CN206249004U - A kind of removable light path direct write exposure machine of DMD structures XY multiaxises - Google Patents
A kind of removable light path direct write exposure machine of DMD structures XY multiaxises Download PDFInfo
- Publication number
- CN206249004U CN206249004U CN201621246472.6U CN201621246472U CN206249004U CN 206249004 U CN206249004 U CN 206249004U CN 201621246472 U CN201621246472 U CN 201621246472U CN 206249004 U CN206249004 U CN 206249004U
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- China
- Prior art keywords
- light path
- multiaxises
- direct write
- exposure machine
- stomata
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Abstract
The utility model discloses a kind of removable light path direct write exposure machine of DMD structures XY multiaxises, belong to direct write exposure technique field.The removable light path direct write exposure machine of DMD structures XY multiaxises of the present utility model, is mainly improved vacuum cup structure, efficiently solves the hypodynamic problem of suction caused due to gas leakage during production platelet.Further, the gas cell distribution on sucker for it is middle dredge, it is four careful, effectively prevented the problem of board edge tilting, save stomata quantity, reduce cost.The removable light path direct write exposure machine of DMD structures XY multiaxises of the present utility model, can produce 55 inches of super large plate；And sucker lower section connects two groups of moving parts respectively in the left and right sides, the kinematic axis of two groups of moving parts is synchronized with the movement, and improves the stability of exposure accuracy and operation.
Description
Technical field
The utility model is related to a kind of removable light path direct write exposure machine of DMD structures XY multiaxises, belongs to direct write exposure technique
Field.
Background technology
PCB (printed circuit board (PCB)) is the supporter of electronic component, while being also the carrier of electronic component electrical connection.
Common PCB production equipments have traditional exposure machine, polygon prism structure laser direct-writing exposure machine, DMD structures laser direct-writing to expose
Machine etc..Directly on pcb board can be imaged image by laser direct-writing exposure machine, relative to traditional exposure machine, it is not necessary to use
The film, the image of formation is apparent.
As market is to the functional requirement more and more higher of pcb board, pcb board also becomes to become increasingly complex, and system compatibility is got over
It is high, it is sometimes necessary to the very big substrate of size, but, the super large plate for width more than 48 inches does not have also in the prior art
The technology and equipment that can be processed with high-quality.Traditional exposure machine can produce super large plate, but its machining accuracy is poor, does not reach
The requirement of high density, thin space；Polygon prism structure laser direct-writing exposure machine cannot realize the movement of light path, whole plate necessary at present
Secondary shaping, when processing is more than 48 inches of super large plates, the whole machine width degree of its equipment is up to more than 3m, and equipment size is excessively huge,
The door by general workshop is difficult to, it is very heavy；Therefore polygon prism structure LDI cannot produce the pcb board of more than 48 inches of width.
Conventional DMD structure laser direct-writing exposure machines, because the size Breadth Maximum that its sucker can expose is only 24 inches, therefore also without
Method super large plate of the production more than 48 inches.
If DMD structure laser direct-writing exposure machines are prepared by increasing the method for the size that sucker can expose, by institute
The vacuum cup size for needing is that, than larger, sometimes more than 55 inches, there are the following problems for meeting：(1) when the pcb board for being exposed
When actual size is smaller, and sucker structure supports larger vacuum range, for the region for being not covered with plank, can produce Lou
Gas, absorption of the influence sucker to substrate；(2) tilted due to might have corner during substrate transport, if pull of vacuum is not enough,
Plank cannot be inhaled flat by sucker, influence whether to expose the quality of pcb board, and substrate can be caused to scrap.To solve this problem, at present
Method have three kinds：
Method one：Directly ignore the problem, but can be very high to the pcb board requirement of client factory, plank usually, can not come back and forth
Return and plank is bent manually, have a strong impact on production efficiency.
Method two：For various sizes of plank, different sucker backing plates are designed.The hole covering model of vacuum is inhaled on backing plate
Enclose, it is in the same size with plank.This method is simple, and operation is somewhat bothered, but when 55 inches of plank is produced, it is necessary to change
55 inches of backing plate, difficulty is multiplied, and changes the time of backing plate, can increase by 150%~200%, has a strong impact on production efficiency.
Method three：Do not covered for plank and vacuumize region, blocked with article, conventional is to cut the used film.
The material benefit of this method very economical, but it is pretty troublesome, different size of pcb board, it is necessary to the film is cut into different sizes, for a long time
Get off, the film after board producing region can be caused to cut is piled up, and the size that finding needs also is bothered.
As can be seen here, generally suitably given up using the replacing suitable sucker of size or searching shape size in the prior art
Abandon the film to block the mode of air leakage point, can all substantially reduce production efficiency.
To sum up, current DMD structure laser direct-writing exposure machines there are problems that super large plate, vacuum cup can not be produced
It is urgently to be resolved hurrily.
Utility model content
For problem above, the utility model provides vacuum cup and the DMD structure XY multiaxises containing the vacuum cup
Removable light path direct write exposure machine, the problems such as can not produce super large plate, vacuum cup gas leakage to solve prior art.
First purpose of the present utility model be to provide a kind of vacuum cup, the vacuum cup, including suction cup main body and
Vacuum generating device；A number of stomata, each each correspondence one in promoting the circulation of qi hole are distributed in suction cup main body in terms of rows and columns
Relay, each row stomata also one relay of each correspondence；Air vent switch is connected between each stomata and vacuum generating device；
The relay and the relay of the stomata column that air vent switch is expert at the stomata simultaneously are connected.
In a kind of implementation method of the present utility model, the air vent switch is located at what stomata was connected with vacuum generating device
On vacuum line.
In a kind of implementation method of the present utility model, the air vent switch is electromagnetic switch.
In a kind of implementation method of the present utility model, the relay is connected with master control device.
In a kind of implementation method of the present utility model, the stomata in suction cup main body in it is middle dredge, four careful points
Cloth form.
In a kind of implementation method of the present utility model, the line space and column pitch of the stomata by the middle of suction cup main body to
Both sides are in the form uniformly successively decreased.
In a kind of implementation method of the present utility model, positioned between the line space or row of the stomata of suction cup main body central region
Away from being 1-3 inches to the maximum, positioned at the minimum 5-8mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of implementation method of the present utility model, opening shape of the stomata in suction cup main body can be round
The arbitrary shapes such as shape, ellipse, square, rectangle, such as it is circular.
In a kind of implementation method of the present utility model, aperture area of the stomata in suction cup main body is 10mm2~
500mm2。
In a kind of implementation method of the present utility model, the Breadth Maximum of the suction cup main body is 55 inches.
In a kind of implementation method of the present utility model, the card of the suction cup main body is for an overall card or by polylith disk
Face combines.
In a kind of implementation method of the present utility model, the card of the suction cup main body by the big disk assembled of two pieces of grades and
Into.
In a kind of implementation method of the present utility model, the suction cup main body can be divided into chuck support structure and backing plate,
The integral structure that can also to be backing plate be integrated with chuck support structure.When suction cup main body is chuck support structure and backing plate
During separate structure, backing plate is arranged on chuck support structure surface, and pad surfaces are designed with equally distributed stomata, backing plate lower section
It is the vacuum air-channel being connected with stomata.
Second purpose of the present utility model is to provide the device containing vacuum cup of the present utility model.
In a kind of implementation method of the present utility model, described device can be various types of exposure machines.
3rd purpose of the present utility model is to provide the DMD structure XY multiaxises containing vacuum cup of the present utility model can
Mobile light path direct write exposure machine.
The removable light path direct write exposure machine of the DMD structures XY multiaxises includes supporting construction, DMD structures, DMD structure steppings
Axle, multiple moving parts, vacuum cup；Each moving parts includes a stepping X-axis, a scanning Y-axis and a lifting Z
Axle；Vacuum cup is located at moving parts top.
The vacuum cup is above-mentioned any one for referring to vacuum cup of the present utility model.
In the utility model, XY multiaxises refer to that, containing multiple moving parts, and moving parts include stepping X-axis, scanning Y-axis
With lifting Z axis；Removable refers to that DMD structures can be moved with the sliding block of DMD structure stepping axles along guide rail.
In a kind of implementation method of the present utility model, the removable light path direct write exposure machine of the DMD structures XY multiaxises contains
There are two moving parts.
In a kind of implementation method of the present utility model, the stepping X-axis is located at lifting Z axis lower section, and scanning Y-axis is located at step
Enter X-axis lower section；
In a kind of implementation method of the present utility model, the vacuum cup is connected with the lifting Z axis of moving parts.
In a kind of implementation method of the present utility model, it is set up in parallel along X-direction between the multiple moving parts.
In a kind of implementation method of the present utility model, the card of the suction cup main body of the vacuum cup is an overall card
Or formed by polylith disk assembled.When being formed by polylith disk assembled, every piece of card one moving parts of correspondence.
In a kind of implementation method of the present utility model, the suction cup main body of the vacuum cup is identical by two sizes in left and right
Card merge form；Each card one moving parts of correspondence.
In a kind of implementation method of the present utility model, any connection is not taken between described two cards, or use
Ball pivot chain structure is connected, or uses Hard link.
In a kind of implementation method of the present utility model, the stepping X-axis has two, respectively the first stepping X-axis and
Two stepping X-axis.
In a kind of implementation method of the present utility model, the supporting construction is gantry structure.
In a kind of implementation method of the present utility model, the DMD structures are arranged on DMD structure stepping axles, can be with
The sliding block of DMD structure stepping axles is moved along guide rail.
In a kind of implementation method of the present utility model, the removable light path direct write exposure machine of the DMD structures XY multiaxises is also
Including the camera for focusing on and positioning.
Advantage of the present utility model and effect：
(1) the removable light path direct write exposure machine of DMD structures XY multiaxises of the present utility model, mainly enters to vacuum cup structure
Improvement is gone.Vacuum cup of the present utility model is the vacuum cup of automation, and chuck surface is distributed with a series of stomata, when
When thering is pcb board to cover above stomata, stomata closed-circuit working, when there is no pcb board to cover above stomata, stomata closure, effectively solution
Determined production platelet when, the hypodynamic problem of suction caused due to gas leakage.Further, the gas cell distribution on sucker is centre
Dredge, four carefully, both cause different size of pcb board when placing, there is stomata marginal portion all the time, effectively prevents board edge and sticks up
The problem for rising, can not need the place of too many stomata to save stomata quantity in centre again, reduce cost, improve efficiency.
(2) the removable light path direct write exposure machine of DMD structures XY multiaxises of the present utility model, exposure machine sucker width can set
Be set to 55 inches, 55 inches of super large plate can be produced, at the same can guarantee that again high accuracy, high density, fine rule away from etc. demand；And sucker
Lower section connects multigroup moving parts, and the kinematic axis of multigroup moving parts is synchronized with the movement, and improves the stabilization of exposure accuracy and operation
Property, up to less than 30 microns, ill-exposed rate drops to less than 0.1% to exposed lines spacing.
(3) combined using top DMD structure stepping axles and lower section stepping X-axis, DMD structures and vacuum cup can be transversely square
To moving freely, horizontal exposure range is extended to greatest extent, increase the flexible property of exposure；Using doing more physical exercises, component sets
Meter, makes vacuum cup possess multiple strong points, sucker is had more preferable stability in motion process, while avoiding unimodule branch
Support the unstable problem of the connection being likely to occur during larger sucker.
Brief description of the drawings
Fig. 1 is vacuum cup structural representation of the present utility model；Wherein, 1 suction cup main body, 3 stomatas, 4 relays, 6 total
Control device；
Fig. 2 is the vacuum generating device and stomata connection diagram of vacuum cup of the present utility model；Wherein, 2 vacuum hair
Generating apparatus, 5 air vent switch；
Fig. 3 is the structural representation after traditional vacuum cup places substrate；Wherein, 14 substrate；
Fig. 4 is a kind of structural representation after vacuum cup of the present utility model places substrate；
Fig. 5 is a kind of structural representation after the substrate position on adjustment vacuum cup of the present utility model；
Fig. 6 is the removable light path direct write exposure machine of the DMD structure XY twin shafts containing vacuum cup of the present utility model；Its
In, 7 supporting constructions, 8DMD structures, 9DMD structure steppings axle, 10 vacuum cups；11 stepping X-axis, 12 scanning Y-axis, 13 lifting Z
Axle.
Specific embodiment
DMD structures：A whole set of complete light path system with DMD as core devices, including LASER Light Source, DMD, optical frames
The parts such as piece are constituted.
PCB：Printed Circuit Board, printed circuit board (PCB) is important electronic unit, is electronic component
Supporter, is the carrier of electronic component electrical connection.
DMD structure stepping axles：Linear induction motor system, light path is arranged on the motion parts of motor, for doing step motion.
Stepping X-axis：Also X-axis motion platform or stepping axle are, can be used to do step motion or continuous scanning motion.
Scanning Y-axis：Also scan axis or Y-axis are, for doing the continuous scanning motion of constant speed.
Lifting Z axis：Also lifting shaft or Z axis are, for controlling the lifting of sucker.
Sucker：For adsorbing, the objective table of fixed pcb board.
Here is that the utility model is specifically described.
Embodiment 1：Vacuum cup
Vacuum cup structure of the present utility model is as shown in Figure 1-2.
The utility model vacuum cup, including suction cup main body 1 and vacuum generating device 2；With row and column in suction cup main body 1
The a number of stomata 3 of formal distribution, each each one relay 4 of correspondence in promoting the circulation of qi hole 3, each row stomata also each correspondence one after
Electrical equipment；Air vent switch 5 is connected between each stomata 3 and vacuum generating device 2；Air vent switch 5 is expert at the stomata simultaneously
Relay and the stomata column relay connect.
Each relay is connected with master control device 6.Air vent switch is located at the vacuum tube that stomata is connected with vacuum generating device
Lu Shang.The air vent switch can be electromagnetic switch.The stomata, can be uniformly distributed in suction cup main body.
Using such structure and connected mode, when vacuum cup works, a certain size substrate is placed on vacuum suction
On disk, stomata row or stomata for there is substrate to cover are arranged, the relay path corresponding to the row or column；For certain stomata
Speech, only when it is expert at and column corresponding to relay all for path makes, the air vent switch of the stomata is just opened, and then
Vacuum generating device and stomata UNICOM, stomata work.In the case of this, the air vent switch not covered by substrate is closing
State, so as to solve leakage problem existing during larger utilization vacuum cup production PCB.
Embodiment 2：Vacuum cup
The vacuum cup of the present embodiment, is made that on the basis of the vacuum cup as shown in Figure 1-2 of embodiment 1 and changes
Enter.
The stomata 3 is in suction cup main body 1 in middle thin, four careful distribution forms.
Traditional vacuum cup, stomata is usually to use equally distributed form, when less pcb board is produced, may
After substrate 14 is placed in suction cup main body, the lucky position in certain edge where substrate far from both sides stomata farther out (as shown in Figure 3) so that
Causing the marginal portion can be tilted because of no pull of vacuum, and production is impacted.Using this centre of the utility model
After thin, four careful distribution forms, as illustrated in figures 4-5, when smaller substrate is placed on vacuum cup, be close to for substrate by selection
Suction cup main body edge is placed, if now in the suction cup main body substrate edges of zone line it is lucky from both sides stomata farther out,
Can so select to be moved to the substrate edges on nearest a line or a row stomata and be allowed to covering just；Due to sucker master
The surrounding stomata of body is closeer, and this movement will not cause substrate phenomenon of another lateral edges from stomata farther out occur.
Alternatively, the line space and column pitch of the stomata are by being in the form uniformly successively decreased to both sides in the middle of suction cup main body.
Alternatively, positioned at suction cup main body central region stomata line space or column pitch be 1-3 inches to the maximum, positioned at suction
The minimum 5-8mm of line space or column pitch of the stomata of disc main body fringe region.Opening shape of the stomata in suction cup main body can
It is to be the arbitrary shapes such as circle, ellipse, square, rectangle, such as circular.Opening surface of the stomata in suction cup main body
Product can be arbitrary, such as 10mm2~500mm2。
Alternatively, the card of the suction cup main body is an overall card or is formed by polylith disk assembled.
Embodiment 3：The removable light path direct write exposure machine of DMD structure XY twin shafts
As a example by containing the removable light path direct write exposure machine of two DMD structure XY twin shafts of moving parts illustrate
It is bright.
As shown in fig. 6, being the removable light path direct write exposure of the DMD structure XY twin shafts containing vacuum cup of the present utility model
Machine.
The removable light path direct write exposure machine of the DMD structures XY twin shafts includes supporting construction 7, DMD structures 8, DMD structures step
Enter axle 9, two moving parts, vacuum cups 10；Each moving parts includes 11, scanning Y-axis 12 and of a stepping X-axis
Individual lifting Z axis 13；Vacuum cup 10 is located at moving parts top.
The DMD structures 8 are arranged on DMD structure steppings axle 9, can be as the sliding block of DMD structure steppings axle 9 is along guide rail
Motion.The stepping X-axis 11 is located at the lower section of lifting Z axis 13, and scanning Y-axis 12 is located at the lower section of stepping X-axis 11；The vacuum cup 10
It is connected with the lifting Z axis 13 of moving parts.Vacuum cup, with stepping X-axis, scanning Y-axis, lifting Z axis 13 movement and occur
Corresponding change in location.
Alternatively, the card of the suction cup main body of the vacuum cup is an overall card.
Alternatively, it is set up in parallel along X-direction between described two moving parts, is uniformly distributed and is installed on vacuum cup 10
Lower section.By setting two moving parts, when producing larger pcb board, run simultaneously between each component, with single moving parts
Compare, it is ensured that more preferable stability.
Alternatively, the stepping X-axis has two, respectively the first stepping X-axis and the second stepping X-axis.
Alternatively, the supporting construction is gantry structure.For the framework support of whole system, marble gantry structure
Design feature can be very good to keep the stability of platform motion, and with good isolation property.
Embodiment 4：The removable light path direct write exposure machine of DMD structure XY twin shafts
As a example by containing the removable light path direct write exposure machine of two DMD structure XY twin shafts of moving parts illustrate
It is bright.
The removable light path direct write exposure machine of the DMD structure XY twin shafts of the present embodiment, is made that on the basis of embodiment 3 and changes
Enter.
The card of the suction cup main body of the vacuum cup is formed by polylith disk assembled；Every piece of card one exercise group of correspondence
Part.
Alternatively, the suction cup main body of the vacuum cup is merged by the size identical card of left and right two and formed；Each disk
Face one moving parts of correspondence.
Any connection is not taken between two cards of the composition suction cup main body, or using the connection of ball pivot chain structure,
Or use Hard link.
It is 55*40 inches of pcb board of production, because of the limitation of domestic processing technology level, it is impossible to produce high precision, area big
Sucker, therefore can only take two pieces of modes of sucker card splicing.In the utility model, two pieces of left and right sucker, if respectively with
The screw of dry quantity is fixed on corresponding Z axis mounting surface, and then the connected mode between two pieces of suckers, can there is following 3 kinds：
(1) any connection is not taken between sucker, the simple precision by the Y-axis of platform courses two.Advantage is simple structure,
It is economical and practical, when less than 24 inches of plank is produced, it is only necessary to expose a sucker scope, it is not necessary to which two suckers are all
It is exposed, production plank size is more flexible, closer to client's use demand.
(2) connected using ball pivot chain structure between sucker, two sucker Z-directions can have slight highly inconsistent situation, Y
Uniformity is realized by platform courses in the motion process of direction.Advantage is unlocked once there is certain Y-axis, by the company of two suckers
Connect, another Y-axis can be driven to unlock, be prevented effectively from the damage of plank.Because two Z axis difference in height conventional methods can not be surveyed accurately
More or less can all there is certain altitude poor to micron level in amount.The method can effectively reduce that Z axis are highly inconsistent to be caused
Situations such as existing Z axis are stuck when moving；
(3) Hard link is used between sucker, i.e., is fixed extremely two suckers with modes such as screws.Advantage is that whether Y-axis is dashed forward
So power-off, or Z axis is highly inconsistent, is scrapped all without plank is caused.
Above-mentioned three kinds of connection methods, can select one way in which to be attached according to actual conditions.
Although the utility model is disclosed as above with preferred embodiment, it is not limited to the utility model, any
Person skilled in the art, is not departing from spirit and scope of the present utility model, can all do various changes and modification, therefore this
What the protection domain of utility model should be defined by claims is defined.
Claims (8)
1. a kind of DMD structures XY multiaxises may move light path direct write exposure machine, it is characterised in that the DMD structures XY multiaxises are removable
Dynamic light path direct write exposure machine includes supporting construction, DMD structures, DMD structure steppings axle, multiple moving parts, vacuum cup；Each
Moving parts include a stepping X-axis, a scanning Y-axis and a lifting Z axis；Vacuum cup is located at moving parts top；
The vacuum cup includes suction cup main body and vacuum generating device；A fixed number is distributed in suction cup main body in terms of rows and columns
The stomata of amount, each each one relay of correspondence in promoting the circulation of qi hole, each row stomata also one relay of each correspondence；Each stomata with it is true
Air vent switch is connected between empty generating means；Relay and the stomata column that air vent switch is expert at the stomata simultaneously
Relay connection；
It is set up in parallel along X-direction between the multiple moving parts.
2. according to the claim 1 removable light path direct write exposure machine of any described DMD structure XY multiaxises, it is characterised in that institute
Air vent switch is stated to be located on the vacuum line that stomata is connected with vacuum generating device.
3. DMD structures XY multiaxises according to claim 1 may move light path direct write exposure machine, it is characterised in that the gas
The line space and column pitch in hole are by being in the form uniformly successively decreased to both sides in the middle of suction cup main body.
4. according to the claim 1 removable light path direct write exposure machine of any described DMD structure XY multiaxises, it is characterised in that institute
The card of suction cup main body is stated for an overall card or is formed by polylith disk assembled.
5. according to the claim 1 removable light path direct write exposure machine of any described DMD structure XY multiaxises, it is characterised in that position
It is 1-3 inches to the maximum in the line space or column pitch of the stomata of suction cup main body central region, positioned at suction cup main body fringe region
The minimum 5-8mm of line space or column pitch of stomata.
6. DMD structures XY multiaxises according to claim 1 may move light path direct write exposure machine, it is characterised in that the gas
Hole switch is electromagnetic switch.
7. DMD structures XY multiaxises according to claim 1 may move light path direct write exposure machine, it is characterised in that the suction
The card of disc main body is formed by two pieces of big disk assembleds of grade.
8. DMD structures XY multiaxises according to claim 1 may move light path direct write exposure machine, it is characterised in that the branch
Support structure is gantry structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621246472.6U CN206249004U (en) | 2016-11-22 | 2016-11-22 | A kind of removable light path direct write exposure machine of DMD structures XY multiaxises |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621246472.6U CN206249004U (en) | 2016-11-22 | 2016-11-22 | A kind of removable light path direct write exposure machine of DMD structures XY multiaxises |
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| Publication Number | Publication Date |
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| CN206249004U true CN206249004U (en) | 2017-06-13 |
Family
ID=59001386
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| Application Number | Title | Priority Date | Filing Date |
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| CN201621246472.6U Active CN206249004U (en) | 2016-11-22 | 2016-11-22 | A kind of removable light path direct write exposure machine of DMD structures XY multiaxises |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108303853A (en) * | 2016-11-22 | 2018-07-20 | 江苏影速光电技术有限公司 | A kind of removable light path direct write exposure machine of DMD structures XY multiaxises |
| CN113727595A (en) * | 2021-11-01 | 2021-11-30 | 广东科视光学技术股份有限公司 | Automatic exposure equipment and method for PCB (printed circuit board) |
-
2016
- 2016-11-22 CN CN201621246472.6U patent/CN206249004U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108303853A (en) * | 2016-11-22 | 2018-07-20 | 江苏影速光电技术有限公司 | A kind of removable light path direct write exposure machine of DMD structures XY multiaxises |
| CN108303853B (en) * | 2016-11-22 | 2024-04-26 | 江苏影速集成电路装备股份有限公司 | XY multiaxis movable light path direct-writing exposure machine of DMD structure |
| CN113727595A (en) * | 2021-11-01 | 2021-11-30 | 广东科视光学技术股份有限公司 | Automatic exposure equipment and method for PCB (printed circuit board) |
| CN113727595B (en) * | 2021-11-01 | 2022-02-15 | 广东科视光学技术股份有限公司 | Automatic exposure equipment and method for PCB (printed circuit board) |
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Address after: 221000 west side of Hengshan Road, Pizhou City, Xuzhou City, Jiangsu Province Patentee after: Jiangsu Yingsu integrated circuit equipment Co., Ltd Address before: 221300 Huashan Road, Pizhou Economic Development Zone, Jiangsu, China, Xuzhou Patentee before: JIANGSU YINGSU PHOTOELECTRIC TECHNOLOGY Co.,Ltd. |
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