CN1239969C - 用于微电子学器件生产的逐次运行控制器 - Google Patents

用于微电子学器件生产的逐次运行控制器 Download PDF

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Publication number
CN1239969C
CN1239969C CNB008119414A CN00811941A CN1239969C CN 1239969 C CN1239969 C CN 1239969C CN B008119414 A CNB008119414 A CN B008119414A CN 00811941 A CN00811941 A CN 00811941A CN 1239969 C CN1239969 C CN 1239969C
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China
Prior art keywords
model
run
tool
metrology
control
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Expired - Fee Related
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CNB008119414A
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English (en)
Chinese (zh)
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CN1371489A (zh
Inventor
K·D·斯托达
B·D·舒尔策
K·察卡利斯
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Azenta Inc
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Brooks Automation Inc
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41885—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by modeling, simulation of the manufacturing system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31086—Communication of carriage, agv data, workpiece data at each station
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31104—Remote configuration of parameters of controlled devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31422—Upload, download programs, parameters from, to station to, from server
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32388—Autonomous flexible system, cells and agv autonomous
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Factory Administration (AREA)
  • Feedback Control In General (AREA)
  • Numerical Control (AREA)
  • Control By Computers (AREA)
CNB008119414A 1999-06-22 2000-06-20 用于微电子学器件生产的逐次运行控制器 Expired - Fee Related CN1239969C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US14043499P 1999-06-22 1999-06-22
US60/140434 1999-06-22
US16898499P 1999-12-03 1999-12-03
US60/168984 1999-12-03

Publications (2)

Publication Number Publication Date
CN1371489A CN1371489A (zh) 2002-09-25
CN1239969C true CN1239969C (zh) 2006-02-01

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Family Applications (1)

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CNB008119414A Expired - Fee Related CN1239969C (zh) 1999-06-22 2000-06-20 用于微电子学器件生产的逐次运行控制器

Country Status (8)

Country Link
US (1) US6587744B1 (enExample)
EP (1) EP1200885A1 (enExample)
JP (1) JP2003502771A (enExample)
KR (1) KR100649387B1 (enExample)
CN (1) CN1239969C (enExample)
AU (1) AU5881700A (enExample)
TW (1) TW484043B (enExample)
WO (1) WO2000079355A1 (enExample)

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* Cited by examiner, † Cited by third party
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