CN1717171A - 图像产生方法和用于检查基板的照明装置 - Google Patents
图像产生方法和用于检查基板的照明装置 Download PDFInfo
- Publication number
- CN1717171A CN1717171A CNA2005100809750A CN200510080975A CN1717171A CN 1717171 A CN1717171 A CN 1717171A CN A2005100809750 A CNA2005100809750 A CN A2005100809750A CN 200510080975 A CN200510080975 A CN 200510080975A CN 1717171 A CN1717171 A CN 1717171A
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- China
- Prior art keywords
- light
- substrate
- target area
- inspection
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
- G01R31/309—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Engineering & Computer Science (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- General Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004-192855 | 2004-06-30 | ||
JP2004192855 | 2004-06-30 | ||
JP2004192855 | 2004-06-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1717171A true CN1717171A (zh) | 2006-01-04 |
CN100433962C CN100433962C (zh) | 2008-11-12 |
Family
ID=35044627
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100809750A Expired - Fee Related CN100433962C (zh) | 2004-06-30 | 2005-06-29 | 图像产生方法和用于检查基板的装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7394084B2 (zh) |
EP (1) | EP1612569A3 (zh) |
CN (1) | CN100433962C (zh) |
TW (1) | TWI263791B (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103534580A (zh) * | 2011-04-18 | 2014-01-22 | 伊斯梅卡半导体控股公司 | 一种检查装置 |
CN103728306A (zh) * | 2014-01-15 | 2014-04-16 | 唐山英莱科技有限公司 | 一种基于双路会聚可调光路的无坡口对接焊缝检测系统 |
CN105277574A (zh) * | 2014-07-22 | 2016-01-27 | 牧德科技股份有限公司 | 应用重复曝光的多曝光影像混合的检测方法 |
CN106556603A (zh) * | 2015-09-30 | 2017-04-05 | 佳能株式会社 | 检查装置和物品制造方法 |
CN108007348A (zh) * | 2017-12-14 | 2018-05-08 | 苏州西博三维科技有限公司 | 非接触式测量设备 |
CN108827971A (zh) * | 2018-04-26 | 2018-11-16 | 深圳市创科自动化控制技术有限公司 | 一种表面缺陷检测方法 |
CN111133851A (zh) * | 2017-09-28 | 2020-05-08 | 环球仪器公司 | 改进的引脚前端照明装置、系统和方法 |
CN113884508A (zh) * | 2020-07-02 | 2022-01-04 | 由田新技股份有限公司 | 用于基板的线路量测系统 |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7925074B2 (en) * | 2006-10-16 | 2011-04-12 | Teradyne, Inc. | Adaptive background propagation method and device therefor |
CN100526864C (zh) * | 2007-10-26 | 2009-08-12 | 华南理工大学 | 一种用于电路板自动光学检测设备的光源装置 |
US20110175997A1 (en) * | 2008-01-23 | 2011-07-21 | Cyberoptics Corporation | High speed optical inspection system with multiple illumination imagery |
CN101520309A (zh) * | 2008-02-28 | 2009-09-02 | 鸿富锦精密工业(深圳)有限公司 | 成像装置 |
US8077307B2 (en) | 2008-04-09 | 2011-12-13 | Orbotech Ltd. | Illumination system for optical inspection |
JP4719284B2 (ja) * | 2008-10-10 | 2011-07-06 | トヨタ自動車株式会社 | 表面検査装置 |
US8894259B2 (en) * | 2009-09-22 | 2014-11-25 | Cyberoptics Corporation | Dark field illuminator with large working area |
US8872912B2 (en) * | 2009-09-22 | 2014-10-28 | Cyberoptics Corporation | High speed distributed optical sensor inspection system |
US8681211B2 (en) * | 2009-09-22 | 2014-03-25 | Cyberoptics Corporation | High speed optical inspection system with adaptive focusing |
US20120133920A1 (en) * | 2009-09-22 | 2012-05-31 | Skunes Timothy A | High speed, high resolution, three dimensional printed circuit board inspection system |
KR101175595B1 (ko) * | 2011-09-26 | 2012-08-24 | 주식회사 미르기술 | 비접촉식 부품검사장치 및 부품검사방법 |
CN103115589B (zh) * | 2013-02-01 | 2017-08-25 | 厦门思泰克智能科技股份有限公司 | 一种红绿蓝三色led光测量装置 |
ES2890649T3 (es) | 2013-05-23 | 2022-01-21 | Rina Consulting Centro Sviluppo Mat S P A | Método para la inspección de superficie de productos largos y aparato adecuado para llevar a cabo dicho método |
WO2015104799A1 (ja) * | 2014-01-08 | 2015-07-16 | ヤマハ発動機株式会社 | 外観検査装置および外観検査方法 |
MX364011B (es) * | 2014-05-05 | 2019-04-11 | Arconic Inc | Aparato y metodo de medicion de soldadura. |
JP6355527B2 (ja) * | 2014-10-31 | 2018-07-11 | 富士フイルム株式会社 | 内視鏡システム及びその作動方法 |
US9838612B2 (en) | 2015-07-13 | 2017-12-05 | Test Research, Inc. | Inspecting device and method for inspecting inspection target |
US9818041B2 (en) | 2015-08-03 | 2017-11-14 | Hy-Ko Products Company | High security key scanning system |
JP2017067632A (ja) * | 2015-09-30 | 2017-04-06 | キヤノン株式会社 | 検査装置および物品製造方法 |
US10600174B2 (en) | 2015-12-29 | 2020-03-24 | Test Research, Inc. | Optical inspection apparatus |
KR101739696B1 (ko) * | 2016-07-13 | 2017-05-25 | 서장일 | 재질인식 조명 시스템 및 이를 이용한 재질인식 방법 |
US10268860B2 (en) | 2016-12-22 | 2019-04-23 | Datalogic ADC, Inc. | White illumination for barcode scanners with improved power efficiency and cost |
JP6857079B2 (ja) * | 2017-05-09 | 2021-04-14 | 株式会社キーエンス | 画像検査装置 |
JP6969439B2 (ja) | 2018-02-23 | 2021-11-24 | オムロン株式会社 | 外観検査装置、及び外観検査装置の照明条件設定方法 |
JP7187782B2 (ja) * | 2018-03-08 | 2022-12-13 | オムロン株式会社 | 画像検査装置 |
US11282187B2 (en) * | 2019-08-19 | 2022-03-22 | Ricoh Company, Ltd. | Inspection system, inspection apparatus, and method using multiple angle illumination |
US11026313B1 (en) * | 2020-08-17 | 2021-06-01 | Deediim Sensor Inc. | Illumination system |
TWI795988B (zh) * | 2020-10-23 | 2023-03-11 | 兆晶生物科技股份有限公司(新加坡) | 成像裝置及手持式成像裝置 |
TWI765384B (zh) * | 2020-10-23 | 2022-05-21 | 兆晶生物科技股份有限公司(新加坡) | 成像裝置及手持式成像裝置 |
CN115793350B (zh) * | 2022-11-11 | 2023-10-03 | 四维视觉技术(广东)有限公司 | 一种可分区发光的环形光源及视觉检测装置 |
Family Cites Families (26)
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JPS62127617A (ja) * | 1985-11-29 | 1987-06-09 | Fujitsu Ltd | 線状物体検査装置 |
JPS6466546A (en) | 1987-09-07 | 1989-03-13 | Hitachi Ltd | Package inspection equipment |
JP2748977B2 (ja) | 1988-09-12 | 1998-05-13 | オムロン株式会社 | 基板検査結果表示装置 |
JPH061173B2 (ja) | 1988-05-09 | 1994-01-05 | オムロン株式会社 | 曲面性状検査装置 |
US5060065A (en) | 1990-02-23 | 1991-10-22 | Cimflex Teknowledge Corporation | Apparatus and method for illuminating a printed circuit board for inspection |
JPH04166711A (ja) * | 1990-10-30 | 1992-06-12 | Omron Corp | 表面性状観測装置 |
JP2929701B2 (ja) * | 1990-10-30 | 1999-08-03 | オムロン株式会社 | 表面性状観測装置 |
JPH05248820A (ja) | 1992-03-10 | 1993-09-28 | Nec Toyama Ltd | 照明装置 |
JPH08201044A (ja) | 1995-01-31 | 1996-08-09 | Nippei Toyama Corp | 半田付け検査用画像入力装置 |
JPH09201044A (ja) | 1996-01-18 | 1997-07-31 | Canon Inc | 共振型スイッチング電源装置 |
JPH10318730A (ja) * | 1997-05-19 | 1998-12-04 | Dainippon Screen Mfg Co Ltd | パターン読取装置 |
JP4112064B2 (ja) * | 1998-02-27 | 2008-07-02 | 松下電器産業株式会社 | 光路調整部材及びそれを備えた照明装置 |
US6598994B1 (en) * | 1998-08-24 | 2003-07-29 | Intelligent Reasoning Systems, Inc. | Multi-angle inspection of manufactured products |
KR100345001B1 (ko) * | 1998-08-27 | 2002-07-19 | 삼성전자 주식회사 | 기판 납땜 검사용 조명 및 광학 장치 |
US6273338B1 (en) * | 1998-09-22 | 2001-08-14 | Timothy White | Low cost color-programmable focusing ring light |
JP2000121563A (ja) * | 1998-10-08 | 2000-04-28 | Victor Co Of Japan Ltd | 外観検査装置 |
JP2001068900A (ja) * | 1999-08-30 | 2001-03-16 | Sony Corp | 実装部品検査方法並びに実装部品検査装置及びその照明器具 |
WO2001029542A1 (en) * | 1999-10-18 | 2001-04-26 | Mv Research Limited | Machine vision |
JP4230628B2 (ja) | 1999-11-30 | 2009-02-25 | シーシーエス株式会社 | 照明装置の制御電源 |
US6596994B1 (en) | 2000-09-21 | 2003-07-22 | The United States Of America As Represented By The United States Department Of Energy | Beam position monitor |
JP2003139712A (ja) | 2001-10-31 | 2003-05-14 | Ccs Inc | Led照明装置 |
JP3889992B2 (ja) * | 2002-05-17 | 2007-03-07 | 株式会社ミツトヨ | リング照明装置 |
US7025241B2 (en) * | 2003-03-03 | 2006-04-11 | Jorge Luis Castellanos | Gravity tin tag feeder attachment |
US7019826B2 (en) * | 2003-03-20 | 2006-03-28 | Agilent Technologies, Inc. | Optical inspection system, apparatus and method for reconstructing three-dimensional images for printed circuit board and electronics manufacturing inspection |
JP2005184246A (ja) | 2003-12-17 | 2005-07-07 | Fuji Photo Film Co Ltd | 撮像装置 |
US20080157040A1 (en) * | 2007-01-02 | 2008-07-03 | Glenn Hironaga | Nail Device and Method |
-
2005
- 2005-06-14 EP EP05012771A patent/EP1612569A3/en not_active Ceased
- 2005-06-20 US US11/157,749 patent/US7394084B2/en not_active Expired - Fee Related
- 2005-06-29 CN CNB2005100809750A patent/CN100433962C/zh not_active Expired - Fee Related
- 2005-06-29 TW TW094121755A patent/TWI263791B/zh not_active IP Right Cessation
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103534580A (zh) * | 2011-04-18 | 2014-01-22 | 伊斯梅卡半导体控股公司 | 一种检查装置 |
CN103728306A (zh) * | 2014-01-15 | 2014-04-16 | 唐山英莱科技有限公司 | 一种基于双路会聚可调光路的无坡口对接焊缝检测系统 |
CN105277574A (zh) * | 2014-07-22 | 2016-01-27 | 牧德科技股份有限公司 | 应用重复曝光的多曝光影像混合的检测方法 |
CN105277574B (zh) * | 2014-07-22 | 2018-04-03 | 牧德科技股份有限公司 | 应用重复曝光的多曝光影像混合的检测方法 |
CN106556603A (zh) * | 2015-09-30 | 2017-04-05 | 佳能株式会社 | 检查装置和物品制造方法 |
CN111133851A (zh) * | 2017-09-28 | 2020-05-08 | 环球仪器公司 | 改进的引脚前端照明装置、系统和方法 |
CN108007348A (zh) * | 2017-12-14 | 2018-05-08 | 苏州西博三维科技有限公司 | 非接触式测量设备 |
CN108827971A (zh) * | 2018-04-26 | 2018-11-16 | 深圳市创科自动化控制技术有限公司 | 一种表面缺陷检测方法 |
CN113884508A (zh) * | 2020-07-02 | 2022-01-04 | 由田新技股份有限公司 | 用于基板的线路量测系统 |
CN113884508B (zh) * | 2020-07-02 | 2024-05-03 | 由田新技股份有限公司 | 用于基板的线路量测系统 |
Also Published As
Publication number | Publication date |
---|---|
CN100433962C (zh) | 2008-11-12 |
TW200606445A (en) | 2006-02-16 |
EP1612569A3 (en) | 2006-02-08 |
EP1612569A2 (en) | 2006-01-04 |
TWI263791B (en) | 2006-10-11 |
US7394084B2 (en) | 2008-07-01 |
US20060000989A1 (en) | 2006-01-05 |
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C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CI01 | Correction of invention patent gazette |
Correction item: Fourth inventor Correct: Yotsuya Teruhisa False: Yotsuya Teruhisa Number: 1 Volume: 22 |
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CI02 | Correction of invention patent application |
Correction item: Fourth inventor Correct: Yotsuya Teruhisa False: Yotsuya Teruhisa Number: 1 Page: The title page Volume: 22 |
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Free format text: CORRECT: THE FOURTH INVENTOR; FROM: TIANGU HUIJIU TO: TERUHISA YOTSUYA |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081112 Termination date: 20130629 |