CN206331235U - A kind of DMD structures single shaft may move light path direct write exposure machine - Google Patents

A kind of DMD structures single shaft may move light path direct write exposure machine Download PDF

Info

Publication number
CN206331235U
CN206331235U CN201621246489.1U CN201621246489U CN206331235U CN 206331235 U CN206331235 U CN 206331235U CN 201621246489 U CN201621246489 U CN 201621246489U CN 206331235 U CN206331235 U CN 206331235U
Authority
CN
China
Prior art keywords
stomata
exposure machine
dmd
direct write
light path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201621246489.1U
Other languages
Chinese (zh)
Inventor
陈海巍
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuxi Speed Semiconductor Technology Co Ltd
Original Assignee
Wuxi Speed Semiconductor Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuxi Speed Semiconductor Technology Co Ltd filed Critical Wuxi Speed Semiconductor Technology Co Ltd
Priority to CN201621246489.1U priority Critical patent/CN206331235U/en
Application granted granted Critical
Publication of CN206331235U publication Critical patent/CN206331235U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

Light path direct write exposure machine is may move the utility model discloses a kind of DMD structures single shaft, belongs to direct write exposure technique field.DMD structures single shaft of the present utility model may move light path direct write exposure machine, and mainly vacuum cup structure is improved, and efficiently solve the problem of suction caused during production platelet due to gas leakage is not enough.Further, the gas cell distribution on sucker for it is middle dredge, it is four careful, effectively prevented the problem of board edge is tilted, saved stomata quantity, reduce cost.DMD structures single shaft of the present utility model may move light path direct write exposure machine, can produce 55 inches of super large plate.

Description

A kind of DMD structures single shaft may move light path direct write exposure machine
Technical field
The utility model is related to a kind of DMD structures single shaft and may move light path direct write exposure machine, belongs to direct write exposure technique neck Domain.
Background technology
PCB (printed circuit board (PCB)) is the supporter of electronic component, while being also the carrier of electronic component electrical connection. Common PCB production equipments have traditional exposure machine, polygon prism structure laser direct-writing exposure machine, the exposure of DMD structures laser direct-writing Machine etc..Image directly can be imaged by laser direct-writing exposure machine on pcb board, relative to traditional exposure machine, it is not necessary to use The film, the image of formation is apparent.
With functional requirement more and more higher of the market to pcb board, pcb board also becomes to become increasingly complex, and system compatibility is got over It is high, it is sometimes necessary to size very big substrate, still, 48 inches of super large plate is more than for size, is not had also in the prior art Can be with the technology and equipment of high-quality processing.Traditional exposure machine can produce super large plate, but its machining accuracy is poor, does not reach The requirement of high density, thin space;Polygon prism structure laser direct-writing exposure machine can not realize the movement of light path, whole plate necessary one at present Secondary shaping, when processing is more than 48 inches of super large plates, the whole machine width degree of its equipment is up to more than 3m, and equipment size is excessively huge, It is difficult to the door by general workshop, it is very heavy;Therefore polygon prism structure LDI can not produce the pcb board of more than 48 inches of width. Conventional DMD structure laser direct-writing exposure machines, because the size maximum that its sucker can expose is only 24 inches, therefore can not also give birth to Super large plate of the production more than 48 inches.
If DMD structure laser direct-writing exposure machines are prepared by increasing the method for the size that sucker can expose, by institute The vacuum cup size needed is that, than larger, sometimes more than 55 inches, there are the following problems for meeting:(1) when the pcb board exposed When actual size is smaller, and sucker structure supports larger vacuum range, and the region for being not covered with plank can be produced Lou Gas, absorption of the influence sucker to substrate;(2) tilted due to might have corner during substrate transport, if pull of vacuum is not enough, Plank can not be inhaled flat by sucker, influence whether to expose the quality of pcb board, substrate can be caused to scrap.To solve this problem, at present Method have three kinds:
Method one:Directly ignore the problem, but can require very high to client factory pcb board, plank usually, can not come back and forth Return and plank is bent manually, have a strong impact on production efficiency.
Method two:For various sizes of plank, different sucker backing plates are designed.The hole covering model of vacuum is inhaled on backing plate Enclose, it is in the same size with plank.This method is simple, and operation is somewhat bothered, but when producing 55 inches of plank, it is necessary to change 55 inches of backing plate, difficulty is multiplied, and changes the time of backing plate, can increase by 150%~200%, have a strong impact on production efficiency.
Method three:Do not covered for plank and vacuumize region, blocked with article, conventional is to cut the used film. This method very economical material benefit, but it is pretty troublesome, and different size of pcb board is, it is necessary to the film be cut into different sizes, for a long time Get off, the film accumulation after the cutting of board producing region can be caused, the size that finding needs also is bothered.
As can be seen here, generally suitably given up using the replacing suitable sucker of size or searching shape size in the prior art Abandon the film to block the mode of air leakage point, can all substantially reduce production efficiency.
To sum up, current DMD structure laser direct-writing exposure machines there are problems that super large plate, vacuum cup can not be produced It is urgently to be resolved hurrily.
Utility model content
For problem above, the utility model provides a kind of vacuum cup and the DMD structure lists containing the vacuum cup Axle may move light path direct write exposure machine, to solve the problems such as prior art can not produce super large plate, vacuum cup gas leakage.
First purpose of the present utility model be to provide a kind of vacuum cup, the vacuum cup, including suction cup main body and Vacuum generating device;A number of stomata, each each correspondence one in promoting the circulation of qi hole are distributed in suction cup main body in terms of rows and columns Relay, each row stomata also each one relay of correspondence;Air vent switch is each connected between stomata and vacuum generating device; The relay and the relay of the stomata column that air vent switch is expert at the stomata simultaneously are connected.
In a kind of embodiment of the present utility model, the air vent switch is located at what stomata was connected with vacuum generating device On vacuum line.
In a kind of embodiment of the present utility model, the air vent switch is electromagnetic switch.
In a kind of embodiment of the present utility model, the relay is connected with master control device.
In a kind of embodiment of the present utility model, the stomata is in suction cup main body in middle thin, four careful points Cloth form.
In a kind of embodiment of the present utility model, the line space and column pitch of the stomata by the middle of suction cup main body to Both sides are in the form uniformly successively decreased.
In a kind of embodiment of the present utility model, between the line space or row of the stomata of suction cup main body central region Away from being 3.1 inches to the maximum, positioned at the minimum 5.3mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the present utility model, opening shape of the stomata in suction cup main body can be round The arbitrary shapes such as shape, ellipse, square, rectangle, such as it is circular.
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 10mm2~ 500mm2
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 50mm2~ 350mm2
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 100mm2~ 250mm2
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 200mm2
In a kind of embodiment of the present utility model, the Breadth Maximum of the suction cup main body is 55 inches.
In a kind of embodiment of the present utility model, the suction cup main body can be divided into chuck support structure and backing plate, It can also be the integral structure that backing plate is integrated with chuck support structure.When suction cup main body is chuck support structure and backing plate During separated structure, backing plate is arranged on chuck support structure surface, and pad surfaces are designed with below equally distributed stomata, backing plate It is the vacuum air-channel being connected with stomata.
Second purpose of the present utility model is to provide a kind of DMD structures single shaft and may move light path direct write exposure machine, described DMD structures single shaft may move light path direct write exposure machine and contain vacuum cup of the present utility model.
In a kind of embodiment of the present utility model, the DMD structures single shaft, which may move light path direct write exposure machine, to be included Supporting construction, DMD structures, DMD structure steppings axle, moving parts, a vacuum cup;The moving parts include a scanning Y-axis and a lifting Z axis;Vacuum cup is located above moving parts.
In the utility model, single shaft refers to comprise only a moving parts, removable to refer to that DMD structures be moved.
In a kind of embodiment of the present utility model, the DMD structures are arranged on DMD structure stepping axles, can be with The sliding block of DMD structure stepping axles is moved along guide rail.
In a kind of embodiment of the present utility model, the structure of the vacuum cup is any one above mentioned knot Structure.
In a kind of embodiment of the present utility model, the scanning Y-axis is located at below lifting Z axis.
In a kind of embodiment of the present utility model, the lifting Z axis connection of the vacuum cup and moving parts.
In a kind of embodiment of the present utility model, the supporting construction is gantry structure.
Advantage and effect of the present utility model:
(1) DMD structures single shaft of the present utility model may move light path direct write exposure machine, and mainly vacuum cup structure is carried out Improve.Vacuum cup of the present utility model is the vacuum cup of automation, and chuck surface is distributed with a series of stomata, works as gas When having pcb board covering above hole, stomata closed-circuit working, when not having pcb board covering above stomata, stomata closure is effectively solved During production platelet, the problem of suction caused due to gas leakage is not enough.Further, the gas cell distribution on sucker is centre Dredge, four carefully, both cause different size of pcb board when placing, there is stomata marginal portion all the time, effectively prevents board edge and sticks up The problem of rising, can save stomata quantity in the middle place for not needing too many stomata again, reduce cost, improve efficiency.
(2) DMD structures single shaft of the present utility model may move light path direct write exposure machine, and exposure machine sucker width can be set Into 55 inches, 55 inches of super large plate can be produced, at the same can guarantee that again high accuracy, high density, fine rule away from etc. demand, between exposed lines Away from up to less than 30 microns, ill-exposed rate drops to less than 0.1%.
(3) DMD structures single shaft of the present utility model may move light path direct write exposure machine, and DMD structures are in DMD structure stepping axles Driving under, can in transverse direction move freely, extend horizontal exposure range, increase the flexible property of exposure, will On the moving parts that stepping axle is arranged below so that the moving parts of lower section are unlikely to overcomplicated, moving parts are improved Stability;Single moving parts design, solves and does more physical exercises component operationally, because the motion of moving parts can not be realized definitely There is the problem of influence exposure quality such as distortion, inclination even results in product rejection in substrate position that is synchronous and may bringing.
Brief description of the drawings
Fig. 1 is vacuum cup structural representation of the present utility model;Wherein, 1 suction cup main body, 3 stomatas, 4 relays, 6 total Control device;
Fig. 2 is the vacuum generating device and stomata connection diagram of vacuum cup of the present utility model;Wherein, 2 vacuum are sent out Generating apparatus, 5 air vent switch;
Fig. 3 places the structural representation after substrate for traditional vacuum cup;Wherein, 14 substrate;
Fig. 4 is that vacuum cup of the present utility model places a kind of structural representation after substrate;
Fig. 5 is a kind of structural representation after the substrate position on adjustment vacuum cup of the present utility model;
Fig. 6 is that the DMD structures single shaft containing vacuum cup of the present utility model may move light path direct write exposure machine;Wherein, 7 Supporting construction, 8DMD structures, 9DMD structure steppings axle, 10 vacuum cups;12 scanning Y-axis, 13 lifting Z axis.
Specific embodiment
DMD structures:A whole set of complete light path system by core devices of DMD, including LASER Light Source, DMD, optical frames The parts such as piece are constituted.
PCB:Printed Circuit Board, printed circuit board (PCB) is important electronic unit, is electronic component Supporter, is the carrier of electronic component electrical connection.
Scan Y-axis:Also scan axis or Y-axis are, for doing the continuous scanning motion of constant speed.
Lift Z axis:Also lifting shaft or Z axis are, for controlling the lifting of sucker.
Sucker:For adsorbing, the objective table of fixed pcb board.
Here is that the utility model is specifically described.
Embodiment 1:Vacuum cup
Vacuum cup structure of the present utility model is as shown in Figure 1-2.
The utility model vacuum cup, including suction cup main body 1 and vacuum generating device 2;With row and column in suction cup main body 1 The a number of stomata 3 of formal distribution, each each one relay 4 of correspondence in promoting the circulation of qi hole 3, each row stomata also each correspondence one after Electrical equipment;Air vent switch 5 is each connected between stomata 3 and vacuum generating device 2;Air vent switch 5 is expert at the stomata simultaneously Relay and the stomata column relay connect.
Each relay is connected with master control device 6.Air vent switch is located at the vacuum tube that stomata is connected with vacuum generating device Lu Shang.The air vent switch can be electromagnetic switch.The stomata, can be uniformly distributed in suction cup main body.
Using such structure and connected mode, when vacuum cup works, a certain size substrate is placed on vacuum suction On disk, for the stomata row or stomata row for thering is substrate to cover, the relay path corresponding to the row or column;For certain stomata Speech, only when it is expert at and column corresponding to relay all make for path, the air vent switch of the stomata is just opened, and then Vacuum generating device and stomata UNICOM, stomata work.In the case of this, the air vent switch not covered by substrate is closing State, so as to solve leakage problem existing during larger utilization vacuum cup production PCB.
Embodiment 2:Vacuum cup
The vacuum cup of the present embodiment, is made that on the basis of the vacuum cup as shown in Figure 1-2 of embodiment 1 and changes Enter.
The stomata 3 is in suction cup main body 1 in middle thin, four careful distribution forms.
Traditional vacuum cup, stomata is usually to use equally distributed form, may when producing less pcb board After substrate 14 is placed in suction cup main body, the lucky position in certain edge where substrate far from both sides stomata farther out (as shown in Figure 3) so that Cause the marginal portion to be tilted because of no pull of vacuum, production is impacted.Using this centre of the utility model After thin, four careful distribution forms, as illustrated in figures 4-5, when smaller substrate is placed on vacuum cup, select substrate is close Suction cup main body edge is placed, if the substrate edges now close to intermediate region in suction cup main body are lucky from both sides stomata farther out, It can so select the substrate edges being moved in nearest a line or a row stomata and be allowed to covering just;Due to sucker master The surrounding stomata of body is closeer, and this movement will not cause phenomenon of another lateral edges of substrate from stomata farther out.
Alternatively, the line space and column pitch of the stomata are by being in the form uniformly successively decreased to both sides in the middle of suction cup main body.
Alternatively, positioned at suction cup main body central region stomata line space or column pitch be 1-3 inches to the maximum, positioned at suction The minimum 5-8mm of line space or column pitch of the stomata of disc main body fringe region.Opening shape of the stomata in suction cup main body can It is to be the arbitrary shapes such as circle, ellipse, square, rectangle, such as circular.Opening surface of the stomata in suction cup main body Product can be arbitrary, such as 10mm2~500mm2
Alternatively, the card of the suction cup main body is integral card or formed by polylith disk assembled.
Embodiment 3:DMD structures single shaft may move light path direct write exposure machine
As shown in fig. 6, may move the exposure of light path direct write for the DMD structures single shaft containing vacuum cup of the present utility model Machine.
The DMD structures single shaft, which may move light path direct write exposure machine, includes supporting construction 7, DMD structures 8, DMD structure steppings Axle 9, a moving parts and vacuum cup 10;Moving parts include a scanning Y-axis 12 and a lifting Z axis 13;Vacuum is inhaled Disk 10 is located above moving parts.
The DMD structures 8 are arranged on DMD structure steppings axle 9, can be as the sliding block of DMD structure steppings axle 9 is along guide rail Motion.The scanning Y-axis 12 is located at the lower section of lifting Z axis 13;The vacuum cup 10 is connected with the lifting Z axis 13 of moving parts. Vacuum cup, occurs corresponding change in location with scanning Y-axis, the movement of drop Z axis 13.
Alternatively, the supporting construction is gantry structure.Framework for whole system is supported, marble gantry structure Design feature can be very good to keep the stability of platform motion, and with good isolation property.
Although the utility model is disclosed as above with preferred embodiment, it is not limited to the utility model, any Person skilled in the art, is not departing from spirit and scope of the present utility model, can all do various changes and modification, therefore this What the protection domain of utility model should be defined by claims is defined.

Claims (9)

1. a kind of DMD structures single shaft may move light path direct write exposure machine, it is characterised in that the DMD structures single shaft may move light Road direct write exposure machine includes supporting construction, DMD structures, DMD structure steppings axle, moving parts, a vacuum cup;Moving parts Including a scanning Y-axis and a lifting Z axis;Vacuum cup is located above moving parts;
The vacuum cup includes suction cup main body and vacuum generating device;A fixed number is distributed in suction cup main body in terms of rows and columns The stomata of amount, each each one relay of correspondence in promoting the circulation of qi hole, each row stomata also each one relay of correspondence;Each stomata with it is true Air vent switch is connected between empty generating means;Relay and the stomata column that air vent switch is expert at the stomata simultaneously Relay connection.
2. DMD structures single shaft according to claim 1 may move light path direct write exposure machine, it is characterised in that the stomata Line space and column pitch by the middle of suction cup main body to both sides in the form uniformly successively decreased.
3. DMD structures single shaft according to claim 1 may move light path direct write exposure machine, it is characterised in that the stomata Switch is located on the vacuum line that stomata is connected with vacuum generating device.
4. DMD structures single shaft according to claim 1 may move light path direct write exposure machine, it is characterised in that positioned at sucker The line space or column pitch of the stomata of main body central region be 3.1 inches to the maximum, positioned at the stomata of suction cup main body fringe region Line space or the minimum 5.3mm of column pitch.
5. DMD structures single shaft according to claim 1 may move light path direct write exposure machine, it is characterised in that the vacuum The lifting Z axis connection of sucker and moving parts.
6. DMD structures single shaft according to claim 1 may move light path direct write exposure machine, it is characterised in that the support Structure is gantry structure.
7. DMD structures single shaft according to claim 1 may move light path direct write exposure machine, it is characterised in that the stomata Aperture area in suction cup main body is 10mm2~500mm2
8. DMD structures single shaft according to claim 1 may move light path direct write exposure machine, it is characterised in that the DMD knots Structure is arranged on DMD structure stepping axles.
9. DMD structures single shaft according to claim 1 may move light path direct write exposure machine, it is characterised in that the scanning Y Axle position is below lifting Z axis.
CN201621246489.1U 2016-11-22 2016-11-22 A kind of DMD structures single shaft may move light path direct write exposure machine Active CN206331235U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621246489.1U CN206331235U (en) 2016-11-22 2016-11-22 A kind of DMD structures single shaft may move light path direct write exposure machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621246489.1U CN206331235U (en) 2016-11-22 2016-11-22 A kind of DMD structures single shaft may move light path direct write exposure machine

Publications (1)

Publication Number Publication Date
CN206331235U true CN206331235U (en) 2017-07-14

Family

ID=59287881

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201621246489.1U Active CN206331235U (en) 2016-11-22 2016-11-22 A kind of DMD structures single shaft may move light path direct write exposure machine

Country Status (1)

Country Link
CN (1) CN206331235U (en)

Similar Documents

Publication Publication Date Title
CN106325007B (en) A kind of more turntable driving axles may move polygon prism light path direct write equipment
CN104375388B (en) A kind of multi-work piece platform direct-write photoetching system
CN104647762A (en) Cutting processing type 3D (three-dimensional) industrial printing device and printing method
CN206302638U (en) Circuit board laser point plate special fixture
CN206249004U (en) A kind of removable light path direct write exposure machine of DMD structures XY multiaxises
CN108406120A (en) The method and apparatus of laser carving through-hole is carried out to spray painting carbon fiber skin
CN206249003U (en) A kind of removable light path direct write exposure machine of DMD structures XY single shafts
CN107650493B (en) Magnetic ink printing equipment
CN206331235U (en) A kind of DMD structures single shaft may move light path direct write exposure machine
JP4596780B2 (en) Method and associated apparatus for cutting a product from sheet material
CN109240048A (en) A kind of multistation work stage single exposure molding direct-write photoetching system
CN206331230U (en) A kind of DMD structures multiaxis may move light path direct write exposure machine
CN206331236U (en) A kind of many turntable driving axles may move polygon prism light path direct write equipment
CN207764553U (en) A kind of DMD structures single shaft fixed optical path direct write exposure machine
CN106444299B (en) A kind of DMD structures multiaxis may move light path direct write exposure machine
CN206331231U (en) A kind of single sweep drive shaft may move polygon prism light path direct write equipment
CN206331233U (en) A kind of XYZ single sweeps drive shaft may move polygon prism light path direct write equipment
CN206363074U (en) A kind of single sweep drive shaft fixes polygon prism light path direct write equipment
CN210803974U (en) Exposure machine
CN206331234U (en) A kind of DMD structures multiaxis fixed light path direct write exposure machine
CN206331232U (en) A kind of many turntable driving axles of XYZ may move polygon prism light path direct write equipment
CN206649281U (en) A kind of more turntable driving axles fix polygon prism light path direct write equipment
CN106444298B (en) A kind of DMD structures single shaft fixed light path direct write exposure machine
CN209303907U (en) Dual contact wafer saw
CN104950598B (en) Up-and-down distributed double-workpiece-stage device

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant