CN1287578A - 烧结氧化物溅射靶组件 - Google Patents
烧结氧化物溅射靶组件 Download PDFInfo
- Publication number
- CN1287578A CN1287578A CN99801777A CN99801777A CN1287578A CN 1287578 A CN1287578 A CN 1287578A CN 99801777 A CN99801777 A CN 99801777A CN 99801777 A CN99801777 A CN 99801777A CN 1287578 A CN1287578 A CN 1287578A
- Authority
- CN
- China
- Prior art keywords
- target
- sintered body
- oxide
- target assembly
- thickness portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005477 sputtering target Methods 0.000 title claims description 35
- 238000004544 sputter deposition Methods 0.000 claims abstract description 12
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 7
- 238000002679 ablation Methods 0.000 claims description 12
- 210000000003 hoof Anatomy 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 6
- 238000009826 distribution Methods 0.000 claims description 4
- 230000003746 surface roughness Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 22
- 230000003628 erosive effect Effects 0.000 abstract description 9
- 229910052751 metal Inorganic materials 0.000 abstract description 8
- 239000002184 metal Substances 0.000 abstract description 8
- 238000005219 brazing Methods 0.000 abstract 1
- 239000000945 filler Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 15
- 229910052738 indium Inorganic materials 0.000 description 13
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 13
- 230000000712 assembly Effects 0.000 description 8
- 238000000429 assembly Methods 0.000 description 8
- 238000005245 sintering Methods 0.000 description 7
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 6
- 229910052725 zinc Inorganic materials 0.000 description 6
- 239000011701 zinc Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
- 239000000395 magnesium oxide Substances 0.000 description 3
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- -1 ITO Chemical class 0.000 description 2
- 238000005267 amalgamation Methods 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 244000137852 Petrea volubilis Species 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910001651 emery Inorganic materials 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3426—Material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (8)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP297571/1998 | 1998-10-06 | ||
JP297571/98 | 1998-10-06 | ||
JP10297571A JP3076311B2 (ja) | 1998-10-06 | 1998-10-06 | 酸化物焼結体スパッタリングターゲット組立体 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1287578A true CN1287578A (zh) | 2001-03-14 |
CN1238552C CN1238552C (zh) | 2006-01-25 |
Family
ID=17848284
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB998017779A Expired - Lifetime CN1238552C (zh) | 1998-10-06 | 1999-09-28 | 烧结氧化物溅射靶组件 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP3076311B2 (zh) |
KR (1) | KR100332476B1 (zh) |
CN (1) | CN1238552C (zh) |
TW (1) | TW448237B (zh) |
WO (1) | WO2000020654A1 (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1880000B (zh) * | 2005-06-13 | 2010-10-20 | 应用材料股份有限公司 | 溅镀靶材、溅镀靶材组件和焊接溅镀靶材牌的方法 |
CN101395295B (zh) * | 2006-03-02 | 2012-05-23 | Gfe弗赖麦特有限公司 | 靶子装置 |
WO2013075317A1 (zh) * | 2011-11-21 | 2013-05-30 | 深圳市华星光电技术有限公司 | 透明导电层的溅射靶材构造 |
CN104532198A (zh) * | 2014-12-16 | 2015-04-22 | 张家港市铭斯特光电科技有限公司 | 一种磁控溅射镀膜用阴极 |
CN105734508A (zh) * | 2016-04-08 | 2016-07-06 | 有研亿金新材料有限公司 | 一种氧化物靶材及其制备方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020069603A (ko) * | 2001-02-27 | 2002-09-05 | 임조섭 | 마그네트론 스퍼터링 장치용 스퍼터링 타겟 |
JP2003264307A (ja) * | 2002-03-11 | 2003-09-19 | Sharp Corp | 薄膜太陽電池及びその製造方法 |
CN1756857B (zh) * | 2003-03-04 | 2010-09-29 | 日矿金属株式会社 | 溅射靶、光信息记录介质用薄膜及其制造方法 |
JP4882332B2 (ja) * | 2005-10-11 | 2012-02-22 | 大日本印刷株式会社 | スパッタ装置 |
JP2009127125A (ja) * | 2007-11-28 | 2009-06-11 | Mitsui Mining & Smelting Co Ltd | スパッタリングターゲット材およびこれから得られるスパッタリングターゲット |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4428816A (en) * | 1983-05-25 | 1984-01-31 | Materials Research Corporation | Focusing magnetron sputtering apparatus |
JP2720755B2 (ja) * | 1993-04-23 | 1998-03-04 | 三菱マテリアル株式会社 | マグネトロンスパッタリング用Tiターゲット材 |
JP2917743B2 (ja) * | 1993-04-23 | 1999-07-12 | 三菱マテリアル株式会社 | マグネトロンスパッタリング用Siターゲット材 |
JPH08176809A (ja) * | 1994-12-21 | 1996-07-09 | Asahi Glass Co Ltd | スパッタリング用ターゲットおよびその再利用方法 |
JPH09111445A (ja) * | 1995-10-12 | 1997-04-28 | Dainippon Printing Co Ltd | スパッタリングターゲット |
-
1998
- 1998-10-06 JP JP10297571A patent/JP3076311B2/ja not_active Expired - Lifetime
-
1999
- 1999-09-28 WO PCT/JP1999/005274 patent/WO2000020654A1/ja active IP Right Grant
- 1999-09-28 CN CNB998017779A patent/CN1238552C/zh not_active Expired - Lifetime
- 1999-09-28 TW TW088116588A patent/TW448237B/zh not_active IP Right Cessation
- 1999-09-28 KR KR1020007005995A patent/KR100332476B1/ko active IP Right Grant
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1880000B (zh) * | 2005-06-13 | 2010-10-20 | 应用材料股份有限公司 | 溅镀靶材、溅镀靶材组件和焊接溅镀靶材牌的方法 |
CN101395295B (zh) * | 2006-03-02 | 2012-05-23 | Gfe弗赖麦特有限公司 | 靶子装置 |
WO2013075317A1 (zh) * | 2011-11-21 | 2013-05-30 | 深圳市华星光电技术有限公司 | 透明导电层的溅射靶材构造 |
CN104532198A (zh) * | 2014-12-16 | 2015-04-22 | 张家港市铭斯特光电科技有限公司 | 一种磁控溅射镀膜用阴极 |
CN105734508A (zh) * | 2016-04-08 | 2016-07-06 | 有研亿金新材料有限公司 | 一种氧化物靶材及其制备方法 |
CN105734508B (zh) * | 2016-04-08 | 2019-08-16 | 有研亿金新材料有限公司 | 一种氧化物靶材及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2000020654A1 (fr) | 2000-04-13 |
JP2000119847A (ja) | 2000-04-25 |
JP3076311B2 (ja) | 2000-08-14 |
KR100332476B1 (ko) | 2002-04-13 |
CN1238552C (zh) | 2006-01-25 |
KR20010032706A (ko) | 2001-04-25 |
TW448237B (en) | 2001-08-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1238552C (zh) | 烧结氧化物溅射靶组件 | |
CN1247812C (zh) | 溅射靶 | |
CN1160485C (zh) | 制造切削刀具的方法和设备 | |
CN111775073B (zh) | 一种抛光垫修整器及其制作方法 | |
JPH1070294A (ja) | 太陽電池用基板およびその製造方法 | |
CN1180123C (zh) | 铟锡氧化物溅射靶 | |
CN1757266A (zh) | 被成形用于物理气相沉积室中的线圈构造和形成线圈构造的方法 | |
CN1811009A (zh) | 利用pvd法的成膜方法以及利用于pvd法的成膜用靶 | |
JP3915965B2 (ja) | Izoスパッタリングターゲットの製造方法 | |
JP6755378B1 (ja) | ターゲット材の研磨方法、ターゲット材の製造方法及びリサイクル鋳塊の製造方法 | |
CN220408408U (zh) | 一种复合电镀金刚线 | |
JP2003183820A (ja) | スパッタリングターゲット | |
KR20160103538A (ko) | 스퍼터링 타겟 | |
JP2007126736A (ja) | スパッタリングターゲットおよびその製造方法 | |
JP2005002364A (ja) | スパッタリングターゲット及びその製造方法 | |
CN100346912C (zh) | 钻头 | |
JPH1161395A (ja) | Itoスパッタリングターゲット | |
CN1297684C (zh) | 单片式溅射靶 | |
CN111469062B (zh) | 制动分离式液态金属研磨盘装置 | |
JP2004052082A (ja) | スパッタリングターゲット組立体 | |
CN1952208A (zh) | 一种磁控溅射镀膜用低熔点金属与背板加工工艺 | |
CN200981892Y (zh) | 一种低熔点金属与背板的结构 | |
CN1365398A (zh) | 铟锡氧化物溅射靶 | |
JPH03228579A (ja) | 難切削性材料用カッティングホイール | |
CN111451950B (zh) | 摇臂送料式研磨盘制备装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: NIPPON MINING AND METALS CO., LTD. Free format text: FORMER NAME OR ADDRESS: NIKKO MATERIALS CO. LTD |
|
CP03 | Change of name, title or address |
Address after: Tokyo, Japan, Japan Patentee after: Nippon Mining & Metals Co., Ltd. Address before: Tokyo, Japan, Japan Patentee before: Nikko Materials Company, Limited |
|
ASS | Succession or assignment of patent right |
Owner name: JX NIPPON MINING + METALS CORP. Free format text: FORMER OWNER: NIPPON MINING + METALS CO., LTD. Effective date: 20110510 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20110510 Address after: Tokyo, Japan, Japan Patentee after: JX Nippon Mining & Metals Corporation Address before: Tokyo, Japan, Japan Patentee before: Nippon Mining & Metals Co., Ltd. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan, Japan Patentee after: JX NIPPON MINING & METALS CORPORATION Address before: Tokyo, Japan, Japan Patentee before: JX Nippon Mining & Metals Corporation |
|
CP01 | Change in the name or title of a patent holder | ||
CX01 | Expiry of patent term |
Granted publication date: 20060125 |
|
CX01 | Expiry of patent term |