CN1286801C - 具防止铜扩散阻障效果之介电质 - Google Patents
具防止铜扩散阻障效果之介电质 Download PDFInfo
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- CN1286801C CN1286801C CNB031452833A CN03145283A CN1286801C CN 1286801 C CN1286801 C CN 1286801C CN B031452833 A CNB031452833 A CN B031452833A CN 03145283 A CN03145283 A CN 03145283A CN 1286801 C CN1286801 C CN 1286801C
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- polymkeric substance
- polybenzoxazole
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- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
- H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
- H01B3/44—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes vinyl resins; acrylic resins
- H01B3/441—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes vinyl resins; acrylic resins from alkenes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02203—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being porous
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Formation Of Insulating Films (AREA)
- Organic Insulating Materials (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
Description
Claims (13)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10228770.8 | 2002-06-27 | ||
DE10228770A DE10228770A1 (de) | 2002-06-27 | 2002-06-27 | Dielektrikum mit Sperrwirkung gegen Kupferdiffusion |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1468839A CN1468839A (zh) | 2004-01-21 |
CN1286801C true CN1286801C (zh) | 2006-11-29 |
Family
ID=29716688
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031452833A Expired - Fee Related CN1286801C (zh) | 2002-06-27 | 2003-06-27 | 具防止铜扩散阻障效果之介电质 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6806344B2 (zh) |
EP (1) | EP1375559B1 (zh) |
JP (1) | JP4041019B2 (zh) |
KR (1) | KR100579336B1 (zh) |
CN (1) | CN1286801C (zh) |
DE (2) | DE10228770A1 (zh) |
SG (1) | SG114619A1 (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10115882B4 (de) * | 2001-03-30 | 2006-08-24 | Infineon Technologies Ag | Polyhydroxamide, daraus durch Cyclisierung erhältliche Polybenzoxazole, Verfahren zur Herstellung der Polyhydroxamide und Polybenzoxazole, Beschichtungsmaterial für elektronische Bauelemente, elektronische Bauteile mit einer Schicht der Polybenzoxazole, Verfahren zur Beschichtung von Substraten mit den Polyhydroxamiden, Verwendung von Polybenzoxazolen als Isolier- und/oder Schutzschicht und Zusammensetzung enthaltend das Polyhydroxamid |
DE10145469B4 (de) * | 2001-09-14 | 2006-07-06 | Infineon Technologies Ag | Poly-o-hydroxyamid und Verfahren zu seiner Weiterverarbeitung zu Polybenzoxazol |
DE10228769A1 (de) * | 2002-06-27 | 2004-02-05 | Infineon Technologies Ag | Isoliermaterial für Aluminium und Kupfermetallisierungen |
US7081674B2 (en) | 2003-06-13 | 2006-07-25 | Rensselaer Polytechnic Institute | Polyelectrolyte nanolayers as diffusion barriers in semiconductor devices |
JP2005311069A (ja) * | 2004-04-21 | 2005-11-04 | Jsr Corp | 半導体装置およびその製造方法 |
CN100481378C (zh) * | 2004-05-21 | 2009-04-22 | Jsr株式会社 | 层叠体及半导体装置 |
JP2006219396A (ja) * | 2005-02-09 | 2006-08-24 | Jfe Chemical Corp | 芳香族ジアミン化合物及びその製造方法 |
JP2006286878A (ja) * | 2005-03-31 | 2006-10-19 | Consortium For Advanced Semiconductor Materials & Related Technologies | 半導体装置製造方法 |
JP2007081162A (ja) * | 2005-09-14 | 2007-03-29 | Sumitomo Bakelite Co Ltd | 半導体装置およびその製造方法 |
JP2008016640A (ja) * | 2006-07-06 | 2008-01-24 | Consortium For Advanced Semiconductor Materials & Related Technologies | 半導体装置 |
DE102009001919B4 (de) * | 2009-03-26 | 2013-10-02 | Semikron Elektronik Gmbh & Co. Kg | Verfahren zum Herstellen einer Mehrzahl von integrierten Halbleiterbauelementen |
JP7145126B2 (ja) * | 2018-08-01 | 2022-09-30 | 信越化学工業株式会社 | ポリアミド、ポリアミドイミド、ポリイミド構造を含む重合体、感光性樹脂組成物、パターン形成方法、感光性ドライフィルム及び電気・電子部品保護用皮膜 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2931297A1 (de) | 1979-08-01 | 1981-02-19 | Siemens Ag | Waermebestaendige positivresists und verfahren zur herstellung waermebestaendiger reliefstrukturen |
US4611053A (en) * | 1985-02-15 | 1986-09-09 | Sasa Michiyuki Mitch | Polyhydroxamide polymer |
US5173542A (en) | 1989-12-08 | 1992-12-22 | Raychem Corporation | Bistriazene compounds and polymeric compositions crosslinked therewith |
US5155175A (en) | 1989-12-08 | 1992-10-13 | Intellectual Property Law Dept. | Crosslinkable fluorinated polyarylene ether composition |
EP0761716B1 (de) * | 1995-08-31 | 2001-02-28 | Infineon Technologies AG | Verfahren zur Herstellung von Poly-o-hydroxyamiden und Poly-o-mercaptoamiden |
EP0854849B1 (en) | 1995-09-12 | 2001-10-31 | The Dow Chemical Company | Ethynyl substituted aromatic compounds, synthesis, polymers and uses thereof |
DE10011608A1 (de) | 2000-03-10 | 2001-10-18 | Infineon Technologies Ag | Bis-o-aminophenole und o-Aminophenolcarbonsäuren |
DE10011604A1 (de) | 2000-03-10 | 2001-10-04 | Infineon Technologies Ag | Polybenzoxazol-Vorstufen |
JP2002174609A (ja) * | 2000-12-08 | 2002-06-21 | Sumitomo Bakelite Co Ltd | 高分子感湿材料 |
-
2002
- 2002-06-27 DE DE10228770A patent/DE10228770A1/de not_active Withdrawn
-
2003
- 2003-06-17 DE DE50306084T patent/DE50306084D1/de not_active Expired - Lifetime
- 2003-06-17 EP EP03013753A patent/EP1375559B1/de not_active Expired - Lifetime
- 2003-06-24 SG SG200303480A patent/SG114619A1/en unknown
- 2003-06-26 KR KR1020030041909A patent/KR100579336B1/ko not_active IP Right Cessation
- 2003-06-26 JP JP2003183611A patent/JP4041019B2/ja not_active Expired - Fee Related
- 2003-06-27 CN CNB031452833A patent/CN1286801C/zh not_active Expired - Fee Related
- 2003-06-27 US US10/609,460 patent/US6806344B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20040063895A1 (en) | 2004-04-01 |
EP1375559A1 (de) | 2004-01-02 |
CN1468839A (zh) | 2004-01-21 |
SG114619A1 (en) | 2005-09-28 |
DE10228770A1 (de) | 2004-02-12 |
KR20040002741A (ko) | 2004-01-07 |
DE50306084D1 (de) | 2007-02-08 |
US6806344B2 (en) | 2004-10-19 |
JP4041019B2 (ja) | 2008-01-30 |
EP1375559B1 (de) | 2006-12-27 |
JP2004068005A (ja) | 2004-03-04 |
KR100579336B1 (ko) | 2006-05-12 |
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