CN207764553U - A kind of DMD structures single shaft fixed optical path direct write exposure machine - Google Patents
A kind of DMD structures single shaft fixed optical path direct write exposure machine Download PDFInfo
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- CN207764553U CN207764553U CN201721260560.6U CN201721260560U CN207764553U CN 207764553 U CN207764553 U CN 207764553U CN 201721260560 U CN201721260560 U CN 201721260560U CN 207764553 U CN207764553 U CN 207764553U
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- stomata
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Abstract
The utility model discloses a kind of DMD structures single shaft fixed optical path direct write exposure machines, belong to direct write exposure technique field.The DMD structure single shaft fixed optical path direct write exposure machines of the utility model, mainly improve vacuum cup structure, when efficiently solving the problems, such as production platelet due to gas leakage and caused by suction it is insufficient.Further, the gas cell distribution on sucker be it is intermediate dredge, be four careful, effectively prevented the problem of board edge tilts, saved stomata quantity, reduce cost.The DMD structure single shaft fixed optical path direct write exposure machines of the utility model, can produce 55 inches of super large plate.
Description
Technical field
The utility model is related to a kind of DMD structures single shaft fixed optical path direct write exposure machines, belong to direct write exposure technique field.
Background technology
PCB (printed circuit board) is the supporter of electronic component, while being also the carrier of electronic component electrical connection.
Common PCB production equipments have traditional exposure machine, polygon prism structure laser direct-writing exposure machine, the exposure of DMD structure laser direct-writings
Machine etc..Image can be directly imaged by laser direct-writing exposure machine on pcb board, relative to traditional exposure machine, need not be used
The image of the film, formation is apparent.
As market is higher and higher to the functional requirement of pcb board, pcb board also becomes to become increasingly complex, and system compatibility is got over
It is high, it is sometimes necessary to which that the prodigious substrate of size is still more than width 48 inches of super large plate, in the prior art not yet
The technology and equipment that can be processed with high quality.Traditional exposure machine can produce super large plate, but its machining accuracy is poor, is not achieved
The requirement of high density, thin space；Polygon prism structure laser direct-writing exposure machine cannot achieve the movement of light path, whole plate necessary one at present
Secondary molding, when processing is more than 48 inches of super large plates, equipment complete machine width is up to 3m or more, and equipment size is excessively huge,
It is difficult to the door by general workshop, it is very heavy；Therefore polygon prism structure LDI can not produce the pcb board of 48 inches of width or more.
Conventional DMD structure laser direct-writing exposure machines, since the size maximum width that its sucker can expose is only 24 inches, also without
Super large plate of the method production more than 48 inches.
If DMD structure laser direct-writing exposure machines are prepared by increasing the method for the size that sucker can expose, by institute
The vacuum cup size needed is bigger, and sometimes more than 55 inches, there are the following problems for meeting：(1) when the pcb board exposed
When actual size is smaller, and sucker structure supports larger vacuum range, for being not covered with the region of plank, will produce leakage
Gas influences absorption of the sucker to substrate；(2) it is tilted due to might have corner during substrate transport, if pull of vacuum is inadequate,
Sucker, which can not inhale plank, puts down, and influences whether the quality of exposure pcb board, substrate can be caused to scrap.To solve this problem, at present
There are three ways to：
Method one：Directly ignore the problem, but client factory pcb board can be required very high, plank not usually, can back and forth
It returns and plank is bent manually, seriously affect production efficiency.
Method two：For various sizes of plank, different sucker backing plates is designed.The hole that vacuum is inhaled on backing plate covers model
It encloses, it is in the same size with plank.This method is simple, and operation is slightly troublesome, but when producing 55 inches of plank, needs replacing
55 inches of backing plate, difficulty are multiplied, and change the time of backing plate, can increase by 150%~200%, seriously affect production efficiency.
Method three：Plank is not covered and vacuumizes region, is blocked with article, the most commonly used is cut the used film.
This method very economical material benefit, but pretty troublesome, different size of pcb board, need for the film to be cut into different sizes, for a long time
Get off, the film accumulation after board production area can be caused to cut, the size for finding needs also bothers.
It can be seen that generally use replaces the suitable sucker of size in the prior art or searching shape size is suitably useless
The film is abandoned to block the mode of air leakage point, can all substantially reduce production efficiency.
To sum up, current DMD structure laser direct-writings exposure machine is in the presence of the problems such as cannot producing super large plate, vacuum cup gas leakage
It is urgently to be resolved hurrily.
Utility model content
In view of the above problems, the utility model provides vacuum cup and the DMD structure single shafts containing the vacuum cup are consolidated
Determine light path direct write exposure machine, cannot be produced with to solve the prior art and be focused in super large plate, vacuum cup gas leakage, exposure process and fixed
The problems such as position is inaccurate.
First purpose of the utility model be to provide a kind of vacuum cup, the vacuum cup, including suction cup main body and
Vacuum generating device；A certain number of stomatas, each each correspondence one in promoting the circulation of qi hole are distributed in suction cup main body in terms of rows and columns
Relay, each row stomata also one relay of each correspondence；Air vent switch is each connected between stomata and vacuum generating device；
The relay for the relay and the stomata column that air vent switch is expert at the stomata simultaneously is connect.
In a kind of embodiment of the utility model, the air vent switch is located at what stomata was connect with vacuum generating device
On vacuum line.
In a kind of embodiment of the utility model, the air vent switch is electromagnetic switch.
In a kind of embodiment of the utility model, the relay is connect with master control device.
In a kind of embodiment of the utility model, the stomata is in suction cup main body in intermediate thin, four careful points
Cloth form.
In a kind of embodiment of the utility model, the line space and column pitch of the stomata by among suction cup main body to
Both sides are in the form of uniformly successively decreasing.
In a kind of embodiment of the utility model, it is located between the line space or row of the stomata of suction cup main body central region
Away from being up to 1-3 inches, it is located at the line space or the minimum 5-8mm of column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the utility model, it is located between the line space or row of the stomata of suction cup main body central region
Away from being up to 1.5-2.8 inches, it is located at the line space or the minimum 4-9mm of column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the utility model, opening shape of the stomata in suction cup main body can be round
The arbitrary shapes such as shape, ellipse, square, rectangle, for example, it is round.
In a kind of embodiment of the utility model, opening area of the stomata in suction cup main body is 10mm2~
500mm2。
In a kind of embodiment of the utility model, the maximum width of the suction cup main body is 55 inches.
In a kind of embodiment of the utility model, the suction cup main body can be divided into chuck support structure and backing plate,
It can also be the integral structure that backing plate is integrated with chuck support structure.When suction cup main body is chuck support structure and backing plate
When separated structure, backing plate is mounted on chuck support structure surface, and pad surfaces are designed with equally distributed stomata, below backing plate
It is the vacuum air-channel being connect with stomata.
Second purpose of the utility model is to provide a kind of DMD structures single shaft fixed optical path direct write exposure machine, the DMD
Structure single shaft fixed optical path direct write exposure machine contains the vacuum cup of the utility model.
In a kind of embodiment of the utility model, the DMD structures single shaft fixed optical path direct write exposure machine further includes
Support construction, DMD structures, a moving parts；The moving parts include a scanning Y-axis and a lifting Z axis；Vacuum is inhaled
Disk is located above moving parts.
In the utility model, single shaft refer to containing only there are one moving parts, fixation refer to DMD structures be in a fixed position,
It is immovable.
In a kind of embodiment of the utility model, the scanning Y-axis is located at below lifting Z axis.
In a kind of embodiment of the utility model, the lifting Z axis of the vacuum cup and moving parts connects.
In a kind of embodiment of the utility model, the support construction is gantry structure.
The advantages of the utility model and effect：
(1) the DMD structure single shaft fixed optical path direct write exposure machines of the utility model, mainly carry out vacuum cup structure
It improves.The vacuum cup of the utility model is the vacuum cup of automation, and chuck surface is distributed with a series of stomata, works as stomata
When having pcb board covering above, stomata closed-circuit working, when not having pcb board covering above stomata, stomata is closed, and is efficiently solved
When producing platelet, the problem of suction deficiency caused by due to gas leakage.Further, the gas cell distribution on sucker be it is intermediate dredge,
Four is careful, and both so that different size of pcb board is when placing, there is stomata in marginal portion always, effectively prevents board edge tilting
The problem of, and stomata quantity is saved in the place that too many stomata can not be needed in centre, is reduced cost, is improved efficiency.
(2) the DMD structure single shaft fixed optical path direct write exposure machines of the utility model, exposure machine sucker width can be arranged to
55 inches, 55 inches of super large plate can be produced, at the same can guarantee again high-precision, high density, filament away from etc. demands, exposed lines spacing
Up to 30 microns hereinafter, ill-exposed rate drops to 0.1% or less.
(3) DMD structure fixed optical paths are used to design, light path is irremovable, effectively prevents due to light path displacement error band
That comes exposes inaccurate problem；Single moving parts design, solves and does more physical exercises component at work, due to the fortune of moving parts
There is the influence exposure quality such as distortion, inclination and even results in product in the dynamic substrate position that cannot achieve absolute synchronization and may bring
The problem of scrapping.
Description of the drawings
Fig. 1 is the vacuum cup structural schematic diagram of the utility model；Wherein, 1 suction cup main body, 3 stomatas, 4 relays, 6 total
Control device；
Fig. 2 is the vacuum generating device and stomata connection diagram of the vacuum cup of the utility model；Wherein, 2 vacuum are sent out
Generating apparatus, 5 air vent switch；
Fig. 3 is that traditional vacuum cup places the structural schematic diagram after substrate；Wherein, 14 substrate；
Fig. 4 is that the vacuum cup of the utility model places a kind of structural schematic diagram after substrate；
Fig. 5 is a kind of structural schematic diagram after the substrate position on the vacuum cup for adjust the utility model；
Fig. 6 is the DMD structure single shaft fixed optical path direct write exposure machines of the vacuum cup containing the utility model；Wherein, 7
Support structure, 8DMD structures, 10 vacuum cups；12 scanning Y-axis, 13 lifting Z axis.
Specific embodiment
DMD structures：Using DMD as a whole set of complete light path system of core devices, including laser light source, DMD, optical frames
The components such as piece form.
PCB：Printed Circuit Board, printed circuit board are important electronic unit, are electronic components
Supporter is the carrier of electronic component electrical connection.
Scan Y-axis：Also it is scan axis or Y-axis, for doing the continuous scanning movement of constant speed.
Lift Z axis：Also it is lifting shaft or Z axis, for controlling the lifting of sucker.
Sucker：For adsorbing and fixing the objective table of pcb board.
Here is that the utility model is specifically described.
Embodiment 1：Vacuum cup
The vacuum cup structure of the utility model is as shown in Figs. 1-2.
The utility model vacuum cup, including suction cup main body 1 and vacuum generating device 2；With row and column in suction cup main body 1
The a certain number of stomatas 3 of formal distribution, each promoting the circulation of qi hole 3 each correspondence, one relay 4, each row stomata also each correspondence one after
Electric appliance；Air vent switch 5 is each connected between stomata 3 and vacuum generating device 2；Air vent switch 5 is expert at the stomata simultaneously
Relay connected with the relay of the stomata column.
Each relay is connect with master control device 6.Air vent switch is located at the vacuum tube that stomata is connect with vacuum generating device
On the road.The air vent switch can be electromagnetic switch.The stomata can be uniformly distributed in suction cup main body.
Using such structure and connection type, when vacuum cup works, a certain size substrate is placed on vacuum suction
On disk, the stomata row or stomata that have substrate to cover are arranged, the relay access corresponding to the row or column；To Mr. Yu's stomata
Speech, only when it is expert at and column corresponding to relay all make for access, the air vent switch of the stomata is just opened, in turn
Vacuum generating device and stomata unicom, stomata work.In the case of this, the air vent switch for the stomata not covered substantially
It is in off state, existing leakage problem when to solve the larger production PCB using vacuum cup.
Embodiment 2：Vacuum cup
The vacuum cup of the present embodiment is made that on the basis of the vacuum cup as shown in Figs. 1-2 of embodiment 1 and changes
Into.
The stomata 3 is in suction cup main body 1 in intermediate thin, four careful distribution forms.
Equally distributed form is usually used in traditional vacuum cup, stomata, may when producing smaller pcb board
After substrate 14 is placed in suction cup main body, the lucky position in certain edge where substrate farther out (as shown in Figure 3) far from both sides stomata, thus
Cause the marginal portion that can be impacted to production because being tilted without pull of vacuum.Using this centre of the utility model
It dredges, after four careful distribution forms, as illustrated in figures 4-5, when smaller substrate is placed on vacuum cup, selects substrate is close
Suction cup main body edge is placed, at this time if the substrate edges of intermediate region are just farther out from both sides stomata in the suction cup main body,
It can so select the substrate edges being moved in nearest a line or a row stomata and be allowed to cover just；Due to sucker master
The phenomenon that surrounding stomata of body is closeer, and this movement will not cause substrate another lateral edges occur farther out from stomata.
Optionally, the line space of the stomata and column pitch by among suction cup main body to both sides in the form of uniformly successively decreasing.
Optionally, it is up to 1-3 inches positioned at the line space or column pitch of the stomata of suction cup main body central region, is located at and inhales
The minimum 5-8mm of line space or column pitch of the stomata of disc main body fringe region.Opening shape of the stomata in suction cup main body can
To be the arbitrary shapes such as circle, ellipse, square, rectangle, for example, it is round.Opening face of the stomata in suction cup main body
Product can be arbitrary, such as 10mm2~500mm2。
Optionally, the disk of the suction cup main body is integral disk or is formed by polylith disk assembled.
Embodiment 3：DMD structure single shaft fixed optical path direct write exposure machines
As shown in fig. 6, for the DMD structure single shaft fixed optical path direct write exposure machines of the vacuum cup containing the utility model.
The DMD structures single shaft fixed optical path direct write exposure machine further includes 8, support construction 7, DMD structures exercise groups
Part and vacuum cup 10；Moving parts include a scanning Y-axis 12 and a lifting Z axis 13；Vacuum cup 10 is located at exercise group
Above part.
The scanning Y-axis 12 is located at 13 lower section of lifting Z axis；The vacuum cup 10 and the lifting Z axis 13 of moving parts connect
It connects.With the movement for scanning Y-axis, drop Z axis 13 corresponding change in location occurs for vacuum cup.
Optionally, the support construction is gantry structure.Framework for whole system supports, marble gantry structure
Design feature can be very good to keep the stability of platform movement, and have good isolation property.
In the process of running, pcb board is placed on vacuum cup 10 (objective table), lifting Z axis is used for focusing, i.e. plank phase
It thickens for standard plate thickness, then lifts Z axis decline, otherwise lifting Z axis rises, that is, lift the height that Z axis 13 controls vacuum cup 10
Degree finds light path optimal focal plane；Start exposure process, the scanning of scanning 12 uniform speed scanning motion control objective table of Y-axis is until exposure knot
Beam position stops.The equipment of the utility model can pass through the height of change lifting shaft, corresponding different plate thickness so that light path
Optimal focal plane remains unchanged.
Although the utility model has been described by way of example and in terms of the preferred embodiments, it is not limited to the utility model, any
Person skilled in the art can do various change and modification, therefore this without departing from the spirit and scope of the utility model
The protection domain of utility model should be subject to what claims were defined.
Claims (7)
1. a kind of DMD structures single shaft fixed optical path direct write exposure machine, which is characterized in that the DMD structures single shaft fixed optical path is straight
It includes support construction, DMD structures, moving parts, a vacuum cup to write exposure machine；Moving parts include one scanning Y-axis and
One lifting Z axis；Vacuum cup is located above moving parts；
The vacuum cup includes suction cup main body and vacuum generating device；A fixed number is distributed in suction cup main body in terms of rows and columns
The stomata of amount, each each one relay of correspondence in promoting the circulation of qi hole, each row stomata also one relay of each correspondence；Each stomata with it is true
It is connected with air vent switch between empty generating means；The relay and the stomata column that air vent switch is expert at the stomata simultaneously
Relay connection；
The stomata is in suction cup main body in intermediate thin, four careful distribution forms；
The scanning Y-axis is located at below lifting Z axis.
2. DMD structures single shaft fixed optical path direct write exposure machine according to claim 1, which is characterized in that the stomata is opened
Off-position is on the vacuum line that stomata is connect with vacuum generating device.
3. DMD structures single shaft fixed optical path direct write exposure machine according to claim 1, which is characterized in that be located at sucker master
The line space or column pitch of the stomata of body central region are up to 1.5-2.8 inches.
4. DMD structures single shaft fixed optical path direct write exposure machine according to claim 1, which is characterized in that be located at sucker master
The minimum 4-9mm of line space or column pitch of the stomata of body fringe region.
5. DMD structures single shaft fixed optical path direct write exposure machine according to claim 1, which is characterized in that the vacuum is inhaled
The lifting Z axis of disk and moving parts connects.
6. DMD structures single shaft fixed optical path direct write exposure machine according to claim 1, which is characterized in that the support knot
Structure is gantry structure.
7. DMD structures single shaft fixed optical path direct write exposure machine according to claim 1, which is characterized in that the stomata exists
Opening area in suction cup main body is 10mm2~500mm2。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621262432 | 2016-11-22 | ||
| CN2016212624320 | 2016-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207764553U true CN207764553U (en) | 2018-08-24 |
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ID=63179518
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721260560.6U Active CN207764553U (en) | 2016-11-22 | 2017-09-28 | A kind of DMD structures single shaft fixed optical path direct write exposure machine |
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| Country | Link |
|---|---|
| CN (1) | CN207764553U (en) |
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- 2017-09-28 CN CN201721260560.6U patent/CN207764553U/en active Active
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Address after: 221000 west side of Hengshan Road, Pizhou City, Xuzhou City, Jiangsu Province Patentee after: Jiangsu Yingsu integrated circuit equipment Co., Ltd Address before: 221300 Huashan Road, Pizhou Economic Development Zone, Jiangsu, China, Xuzhou Patentee before: JIANGSU YINGSU PHOTOELECTRIC TECHNOLOGY Co.,Ltd. |