CN1632677A - 制造平板显示器的方法 - Google Patents
制造平板显示器的方法 Download PDFInfo
- Publication number
- CN1632677A CN1632677A CNA2005100041021A CN200510004102A CN1632677A CN 1632677 A CN1632677 A CN 1632677A CN A2005100041021 A CNA2005100041021 A CN A2005100041021A CN 200510004102 A CN200510004102 A CN 200510004102A CN 1632677 A CN1632677 A CN 1632677A
- Authority
- CN
- China
- Prior art keywords
- nesa coating
- pixel electrode
- photosensitive
- black matrix
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 33
- 239000000758 substrate Substances 0.000 claims abstract description 47
- 238000000576 coating method Methods 0.000 claims description 95
- 239000011248 coating agent Substances 0.000 claims description 93
- 239000010408 film Substances 0.000 claims description 35
- 239000011159 matrix material Substances 0.000 claims description 27
- 239000012535 impurity Substances 0.000 claims description 25
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 238000009413 insulation Methods 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000002834 transmittance Methods 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 description 39
- 239000010410 layer Substances 0.000 description 30
- 239000003990 capacitor Substances 0.000 description 15
- 239000004065 semiconductor Substances 0.000 description 11
- 239000011229 interlayer Substances 0.000 description 9
- 239000012212 insulator Substances 0.000 description 7
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- 229910003437 indium oxide Inorganic materials 0.000 description 6
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 6
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 6
- 229910001887 tin oxide Inorganic materials 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052785 arsenic Inorganic materials 0.000 description 3
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- RNWHGQJWIACOKP-UHFFFAOYSA-N zinc;oxygen(2-) Chemical compound [O-2].[Zn+2] RNWHGQJWIACOKP-UHFFFAOYSA-N 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920001621 AMOLED Polymers 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
- H05B33/28—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode of translucent electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/82—Cathodes
- H10K50/828—Transparent cathodes, e.g. comprising thin metal layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/85—Arrangements for extracting light from the devices
- H10K50/852—Arrangements for extracting light from the devices comprising a resonant cavity structure, e.g. Bragg reflector pair
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/86—Arrangements for improving contrast, e.g. preventing reflection of ambient light
- H10K50/865—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. light-blocking layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Electroluminescent Light Sources (AREA)
- Manufacturing Of Electric Cables (AREA)
- Non-Insulated Conductors (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Physical Vapour Deposition (AREA)
- Liquid Crystal (AREA)
Abstract
Description
Claims (3)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR75075/01 | 2001-11-29 | ||
KR20010075075 | 2001-11-29 | ||
KR75075/2001 | 2001-11-29 | ||
KR5435/2002 | 2002-01-30 | ||
KR10-2002-0005435A KR100483988B1 (ko) | 2001-11-29 | 2002-01-30 | 투명도전막의 투과도 변형방법 |
KR5435/02 | 2002-01-30 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB021524262A Division CN1262020C (zh) | 2001-11-29 | 2002-11-27 | 改变透明导电层透射率的方法、平板显示器及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1632677A true CN1632677A (zh) | 2005-06-29 |
CN100510851C CN100510851C (zh) | 2009-07-08 |
Family
ID=26639487
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100041021A Expired - Lifetime CN100510851C (zh) | 2001-11-29 | 2002-11-27 | 制造平板显示器的方法 |
CNB021524262A Expired - Lifetime CN1262020C (zh) | 2001-11-29 | 2002-11-27 | 改变透明导电层透射率的方法、平板显示器及其制造方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB021524262A Expired - Lifetime CN1262020C (zh) | 2001-11-29 | 2002-11-27 | 改变透明导电层透射率的方法、平板显示器及其制造方法 |
Country Status (3)
Country | Link |
---|---|
US (3) | US6955578B2 (zh) |
KR (1) | KR100483988B1 (zh) |
CN (2) | CN100510851C (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7988514B2 (en) | 2001-11-29 | 2011-08-02 | Samsung Mobile Display Co., Ltd. | Method of varying transmittance of transparent conductive layer, flat panel display device and manufacturing method thereof |
Families Citing this family (46)
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TW548860B (en) | 2001-06-20 | 2003-08-21 | Semiconductor Energy Lab | Light emitting device and method of manufacturing the same |
US7211828B2 (en) | 2001-06-20 | 2007-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and electronic apparatus |
KR100491143B1 (ko) * | 2001-12-26 | 2005-05-24 | 삼성에스디아이 주식회사 | 블랙매트릭스를 구비한 평판표시장치 및 그 제조방법 |
KR100844004B1 (ko) * | 2002-03-15 | 2008-07-04 | 엘지디스플레이 주식회사 | 유기전계발광 소자용 투명 도전막의 제조 방법 |
KR100462861B1 (ko) | 2002-04-15 | 2004-12-17 | 삼성에스디아이 주식회사 | 블랙매트릭스를 구비한 평판표시장치 및 그의 제조방법 |
US7230271B2 (en) | 2002-06-11 | 2007-06-12 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device comprising film having hygroscopic property and transparency and manufacturing method thereof |
EP1376209A1 (fr) * | 2002-06-21 | 2004-01-02 | Asulab S.A. | Procédé de fabrication d'un dispositif délimitant un volume pour le confinement d'un fluide ou d'une matière sensible |
KR100527187B1 (ko) * | 2003-05-01 | 2005-11-08 | 삼성에스디아이 주식회사 | 고효율 유기전계 발광표시장치 및 그의 제조방법 |
KR100686333B1 (ko) * | 2003-07-04 | 2007-02-22 | 삼성에스디아이 주식회사 | 박막트랜지스터, 이를 구비하는 평판표시장치 및 그의 제조방법 |
KR100542997B1 (ko) | 2003-08-07 | 2006-01-20 | 삼성에스디아이 주식회사 | 평판표시장치 및 그의 제조방법 |
KR100581901B1 (ko) * | 2004-02-06 | 2006-05-22 | 삼성에스디아이 주식회사 | 액티브 매트릭스형 유기전계발광소자 |
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KR100659054B1 (ko) * | 2004-06-23 | 2006-12-21 | 삼성에스디아이 주식회사 | 유기 박막 트랜지스터를 구비한 능동 구동형 유기전계발광 디스플레이 장치 및 그 제조방법 |
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US20060012742A1 (en) * | 2004-07-16 | 2006-01-19 | Yaw-Ming Tsai | Driving device for active matrix organic light emitting diode display and manufacturing method thereof |
KR101035914B1 (ko) * | 2004-07-30 | 2011-05-23 | 엘지디스플레이 주식회사 | 평판 표시 소자 및 그의 제조방법 |
US7033902B2 (en) * | 2004-09-23 | 2006-04-25 | Toppoly Optoelectronics Corp. | Method for making thin film transistors with lightly doped regions |
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CN103022049B (zh) * | 2012-12-12 | 2015-12-02 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法、显示装置 |
JP6028668B2 (ja) * | 2013-04-17 | 2016-11-16 | コニカミノルタ株式会社 | 透明電極、電子デバイス及び有機エレクトロルミネッセンス素子 |
CN103700685B (zh) * | 2013-12-12 | 2017-12-08 | 京东方科技集团股份有限公司 | 一种显示面板、显示装置 |
CN103715204B (zh) * | 2013-12-27 | 2015-05-27 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法、显示装置 |
KR102346262B1 (ko) * | 2014-07-14 | 2022-01-03 | 엘지디스플레이 주식회사 | 유기 발광 표시장치 및 이를 제조하는 방법 |
KR102241846B1 (ko) * | 2014-07-16 | 2021-04-20 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
JP6807235B2 (ja) * | 2017-01-11 | 2021-01-06 | 株式会社ジャパンディスプレイ | 表示装置 |
CN107179638B (zh) * | 2017-07-27 | 2021-01-15 | 京东方科技集团股份有限公司 | 一种显示面板及其控制方法、显示装置 |
CN114497118A (zh) * | 2020-10-23 | 2022-05-13 | 京东方科技集团股份有限公司 | 显示基板及其制备方法、显示装置 |
TWI793859B (zh) | 2021-11-16 | 2023-02-21 | 友達光電股份有限公司 | 透明電子裝置及其製造方法 |
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-
2002
- 2002-01-30 KR KR10-2002-0005435A patent/KR100483988B1/ko active IP Right Grant
- 2002-06-10 US US10/164,385 patent/US6955578B2/en not_active Expired - Lifetime
- 2002-11-27 CN CNB2005100041021A patent/CN100510851C/zh not_active Expired - Lifetime
- 2002-11-27 CN CNB021524262A patent/CN1262020C/zh not_active Expired - Lifetime
-
2005
- 2005-07-22 US US11/186,830 patent/US7511416B2/en not_active Expired - Lifetime
-
2009
- 2009-02-17 US US12/372,377 patent/US7988514B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7988514B2 (en) | 2001-11-29 | 2011-08-02 | Samsung Mobile Display Co., Ltd. | Method of varying transmittance of transparent conductive layer, flat panel display device and manufacturing method thereof |
Also Published As
Publication number | Publication date |
---|---|
CN100510851C (zh) | 2009-07-08 |
KR100483988B1 (ko) | 2005-04-15 |
CN1423344A (zh) | 2003-06-11 |
US7511416B2 (en) | 2009-03-31 |
KR20030044744A (ko) | 2003-06-09 |
US20050269939A1 (en) | 2005-12-08 |
US20090155946A1 (en) | 2009-06-18 |
US20030107326A1 (en) | 2003-06-12 |
US6955578B2 (en) | 2005-10-18 |
US7988514B2 (en) | 2011-08-02 |
CN1262020C (zh) | 2006-06-28 |
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