CN1693439A - 碱性洗净剂 - Google Patents
碱性洗净剂 Download PDFInfo
- Publication number
- CN1693439A CN1693439A CNA2005100661749A CN200510066174A CN1693439A CN 1693439 A CN1693439 A CN 1693439A CN A2005100661749 A CNA2005100661749 A CN A2005100661749A CN 200510066174 A CN200510066174 A CN 200510066174A CN 1693439 A CN1693439 A CN 1693439A
- Authority
- CN
- China
- Prior art keywords
- carbon number
- alcohols
- alkyl
- alkali cleaner
- positively charged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000003513 alkali Substances 0.000 title claims abstract description 20
- 229910052799 carbon Inorganic materials 0.000 claims description 75
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 74
- -1 alkyl carbon Chemical compound 0.000 claims description 60
- 125000000217 alkyl group Chemical group 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 28
- 229910052782 aluminium Inorganic materials 0.000 claims description 26
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 26
- 239000011521 glass Substances 0.000 claims description 26
- 239000004411 aluminium Substances 0.000 claims description 25
- 150000001298 alcohols Chemical class 0.000 claims description 23
- 238000004140 cleaning Methods 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 19
- 239000003795 chemical substances by application Substances 0.000 claims description 18
- 238000007598 dipping method Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- 239000007921 spray Substances 0.000 claims description 11
- 125000004429 atom Chemical group 0.000 claims description 9
- 125000002947 alkylene group Chemical group 0.000 claims description 8
- 239000004566 building material Substances 0.000 claims description 7
- 239000002585 base Substances 0.000 claims description 6
- 239000002904 solvent Substances 0.000 claims description 6
- 150000001408 amides Chemical class 0.000 claims description 5
- 238000005260 corrosion Methods 0.000 claims description 5
- 230000007797 corrosion Effects 0.000 claims description 5
- 150000007530 organic bases Chemical class 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000003963 antioxidant agent Substances 0.000 claims description 3
- 230000003078 antioxidant effect Effects 0.000 claims description 3
- 239000002738 chelating agent Substances 0.000 claims description 3
- 229910021645 metal ion Inorganic materials 0.000 claims description 3
- 238000002604 ultrasonography Methods 0.000 claims description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 2
- 150000005622 tetraalkylammonium hydroxides Chemical class 0.000 claims description 2
- 150000003376 silicon Chemical class 0.000 claims 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract description 12
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 4
- 125000004433 nitrogen atom Chemical group N* 0.000 abstract description 4
- 150000002500 ions Chemical class 0.000 description 61
- 239000003599 detergent Substances 0.000 description 25
- 150000003839 salts Chemical class 0.000 description 24
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 18
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 16
- 150000001412 amines Chemical class 0.000 description 14
- 239000002253 acid Substances 0.000 description 12
- 235000014113 dietary fatty acids Nutrition 0.000 description 11
- 239000000194 fatty acid Substances 0.000 description 11
- 229930195729 fatty acid Natural products 0.000 description 11
- 239000004973 liquid crystal related substance Substances 0.000 description 10
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 9
- 238000002474 experimental method Methods 0.000 description 9
- 235000011187 glycerol Nutrition 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 150000004665 fatty acids Chemical class 0.000 description 8
- 230000003628 erosive effect Effects 0.000 description 7
- 238000011010 flushing procedure Methods 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 150000007524 organic acids Chemical class 0.000 description 7
- 235000013772 propylene glycol Nutrition 0.000 description 7
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 6
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
- 229910019142 PO4 Inorganic materials 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 150000003863 ammonium salts Chemical class 0.000 description 6
- 150000002148 esters Chemical group 0.000 description 6
- 150000002466 imines Chemical class 0.000 description 6
- 239000003921 oil Substances 0.000 description 6
- 235000019198 oils Nutrition 0.000 description 6
- 125000005702 oxyalkylene group Chemical group 0.000 description 6
- 239000010452 phosphate Substances 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 235000019832 sodium triphosphate Nutrition 0.000 description 6
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 6
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 5
- 238000005660 chlorination reaction Methods 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 229910052500 inorganic mineral Inorganic materials 0.000 description 5
- 239000011707 mineral Substances 0.000 description 5
- 235000010755 mineral Nutrition 0.000 description 5
- 230000019635 sulfation Effects 0.000 description 5
- 238000005670 sulfation reaction Methods 0.000 description 5
- UNXRWKVEANCORM-UHFFFAOYSA-I triphosphate(5-) Chemical compound [O-]P([O-])(=O)OP([O-])(=O)OP([O-])([O-])=O UNXRWKVEANCORM-UHFFFAOYSA-I 0.000 description 5
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 4
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 4
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 150000002334 glycols Chemical class 0.000 description 4
- 229910052700 potassium Inorganic materials 0.000 description 4
- 239000011591 potassium Substances 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 125000005207 tetraalkylammonium group Chemical group 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 3
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical group OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- 150000003973 alkyl amines Chemical class 0.000 description 3
- 125000003368 amide group Chemical group 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- 229910052728 basic metal Inorganic materials 0.000 description 3
- 150000003818 basic metals Chemical group 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- ROSDSFDQCJNGOL-UHFFFAOYSA-N protonated dimethyl amine Natural products CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 3
- 239000000600 sorbitol Substances 0.000 description 3
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 3
- 125000005270 trialkylamine group Chemical group 0.000 description 3
- 239000001993 wax Substances 0.000 description 3
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical group COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- LWYAUHJRUCQFCX-UHFFFAOYSA-N 4-dodecoxy-4-oxobutanoic acid Chemical compound CCCCCCCCCCCCOC(=O)CCC(O)=O LWYAUHJRUCQFCX-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- KWIUHFFTVRNATP-UHFFFAOYSA-N Betaine Natural products C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- YNQLUTRBYVCPMQ-UHFFFAOYSA-N Ethylbenzene Chemical compound CCC1=CC=CC=C1 YNQLUTRBYVCPMQ-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- AVXURJPOCDRRFD-UHFFFAOYSA-N Hydroxylamine Chemical compound ON AVXURJPOCDRRFD-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- LVHFFCVSWIOHPR-UHFFFAOYSA-N O(O)O.C(C)[N+](CC)(CC)CC Chemical compound O(O)O.C(C)[N+](CC)(CC)CC LVHFFCVSWIOHPR-UHFFFAOYSA-N 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- CZMRCDWAGMRECN-UGDNZRGBSA-N Sucrose Chemical compound O[C@H]1[C@H](O)[C@@H](CO)O[C@@]1(CO)O[C@@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 CZMRCDWAGMRECN-UGDNZRGBSA-N 0.000 description 2
- 229930006000 Sucrose Natural products 0.000 description 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical class OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 2
- 238000007605 air drying Methods 0.000 description 2
- 150000001335 aliphatic alkanes Chemical class 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
- 229960003237 betaine Drugs 0.000 description 2
- 230000031709 bromination Effects 0.000 description 2
- 238000005893 bromination reaction Methods 0.000 description 2
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 description 2
- 125000004369 butenyl group Chemical group C(=CCC)* 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 150000007942 carboxylates Chemical class 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical group NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 2
- 125000005265 dialkylamine group Chemical group 0.000 description 2
- JQVDAXLFBXTEQA-UHFFFAOYSA-N dibutylamine Chemical compound CCCCNCCCC JQVDAXLFBXTEQA-UHFFFAOYSA-N 0.000 description 2
- MELGLHXCBHKVJG-UHFFFAOYSA-N dimethyl(dioctyl)azanium Chemical group CCCCCCCC[N+](C)(C)CCCCCCCC MELGLHXCBHKVJG-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- DMBHHRLKUKUOEG-UHFFFAOYSA-N diphenylamine Chemical compound C=1C=CC=CC=1NC1=CC=CC=C1 DMBHHRLKUKUOEG-UHFFFAOYSA-N 0.000 description 2
- JRBPAEWTRLWTQC-UHFFFAOYSA-N dodecylamine Chemical group CCCCCCCCCCCCN JRBPAEWTRLWTQC-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000005227 gel permeation chromatography Methods 0.000 description 2
- 239000004519 grease Substances 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 125000001624 naphthyl group Chemical group 0.000 description 2
- BKIMMITUMNQMOS-UHFFFAOYSA-N nonane Chemical compound CCCCCCCCC BKIMMITUMNQMOS-UHFFFAOYSA-N 0.000 description 2
- 239000002736 nonionic surfactant Substances 0.000 description 2
- 235000006408 oxalic acid Nutrition 0.000 description 2
- 150000003016 phosphoric acids Chemical class 0.000 description 2
- 235000019353 potassium silicate Nutrition 0.000 description 2
- 125000004368 propenyl group Chemical group C(=CC)* 0.000 description 2
- 230000003134 recirculating effect Effects 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000005720 sucrose Substances 0.000 description 2
- 150000003512 tertiary amines Chemical class 0.000 description 2
- 125000002769 thiazolinyl group Chemical group 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- HVLLSGMXQDNUAL-UHFFFAOYSA-N triphenyl phosphite Chemical compound C=1C=CC=CC=1OP(OC=1C=CC=CC=1)OC1=CC=CC=C1 HVLLSGMXQDNUAL-UHFFFAOYSA-N 0.000 description 2
- 125000004417 unsaturated alkyl group Chemical group 0.000 description 2
- 150000004670 unsaturated fatty acids Chemical class 0.000 description 2
- 235000021122 unsaturated fatty acids Nutrition 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- HDTRYLNUVZCQOY-UHFFFAOYSA-N α-D-glucopyranosyl-α-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OC1C(O)C(O)C(O)C(CO)O1 HDTRYLNUVZCQOY-UHFFFAOYSA-N 0.000 description 1
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 1
- ICBPURKUPVLVCM-UHFFFAOYSA-N 1,5-dimethyl-2-phenylpyrazol-3-one;2-hydroxy-2-phenylacetic acid Chemical compound OC(=O)C(O)C1=CC=CC=C1.CN1C(C)=CC(=O)N1C1=CC=CC=C1 ICBPURKUPVLVCM-UHFFFAOYSA-N 0.000 description 1
- ZFPGARUNNKGOBB-UHFFFAOYSA-N 1-Ethyl-2-pyrrolidinone Chemical compound CCN1CCCC1=O ZFPGARUNNKGOBB-UHFFFAOYSA-N 0.000 description 1
- FJLUATLTXUNBOT-UHFFFAOYSA-N 1-Hexadecylamine Chemical compound CCCCCCCCCCCCCCCCN FJLUATLTXUNBOT-UHFFFAOYSA-N 0.000 description 1
- ZMXIYERNXPIYFR-UHFFFAOYSA-N 1-ethylnaphthalene Chemical compound C1=CC=C2C(CC)=CC=CC2=C1 ZMXIYERNXPIYFR-UHFFFAOYSA-N 0.000 description 1
- BMVXCPBXGZKUPN-UHFFFAOYSA-N 1-hexanamine Chemical compound CCCCCCN BMVXCPBXGZKUPN-UHFFFAOYSA-N 0.000 description 1
- OWEGMIWEEQEYGQ-UHFFFAOYSA-N 100676-05-9 Natural products OC1C(O)C(O)C(CO)OC1OCC1C(O)C(O)C(O)C(OC2C(OC(O)C(O)C2O)CO)O1 OWEGMIWEEQEYGQ-UHFFFAOYSA-N 0.000 description 1
- NVEUWWMNWPNXOC-UHFFFAOYSA-N 2,2-dimethyltridecane Chemical compound CCCCCCCCCCCC(C)(C)C NVEUWWMNWPNXOC-UHFFFAOYSA-N 0.000 description 1
- PTDIJFYBVOBHCN-UHFFFAOYSA-N 2-(butylamino)ethane-1,1,1-triol Chemical compound CCCCNCC(O)(O)O PTDIJFYBVOBHCN-UHFFFAOYSA-N 0.000 description 1
- JYVKZELXZLJWPU-UHFFFAOYSA-N 2-(ethylamino)ethane-1,1,1-triol Chemical compound CCNCC(O)(O)O JYVKZELXZLJWPU-UHFFFAOYSA-N 0.000 description 1
- ZXIYZDSEASMXPI-UHFFFAOYSA-N 2-(methylamino)ethane-1,1,1-triol Chemical group CNCC(O)(O)O ZXIYZDSEASMXPI-UHFFFAOYSA-N 0.000 description 1
- KHJWSKNOMFJTDN-UHFFFAOYSA-N 2-[2-[bis(carboxymethyl)amino]ethyl-(carboxymethyl)amino]acetic acid;sodium Chemical compound [Na].OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KHJWSKNOMFJTDN-UHFFFAOYSA-N 0.000 description 1
- FVIMRJIDRHUTQP-UHFFFAOYSA-N 2-[bis(2-hydroxyethyl)amino]ethyl octadecanoate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OCCN(CCO)CCO FVIMRJIDRHUTQP-UHFFFAOYSA-N 0.000 description 1
- DJIOGHZNVKFYHH-UHFFFAOYSA-N 2-hexadecylpyridine Chemical class CCCCCCCCCCCCCCCCC1=CC=CC=N1 DJIOGHZNVKFYHH-UHFFFAOYSA-N 0.000 description 1
- RKOGJKGQMPZCGG-UHFFFAOYSA-N 2-methoxypropane-1,3-diol Chemical compound COC(CO)CO RKOGJKGQMPZCGG-UHFFFAOYSA-N 0.000 description 1
- WODGMMJHSAKKNF-UHFFFAOYSA-N 2-methylnaphthalene-1-sulfonic acid Chemical class C1=CC=CC2=C(S(O)(=O)=O)C(C)=CC=C21 WODGMMJHSAKKNF-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 1
- IVFPTNHGDLCNBV-UHFFFAOYSA-N 3-(diethylamino)butan-1-ol Chemical compound CCN(CC)C(C)CCO IVFPTNHGDLCNBV-UHFFFAOYSA-N 0.000 description 1
- QTTKJYGPXLCJNF-UHFFFAOYSA-N 3-(dimethylamino)butan-1-ol Chemical compound CN(C)C(C)CCO QTTKJYGPXLCJNF-UHFFFAOYSA-N 0.000 description 1
- PYSGFFTXMUWEOT-UHFFFAOYSA-N 3-(dimethylamino)propan-1-ol Chemical group CN(C)CCCO PYSGFFTXMUWEOT-UHFFFAOYSA-N 0.000 description 1
- FBXBSCUQZWUZDD-UHFFFAOYSA-N 3-(ethylamino)propan-1-ol Chemical compound CCNCCCO FBXBSCUQZWUZDD-UHFFFAOYSA-N 0.000 description 1
- AFPHTEQTJZKQAQ-UHFFFAOYSA-N 3-nitrobenzoic acid Chemical compound OC(=O)C1=CC=CC([N+]([O-])=O)=C1 AFPHTEQTJZKQAQ-UHFFFAOYSA-N 0.000 description 1
- XBWPRQHAZYUJQE-UHFFFAOYSA-N 4-(diethylamino)pentan-1-ol Chemical compound CCN(CC)C(C)CCCO XBWPRQHAZYUJQE-UHFFFAOYSA-N 0.000 description 1
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 1
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- NHDHVHZZCFYRSB-UHFFFAOYSA-N pyriproxyfen Chemical compound C=1C=CC=NC=1OC(C)COC(C=C1)=CC=C1OC1=CC=CC=C1 NHDHVHZZCFYRSB-UHFFFAOYSA-N 0.000 description 1
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- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
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- 150000004671 saturated fatty acids Chemical class 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 235000017550 sodium carbonate Nutrition 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 239000004324 sodium propionate Substances 0.000 description 1
- 235000010334 sodium propionate Nutrition 0.000 description 1
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- 229960003212 sodium propionate Drugs 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- IZWPGJFSBABFGL-GMFCBQQYSA-M sodium;2-[methyl-[(z)-octadec-9-enoyl]amino]ethanesulfonate Chemical compound [Na+].CCCCCCCC\C=C/CCCCCCCC(=O)N(C)CCS([O-])(=O)=O IZWPGJFSBABFGL-GMFCBQQYSA-M 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000003760 tallow Substances 0.000 description 1
- 229940095064 tartrate Drugs 0.000 description 1
- CBXCPBUEXACCNR-UHFFFAOYSA-N tetraethylammonium Chemical compound CC[N+](CC)(CC)CC CBXCPBUEXACCNR-UHFFFAOYSA-N 0.000 description 1
- DTIFFPXSSXFQCJ-UHFFFAOYSA-N tetrahexylazanium Chemical compound CCCCCC[N+](CCCCCC)(CCCCCC)CCCCCC DTIFFPXSSXFQCJ-UHFFFAOYSA-N 0.000 description 1
- QEMXHQIAXOOASZ-UHFFFAOYSA-N tetramethylammonium Chemical group C[N+](C)(C)C QEMXHQIAXOOASZ-UHFFFAOYSA-N 0.000 description 1
- RYCLIXPGLDDLTM-UHFFFAOYSA-J tetrapotassium;phosphonato phosphate Chemical compound [K+].[K+].[K+].[K+].[O-]P([O-])(=O)OP([O-])([O-])=O RYCLIXPGLDDLTM-UHFFFAOYSA-J 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- 125000005208 trialkylammonium group Chemical group 0.000 description 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 1
- GCRCSLNXFKCFHB-UHFFFAOYSA-N triethyl(hexyl)azanium Chemical compound CCCCCC[N+](CC)(CC)CC GCRCSLNXFKCFHB-UHFFFAOYSA-N 0.000 description 1
- CENIAFYRIODGSU-UHFFFAOYSA-N triethyl(octadecyl)azanium Chemical compound CCCCCCCCCCCCCCCCCC[N+](CC)(CC)CC CENIAFYRIODGSU-UHFFFAOYSA-N 0.000 description 1
- PDSVZUAJOIQXRK-UHFFFAOYSA-N trimethyl(octadecyl)azanium Chemical compound CCCCCCCCCCCCCCCCCC[N+](C)(C)C PDSVZUAJOIQXRK-UHFFFAOYSA-N 0.000 description 1
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 description 1
- HRXKRNGNAMMEHJ-UHFFFAOYSA-K trisodium citrate Chemical compound [Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O HRXKRNGNAMMEHJ-UHFFFAOYSA-K 0.000 description 1
- 229940038773 trisodium citrate Drugs 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 229910000406 trisodium phosphate Inorganic materials 0.000 description 1
- 235000019801 trisodium phosphate Nutrition 0.000 description 1
- 229960004418 trolamine Drugs 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000000811 xylitol Substances 0.000 description 1
- HEBKCHPVOIAQTA-SCDXWVJYSA-N xylitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)CO HEBKCHPVOIAQTA-SCDXWVJYSA-N 0.000 description 1
- 235000010447 xylitol Nutrition 0.000 description 1
- 229960002675 xylitol Drugs 0.000 description 1
- 229960003487 xylose Drugs 0.000 description 1
- 239000004711 α-olefin Substances 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
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- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
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- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
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- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/26—Organic compounds containing nitrogen
- C11D3/30—Amines; Substituted amines ; Quaternized amines
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Abstract
本发明提出一种碱性洗净剂,由碱性成分(A)、多价醇类(B)及醇类(C)所组成。其中,多价醇类(B)为不含氮原子且平均分子量在92~400的三~八价的醇类。醇类(C)为选自不含氮原子且平均分子量在62~250的二价醇类(C1)及不含氮原子且平均分子量在32~500的一价醇类(C2)所组成的族群中至少一醇类。
Description
技术领域
本发明是有关于一种用以去除附着于电子部件、金属部件及陶瓷部件等部件上的油脂、树脂及微粒等的碱性洗净剂,更详细地说,是关于一种用作液晶面板的垂直配向聚亚胺膜(特别是半烧成膜)的剥离液,或是用作半导体组件电路及液晶面板的半导体组件电路等电路制造时的光阻剥离液的碱性洗净剂。
背景技术
一直以来,碱性洗净剂相较于中性洗净剂,因为对于油脂、树脂及微粒等的去除能力较为显著,所以广泛地使用在电子部件、金属部件及陶瓷部件等的生产现场。但是,因为铝等非铁金属容易被碱性洗净剂所腐蚀,所以目前在一部份或全部使用铝的电子部件等部件的洗净方法,是不会使用碱性洗净剂的。例如是电子部件,特别是液晶面板的聚亚胺配向膜,之前是水准配向型,随着对广视角的液晶面板的需求越来越强,垂直配向型的聚亚胺配向膜有增加的趋势。如果是水准配向型的聚亚胺配向膜玻璃基板,在完全烧成(烧成温度:约180℃)前的半烧成状态,此时不合格品可以N-甲基吡咯烷酮(N-methylpyrrolidone)等溶剂剥离其配向膜,且不会腐蚀铝薄膜(内联机)。但是在配向膜为垂直配向型的聚亚胺配向膜时,因为其在半烧成状态的时候,无法使用N-甲基吡咯烷酮等溶剂加以剥离,所以须使用碱性洗净剂加以剥离,如日本专利申请案早期公开第平6-306661号所述者。在这个时候,因为玻璃基板的铝薄膜(内联机)会被腐蚀,所以铝薄膜的部分用蜡等物质进行保护再进行洗净,接着再以烃类溶剂等溶剂去除蜡以使基板及铝薄膜复原,或是将配向膜及铝薄膜同时完全剥离及溶解,而仅使基板复原。
此外,关于半导体组件电路等的制程,为了去除形成内联机时所产生的光阻残留物,一直以来都是使用胺系剥离剂来进行。但是,胺系剥离剂具有腐蚀基板上的铝及钨等的金属内联机及金属薄膜的问题。这个问题可以使用含有第四级铵氢氧化物、糖类的水溶液来解决,日本专利申请案早期公开第平4-48633号所述者,但是在光阻的剥离性及抑制金属内联机的腐蚀这两方面,并无法同时完全满足。
发明内容
本发明的目的就是提供一种金属(特别是铝)非腐蚀性佳的新型洗净剂、洗净方法及以此洗净剂进行洗净的电子部件。
本发明人为达成上述目的,积极研究而完成本发明。
换言之,本发明提出一种碱性洗净剂,由碱性成分(A)、不含氮原子且数量平均分子量在92-400的三-八价的多价醇类(B)、及选自不含氮原子且数量平均分子量在62-250的二价醇类(C1)及不含氮原子且数量平均分子量在32-500的一价醇类(C2)所组成的族群中至少一醇类(C)所组成。
本发明提出一种洗净方法,适用于电子部件、电器部件或铝建材,其特征在于使用本发明的洗净剂,以选自超音波洗净、喷淋(shower)洗净、喷洒(spray)洗净、浸渍及浸渍摇动中一或多种的方法进行洗净。
本发明提出一种电子部件、电器部件或铝建材,是以本发明的洗净方法进行洗净、冲洗后,干燥而得。
本发明的洗净剂具有金属(特别是铝)非腐蚀性佳的优点,例如是液晶面板用的玻璃基板及半导体基板的铝内联机、滤光部件不会受到破坏,且半烧成垂直配向聚亚胺膜、光阻可在短时间内被剥离及洗净。因此,关于配向膜剥离洗净制程(玻璃基板复原制程),不再是如习知般只能使玻璃基板复原,还可以同时使铝内联机、滤光部材复原。
另外,本发明的洗净剂在去除油份、指纹、树脂及微粒的能力也是相当出色。
为让本发明的上述和其它目的、特征和优点能更明显易懂,下文特举较佳实施例,作详细说明如下。
具体实施方式
在本发明中的碱性成分(A),例如是(A1)金属氢氧化物[碱金属氢氧化物(氢氧化锂、氢氧化钠及氢氧化钾等)、碱土族金属氢氧化物(氢氧化钙、氢氧化镁及氢氧化钡等)]、(A2)碳酸盐[碱金属碳酸盐(碳酸钠及碳酸钾等)、碱土族金属碳酸盐(碳酸钙、碳酸镁及碳酸钡等)]、(A3)磷酸盐[碱金属磷酸盐(焦磷酸钠、焦磷酸钾、三聚磷酸钠及三聚磷酸钾等)、碱土族金属磷酸盐(焦磷酸钙、焦磷酸镁、焦磷酸钡、三聚磷酸钙、三聚磷酸镁及三聚磷酸钡等)]、(A4)硅酸盐[碱金属硅酸盐(硅酸钠及硅酸钾等)、碱土族金属硅酸盐(硅酸钙、硅酸镁及硅酸钡等)]、(A5)氨、(A6)羟胺、(A7)下列一般式(1)所示的有机碱及这些物质的混合物。
——(R5O)p-H (2)
式中,R1例如是碳数为1-24的烃基,更佳的是碳数1-14的烃基,R2、R 3及R4中每一个为氢原子、碳数为1-24(更佳的是碳数为1-14)的烃基或一般式(2)所表示的官能基,R5为碳数2-4的烷撑基,p为1-6的整数。
在一般式(1)中,R1例如是直链或分枝的饱和或不饱和烃基、脂环式烃基及含有芳香环的烃基等。
直链或分枝的饱和烃基,例如是烷基(甲基、乙基,正、异、二级及三级丁基,辛基、2-乙基己基、十八烷基(octadecyl)等)。直链或分枝的不饱和烃基,例如是烯基(乙烯基、丙烯基、烯丙基及丁烯基等)。脂环式烃基,例如是环烷基(环己烷等)。含有芳香环的烃基,例如是芳烃基(苯基及萘基等)、芳烷基(苯甲基及苯乙基等)、烷芳烃基(甲苯基、乙苯基、壬苯基、甲萘基及乙萘基等)。
在这些烃基中,以洗净性的观点来看,较佳的是烷基及烯基。
若R1碳数在24以下,会有较佳的洗净性(或剥离性,以下同)。
R2、R3及R4为烃基的时候,此烃基例如是与R1相同的烃基,其较佳的烃基也如同R1。若R2、R3及R4碳数在24以下,会有良好的洗净性。
在一般式(2)中,R5例如是乙烯基、丙烯基及丁烯基等碳数为2-4的烯烃基。
若R5碳数在4以下,会有良好的洗净性。p为1-6(较佳为1-3)的整数,若p在6以下,会有良好的洗净性。
有机碱(A7),例如是结合氮原子的下列(1)-(5)的阳离子和氢氧化物阴离子的盐及这些物质的混合物中至少一个烃基。
(1)含有四个烃基的四级铵阳离子
含有四个碳数1-6的烷基的四烃基铵,例如是四甲基铵、四乙基铵、四(正或异)丙基铵、四(正、异或三级)丁基铵、四戊基铵及四己基铵等。
含有三个碳数1-6的烷基的四烃基铵,例如是三甲基庚基铵、三甲基辛基铵、三甲基癸基铵、三甲基十二烷基铵、三甲基硬脂基(stearyl)铵、三甲基苯甲基铵、三乙基己基铵、三乙基辛基铵、三乙基硬脂基铵、三乙基苯甲基铵、三丁基苯甲基铵、三丁基辛基铵及三己基硬脂基铵等。
含有二个碳数1-6的烷基的四烃基铵,例如是二甲基二辛基铵、二乙基二辛基铵及二甲基二苯甲基铵等。
含有一个碳数1-6的烷基的四烃基铵,例如是甲基三辛基铵、乙基三辛基铵及甲基辛基二苯甲基铵等。
(2)含有三个烃基的三级胺阳离子
含有三个碳数1-6的烷基的三烃基胺阳离子,例如是三甲基胺阳离子、三乙基胺阳离子及三丁基胺阳离子等。
含有二个碳数1-6的烷基的三烃基胺阳离子,例如是二甲基辛基胺阳离子、二甲基硬脂基胺阳离子、二乙基辛基胺阳离子、二丁基辛基胺阳离子及二甲基苯甲基胺阳离子等。
含有一个碳数1-6的烷基的三烃基胺阳离子,例如是甲基二辛基胺阳离子、乙基二辛基胺阳离子及甲基辛基苯甲基胺阳离子等。
(3)含有二个烃基的二级胺阳离子
含有二个碳数1-6的烷基的二烃基胺阳离子,例如是二甲基胺阳离子、二乙基胺阳离子、二丁基胺阳离子及二己基胺阳离子等。
含有一个碳数1-6的烷基的二烃基胺阳离子,例如是甲基辛基胺阳离子、乙基辛基胺阳离子、丁基辛基胺阳离子、己基辛基胺阳离子、甲基硬脂基胺阳离子、甲基苯甲基胺阳离子及乙基苯甲基胺阳离子等。
(4)含有一个烃基的一级胺阳离子
单烃基(碳数1-6)胺阳离子,例如是甲基胺阳离子、乙基胺阳离子、丁基胺阳离子及己基胺阳离子等。
(5)含有氧烯烃基的阳离子
(i)含有一个氧烯烃基的阳离子,例如是羟乙基三甲基胺阳离子、羟乙基三乙基胺阳离子、羟丙基三甲基胺阳离子、羟丙基三乙基胺阳离子、羟乙基二甲基乙基胺阳离子及羟乙基二甲基辛基胺阳离子等。
(ii)含有二个氧烯烃基的阳离子,例如是二羟乙基二甲基胺阳离子、二羟乙基二乙基胺阳离子、二羟丙基二甲基胺阳离子、二羟丙基二乙基胺阳离子、二羟乙基甲基乙基胺阳离子、二羟乙基甲基辛基胺阳离子及双(2-羟乙氧乙基)辛基胺阳离子等。
(iii)含有三个氧烯烃基的阳离子,例如是三羟乙基甲基胺阳离子、三羟乙基乙基胺阳离子、三羟乙基丁基胺阳离子、三羟丙基甲基胺阳离子、三羟丙基乙基胺阳离子及三羟乙基辛基胺阳离子等。
在碱性成分(A)中,以洗净性及冲洗的观点来看,较佳的是(A1)及(A7)。在(A1)中以洗净性的观点来看,较佳的是碱金属氢氧化物,更佳的是氢氧化钠及氢氧化钾。在(A7)中,以洗净性及冲洗的观点来看,较佳的是上述(1)及(2)的盐,更佳的是(1)的盐,特别是含有四个碳数1-6的烷基的四烷基铵氢氧化物,特佳的是四甲基铵氢氧化物及四乙基铵氢氧化物。
上述的化合物,也可以混合使用。
在本发明中,不含氮原子且数量平均分子量为92-400[数量平均分子量以下略记为Mn,是以胶体透析层析仪(Gel Permeation Chromatography,GPC)进行测定而得]的三-八价的多价醇类(B),例如是三-八价的脂肪族多价醇类(甘油、三羟甲基乙烷、三羟甲基丙烷、二甘油、三甘油、四甘油、五甘油、2-甲基甘油、1,2,4-丁三醇、甘蔗糖、葡萄糖、果糖、核醣、麦芽糖、海藻糖、木糖、丁四醇、木糖醇、山梨糖醇、甘露醇、蔗糖等)及这些物质的氧化烯基(碳数为2-3)的附加物(附加的氧化烯基的数目为1-7个)等。
在上述的物质中,以洗净性及冲洗的观点来看,较佳的是甘油、二甘油、三甘油及山梨糖醇。
在本发明中,不含氮原子且Mn为62-250的二价醇类(C1),例如是二羟基烷类(碳数为2-8的二羟基烷类:乙二醇、1,2丙烯乙二醇、1,3-丙烯乙二醇、1,4-丁二醇、1,6-己二醇及新戊基乙二醇等)、脂环式二醇类(碳数为6-15的二醇类:环己烷-1,2-、1,3-、1,4-二醇、环戊烷-1,2-、1,3-二醇及氢化双酚A等)、分子中含有一个醚基的二醇类(二次乙基乙二醇及二丙烯乙二醇等)及这些物质的混合物。(C1)的分子量较佳的是在62以上且未满150的范围。
在本发明中,不含氮原子且Mn为32-500的一价醇类(C2),例如是碳数为1-12的脂肪族醇类、此醇类中附加碳数为2-4的烯烃基氧化物的化合物及这些物质的混合物。碳数为1-12的脂肪族醇类,具体来说,例如是甲醇、乙醇、异丙醇及丁醇等。醇类中附加碳数为2-4的烯烃基氧化物的化合物,例如是乙二醇单甲醚、二乙二醇单甲醚、丙烯乙二醇单甲醚及乙二醇单丁谜等。
在(C)中,以洗净性及耐腐蚀性的观点来看,较佳的是(C1)中的乙二醇、丙烯乙二醇及二丙烯乙二醇、(C2)中的乙二醇单甲醚、二乙二醇单甲醚,更佳的是丙烯乙二醇及二乙二醇单甲醚。
关于本发明的洗净剂,其中(A),(B)及(C)的含量,以洗净性及耐腐蚀性的观点来看,以该碱性成分(A)、(B)及(C)的总重量为基准,(A)较佳的含量为0.1-25%(以下“%”表示“重量%”),更佳为0.2-15%,(B)较佳的含量为1-25%,更佳为2-15%,(C)较佳的含量为60-95%,更佳为75-93%。此外,(A)与(B)的重量比,以洗净姓及耐腐蚀性的观点来看,较佳为10/90-99/1,更佳为20/80-80/20。
在本发明的洗净剂中,除了(A)、(B)及(C)以外,必要时更可包括接口活性剂(D)、含有酰胺的亲水性溶剂(E)、其它添加剂及/或水。
接口活性剂(D),例如是非离子接口活性剂(D1)、阴离子界面活性剂(D2)、阳离子界面活性剂(D3)及两性界面活性剂(D4)及这些物质的混合物。但是,在(D1)中,并不包括(B)及(C)的范围中的醇类。此外,在(D3)中,并不包括一般式(1)所示的有机碱。
(D1),例如是烯烃基氧化物附加型非离子界面活性剂[高级醇类(碳数为8-18)、烷基酚(碳数为10-24)、高级脂肪酸(碳数为12-24)或高级烷基胺(碳数为8-24)等中,直接附加氧化烯基[碳数为2-4,例如是氧化乙烯基(以下简称EO)、氧化丙烯基、氧化丁烯基,以下同]的产物(Mn为158-200,000);聚氧烯烃基乙二醇(Mn为150-6,000)与高级脂肪酸(碳数为12-24)等反应的产物;在二醇类[上述(C1)中所述的物质]或三-八价的多价醇[上述(B)中所述的物质]等含有羟基的化合物与高级脂肪酸(碳数为12-24)反应所得的酯化物上附加氧化烯基的产物(Mn为250-30,000)、在高级脂肪酸(碳数为8-24)酰胺上附加氧化烯基的产物(Mn为200-30,000)、在多价醇(上述的物质)烷基(碳数为8-60)醚上附加氧化烯基的产物(Mn为120-30,000)等],及多价醇(碳数为3-20)型非离子界面活性剂[多价醇脂肪酸(碳数为8-60)酯、多价脂肪酸烷基(碳数为8-60)醚、脂肪酸(碳数为8-60)烷醇酰胺]等。
(D2),例如是羧酸(碳数为8-22的饱和或不饱和脂肪酸)或其盐类、羧甲基化合物的盐类[碳数为8-16的脂肪族醇类及/或其的EO附加物(附加数目1-10)等的羧甲基化合物的盐类等]、硫酸酯盐类[高级醇硫酸酯盐类(碳数为8-18的脂肪族脂类的硫酸酯盐类等)等]、高级烷基醚硫酸酯盐类[碳数为8-18的脂肪族脂类的EO附加物(附加数目1-10)的硫酸酯盐类]、硫酸化油(天然的不饱和油脂或不饱和的蜡油进行硫酸化后再中和所得的盐类)、硫酸化脂肪酸脂(对不饱和脂肪酸的低级醇酯类进行硫酸化后再中和所得的盐类)、硫酸化烯烃(对碳数为12-18的烯烃类进行硫酸化后再中和所得的盐类)、磺酸盐[烷基苯磺酸盐、甲基萘磺酸盐、磺基琥珀酸酯型、α-烯烃(碳数为12-18)磺酸盐、Igepon T型(商品名)界面活性剂]及磷酸酯盐[高级醇(碳数为8-60)磷酸酯盐、高级醇(碳数为8-60)的EO附加物的磷酸酯盐、烷基(碳数为4-60)酚的EO附加物的磷酸酯盐等]等盐类。
上述盐类,例如是碱金属(钠、钾等)盐、碱土族金属(钙、镁等)盐、铵盐、烷基胺(碳数为1-20)盐及烷醇胺(碳数为2-12,例如是单、二、三乙醇胺)盐等。
(D3),例如是第四级铵盐型[四烷基(碳数为4-100)铵盐,例如是氯化十二烷基三甲基铵、氯化二癸基二甲基铵、溴化二辛基二甲基铵、溴化硬脂基三甲基铵;三烷基(碳数为3-80)苯基铵盐,例如是氯化十二烷基二甲基苯基铵(氯化苯甲烃铵);烷基(碳数为2-60)啶盐,例如是氯化十六烷基啶盐;聚氧烯烃基(碳数为2-4)三烃基铵盐,例如是氯化聚氧乙烯基三甲基铵;Sapamine型(商品名)四级铵盐,例如是硬脂酰胺乙基二乙基甲基铵的甲基硫酸盐]、胺盐型[脂肪族高级胺(碳数为12-60,例如是十二烷基胺、硬脂基胺、十六烷基胺、硬化牛脂胺、松香胺等)的无机酸(盐酸、硫酸、硝酸及磷酸)盐或有机酸(醋酸、丙酸、十二酸、油酸、安息香酸、琥珀酸、己二酸、壬二酸)盐;低级胺(碳数为1-11)的高级脂肪酸(碳数为12-24,例如是硬脂酸、油酸)盐;脂肪族胺(碳数为1-30)的EO附加物等的无机酸(上述的无机酸)盐或有机酸(上述的有机酸)盐;三级胺(三乙醇胺单硬脂酸酯、硬脂酰胺乙基二乙基甲基乙醇胺等)的无机酸(上述的无机酸)盐或有机酸(上述的有机酸)盐等]等。
(D4),例如是氨基酸两性界面活性剂[高级烷基胺(碳数为12-18)的丙酸钠等]、甜菜碱型两性界面活性剂[烷基(碳数为12-18)二甲基甜菜碱等、烷基(碳数为12-18)二羟乙基甜菜碱等、椰子油脂肪酸酰胺丙基甜菜碱等]、硫酸酯盐型两性界面活性剂[高级烷基(碳数为8-18)胺的硫酸酯钠盐、羟乙基咪唑啉硫酸酯钠盐等]、磺酸盐型两性界面活性剂(五癸基胺基乙磺酸、咪唑啉磺酸等)、磷酸酯盐型两性界面活性剂[甘油高级脂肪酸(碳数为8-22)酯化物的磷酸酯胺盐]等。
在(D1)-(D4)中,以洗净性及耐腐蚀性的观点来看,较佳的是(D1)及(D2),更佳的是(D1)。(D)的含量,以洗净剂的总重量为基准,较佳为1-20%。
含有酰胺基的亲水性溶剂(E),在对水的溶解度(g/100g的H2O)在3以上,而分子中含有一个以上酰胺基或水溶性酰胺,例如是2-吡咯烷酮及N-烷基(碳数为1-3)-2-吡咯烷酮等。在这些物质中,以洗净性及冲洗的观点来看,较佳的是N-甲基-2-吡咯烷酮、N-乙基-2-吡咯烷酮、N-n-丙基-2-吡咯烷酮及N-异丙基-2-吡咯烷酮,更佳的是N-甲基-2-吡咯烷酮。(E)的含量,以洗净剂的总重量为基准,从洗净性、清洗及耐腐蚀性的观点来看,较佳的是在30%以下,更佳的是1-20%。
水的含量,以洗净剂的总重量为基准,从洗净性、清洗及耐腐蚀性的观点来看,较佳的是在39%以下,更佳的是1-38%,特佳的是2-30%。
其它添加剂(F),例如是抗锈剂[胺(碳数为6-30、例如是环己基胺、十二烷基胺、硬脂基胺等)的EO附加物(附加数目2-10)、铬酸盐、亚硝酸盐、胺(碳数为6-30)的高级脂肪酸(碳数为8-30)盐、二羧酸(碳数为12-24)的碱金属(钠、钾等)盐、铵盐、或烷醇胺盐(三乙醇胺盐等)、二羧酸(碳数为12-24)的烷醇酰胺(例如是十二烷基琥珀酸二乙醇酰胺)、二羧酸(碳数为12-24)的烷醇酰胺碱金属盐(例如是十二烷基琥珀酸二乙醇酰胺钠盐)等]、抗氧化剂[酚类化合物(2,6,-二-t-丁基-4-甲基酚等)、含硫化合物(双十二烷基硫二苯胺丙酸盐等)、胺化合物(辛基化二苯基胺等)、磷化合物(三苯基亚磷酸盐等)等]、金属离子螯合剂(乙烯二胺四醋酸钠、柠檬酸钠等)、有机酸(柠檬酸、乙醇酸、琥珀酸、酒石酸、乳酸、反丁烯二酸、苹果酸、乙酰酸、丁酸、吉草酸、草酸、顺丁烯二酸、杏仁酸等)及这些物质的碱金属(钠、钾等)盐、铵盐或烷醇胺盐(如三乙醇胺盐)等。
(F)的含量,以洗净剂的总重量为基准,防锈剂通常在20%以下,较佳的是0.5-10%,抗氧化剂通常在5%以下,较佳的是0.1-1%,金属离子螯合剂通常在20%以下,较佳的是0.5-10%,有机酸通常在20%以下,较佳的是0.5-10%。
以本发明洗净剂的重量为基准,(D)、(E)及(F)合计的含量,通常在40%以下,较佳的是在30%以下,更佳的是在20%以下。
本发明的洗净剂在25℃时的黏度,通常在2-300mm2/s,从洗净性及冲洗的观点来看,较佳的是3-100mm2/s,更佳的是4-50mm2/s。其中,黏度是以奥斯瓦特(Ostwald)或乌贝路德(Ubbelohde)等黏度剂进行测定。
本发明的洗净剂,其适用的用途并无特别限定,可用于各种电子部件及铝建材等进行洗净,较佳的是用于电子部件的洗净,特别是广泛地用在一部份或全部使用铝的电子部件等部件的洗净上。例如是液晶面板用的玻璃基板(配向膜图案化之前的洗净、不符合配向膜的玻璃及洗净)、半导体基板、印刷电路板、电浆显示玻璃基板、热感应头等电子部件、空调冷却膜、空气清净机的铝电极板、电剃刀等的电器部件、铝建材等。此外,洗净的对象(污垢)为油分、指纹、树脂、有机微粒等的有机物、无机微粒(例如是玻璃粉、陶瓷粉、金属粉等)等的无机物。在本发明洗净剂的这些洗净对象中,特别适合用于液晶面板用的玻璃基板的洗净(配向膜进行薄膜化前玻璃基板的洗净,或配向膜为不符合的玻璃基板的洗净)。
本发明洗净剂适用的使用方法,举例来说,如液晶面板用的玻璃基板的剥离及洗净方法,为超音波洗净、喷淋(shower)洗净、喷洒(spray)洗净、浸渍、浸渍摇动及这些方法组合的洗净方法。
进行洗净时,本发明的洗净剂在必要时以水进行稀释为佳,更佳的是水的含量在上述水的含量范围内。
洗净温度,通常为10-70℃,较佳的是15-60℃。洗净时间通常是0.2-120分,较佳的是0.5-30分。水的冲洗温度通常是5-90℃,较佳的是10-70℃,冲洗的方法同上述所适用的洗净方法。冲洗后,通常在50-150℃的环境中,较佳的是在60-100℃的环境中,进行加热干燥,时间通常在1-120分,较佳的是在3-60分,以得到干净的液晶面板用的玻璃基板,如此即可使玻璃基板复原。
【实施例】
以下,以一实施例对本发明进行详细说明,但此实施例并不用以限定本发明。此外,关于以下的各部份,以质量比(part by weight)表示。
〔实施例1-8、比较例1-4〕
表1中所记载的各部份(百分比表示)的各成分,在一升的烧杯中,在室温下充分地搅拌及混合,以制作出实施例及比较例的洗净剂。
表1中的代号说明如下:
A-1:氢氧化钠
A-2:四n-丁基铵氢氧化物
A-3:四乙基铵氢氧化物
B-1:甘油
B-2:二甘油
B-3:山梨糖醇
C-1:丙烯乙二醇
C-2:乙二醇
C-3:二乙二醇单甲醚
实施例及比较例所得到的洗净剂的评价方法如下所示,评价结果如表1所示。
1.配向膜剥离性
在预先行程ITO膜(铟锡氧化膜)的玻璃基板(25×25mm,厚度为0.75mm)上,涂布聚亚胺树脂。接着,在80℃进行加热黏附作业,重复三次,即完成紧密黏附有半烧性的垂直配向聚亚胺膜(膜厚5μm)的玻璃基板实验片。实验片在洗净剂(25℃)中,浸渍特定时间后,置于不锈钢网上,以离子交换水喷淋(shower)洗净一分钟后,对另一面进行同样的冲洗步骤。然后,实验片在70℃循环风干燥机中干燥十分钟后,以显微镜观察配向膜的剥离性,接着给予五种等级的评价。
<评价基准>
5:玻璃基板表面的配向膜全部剥离。
4:玻璃基板表面的配向膜少部分残留。
3:玻璃基板表面的配向膜一部分残留。
2:玻璃基板表面的配向膜大部分残留。
1:玻璃基板表面的配向膜全部残留。
2.光阻剥离性
在三英吋的硅芯片上,涂布2μm厚的正光阻(可溶酚醛清漆树脂)。接着,80℃进行10分钟的加热黏附作业,以完成实验片。实验片在洗净剂中,温度为50℃的环境下,浸渍特定时间后,以离子交换水喷淋(shower)洗净一分钟。然后,实验片在70℃的循环风干燥机中干燥十分钟后,以显微镜观察光阻的剥离性,接着给予五种等级的评价。
<评价基准>
5:芯片表面的光阻全部剥离。
4:芯片表面的光阻少部分残留。
3:芯片表面的光阻一部分残留。
2:芯片表面的光阻大部分残留。
1:芯片表面的光阻全部残留。
3.腐蚀性
紧密黏附有铝薄膜(膜厚0.1μm)的玻璃基板实验片(25×25mm,厚度为0.75mm),在洗净剂(40℃)中,浸渍特定时间后,测定铝薄膜完全消失而使实验片变成透明的时间,作为其腐蚀时间。
4.腐蚀性-2
铝实验片(20×50mm,厚度为1mm)于洗净剂中浸渍,在50℃的环境中放置一周后,以纯水冲洗。接着,在90℃的环境中,干燥30分钟后,测量其重量。腐蚀速度的算法以下式表示。
【表1】
实施例 | 比较例 | ||||||||||||
1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 1 | 2 | 3 | 4 | ||
A | A-1 | 4 | - | - | - | - | - | - | - | 4 | 4 | - | - |
A-2 | - | 3 | - | 4 | 4 | 2 | - | - | - | - | - | - | |
A-3 | - | - | 3 | - | - | - | 3 | 6 | - | - | 4 | 4 | |
B | B-1 | 6 | 6 | - | 7 | 5 | 5 | - | - | 80 | 5 | - | - |
B-2 | - | - | 3 | - | - | - | - | - | - | - | - | - | |
B-3 | - | - | - | - | - | - | 2 | - | - | - | - | - | |
C | C-1 | 80 | 75 | - | - | 85 | - | 20 | - | - | - | 80 | - |
C-2 | - | - | - | - | - | - | - | 40 | - | - | - | - | |
C-3 | - | - | 80 | 80 | - | 60 | 60 | 40 | - | - | - | - | |
水 | 其余 | 其余 | 其余 | 其余 | 其余 | 其余 | 其余 | 其余 | 其余 | 其余 | 其余 | 其余 | |
合计 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | |
分析值 | pH(10%水溶液) | 13.1 | 12.8 | 12.6 | 12.5 | 12.7 | 12.8 | 12.3 | 12.9 | 13.2 | 12.8 | 12.8 | 12.6 |
黏度(mm2 | 15 | 12 | 6 | 7 | 15 | 5 | 7 | 10 | 50 | 4 | 12 | 5 |
/s,25℃) | |||||||||||||
评价结果 | 配向膜剥离性 | ||||||||||||
(浸渍时间1分) | 5 | 4 | 5 | 4 | 5 | 4 | 5 | 5 | 3 | 2 | 2 | 2 | |
(浸渍时间2分) | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 3 | 2 | 2 | 2 | |
(浸渍时间30分) | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 4 | 4 | 4 | |
光阻剥离性 | |||||||||||||
(浸渍时间1分) | 5 | 4 | 4 | 5 | 4 | 4 | 5 | 5 | 2 | 2 | 2 | 2 | |
(浸渍时间2分) | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 2 | 2 | 2 | 3 | |
(浸渍时间30分) | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 3 | 4 | 4 | 4 | |
腐蚀性(腐蚀时间:hr) | >36 | >36 | >36 | >36 | >36 | >36 | >36 | >36 | 5 | 2 | 2 | 5 | |
腐蚀速度(mdd,50℃) | 2 | 4 | 3 | 4 | 3 | 3 | 2 | 5 | 10 | 20 | 20 | 15 |
本发明的洗净剂,因为具有较佳的铝耐腐蚀性,且对油分、指纹、树脂及微粒有良好的去除能力,所以不仅可用于液晶面板用玻璃基板、半导体用硅基板等电子部件的洗净用途,也适用于电器部件、金属部件及建材等的洗净用途,可利用性相当高。
虽然本发明已以较佳实施例揭露如上,然其并非用以限定本发明,任何熟习此技艺者,在不脱离本发明的精神和范围内,当可作些许更动与润饰,因此本发明的保护范围当视后附的申请专利范围所界定者为准。
Claims (11)
1.一种碱性洗净剂,其特征在于其包括:
一碱性成分(A);
一多价醇类(B),不含氮原子且平均分子量在92~400的三~八价醇类;以及
至少一醇类(C),选自不含氮原子且平均分子量在62~250的二价醇类(C1)及不含氮原子且平均分子量在32~500的一价醇类(C2)所组成的族群。
3、根据权利要求1或2所述的碱性洗净剂,其特征在于其中所述的碱性成分(A)为烷基碳数为1或2的四烷基铵氢氧化物。
4、根据权利要求1或2所述的碱性洗净剂,其特征在于其中以该碱性成分(A)、该多价醇类(B)及该醇类(C)的总重量为基准,该碱性成分(A)为0.1~25重量%,该多价醇类(B)为1~25重量%,该醇类(C)为60~95重量%。
5、根据权利要求1或2所述的碱性洗净剂,其特征在于其更包括下列物质中的至少一种:界面活性剂(D)、含有酰胺的亲水性溶剂(E)、抗锈剂、抗氧化剂、金属离子螯合剂、以及水。
6、根据权利要求5所述的碱性洗净剂,其特征在于其中以该碱性洗净剂的总重量为基准,水为2~30重量%。
7、根据权利要求1或2所述的碱性洗净剂,其特征在于在50℃时,铝的腐蚀速度在10mdd以下。
8、一种洗净方法,适用于一电子部件、一电器部件或一铝建材,其特征在于使用根据权利要求1或2所述的碱性洗净剂,以选自超音波洗净、喷淋(shower)洗净、喷洒(spray)洗净、浸渍及浸渍摇动中一种以上的方法进行洗净。
9、根据权利要求8所述的洗净方法,其特征在于其中所述的电子部件包括一玻璃基板或一硅基板。
10、根据权利要求9所述的洗净方法,其特征在于其中所述的玻璃基板或该硅基板为至少一部份使用铝的基板。
11.一种电子部件、电器部件或铝建材,其特征在于是以根据权利要求8所述的洗净方法进行洗净、冲洗后,干燥而得。
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KR100617855B1 (ko) | 2006-08-28 |
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