is close Suction cup main body edge is placed, if the substrate edges now close to intermediate region in suction cup main body are lucky from both sides stomata farther out, It can so select the substrate edges being moved in nearest a line or a row stomata and be allowed to covering just;Due to sucker master The surrounding stomata of body is closeer, and this movement will not cause phenomenon of another lateral edges of substrate from stomata farther out.
Alternatively, the line space and column pitch of the stomata are by being in the form uniformly successively decreased to both sides in the middle of suction cup main body.
Alternatively, positioned at suction cup main body central region stomata line space or column pitch be 1-3 inches to the maximum, positioned at suction The minimum 5-8mm of line space or column pitch of the stomata of disc main body fringe region.Opening shape of the stomata in suction cup main body can It is to be the arbitrary shapes such as circle, ellipse, square, rectangle, such as circular.Opening surface of the stomata in suction cup main body Product can be arbitrary, such as 10mm2~500mm2
Alternatively, the card of the suction cup main body is integral card or formed by polylith disk assembled.
Embodiment 3:Double turntable driving axles may move polygon prism light path direct write equipment
Illustrated so that double turntable driving axles containing two moving parts may move polygon prism light path direct write equipment as an example Explanation.
As shown in fig. 6-7, it may move polygon prism light path for double turntable driving axles containing vacuum cup of the present utility model Direct write equipment.
Described pair of turntable driving axle, which may move polygon prism light path direct write equipment, includes base 7, polygon prism light path 8, stepping drive Moving axis 9, multiple moving parts, vacuum cup 10, connecting plate 15, camera 16;Each moving parts include a turntable driving Y-axis 12 and one lifting driving Z axis 13;Vacuum cup 10 is located above moving parts.
The polygon prism light path 8 is connected by connecting plate 15 with stepper drive axle 9, can be with the sliding block of stepper drive axle 9 Moved along guide rail.The turntable driving Y-axis 12 is located at the lower section of lifting driving Z axis 13, is connected with lifting driving Z axis 13;It is described Vacuum cup 10, as objective table, the lifting driving Z axis 13 with moving parts are connected.Vacuum cup, with turntable driving Y-axis, Lifting drives the movement of Z axis 13 and occurs corresponding change in location.
Base has function of shock insulation, and horizontal positioned, all parts are respectively mounted above it.
The camera 16 is located at the top of vacuum cup 10, for capturing the exposure area of the big plates of PCB.
Pcb board is placed on vacuum cup 10 (objective table), the height of the lifting driving control objective table 10 of Z axis 13 finds light Road optimal focal plane;Determination pcb board exposure original position is found by camera 16, stepper drive axle 9 moves polygon prism light path 8 To exposure original position, objective table is moved to exposure original position by turntable driving Y-axis 12;Polygon prism light path 8 starts exposure, together When turntable driving Y-axis 12 control objective table scanning until end exposure position stops;Expose behind a region, polygon prism light path 8 with stepper drive axle 9 stepping, one fixed range, polygon prism light path 8 is started exposure in the unexposed region of pcb board; After repeating 1~5N times, whole plate end exposure.Equipment of the present utility model, can be by changing the height of lifting shaft, and correspondence is different Thickness of slab so that light path optimal focal plane keep it is constant;Meanwhile, using double lifting shafts, objective table support can be strengthened, reduce and become Shape.
Alternatively, the card of the suction cup main body of the vacuum cup is integral card.
Alternatively, it is set up in parallel between the multiple moving parts along X-direction, is uniformly distributed and is installed on vacuum cup 10 Lower section.By setting multiple moving parts, when producing larger pcb board, run simultaneously between each component, with single moving parts Compare, it is ensured that more preferable stability.
Alternatively, the multiple moving parts have 2.
Embodiment 4:Double turntable driving axles may move polygon prism light path direct write equipment
Illustrated so that double turntable driving axles containing two moving parts may move polygon prism light path direct write equipment as an example Explanation.
Double turntable driving axles of the present embodiment may move polygon prism light path direct write equipment, be made on the basis of embodiment 3 Improve.
The card of the suction cup main body of the vacuum cup is formed by polylith disk assembled;Corresponding one of every piece of card is more Individual moving parts.
Alternatively, the suction cup main body of the vacuum cup is merged by the size identical card of left and right two and formed;Each disk Face one moving parts of correspondence.
Any connection is not taken between two cards of the composition suction cup main body, or using the connection of ball pivot chain structure, Or use Hard link.
For 55*40 inch of pcb board of production, because of the limitation of domestic processing technology level, it is impossible to produce high precision, area greatly Sucker, therefore can only take the mode of two pieces of sucker card splicings.In the utility model, two pieces of left and right sucker, if respectively with The screw of dry quantity is fixed on corresponding Z axis mounting surface, and then the connected mode between two pieces of suckers, can there is following 3 kinds:
(1) any connection is not taken between sucker, the simple precision by the Y-axis of platform courses two.Advantage be it is simple in construction, It is economical and practical, when producing less than 24 inches of plank, it is only necessary to expose a sucker scope, it is not necessary to which two suckers are all It is exposed, production plank size is more flexible, closer to client's use demand.
(2) connected between sucker using ball pivot chain structure, two sucker Z-directions can have the inconsistent situation of slight height, Y Uniformity is realized by platform courses in the motion process of direction.Advantage is unlocked once there is some Y-axis, passes through the company of two suckers Connect, another Y-axis can be driven to unlock, the damage of plank is prevented effectively from.Because two Z axis difference in height conventional methods can not be surveyed accurately Amount more or less can all have certain altitude poor to micron level.This method can effectively reduce that Z axis is highly inconsistent to be caused Situations such as stuck during existing Z axis motion;
(3) Hard link is used between sucker, i.e., is fixed two suckers extremely with modes such as screws.Advantage is that whether Y-axis is dashed forward So power-off, or Z axis are highly inconsistent, are scrapped all without plank is caused.
Above-mentioned three kinds of connection methods, can select one way in which to be attached according to actual conditions.
Although the utility model is disclosed as above with preferred embodiment, it is not limited to the utility model, any Person skilled in the art, is not departing from spirit and scope of the present utility model, can all do various changes and modification, therefore this What the protection domain of utility model should be defined by claims is defined.

Claims (6)

1. a kind of many turntable driving axles may move polygon prism light path direct write equipment, it is characterised in that many turntable driving axles can Mobile polygon prism light path direct write equipment includes base, polygon prism light path, stepper drive axle, connecting plate, vacuum cup, multiple motions Component, camera;The moving parts include a turntable driving Y-axis and a lifting driving Z axis;Vacuum cup is located at exercise group Above part;
The vacuum cup includes suction cup main body and vacuum generating device;One is distributed in terms of rows and columns in the suction cup main body The stomata of fixed number amount, each each one relay of correspondence in promoting the circulation of qi hole, each row stomata also each one relay of correspondence;Each stomata Air vent switch is connected between vacuum generating device;Relay and the stomata institute that air vent switch is expert at the stomata simultaneously Connected in the relay of row;
The line space and column pitch of the stomata are by being in the form uniformly successively decreased to both sides in the middle of suction cup main body.
2. many turntable driving axles according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that described Polygon prism light path is connected by connecting plate with stepper drive axle.
3. many turntable driving axles according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that described Air vent switch is located on the vacuum line that stomata is connected with vacuum generating device.
4. many turntable driving axles according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that described The card of suction cup main body is integral card or formed by polylith disk assembled.
5. many turntable driving axles according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that be located at The line space or column pitch of the stomata of suction cup main body central region are 1-3 inches to the maximum, positioned at the gas of suction cup main body fringe region The minimum 5-8mm of line space or column pitch in hole.
6. many turntable driving axles according to claim 1 may move polygon prism light path direct write equipment, it is characterised in that described Many turntable driving axles may move polygon prism light path direct write equipment and contain two moving parts.
CN201621246490.4U 2016-11-22 2016-11-22 A kind of many turntable driving axles may move polygon prism light path direct write equipment Active CN206331236U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621246490.4U CN206331236U (en) 2016-11-22 2016-11-22 A kind of many turntable driving axles may move polygon prism light path direct write equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621246490.4U CN206331236U (en) 2016-11-22 2016-11-22 A kind of many turntable driving axles may move polygon prism light path direct write equipment

Publications (1)

Publication Number Publication Date
CN206331236U true CN206331236U (en) 2017-07-14

Family

ID=59287753

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201621246490.4U Active CN206331236U (en) 2016-11-22 2016-11-22 A kind of many turntable driving axles may move polygon prism light path direct write equipment

Country Status (1)

Country Link
CN (1) CN206331236U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106325007A (en) * 2016-11-22 2017-01-11 无锡影速半导体科技有限公司 Multi-scanning-driving-shaft movable polygon-prism light-path directly-writing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106325007A (en) * 2016-11-22 2017-01-11 无锡影速半导体科技有限公司 Multi-scanning-driving-shaft movable polygon-prism light-path directly-writing device

Similar Documents

Publication Publication Date Title
CN1856392B (en) Substrate dicing system and substrate dicing method
CN106325007B (en) A kind of more turntable driving axles may move polygon prism light path direct write equipment
CN110102908A (en) It is a kind of based on 3D vision positioning laser remove adhesive dispenser and method
CN108762007A (en) A kind of raising exposure production capacity direct-write photoetching mechanism and its exposure method
CN106041315A (en) Equipment for precisely carving light guide plate by using laser
CN206249004U (en) A kind of removable light path direct write exposure machine of DMD structures XY multiaxises
CN206331236U (en) A kind of many turntable driving axles may move polygon prism light path direct write equipment
JP2006210393A (en) Substrate processing apparatus, substrate transfer apparatus and substrate control method
CN206331230U (en) A kind of DMD structures multiaxis may move light path direct write exposure machine
CN108627909A (en) The production method of light guiding board mould core
CN206649281U (en) A kind of more turntable driving axles fix polygon prism light path direct write equipment
CN206331232U (en) A kind of many turntable driving axles of XYZ may move polygon prism light path direct write equipment
CN106444299B (en) A kind of DMD structures multiaxis may move light path direct write exposure machine
CN206331231U (en) A kind of single sweep drive shaft may move polygon prism light path direct write equipment
CN206331233U (en) A kind of XYZ single sweeps drive shaft may move polygon prism light path direct write equipment
CN206249003U (en) A kind of removable light path direct write exposure machine of DMD structures XY single shafts
CN206331234U (en) A kind of DMD structures multiaxis fixed light path direct write exposure machine
CN206363074U (en) A kind of single sweep drive shaft fixes polygon prism light path direct write equipment
CN206331235U (en) A kind of DMD structures single shaft may move light path direct write exposure machine
CN204935321U (en) A kind of glass cover-plate carving machine carrying out processing under water
CN114813692B (en) Online fluorescence microscopy machine of OLED screen
CN207764553U (en) A kind of DMD structures single shaft fixed optical path direct write exposure machine
CN108237588A (en) Diaphragm process equipment
CN108303853B (en) XY multiaxis movable light path direct-writing exposure machine of DMD structure
CN216669776U (en) Strain gauge defect recognition equipment based on machine vision

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CP03 Change of name, title or address

Address after: 221000 west side of Hengshan Road, Pizhou City, Xuzhou City, Jiangsu Province

Patentee after: Jiangsu Yingsu integrated circuit equipment Co., Ltd

Address before: 221300 Huashan Road, Pizhou Economic Development Zone, Jiangsu, China, Xuzhou

Patentee before: JIANGSU YINGSU PHOTOELECTRIC TECHNOLOGY Co.,Ltd.

CP03 Change of name, title or address