CN1934422A - 光电式编码器 - Google Patents

光电式编码器 Download PDF

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CN1934422A
CN1934422A CNA2005800088632A CN200580008863A CN1934422A CN 1934422 A CN1934422 A CN 1934422A CN A2005800088632 A CNA2005800088632 A CN A2005800088632A CN 200580008863 A CN200580008863 A CN 200580008863A CN 1934422 A CN1934422 A CN 1934422A
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lens
receiving element
aperture diaphragm
light receiving
optical
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CN100451559C (zh
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下村俊隆
二本森辰悟
水谷都
埃里克·H·阿尔滕多夫
约瑟夫·D·托拜厄森
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Mitutoyo Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/38Forming the light into pulses by diffraction gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715Scale reading or illumination devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
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Abstract

一种光电式编码器,具有在主分度标尺与光接收元件之间插入第1透镜和在其焦点位置配置的孔径光阑的远心光学系统,在上述孔径光阑与光接收元件之间,至少插入第2透镜,使其焦点位于孔径光阑,成为双侧远心光学系统,并且可以改善信号检测的效率,扩大组装的容许范围。

Description

光电式编码器
技术领域
本发明涉及一种光电式编码器,特别是涉及具有在主分度标尺与光接收元件之间插入透镜和孔径光阑的远心光学系统的光电式编码器的改进。
背景技术
如图1所示,如特开2004-264295号公报所述,在主分度标尺20与构成感光部30的例如光接收元件阵列34之间,插入由透镜42及作为远心光学光阑的孔径光阑44构成的透镜光学系统(远心光学系统)40,如图2所示,可以考虑如下的光电式编码器,其通过调整透镜42与主分度标尺20的刻度21及光接收元件阵列34上的光接收元件35之间的距离a、b而能够进行倍率设定。在图1中,10是光源,f是透镜42的焦距。
在使用该远心光学系统40的光电式编码器中,主分度标尺20上的像通过透镜光学系统(42、44)投影到光接收元件阵列34上。在这里,由于在透镜42的焦点位置配置孔径光阑44,即使主分度标尺20与透镜42之间的距离(间隔)变动,如果不变动透镜42、孔径光阑44和光接收元件阵列34的位置关系,可以抑制光接收元件阵列34上成像的像的倍率变动。
但是,即使是使用该远光光学系统40的光电式编码器,由于光接收元件35的间隔方向不对准,如图3所示,若透镜42与主分度标尺20的距离a和透镜42与光接收元件35之间的距离b的关系变化,则在感光面31上形成的像的倍率急剧地变化,如图4所示,导致信号强度急剧降低。
另外,由于透镜的场曲(失真)或彗差,周围部的信号检测效率降低。
而且,在将光学系统小型化时,必须使用焦距小的(在通用透镜的情况指直径小的)透镜,但是要减小像差的情况下,必须使用(1)非球面透镜或者(2)多枚透镜的组合(调整),导致成本增加及调整工时增加等问题。
发明内容
本发明的课题是解决上述现有的问题,改善信号检测效率,并且扩大组装的容许范围,降低调整工时。
本发明的光电式编码器,,具有在主分度标尺与光接收元件之间插入第1透镜和在其焦点位置设置的孔径光阑的远心光学系统,其中,在上述孔径光阑与光接收元件之间,至少插入第2透镜,使其焦点位于孔径光阑,通过成为双远心光学系统。
另外,使上述第2透镜为与上述第1透镜相同但朝向相反的透镜,通过用第2透镜对第1透镜发生的像差进行反向补正,可大致完全消除像差。
另外,上述第1透镜或者第2透镜的至少任意一个可以是失真像差大但价格低的球形透镜或者是光线在透镜介质内抛物线状地折射的折射率分布型的GRIN透镜(也称自对焦透镜)或者是鼓形透镜,构成小型、价格低的透镜。
另外,在上述第2透镜与感光元件之间,进一步,插入一个以上含有在第2孔径光阑及其两侧排列设置的第3、第4透镜的第2双远心光学系统。
另外,上述孔径光阑是在与测定轴垂直的方向上长的狭缝,增加位于光接收元件的光量,降低光源的功率,提高其可靠性。
根据本发明,因为可以用第2透镜对第1透镜发生的像差进行反向补正,所以可以降低像差,改善信号检测的效率。
另外,即使第2透镜与光接收元件的间隔变化,由于将光学倍率保持一定,故可以扩大间隔方向的组装容许范围,降低调整工时。
附图说明
图1是表示使用远心光学系统的光电式编码器的主要部分构成的立体图;
图2是使用远心光学系统的光电式编码器的主要部分构成的平面图;
图3是为了说明使用远心光学系统的光电式编码器由于光接收元件的间隔方向不对准而产生倍率变动的光路图;
图4是表示使用远心光学系统的光电式编码器的信号强度变动的例子的线图;
图5是表示本发明的第一实施方式的主要部分构成的立体图;
图6是本发明的第一实施方式的主要部分构成的光路图;
图7是表示本发明的第二实施方式的主要部分构成的光路图;
图8是表示本发明的第三实施方式的主要部分构成的光路图;
图9是表示本发明的第四实施方式的主要部分构成的光路图;
图10是表示本发明的第五实施方式的主要部分构成的光路图;
图11是表示本发明的第六实施方式的主要部分构成的光路图;
图12是表示本发明的第七实施方式的主要部分构成的光路图;
图13是表示本发明的第八实施方式的主要部分构成的立体图;
图14是表示本发明的第九实施方式的主要部分构成的光路图;
图15是表示本发明的第九实施方式的主要部分构成的作用的线图;
图16是表示本发明的第十实施方式的主要部分构成的光路图。
具体实施方式
以下参照下图对本发明的实施方式进行详细说明。
本发明的第一实施方式,在具有图1所示的远心光学系统40的光电式编码器中,如图5所示,在孔径光阑44的相反侧,朝向相反地插入与第1透镜42相同的透镜52,使其焦点位于孔径光阑44,形成双侧远心光学系统的50。在图中,f是透镜42、52的焦距。
在本实施方式中,因为第1透镜42与第2透镜52是相同的,故可以用第2透镜52对第1透镜42发生的像差进行反向补正,可以大体上完全消除像差,大大改善信号检测的效率。
另外,由于使第2透镜52的焦点位于孔径光阑44而进行插入,故如图6所示,从第2透镜射出的光成为平行光,即使第2透镜52与感光面31的间隔变化,由于光学倍率保持一定(1倍),故可以扩大间隔方向的组装容许范围,降低调整工时。
另外,作为第1、第2透镜42、52,不仅仅如图6所示朝向外侧地使用平凸透镜,也可以如图7所示的第二实施方式,朝向内侧地使用平凸透镜,或者如图8所示的第三实施方式,使用双凸透镜,或者如图9所示的第四实施方式,使用球形透镜以谋求小型化及低成本化,或者如图10所示的第五实施方式,使用GRIN透镜以谋求小型化及低成本化,或者如图11所示的第六实施方式,使用鼓形透镜以谋求小型化及低成本化。
另外,如图12所示的第七实施方式,也可以使第2透镜54与第1透镜42不同,将输入与输出的光学倍率改变为1倍以外的倍率。在图中,F是第2透镜54的焦距。
此时,像差恐怕不能被去除,但是扩大了间隔方向的组装的容许范围。
另外,孔径光阑的形状不是圆形,可以如图13所示的第八实施方式,形成为在与测定轴垂直的方向伸长的狭缝46,增加到达感光面31的光量,降低光源10的功率,也可以提高其可靠性。另外,孔径光阑的形状也可以是椭圆或者长孔形状。
并且,如图14所示的第九实施方式,在测定轴方向上增加双远心光学系统50的孔径光阑的数量,如图15所示,通过像的叠加来扩大标尺上的视野(FOB),通过平均化效果,对于污垢或弯曲进行鲁棒设计(ロボスト),而且增加到达感光面31的光量,降低光源10的功率,也可以提高其可靠性。
另外,增加的透镜的数量并不局限于一个,如图16所示的第十实施方式,可以再增加1组由透镜62、64、孔径光阑66构成的双远心光学系统60,在此,透镜62、64与透镜42、52可以相同也可以不同。另外,增加的双远心光学系统的数量也并不局限于1组,也可以增加2组以上。
产业利用的可利用性
在本发明中刻度光栅与光接收元件是分开的,具有两者合为一体的光接收元件阵列也能适用。而且,不仅是透射型编码器,反射型编码器也能适用。

Claims (7)

1.一种光电式编码器,具有在主分度标尺与光接收元件之间插入第1透镜和在所述第1透镜焦点位置配置的孔径光阑的远心光学系统,其特征在于,在上述孔径光阑与光接收元件之间,至少插入第2透镜,使其焦点位于孔径光阑,成为双侧远心光学系统。
2.如权利要求1所述的光电式编码器,其特征在于,上述第2透镜是与第1透镜相同但朝向相反的透镜。
3.如权利要求1或2所述的光电式编码器,其特征在于,上述第1透镜或者第2透镜的至少任意一个是球形透镜。
4.如权利要求1或2所述的光电式编码器,其特征在于,上述第1透镜或者第2透镜的至少任意一个是GRIN透镜。
5.如权利要求1或2所述的光电式编码器,其特征在于,上述第1透镜或者第2透镜的至少任意一个是圆筒透镜。
6.一种如权利要求1~5的任意一项所述的光电编码器,其特征在于,在所述第2透镜与光接收元件之间还插入一个以上含有第2孔径光阑及在其两侧配置的第3、第4透镜的第2双侧远心光学系统。
7.如权利要求1~6的任意一项所述的光电式编码器,其特征在于,上述孔径光阑在测定轴垂直的方向是长的狭缝。
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