CN206331230U - A kind of DMD structures multiaxis may move light path direct write exposure machine - Google Patents
A kind of DMD structures multiaxis may move light path direct write exposure machine Download PDFInfo
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- CN206331230U CN206331230U CN201621246324.4U CN201621246324U CN206331230U CN 206331230 U CN206331230 U CN 206331230U CN 201621246324 U CN201621246324 U CN 201621246324U CN 206331230 U CN206331230 U CN 206331230U
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- stomata
- direct write
- exposure machine
- light path
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Abstract
Light path direct write exposure machine is may move the utility model discloses a kind of DMD structures multiaxis, belongs to direct write exposure technique field.DMD structures multiaxis of the present utility model may move light path direct write exposure machine, and mainly vacuum cup structure is improved, and efficiently solve the problem of suction caused during production platelet due to gas leakage is not enough.Further, the gas cell distribution on sucker for it is middle dredge, it is four careful, effectively prevented the problem of board edge is tilted, saved stomata quantity, reduce cost.DMD structures multiaxis of the present utility model may move light path direct write exposure machine, can produce 55 inches of super large plate；And multigroup moving parts are connected below sucker, the kinematic axis of multigroup moving parts is synchronized with the movement, and improves the stability of exposure accuracy and operation.
Description
Technical field
The utility model is related to a kind of DMD structures multiaxis and may move light path direct write exposure machine, belongs to direct write exposure technique neck
Domain.
Background technology
PCB (printed circuit board (PCB)) is the supporter of electronic component, while being also the carrier of electronic component electrical connection.
Common PCB production equipments have traditional exposure machine, polygon prism structure laser direct-writing exposure machine, the exposure of DMD structures laser direct-writing
Machine etc..Image directly can be imaged by laser direct-writing exposure machine on pcb board, relative to traditional exposure machine, it is not necessary to use
The film, the image of formation is apparent.
With functional requirement more and more higher of the market to pcb board, pcb board also becomes to become increasingly complex, and system compatibility is got over
It is high, it is sometimes necessary to size very big substrate, still, 48 inches of super large plate is more than for size, is not had also in the prior art
Can be with the technology and equipment of high-quality processing.Traditional exposure machine can produce super large plate, but its machining accuracy is poor, does not reach
The requirement of high density, thin space；Polygon prism structure laser direct-writing exposure machine can not realize the movement of light path, whole plate necessary one at present
Secondary shaping, when processing is more than 48 inches of super large plates, the whole machine width degree of its equipment is up to more than 3m, and equipment size is excessively huge,
It is difficult to the door by general workshop, it is very heavy；Therefore polygon prism structure LDI can not produce the pcb board of more than 48 inches of width.
Conventional DMD structure laser direct-writing exposure machines, because the size maximum that its sucker can expose is only 24 inches, therefore can not also give birth to
Super large plate of the production more than 48 inches.
If DMD structure laser direct-writing exposure machines are prepared by increasing the method for the size that sucker can expose, by institute
The vacuum cup size needed is that, than larger, sometimes more than 55 inches, there are the following problems for meeting：(1) when the pcb board exposed
When actual size is smaller, and sucker structure supports larger vacuum range, and the region for being not covered with plank can be produced Lou
Gas, absorption of the influence sucker to substrate；(2) tilted due to might have corner during substrate transport, if pull of vacuum is not enough,
Plank can not be inhaled flat by sucker, influence whether to expose the quality of pcb board, substrate can be caused to scrap.To solve this problem, at present
Method have three kinds：
Method one：Directly ignore the problem, but can require very high to client factory pcb board, plank usually, can not come back and forth
Return and plank is bent manually, have a strong impact on production efficiency.
Method two：For various sizes of plank, different sucker backing plates are designed.The hole covering model of vacuum is inhaled on backing plate
Enclose, it is in the same size with plank.This method is simple, and operation is somewhat bothered, but when producing 55 inches of plank, it is necessary to change
55 inches of backing plate, difficulty is multiplied, and changes the time of backing plate, can increase by 150%~200%, have a strong impact on production efficiency.
Method three：Do not covered for plank and vacuumize region, blocked with article, conventional is to cut the used film.
This method very economical material benefit, but it is pretty troublesome, and different size of pcb board is, it is necessary to the film be cut into different sizes, for a long time
Get off, the film accumulation after the cutting of board producing region can be caused, the size that finding needs also is bothered.
As can be seen here, generally suitably given up using the replacing suitable sucker of size or searching shape size in the prior art
Abandon the film to block the mode of air leakage point, can all substantially reduce production efficiency.
To sum up, current DMD structure laser direct-writing exposure machines there are problems that super large plate, vacuum cup can not be produced
It is urgently to be resolved hurrily.
Utility model content
For problem above, DMD structure multiaxis of the utility model there is provided vacuum cup and containing the vacuum cup can
Mobile light path direct write exposure machine, to solve the problems such as prior art can not produce super large plate, vacuum cup gas leakage.
First purpose of the present utility model be to provide a kind of vacuum cup, the vacuum cup, including suction cup main body and
Vacuum generating device；A number of stomata, each each correspondence one in promoting the circulation of qi hole are distributed in suction cup main body in terms of rows and columns
Relay, each row stomata also each one relay of correspondence；Air vent switch is each connected between stomata and vacuum generating device；
The relay and the relay of the stomata column that air vent switch is expert at the stomata simultaneously are connected.
In a kind of embodiment of the present utility model, the air vent switch is located at what stomata was connected with vacuum generating device
On vacuum line.
In a kind of embodiment of the present utility model, the air vent switch is electromagnetic switch.
In a kind of embodiment of the present utility model, the relay is connected with master control device.
In a kind of embodiment of the present utility model, the stomata is in suction cup main body in middle thin, four careful points
Cloth form.
In a kind of embodiment of the present utility model, the line space and column pitch of the stomata by the middle of suction cup main body to
Both sides are in the form uniformly successively decreased.
In a kind of embodiment of the present utility model, between the line space or row of the stomata of suction cup main body central region
Away from being 1-3 inches to the maximum, positioned at the minimum 5-8mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the present utility model, between the line space or row of the stomata of suction cup main body central region
Away from being 0.5-3.5 inches to the maximum, positioned at the minimum 3-6mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the present utility model, opening shape of the stomata in suction cup main body can be round
The arbitrary shapes such as shape, ellipse, square, rectangle, such as it is circular.Using square or rectangular opening shape, its
The linear shape of edge of opening, it is easier to being equally that the substrate edges that edge is linear agree with.
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 10mm2~
500mm2。
In a kind of embodiment of the present utility model, the Breadth Maximum of the suction cup main body is 55 inches.
In a kind of embodiment of the present utility model, the card of the suction cup main body is integral card or by polylith disk
Face is combined.
In a kind of embodiment of the present utility model, the card of the suction cup main body is by the big disk assembled of two pieces of grades
Into.
In a kind of embodiment of the present utility model, the suction cup main body can be divided into chuck support structure and backing plate,
It can also be the integral structure that backing plate is integrated with chuck support structure.When suction cup main body is chuck support structure and backing plate
During separated structure, backing plate is arranged on chuck support structure surface, and pad surfaces are designed with below equally distributed stomata, backing plate
It is the vacuum air-channel being connected with stomata.
Second purpose of the present utility model is to provide the device containing vacuum cup of the present utility model.
In a kind of embodiment of the present utility model, described device can be various types of exposure machines.
It is removable that 3rd purpose of the present utility model is to provide the DMD structure multiaxises containing vacuum cup of the present utility model
Dynamic light path direct write exposure machine.
In a kind of embodiment of the present utility model, the DMD structures twin shaft may move light path direct write exposure machine and also wrap
Include supporting construction, DMD structures, DMD structure steppings axle, multiple moving parts；Each moving parts include a scanning Y-axis and one
Individual lifting Z axis；Vacuum cup is located above moving parts.
In the utility model, multiaxis refers to there are two or more moving parts, and moving parts are risen by a scanning Y-axis and one
Z axis composition drops；It is removable, refer to that DMD structures can be moved with the sliding block of DMD structure stepping axles along guide rail；It is the multiple, be
Refer to two or more, including two.
In a kind of embodiment of the present utility model, it is DMD that the DMD structures multiaxis, which may move light path direct write exposure machine,
Structure twin shaft may move light path direct write exposure machine, contain two moving parts.
In a kind of embodiment of the present utility model, the scanning Y-axis is located at below lifting Z axis；
In a kind of embodiment of the present utility model, the lifting Z axis connection of the vacuum cup and moving parts.
In a kind of embodiment of the present utility model, it is set up in parallel between the moving parts along X-direction.
In a kind of embodiment of the present utility model, the card of the suction cup main body of the vacuum cup is integral card
Or formed by polylith disk assembled.When being formed by polylith disk assembled, every piece of card correspondence one or moving parts.
In a kind of embodiment of the present utility model, the suction cup main body of the vacuum cup is identical by the size of left and right two
Card merge form；One moving parts of each card correspondence.
In a kind of embodiment of the present utility model, any connection is not taken between described two cards, or use
Ball pivot chain structure is connected, or uses Hard link.
In a kind of embodiment of the present utility model, the supporting construction is gantry structure.
In a kind of embodiment of the present utility model, the DMD structures are arranged on DMD structure stepping axles, can be with
The sliding block of DMD structure stepping axles is moved along guide rail.
Advantage and effect of the present utility model：
(1) DMD structures multiaxis of the present utility model may move light path direct write exposure machine, and mainly vacuum cup structure is carried out
Improve.Vacuum cup of the present utility model is the vacuum cup of automation, and chuck surface is distributed with a series of stomata, works as gas
When having pcb board covering above hole, stomata closed-circuit working, when not having pcb board covering above stomata, stomata closure is effectively solved
During production platelet, the problem of suction caused due to gas leakage is not enough.Further, the gas cell distribution on sucker is centre
Dredge, four carefully, both cause different size of pcb board when placing, there is stomata marginal portion all the time, effectively prevents board edge and sticks up
The problem of rising, can save stomata quantity in the middle place for not needing too many stomata again, reduce cost, improve efficiency.
(2) DMD structures twin shaft of the present utility model may move light path direct write exposure machine, and exposure machine sucker width can be set
Into 55 inches, 55 inches of super large plate can be produced, at the same can guarantee that again high accuracy, high density, fine rule away from etc. demand；And under sucker
The multigroup moving parts of side's connection, the kinematic axis of multigroup moving parts is synchronized with the movement, and improves the stability of exposure accuracy and operation,
Exposed lines spacing is up to less than 30 microns, and ill-exposed rate drops to less than 0.1%.
(3) DMD structures multiaxis of the present utility model may move light path direct write exposure machine, and DMD structures are in DMD structure stepping axles
Driving under, can in transverse direction move freely, extend horizontal exposure range, increase the flexible property of exposure, will
On the moving parts that stepping axle is arranged below, it is to avoid in component of doing more physical exercises while when moving, the fortune that is likely to occur in transverse direction
Move asynchronous problem, it is to avoid exposure may be brought inaccurate, or even the situation of product rejection occurs；Using doing more physical exercises, component is set
Meter, makes vacuum cup possess multiple strong points, sucker is had more preferable stability in motion process, while avoiding unimodule branch
Support the unstable problem of the connection being likely to occur during larger sucker.
Brief description of the drawings
Fig. 1 is vacuum cup structural representation of the present utility model；Wherein, 1 suction cup main body, 3 stomatas, 4 relays, 6 total
Control device；
Fig. 2 is the vacuum generating device and stomata connection diagram of vacuum cup of the present utility model；Wherein, 2 vacuum are sent out
Generating apparatus, 5 air vent switch；
Fig. 3 places the structural representation after substrate for traditional vacuum cup；Wherein, 14 substrate；
Fig. 4 is that vacuum cup of the present utility model places a kind of structural representation after substrate；
Fig. 5 is a kind of structural representation after the substrate position on adjustment vacuum cup of the present utility model；
Fig. 6 is that the DMD structures twin shaft containing vacuum cup of the present utility model may move light path direct write exposure machine；Wherein, 7
Supporting construction, 8DMD structures, 9DMD structure steppings axle, 10 vacuum cups；12 scanning Y-axis, 13 lifting Z axis.
Specific embodiment
DMD structures：A whole set of complete light path system by core devices of DMD, including LASER Light Source, DMD, optical frames
The parts such as piece are constituted.
PCB：Printed Circuit Board, printed circuit board (PCB) is important electronic unit, is electronic component
Supporter, is the carrier of electronic component electrical connection.
Stepping axle：Light path is arranged on the motion parts of motor, for doing step motion.
Scan Y-axis：Also scan axis or Y-axis are, for doing the continuous scanning motion of constant speed.
Lift Z axis：Also lifting shaft or Z axis are, for controlling the lifting of sucker.
Sucker：For adsorbing, the objective table of fixed pcb board.
Here is that the utility model is specifically described.
Embodiment 1：Vacuum cup
Vacuum cup structure of the present utility model is as shown in Figure 1-2.
The utility model vacuum cup, including suction cup main body 1 and vacuum generating device 2；With row and column in suction cup main body 1
The a number of stomata 3 of formal distribution, each each one relay 4 of correspondence in promoting the circulation of qi hole 3, each row stomata also each correspondence one after
Electrical equipment；Air vent switch 5 is each connected between stomata 3 and vacuum generating device 2；Air vent switch 5 is expert at the stomata simultaneously
Relay and the stomata column relay connect.
Each relay is connected with master control device 6.Air vent switch is located at the vacuum tube that stomata is connected with vacuum generating device
Lu Shang.The air vent switch can be electromagnetic switch.The stomata, can be uniformly distributed in suction cup main body.
Using such structure and connected mode, when vacuum cup works, a certain size substrate is placed on vacuum suction
On disk, for the stomata row or stomata row for thering is substrate to cover, the relay path corresponding to the row or column；For certain stomata
Speech, only when it is expert at and column corresponding to relay all make for path, the air vent switch of the stomata is just opened, and then
Vacuum generating device and stomata UNICOM, stomata work.In the case of this, the air vent switch for the stomata not covered by substrate
For closed mode, so as to solve leakage problem existing during larger utilization vacuum cup production PCB.
Embodiment 2：Vacuum cup
The vacuum cup of the present embodiment, is made that on the basis of the vacuum cup as shown in Figure 1-2 of embodiment 1 and changes
Enter.
The stomata 3 is in suction cup main body 1 in middle thin, four careful distribution forms.
Traditional vacuum cup, stomata is usually to use equally distributed form, may when producing less pcb board
After substrate 14 is placed in suction cup main body, the lucky position in certain edge where substrate far from both sides stomata farther out (as shown in Figure 3) so that
Cause the marginal portion to be tilted because of no pull of vacuum, production is impacted.Using this centre of the utility model
After thin, four careful distribution forms, as illustrated in figures 4-5, when smaller substrate is placed on vacuum cup, select substrate is close
Suction cup main body edge is placed, if the substrate edges now close to intermediate region in suction cup main body are lucky from both sides stomata farther out,
It can so select the substrate edges being moved in nearest a line or a row stomata and be allowed to covering just；Due to sucker master
The surrounding stomata of body is closeer, and this movement will not cause phenomenon of another lateral edges of substrate from stomata farther out.
Alternatively, the line space and column pitch of the stomata are by being in the form uniformly successively decreased to both sides in the middle of suction cup main body.
Alternatively, positioned at suction cup main body central region stomata line space or column pitch be 1-3 inches to the maximum, positioned at suction
The minimum 5-8mm of line space or column pitch of the stomata of disc main body fringe region.Opening shape of the stomata in suction cup main body can
It is to be the arbitrary shapes such as circle, ellipse, square, rectangle, such as circular.Opening surface of the stomata in suction cup main body
Product can be arbitrary, such as 10mm2~500mm2。
Alternatively, the card of the suction cup main body is integral card or formed by polylith disk assembled.
Embodiment 3：DMD structures twin shaft may move light path direct write exposure machine
As shown in fig. 6, being carried out so that the DMD structures twin shaft containing two moving parts may move light path direct write exposure machine as an example
Illustrate.The DMD structures twin shaft, which may move light path direct write exposure machine, includes supporting construction 7, DMD structures 8, DMD structures step
Enter axle 9, two moving parts, vacuum cups 10；Each moving parts are made up of a scanning Y-axis 12 and a lifting Z axis 13；
Vacuum cup 10 is located above moving parts.
The DMD structures 8 are arranged on DMD structure steppings axle 9, can be as the sliding block of DMD structure steppings axle 9 is along guide rail
Motion.The scanning Y-axis 12 is located at the lower section of lifting Z axis 13；The vacuum cup 10 is connected with the lifting Z axis 13 of moving parts.
Vacuum cup, occurs corresponding change in location with scanning Y-axis, the movement of lifting Z axis 13.
Alternatively, the card of the suction cup main body of the vacuum cup is integral card.
Alternatively, it is set up in parallel between described two moving parts along X-direction, is uniformly distributed and is installed on vacuum cup 10
Lower section.By setting multiple moving parts, when producing larger pcb board, run simultaneously between each component, with single moving parts
Compare, it is ensured that more preferable stability.
Alternatively, the supporting construction is gantry structure.Framework for whole system is supported, marble gantry structure
Design feature can be very good to keep the stability of platform motion, and with good isolation property.
Embodiment 4：DMD structures twin shaft may move light path direct write exposure machine
The DMD structures twin shaft of the present embodiment may move light path direct write exposure machine, is made that and changes on the basis of embodiment 3
Enter.
The suction cup main body of the vacuum cup is merged by the size identical card of left and right two to be formed；Each card correspondence one
Individual moving parts.
Any connection is not taken between two cards of the composition suction cup main body, or using the connection of ball pivot chain structure,
Or use Hard link.
For 55*40 inch of pcb board of production, because of the limitation of domestic processing technology level, it is impossible to produce high precision, area greatly
Sucker, therefore can only take the mode of two pieces of sucker card splicings.In the utility model, two pieces of left and right sucker, if respectively with
The screw of dry quantity is fixed on corresponding Z axis mounting surface, and then the connected mode between two pieces of suckers, can there is following 3 kinds：
(1) any connection is not taken between sucker, the simple precision by the Y-axis of platform courses two.Advantage be it is simple in construction,
It is economical and practical, when producing less than 24 inches of plank, it is only necessary to expose a sucker scope, it is not necessary to which two suckers are all
It is exposed, production plank size is more flexible, closer to client's use demand.
(2) connected between sucker using ball pivot chain structure, two sucker Z-directions can have the inconsistent situation of slight height, Y
Uniformity is realized by platform courses in the motion process of direction.Advantage is unlocked once there is some Y-axis, passes through the company of two suckers
Connect, another Y-axis can be driven to unlock, the damage of plank is prevented effectively from.Because two Z axis difference in height conventional methods can not be surveyed accurately
Amount more or less can all have certain altitude poor to micron level.This method can effectively reduce that Z axis is highly inconsistent to be caused
Situations such as stuck during existing Z axis motion；
(3) Hard link is used between sucker, i.e., is fixed two suckers extremely with modes such as screws.Advantage is that whether Y-axis is dashed forward
So power-off, or Z axis are highly inconsistent, are scrapped all without plank is caused.
Above-mentioned three kinds of connection methods, can select one way in which to be attached according to actual conditions.
Although the utility model is disclosed as above with preferred embodiment, it is not limited to the utility model, any
Person skilled in the art, is not departing from spirit and scope of the present utility model, can all do various changes and modification, therefore this
What the protection domain of utility model should be defined by claims is defined.
Claims (7)
1. a kind of DMD structures multiaxis may move light path direct write exposure machine, it is characterised in that the DMD structures multiaxis may move light
Road direct write exposure machine includes supporting construction, DMD structures, DMD structure steppings axle, multiple moving parts, vacuum cup；Each motion
Component includes a scanning Y-axis and a lifting Z axis；Vacuum cup is located above moving parts；
The vacuum cup includes suction cup main body and vacuum generating device；A fixed number is distributed in suction cup main body in terms of rows and columns
The stomata of amount, each each one relay of correspondence in promoting the circulation of qi hole, each row stomata also each one relay of correspondence；Each stomata with it is true
Air vent switch is connected between empty generating means；Relay and the stomata column that air vent switch is expert at the stomata simultaneously
Relay connection
The stomata is in middle thin, four careful distribution forms in suction cup main body, and the opening shape of stomata is square or long
It is square.
2. DMD structures multiaxis according to claim 1 may move light path direct write exposure machine, it is characterised in that the stomata
Switch is located on the vacuum line that stomata is connected with vacuum generating device.
3. DMD structures multiaxis according to claim 1 may move light path direct write exposure machine, it is characterised in that the sucker
The card of main body is integral card or formed by polylith disk assembled.
4. DMD structures multiaxis according to claim 1 may move light path direct write exposure machine, it is characterised in that positioned at sucker
The line space or column pitch of the stomata of main body central region are 0.5-3.5 inches to the maximum, positioned at the gas of suction cup main body fringe region
The minimum 3-6mm of line space or column pitch in hole.
5. DMD structures multiaxis according to claim 1 may move light path direct write exposure machine, it is characterised in that the multiple
It is set up in parallel between moving parts along X-direction.
6. DMD structures multiaxis according to claim 1 may move light path direct write exposure machine, it is characterised in that the vacuum
The suction cup main body of sucker is merged by the size identical card of left and right two to be formed；One moving parts of each card correspondence.
7. DMD structures multiaxis according to claim 6 may move light path direct write exposure machine, it is characterised in that described two
Any connection is not taken between card, Hard link is either connected or use using ball pivot chain structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621246324.4U CN206331230U (en) | 2016-11-22 | 2016-11-22 | A kind of DMD structures multiaxis may move light path direct write exposure machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621246324.4U CN206331230U (en) | 2016-11-22 | 2016-11-22 | A kind of DMD structures multiaxis may move light path direct write exposure machine |
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| Publication Number | Publication Date |
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| CN206331230U true CN206331230U (en) | 2017-07-14 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106444299A (en) * | 2016-11-22 | 2017-02-22 | 江苏影速光电技术有限公司 | Multi-axis movable light path direct-write exposure machine with DMD structure |
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2016
- 2016-11-22 CN CN201621246324.4U patent/CN206331230U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106444299A (en) * | 2016-11-22 | 2017-02-22 | 江苏影速光电技术有限公司 | Multi-axis movable light path direct-write exposure machine with DMD structure |
| CN106444299B (en) * | 2016-11-22 | 2017-12-12 | 江苏影速光电技术有限公司 | A kind of DMD structures multiaxis may move light path direct write exposure machine |
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Address after: 221000 west side of Hengshan Road, Pizhou City, Xuzhou City, Jiangsu Province Patentee after: Jiangsu Yingsu integrated circuit equipment Co., Ltd Address before: 221300 Huashan Road, Pizhou Economic Development Zone, Jiangsu, China, Xuzhou Patentee before: JIANGSU YINGSU PHOTOELECTRIC TECHNOLOGY Co.,Ltd. |