CN1947240A - 制造芯片和相关支撑的方法 - Google Patents
制造芯片和相关支撑的方法 Download PDFInfo
- Publication number
- CN1947240A CN1947240A CNA2005800134753A CN200580013475A CN1947240A CN 1947240 A CN1947240 A CN 1947240A CN A2005800134753 A CNA2005800134753 A CN A2005800134753A CN 200580013475 A CN200580013475 A CN 200580013475A CN 1947240 A CN1947240 A CN 1947240A
- Authority
- CN
- China
- Prior art keywords
- support
- chip
- layer
- brick bat
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 76
- 239000000758 substrate Substances 0.000 claims abstract description 67
- 239000000463 material Substances 0.000 claims abstract description 38
- 238000005520 cutting process Methods 0.000 claims abstract description 22
- 239000004065 semiconductor Substances 0.000 claims abstract description 10
- 239000011449 brick Substances 0.000 claims description 36
- 230000009467 reduction Effects 0.000 claims description 34
- 238000012546 transfer Methods 0.000 claims description 27
- 239000000853 adhesive Substances 0.000 claims description 23
- 230000001070 adhesive effect Effects 0.000 claims description 22
- 238000005530 etching Methods 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 239000011521 glass Substances 0.000 claims description 6
- 229920000642 polymer Polymers 0.000 claims description 6
- 229920003023 plastic Polymers 0.000 claims description 5
- 239000004033 plastic Substances 0.000 claims description 5
- 230000002441 reversible effect Effects 0.000 claims description 5
- 241000288673 Chiroptera Species 0.000 claims description 4
- 238000003486 chemical etching Methods 0.000 claims description 4
- 239000007767 bonding agent Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 238000012797 qualification Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- 230000003313 weakening effect Effects 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000003628 erosive effect Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 241000894007 species Species 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0404437 | 2004-04-27 | ||
FR0404437A FR2869455B1 (fr) | 2004-04-27 | 2004-04-27 | Procede de fabrication de puces et support associe |
Publications (1)
Publication Number | Publication Date |
---|---|
CN1947240A true CN1947240A (zh) | 2007-04-11 |
Family
ID=34945110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2005800134753A Pending CN1947240A (zh) | 2004-04-27 | 2005-04-25 | 制造芯片和相关支撑的方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7544586B2 (fr) |
EP (1) | EP1756864B9 (fr) |
JP (1) | JP4782107B2 (fr) |
KR (1) | KR100836289B1 (fr) |
CN (1) | CN1947240A (fr) |
FR (1) | FR2869455B1 (fr) |
WO (1) | WO2005106948A1 (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102054854A (zh) * | 2009-10-30 | 2011-05-11 | 乐金显示有限公司 | 有机电致发光显示设备及其制造方法 |
CN103137140A (zh) * | 2011-11-24 | 2013-06-05 | 新科实业有限公司 | 光源芯片、热促进磁头及其制造方法 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7808082B2 (en) * | 2006-11-14 | 2010-10-05 | International Business Machines Corporation | Structure and method for dual surface orientations for CMOS transistors |
US7858493B2 (en) * | 2007-02-23 | 2010-12-28 | Finisar Corporation | Cleaving edge-emitting lasers from a wafer cell |
DE102008038342B4 (de) * | 2008-08-19 | 2015-08-06 | Infineon Technologies Austria Ag | Halbleiterbauelement mit Randbereich, in dem eine Zone aus porösem Material ausgebildet ist und Verfahren zu dessen Herstellung und Halbleiterscheibe |
JP5127669B2 (ja) * | 2008-10-31 | 2013-01-23 | パナソニック株式会社 | 半導体ウェハ |
FR3058830B1 (fr) * | 2016-11-14 | 2018-11-30 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de realisation collective d’une pluralite de puces optoelectroniques |
IL254078A0 (en) | 2017-08-21 | 2017-09-28 | Advanced Vision Tech A V T Ltd | Method and system for creating images for testing |
FR3087936B1 (fr) * | 2018-10-24 | 2022-07-15 | Aledia | Dispositif electronique |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5029280A (fr) * | 1973-07-20 | 1975-03-25 | ||
JPS5848172A (ja) | 1981-09-18 | 1983-03-22 | Fujitsu Ltd | 多言語間翻訳装置 |
JPS59172740A (ja) * | 1983-03-22 | 1984-09-29 | Mitsubishi Electric Corp | 半導体ウエ−ハの分割方法 |
JPS60108745A (ja) | 1983-11-18 | 1985-06-14 | Ngk Insulators Ltd | 電気化学的装置 |
JPH06105754B2 (ja) * | 1985-05-21 | 1994-12-21 | 株式会社フジクラ | 半導体チツプの製造方法 |
US5393706A (en) * | 1993-01-07 | 1995-02-28 | Texas Instruments Incorporated | Integrated partial sawing process |
JPH08107193A (ja) * | 1994-09-30 | 1996-04-23 | Kyushu Komatsu Denshi Kk | Soi基板の製造方法 |
US5904548A (en) * | 1996-11-21 | 1999-05-18 | Texas Instruments Incorporated | Trench scribe line for decreased chip spacing |
JP2000298818A (ja) * | 1999-04-12 | 2000-10-24 | Tdk Corp | 多面付素子の加工方法およびスライダの加工方法 |
JP3532788B2 (ja) * | 1999-04-13 | 2004-05-31 | 唯知 須賀 | 半導体装置及びその製造方法 |
JP4320892B2 (ja) * | 2000-01-20 | 2009-08-26 | 株式会社デンソー | 接合基板の切断方法 |
JP2001345289A (ja) | 2000-05-31 | 2001-12-14 | Nec Corp | 半導体装置の製造方法 |
US6933212B1 (en) * | 2004-01-13 | 2005-08-23 | National Semiconductor Corporation | Apparatus and method for dicing semiconductor wafers |
US8426293B2 (en) * | 2004-07-09 | 2013-04-23 | Semiconductor Energy Laboratory Co., Ltd. | IC chip and its manufacturing method |
US7452739B2 (en) * | 2006-03-09 | 2008-11-18 | Semi-Photonics Co., Ltd. | Method of separating semiconductor dies |
-
2004
- 2004-04-27 FR FR0404437A patent/FR2869455B1/fr not_active Expired - Fee Related
-
2005
- 2005-04-25 KR KR1020067022096A patent/KR100836289B1/ko active IP Right Grant
- 2005-04-25 JP JP2007510073A patent/JP4782107B2/ja active Active
- 2005-04-25 EP EP05767616A patent/EP1756864B9/fr active Active
- 2005-04-25 CN CNA2005800134753A patent/CN1947240A/zh active Pending
- 2005-04-25 WO PCT/FR2005/001021 patent/WO2005106948A1/fr active Search and Examination
- 2005-05-23 US US11/136,252 patent/US7544586B2/en active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102054854A (zh) * | 2009-10-30 | 2011-05-11 | 乐金显示有限公司 | 有机电致发光显示设备及其制造方法 |
US8858286B2 (en) | 2009-10-30 | 2014-10-14 | Lg Display Co., Ltd. | Organic electroluminescent display device and method of fabricating the same |
CN102054854B (zh) * | 2009-10-30 | 2014-11-26 | 乐金显示有限公司 | 有机电致发光显示设备及其制造方法 |
CN103137140A (zh) * | 2011-11-24 | 2013-06-05 | 新科实业有限公司 | 光源芯片、热促进磁头及其制造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2007535158A (ja) | 2007-11-29 |
US20050236700A1 (en) | 2005-10-27 |
EP1756864B9 (fr) | 2013-02-13 |
WO2005106948A1 (fr) | 2005-11-10 |
KR20070004056A (ko) | 2007-01-05 |
US7544586B2 (en) | 2009-06-09 |
EP1756864A1 (fr) | 2007-02-28 |
JP4782107B2 (ja) | 2011-09-28 |
FR2869455A1 (fr) | 2005-10-28 |
FR2869455B1 (fr) | 2006-07-14 |
EP1756864B1 (fr) | 2012-08-01 |
KR100836289B1 (ko) | 2008-06-09 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |