CN206249003U - A kind of removable light path direct write exposure machine of DMD structures XY single shafts - Google Patents
A kind of removable light path direct write exposure machine of DMD structures XY single shafts Download PDFInfo
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- CN206249003U CN206249003U CN201621246457.1U CN201621246457U CN206249003U CN 206249003 U CN206249003 U CN 206249003U CN 201621246457 U CN201621246457 U CN 201621246457U CN 206249003 U CN206249003 U CN 206249003U
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- stomata
- light path
- exposure machine
- direct write
- dmd
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Abstract
The utility model discloses a kind of removable light path direct write exposure machine of DMD structures XY single shafts, belong to direct write exposure technique field.The removable light path direct write exposure machine of DMD structures XY single shafts of the present utility model, is mainly improved vacuum cup structure, efficiently solves the hypodynamic problem of suction caused due to gas leakage during production platelet.Further, the gas cell distribution on sucker for it is middle dredge, it is four careful, effectively prevented the problem of board edge tilting, save stomata quantity, reduce cost.The removable light path direct write exposure machine of DMD structures XY single shafts of the present utility model, can produce 55 inches of super large plate.
Description
Technical field
The utility model is related to a kind of removable light path direct write exposure machine of DMD structures XY single shafts, belongs to direct write exposure technique
Field.
Background technology
PCB (printed circuit board (PCB)) is the supporter of electronic component, while being also the carrier of electronic component electrical connection.
Common PCB production equipments have traditional exposure machine, polygon prism structure laser direct-writing exposure machine, DMD structures laser direct-writing to expose
Machine etc..Directly on pcb board can be imaged image by laser direct-writing exposure machine, relative to traditional exposure machine, it is not necessary to use
The film, the image of formation is apparent.
As market is to the functional requirement more and more higher of pcb board, pcb board also becomes to become increasingly complex, and system compatibility is got over
It is high, it is sometimes necessary to the very big substrate of size, but, the super large plate for size more than 48 inches does not have also in the prior art
The technology and equipment that can be processed with high-quality.Traditional exposure machine can produce super large plate, but its machining accuracy is poor, does not reach
The requirement of high density, thin space；Polygon prism structure laser direct-writing exposure machine cannot realize the movement of light path, whole plate necessary at present
Secondary shaping, when processing is more than 48 inches of super large plates, the whole machine width degree of its equipment is up to more than 3m, and equipment size is excessively huge,
The door by general workshop is difficult to, it is very heavy；Therefore polygon prism structure LDI cannot produce the pcb board of more than 48 inches of width.
Conventional DMD structure laser direct-writing exposure machines, due to maximum only 24 inches of the size that its sucker can expose, therefore cannot also give birth to
Produce the super large plate more than 48 inches.
If DMD structure laser direct-writing exposure machines are prepared by increasing the method for the size that sucker can expose, by institute
The vacuum cup size for needing is that, than larger, sometimes more than 55 inches, there are the following problems for meeting：(1) when the pcb board for being exposed
When actual size is smaller, and sucker structure supports larger vacuum range, for the region for being not covered with plank, can produce Lou
Gas, absorption of the influence sucker to substrate；(2) tilted due to might have corner during substrate transport, if pull of vacuum is not enough,
Plank cannot be inhaled flat by sucker, influence whether to expose the quality of pcb board, and substrate can be caused to scrap.To solve this problem, at present
Method have three kinds：
Method one：Directly ignore the problem, but can be very high to the pcb board requirement of client factory, plank usually, can not come back and forth
Return and plank is bent manually, have a strong impact on production efficiency.
Method two：For various sizes of plank, different sucker backing plates are designed.The hole covering model of vacuum is inhaled on backing plate
Enclose, it is in the same size with plank.This method is simple, and operation is somewhat bothered, but when 55 inches of plank is produced, it is necessary to change
55 inches of backing plate, difficulty is multiplied, and changes the time of backing plate, can increase by 150%~200%, has a strong impact on production efficiency.
Method three：Do not covered for plank and vacuumize region, blocked with article, conventional is to cut the used film.
The material benefit of this method very economical, but it is pretty troublesome, different size of pcb board, it is necessary to the film is cut into different sizes, for a long time
Get off, the film after board producing region can be caused to cut is piled up, and the size that finding needs also is bothered.
As can be seen here, generally suitably given up using the replacing suitable sucker of size or searching shape size in the prior art
Abandon the film to block the mode of air leakage point, can all substantially reduce production efficiency.
To sum up, current DMD structure laser direct-writing exposure machines there are problems that super large plate, vacuum cup can not be produced
It is urgently to be resolved hurrily.
Utility model content
For problem above, the utility model provides vacuum cup and the DMD structure XY single shafts containing the vacuum cup
Removable light path direct write exposure machine, the problems such as can not produce super large plate, vacuum cup gas leakage to solve prior art.
First purpose of the present utility model be to provide a kind of vacuum cup, the vacuum cup, including suction cup main body and
Vacuum generating device；A number of stomata, each each correspondence one in promoting the circulation of qi hole are distributed in suction cup main body in terms of rows and columns
Relay, each row stomata also one relay of each correspondence；Air vent switch is connected between each stomata and vacuum generating device；
The relay and the relay of the stomata column that air vent switch is expert at the stomata simultaneously are connected.
In a kind of implementation method of the present utility model, the air vent switch is located at what stomata was connected with vacuum generating device
On vacuum line.
In a kind of implementation method of the present utility model, the air vent switch is electromagnetic switch.
In a kind of implementation method of the present utility model, the relay is connected with master control device.
In a kind of implementation method of the present utility model, the stomata in suction cup main body in it is middle dredge, four careful points
Cloth form.
In a kind of implementation method of the present utility model, the line space and column pitch of the stomata by the middle of suction cup main body to
Both sides are in the form uniformly successively decreased.
In a kind of implementation method of the present utility model, positioned between the line space or row of the stomata of suction cup main body central region
Away from being 1-3 inches to the maximum, positioned at the minimum 5-8mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of implementation method of the present utility model, positioned between the line space or row of the stomata of suction cup main body central region
Away from being 3.2 inches to the maximum, positioned at the minimum 5.4mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of implementation method of the present utility model, opening shape of the stomata in suction cup main body can be round
The arbitrary shapes such as shape, ellipse, square, rectangle, such as it is circular.
In a kind of implementation method of the present utility model, aperture area of the stomata in suction cup main body is 10mm2~
500mm2。
In a kind of implementation method of the present utility model, aperture area of the stomata in suction cup main body is 50mm2~
350mm2。
In a kind of implementation method of the present utility model, aperture area of the stomata in suction cup main body is 100mm2~
250mm2。
In a kind of implementation method of the present utility model, aperture area of the stomata in suction cup main body is 200mm2。
In a kind of implementation method of the present utility model, the Breadth Maximum of the suction cup main body is 55 inches.
In a kind of implementation method of the present utility model, the card of the suction cup main body is for an overall card or by polylith disk
Face combines.
In a kind of implementation method of the present utility model, the card of the suction cup main body by the big disk assembled of two pieces of grades and
Into.
In a kind of implementation method of the present utility model, the suction cup main body can be divided into chuck support structure and backing plate,
The integral structure that can also to be backing plate be integrated with chuck support structure.When suction cup main body is chuck support structure and backing plate
During separate structure, backing plate is arranged on chuck support structure surface, and pad surfaces are designed with equally distributed stomata, backing plate lower section
It is the vacuum air-channel being connected with stomata.
Second purpose of the present utility model is to provide the DMD structure XY single shafts containing vacuum cup of the present utility model can
Mobile light path direct write exposure machine.
In a kind of implementation method of the present utility model, the removable light path direct write exposure machine bag of the DMD structures XY single shafts
Include supporting construction, DMD structures, DMD structure steppings axle, moving parts, a vacuum cup；The moving parts include a step
Enter X-axis, a scanning Y-axis and a lifting Z axis；Vacuum cup is located at moving parts top.
In the utility model, XY single shafts refer to containing a moving parts, moving parts include stepping X-axis, scanning Y-axis and
Lifting Z axis；Removable refers to that DMD structures can be moved with the sliding block of DMD structure stepping axles along guide rail.
In a kind of implementation method of the present utility model, the structure of the vacuum cup is above mentioned any one knot
Structure.
In a kind of implementation method of the present utility model, the stepping X-axis is located at lifting Z axis lower section, and scanning Y-axis is located at step
Enter X-axis lower section.
In a kind of implementation method of the present utility model, the vacuum cup is connected with the lifting Z axis of moving parts.
In a kind of implementation method of the present utility model, the supporting construction is gantry structure.
In a kind of implementation method of the present utility model, the DMD structures are arranged on DMD structure stepping axles, can be with
The sliding block of DMD structure stepping axles is moved along guide rail.
Advantage of the present utility model and effect：
(1) the removable light path direct write exposure machine of DMD structures XY single shafts of the present utility model, mainly enters to vacuum cup structure
Improvement is gone.Vacuum cup of the present utility model is the vacuum cup of automation, and chuck surface is distributed with a series of stomata, when
When thering is pcb board to cover above stomata, stomata closed-circuit working, when there is no pcb board to cover above stomata, stomata closure, effectively solution
Determined production platelet when, the hypodynamic problem of suction caused due to gas leakage.Further, the gas cell distribution on sucker is centre
Dredge, four carefully, both cause different size of pcb board when placing, there is stomata marginal portion all the time, effectively prevents board edge and sticks up
The problem for rising, can not need the place of too many stomata to save stomata quantity in centre again, reduce cost, improve efficiency.
(2) the removable light path direct write exposure machine of DMD structures XY single shafts of the present utility model, exposure machine sucker width can set
Be set to 55 inches, 55 inches of super large plate can be produced, at the same can guarantee that again high accuracy, high density, fine rule away from etc. demand, exposed lines
Up to less than 30 microns, ill-exposed rate drops to less than 0.1% to spacing.
(3) combined using top DMD structure stepping axles and lower section stepping X-axis, DMD structures and vacuum cup can be transversely square
To moving freely, horizontal exposure range is extended to greatest extent, increase the flexible property of exposure；Single moving parts design, solution
Determine and done more physical exercises component operationally, due to the substrate position that the motion of moving parts cannot realize absolute synchronization and may bring
There is the problem that the influence exposure quality such as distortion, inclination even results in product rejection.
Brief description of the drawings
Fig. 1 is vacuum cup structural representation of the present utility model；Wherein, 1 suction cup main body, 3 stomatas, 4 relays, 6 total
Control device；
Fig. 2 is the vacuum generating device and stomata connection diagram of vacuum cup of the present utility model；Wherein, 2 vacuum hair
Generating apparatus, 5 air vent switch；
Fig. 3 is the structural representation after traditional vacuum cup places substrate；Wherein, 14 substrate；
Fig. 4 is a kind of structural representation after vacuum cup of the present utility model places substrate；
Fig. 5 is a kind of structural representation after the substrate position on adjustment vacuum cup of the present utility model；
Fig. 6 is the removable light path direct write exposure machine of the DMD structure XY single shafts containing vacuum cup of the present utility model；Its
In, 7 supporting constructions, 8DMD structures, 9DMD structure steppings axle, 10 vacuum cups；11 stepping X-axis, 12 scanning Y-axis, 13 lifting Z
Axle.
Specific embodiment
DMD structures：A whole set of complete light path system with DMD as core devices, including LASER Light Source, DMD, optical frames
The parts such as piece are constituted.
PCB：Printed Circuit Board, printed circuit board (PCB) is important electronic unit, is electronic component
Supporter, is the carrier of electronic component electrical connection.
DMD structure stepping axles：Linear induction motor system, light path is arranged on the motion parts of motor, for doing step motion.
Stepping X-axis：Also X-axis motion platform or stepping axle are, can be used to do step motion or continuous scanning motion.
Scanning Y-axis：Also scan axis or Y-axis are, for doing the continuous scanning motion of constant speed.
Lifting Z axis：Also lifting shaft or Z axis are, for controlling the lifting of sucker.
Sucker：For adsorbing, the objective table of fixed pcb board.
Here is that the utility model is specifically described.
Embodiment 1：Vacuum cup
Vacuum cup structure of the present utility model is as shown in Figure 1-2.
The utility model vacuum cup, including suction cup main body 1 and vacuum generating device 2；With row and column in suction cup main body 1
The a number of stomata 3 of formal distribution, each each one relay 4 of correspondence in promoting the circulation of qi hole 3, each row stomata also each correspondence one after
Electrical equipment；Air vent switch 5 is connected between each stomata 3 and vacuum generating device 2；Air vent switch 5 is expert at the stomata simultaneously
Relay and the stomata column relay connect.
Each relay is connected with master control device 6.Air vent switch is located at the vacuum tube that stomata is connected with vacuum generating device
Lu Shang.The air vent switch can be electromagnetic switch.The stomata, can be uniformly distributed in suction cup main body.
Using such structure and connected mode, when vacuum cup works, a certain size substrate is placed on vacuum suction
On disk, stomata row or stomata for there is substrate to cover are arranged, the relay path corresponding to the row or column；For certain stomata
Speech, only when it is expert at and column corresponding to relay all for path makes, the air vent switch of the stomata is just opened, and then
Vacuum generating device and stomata UNICOM, stomata work.In the case of this, the air vent switch not covered by substrate is closing
State, so as to solve leakage problem existing during larger utilization vacuum cup production PCB.
Embodiment 2：Vacuum cup
The vacuum cup of the present embodiment, is made that on the basis of the vacuum cup as shown in Figure 1-2 of embodiment 1 and changes
Enter.
The stomata 3 is in suction cup main body 1 in middle thin, four careful distribution forms.
Traditional vacuum cup, stomata is usually to use equally distributed form, when less pcb board is produced, may
After substrate 14 is placed in suction cup main body, the lucky position in certain edge where substrate far from both sides stomata farther out (as shown in Figure 3) so that
Causing the marginal portion can be tilted because of no pull of vacuum, and production is impacted.Using this centre of the utility model
After thin, four careful distribution forms, as illustrated in figures 4-5, when smaller substrate is placed on vacuum cup, be close to for substrate by selection
Suction cup main body edge is placed, if now in the suction cup main body substrate edges of zone line it is lucky from both sides stomata farther out,
Can so select to be moved to the substrate edges on nearest a line or a row stomata and be allowed to covering just；Due to sucker master
The surrounding stomata of body is closeer, and this movement will not cause phenomenon of another lateral edges of substrate from stomata farther out.
Alternatively, the line space and column pitch of the stomata are by being in the form uniformly successively decreased to both sides in the middle of suction cup main body.
Alternatively, positioned at suction cup main body central region stomata line space or column pitch be 1-3 inches to the maximum, positioned at suction
The minimum 5-8mm of line space or column pitch of the stomata of disc main body fringe region.Opening shape of the stomata in suction cup main body can
It is to be the arbitrary shapes such as circle, ellipse, square, rectangle, such as circular.Opening surface of the stomata in suction cup main body
Product can be arbitrary, such as 10mm2~500mm2。
Alternatively, the card of the suction cup main body is an overall card or is formed by polylith disk assembled.
Embodiment 3：The removable light path direct write exposure machine of DMD structure XY single shafts
As shown in fig. 6, being the removable light path direct write exposure of the DMD structure XY single shafts containing vacuum cup of the present utility model
Machine.
The removable light path direct write exposure machine of the DMD structures XY single shafts includes supporting construction 7, DMD structures 8, DMD structures step
Enter axle 9, moving parts, a vacuum cup 10；The moving parts include 11, scanning Y-axis 12 and of a stepping X-axis
Individual lifting Z axis 13；Vacuum cup 10 is located at moving parts top.
The DMD structures 8 are arranged on DMD structure steppings axle 9, can be as the sliding block of DMD structure steppings axle 9 is along guide rail
Motion.The stepping X-axis 11 is located at the lower section of lifting Z axis 13, and scanning Y-axis 12 is located at the lower section of stepping X-axis 11；The vacuum cup 10
It is connected with the lifting Z axis 13 of moving parts.Vacuum cup, with stepping X-axis, scans Y-axis, drops the movement of Z axis 13 and phase occurs
The change in location answered.
Alternatively, the card of the suction cup main body of the vacuum cup is an overall card.
Alternatively, the supporting construction is gantry structure.For the framework support of whole system, marble gantry structure
Design feature can be very good to keep the stability of platform motion, and with good isolation property.
Although the utility model is disclosed as above with preferred embodiment, it is not limited to the utility model, any
Person skilled in the art, is not departing from spirit and scope of the present utility model, can all do various changes and modification, therefore this
What the protection domain of utility model should be defined by claims is defined.
Claims (8)
1. a kind of DMD structures XY single shafts may move light path direct write exposure machine, it is characterised in that the DMD structures XY single shafts are removable
Dynamic light path direct write exposure machine includes supporting construction, DMD structures, DMD structure steppings axle, moving parts, a vacuum cup；It is described
Moving parts include a stepping X-axis, a scanning Y-axis and a lifting Z axis；Vacuum cup is located at moving parts top；
The vacuum cup includes suction cup main body and vacuum generating device；A fixed number is distributed in suction cup main body in terms of rows and columns
The stomata of amount, each each one relay of correspondence in promoting the circulation of qi hole, each row stomata also one relay of each correspondence；Each stomata with it is true
Air vent switch is connected between empty generating means；Relay and the stomata column that air vent switch is expert at the stomata simultaneously
Relay connection；
The stomata is in suction cup main body in middle thin, four careful distribution forms.
2. DMD structures XY single shafts according to claim 1 may move light path direct write exposure machine, it is characterised in that the gas
Hole switch is on the vacuum line that stomata is connected with vacuum generating device.
3. DMD structures XY single shafts according to claim 1 may move light path direct write exposure machine, it is characterised in that the suction
The card of disc main body is an overall card or is formed by polylith disk assembled.
4. DMD structures XY single shafts according to claim 1 may move light path direct write exposure machine, it is characterised in that positioned at suction
The line space or column pitch of the stomata of disc main body central region are 3.2 inches to the maximum.
5. DMD structures XY single shafts according to claim 1 may move light path direct write exposure machine, it is characterised in that positioned at suction
The minimum 5.4mm of line space or column pitch of the stomata of disc main body fringe region.
6. DMD structures XY single shafts according to claim 1 may move light path direct write exposure machine, it is characterised in that described true
Suction disk is connected with the lifting Z axis of moving parts.
7. DMD structures XY single shafts according to claim 1 may move light path direct write exposure machine, it is characterised in that the step
Enter X-axis and be located at lifting Z axis lower section, scanning Y-axis is located at stepping X-axis lower section.
8. DMD structures XY single shafts according to claim 1 may move light path direct write exposure machine, it is characterised in that the branch
Support structure is gantry structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621246457.1U CN206249003U (en) | 2016-11-22 | 2016-11-22 | A kind of removable light path direct write exposure machine of DMD structures XY single shafts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621246457.1U CN206249003U (en) | 2016-11-22 | 2016-11-22 | A kind of removable light path direct write exposure machine of DMD structures XY single shafts |
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| Publication Number | Publication Date |
|---|---|
| CN206249003U true CN206249003U (en) | 2017-06-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621246457.1U Active CN206249003U (en) | 2016-11-22 | 2016-11-22 | A kind of removable light path direct write exposure machine of DMD structures XY single shafts |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112344882A (en) * | 2020-10-29 | 2021-02-09 | 江苏迪盛智能科技有限公司 | Error measurement system and method of silk screen exposure machine |
-
2016
- 2016-11-22 CN CN201621246457.1U patent/CN206249003U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112344882A (en) * | 2020-10-29 | 2021-02-09 | 江苏迪盛智能科技有限公司 | Error measurement system and method of silk screen exposure machine |
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