CN1200896C - 石英玻璃的制造方法及所用的颗粒和由其构成的部件 - Google Patents

石英玻璃的制造方法及所用的颗粒和由其构成的部件 Download PDF

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Publication number
CN1200896C
CN1200896C CNB008177104A CN00817710A CN1200896C CN 1200896 C CN1200896 C CN 1200896C CN B008177104 A CNB008177104 A CN B008177104A CN 00817710 A CN00817710 A CN 00817710A CN 1200896 C CN1200896 C CN 1200896C
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CN
China
Prior art keywords
sio
particles
particle
density
quartz glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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CNB008177104A
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English (en)
Chinese (zh)
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CN1413175A (zh
Inventor
W·维尔德克
H·法比安
U·格尔蒂格
J·莱斯特
R·格贝尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzglas GmbH and Co KG
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Heraeus Quarzglas GmbH and Co KG
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Publication of CN1413175A publication Critical patent/CN1413175A/zh
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
    • C03C1/02—Pretreated ingredients
    • C03C1/026—Pelletisation or prereacting of powdered raw materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/10—Forming beads
    • C03B19/1005—Forming solid beads
    • C03B19/106—Forming solid beads by chemical vapour deposition; by liquid phase reaction
    • C03B19/1065—Forming solid beads by chemical vapour deposition; by liquid phase reaction by liquid phase reactions, e.g. by means of a gel phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
    • C03C2201/24—Doped silica-based glasses containing non-metals other than boron or halide containing nitrogen, e.g. silicon oxy-nitride glasses
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
    • C03C2201/26—Doped silica-based glasses containing non-metals other than boron or halide containing carbon
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/30—Doped silica-based glasses containing metals
    • C03C2201/32—Doped silica-based glasses containing metals containing aluminium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/80—Glass compositions containing bubbles or microbubbles, e.g. opaque quartz glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00—Production processes
    • C03C2203/10—Melting processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00—Production processes
    • C03C2203/50—After-treatment
    • C03C2203/52—Heat-treatment
    • C03C2203/54—Heat-treatment in a dopant containing atmosphere

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Silicon Compounds (AREA)
  • Glass Compositions (AREA)
CNB008177104A 1999-12-22 2000-12-14 石英玻璃的制造方法及所用的颗粒和由其构成的部件 Expired - Lifetime CN1200896C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19962451.8 1999-12-22
DE19962451A DE19962451C1 (de) 1999-12-22 1999-12-22 Verfahren für die Herstellung von opakem Quarzglas und für die Durchführung des Verfahrens geeignetes Si0¶2¶-Granulat

Publications (2)

Publication Number Publication Date
CN1413175A CN1413175A (zh) 2003-04-23
CN1200896C true CN1200896C (zh) 2005-05-11

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CNB008177104A Expired - Lifetime CN1200896C (zh) 1999-12-22 2000-12-14 石英玻璃的制造方法及所用的颗粒和由其构成的部件

Country Status (9)

Country Link
US (1) US6380110B1 (cg-RX-API-DMAC10.html)
EP (1) EP1240114B1 (cg-RX-API-DMAC10.html)
JP (1) JP4681189B2 (cg-RX-API-DMAC10.html)
KR (1) KR100716485B1 (cg-RX-API-DMAC10.html)
CN (1) CN1200896C (cg-RX-API-DMAC10.html)
CA (1) CA2395501A1 (cg-RX-API-DMAC10.html)
DE (2) DE19962451C1 (cg-RX-API-DMAC10.html)
TW (1) TW548246B (cg-RX-API-DMAC10.html)
WO (1) WO2001046079A1 (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107417071A (zh) * 2016-05-24 2017-12-01 贺利氏石英玻璃股份有限两合公司 制造含孔隙的不透明石英玻璃的方法

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DE10019693B4 (de) * 2000-04-20 2006-01-19 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Bauteils aus opakem, synthetischen Quarzglas, nach dem Verfahren hergestelltes Quarzglasrohr, sowie Verwendung desselben
DE10020955A1 (de) * 2000-04-28 2001-11-22 Fraunhofer Ges Forschung Formkörper und Verfahren zur Herstellung
DE10055362C1 (de) * 2000-11-08 2002-01-24 Heraeus Quarzglas Verfahren zur Herstellung eines SiO¶2¶-Rohlings und Vorrichtung zur Durchführung des Verfahrens
DE10055357C1 (de) * 2000-11-08 2002-08-14 Heraeus Quarzglas Verfahren und Vorrichtung zur Herstellung eines SiO¶2¶-Rohlings
DE10159959A1 (de) * 2001-12-06 2003-06-26 Heraeus Quarzglas Quarzglasrohling für ein optisches Bauteil und Verwendung desselben
DE10243953B4 (de) * 2002-09-21 2005-11-17 Heraeus Quarzglas Gmbh & Co. Kg Verfahren für die Herstellung eines Bauteils aus opakem Quarzglas
CN100509669C (zh) * 2002-11-29 2009-07-08 信越石英株式会社 合成石英玻璃的制造方法及合成石英玻璃体
WO2005054139A1 (de) * 2003-12-08 2005-06-16 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur herstellung von laseraktivem quarzglas und verwendung desselben
DE102004038602B3 (de) * 2004-08-07 2005-12-29 Heraeus Quarzglas Gmbh & Co. Kg Elektrogeschmolzenes, synthetisches Quarzglas, insbesondere für den Einsatz in der Lampen- und in der Halbleiterfertigung und Verfahren zur Herstellung desselben
DE102004052312A1 (de) * 2004-08-23 2006-03-02 Heraeus Quarzglas Gmbh & Co. Kg Beschichtetes Bauteil aus Quarzglas sowie Verfahren zur Herstellung des Bauteils
DE102004051846B4 (de) * 2004-08-23 2009-11-05 Heraeus Quarzglas Gmbh & Co. Kg Bauteil mit einer Reflektorschicht sowie Verfahren für seine Herstellung
US7563512B2 (en) * 2004-08-23 2009-07-21 Heraeus Quarzglas Gmbh & Co. Kg Component with a reflector layer and method for producing the same
DE102006018711B4 (de) * 2006-04-20 2008-09-25 Heraeus Quarzglas Gmbh & Co. Kg Werkstoff, insbesondere für ein optisches Bauteil zum Einsatz in der Mikrolithographie und Verfahren zur Herstellung eines Formkörpers aus dem Werkstoff
JP5314429B2 (ja) * 2006-12-05 2013-10-16 信越石英株式会社 合成不透明石英ガラス及びその製造方法
DE102007017004A1 (de) * 2007-02-27 2008-08-28 Heraeus Quarzglas Gmbh & Co. Kg Optisches Bauteil aus synthetischem Quarzglas mit erhöhter Strahlenbeständigkeit, sowie Verfahren zur Herstellung des Bauteils
JP5171098B2 (ja) * 2007-04-24 2013-03-27 岩崎電気株式会社 石英ガラス製品の製造方法、それに用いるシリカ顆粒とその生成方法
DE102009005446A1 (de) * 2009-01-21 2010-07-22 Schott Ag Granulat, Verfahren zu dessen Herstellung sowie dessen Verwendung
KR101246157B1 (ko) * 2010-12-09 2013-03-20 한국세라믹기술원 엔지니어드 스톤의 제조방법
TWI652240B (zh) * 2014-02-17 2019-03-01 日商東曹股份有限公司 不透明石英玻璃及其製造方法
EP3000790B2 (de) 2014-09-29 2023-07-26 Heraeus Quarzglas GmbH & Co. KG Verfahren für die Herstellung von Bauteilen aus synthetischem Quarzglas aus SiO2-Granulat
JP6558137B2 (ja) * 2015-08-07 2019-08-14 東ソー株式会社 不透明シリカガラス製造用の高強度成形体
CN108698892A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 从二氧化硅颗粒制备石英玻璃体
CN108698890A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 利用在熔融烘箱中的露点监测制备石英玻璃体
US11299417B2 (en) 2015-12-18 2022-04-12 Heraeus Quarzglas Gmbh & Co. Kg Preparation of a quartz glass body in a melting crucible of refractory metal
JP2019502632A (ja) * 2015-12-18 2019-01-31 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 立設式焼結坩堝内での石英ガラス体の調製
JP2019506349A (ja) * 2015-12-18 2019-03-07 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 吊り下げ式金属シート坩堝内での石英ガラス体の調製
CN108698888A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 在石英玻璃制备中作为中间物的经碳掺杂的二氧化硅颗粒的制备
TWI808933B (zh) * 2015-12-18 2023-07-21 德商何瑞斯廓格拉斯公司 石英玻璃體、二氧化矽顆粒、光導、施照體、及成型體及其製備方法
KR20180095619A (ko) 2015-12-18 2018-08-27 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 실리카 유리 제조 동안 규소 함량의 증가
KR20180095880A (ko) 2015-12-18 2018-08-28 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 합성 석영 유리 결정립의 제조
WO2017103153A1 (de) 2015-12-18 2017-06-22 Heraeus Quarzglas Gmbh & Co. Kg Glasfasern und vorformen aus quarzglas mit geringem oh-, cl- und al-gehalt
CN108698894A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 在多腔式烘箱中制备石英玻璃体
EP3390306A2 (de) * 2015-12-18 2018-10-24 Heraeus Quarzglas GmbH & Co. KG Herstellung eines quarzglaskörpers in einem hängenden sintertiegel
TWI733723B (zh) 2015-12-18 2021-07-21 德商何瑞斯廓格拉斯公司 不透明石英玻璃體的製備
EP3185057A1 (de) * 2015-12-22 2017-06-28 Heraeus Quarzglas GmbH & Co. KG Faseroptische streueinrichtung und herstellungsverfahren dafür
JP6878829B2 (ja) * 2016-10-26 2021-06-02 東ソー株式会社 シリカ粉末及び高流動性シリカ造粒粉末並びにその製造方法
EP3476815B1 (en) 2017-10-27 2023-11-29 Heraeus Quarzglas GmbH & Co. KG Production of a porous product including post-adapting a pore structure

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107417071A (zh) * 2016-05-24 2017-12-01 贺利氏石英玻璃股份有限两合公司 制造含孔隙的不透明石英玻璃的方法
CN107417071B (zh) * 2016-05-24 2021-08-17 贺利氏石英玻璃股份有限两合公司 制造含孔隙的不透明石英玻璃的方法

Also Published As

Publication number Publication date
EP1240114B1 (de) 2005-12-07
US6380110B1 (en) 2002-04-30
JP4681189B2 (ja) 2011-05-11
DE50011832D1 (de) 2006-01-12
WO2001046079A1 (de) 2001-06-28
DE19962451C1 (de) 2001-08-30
CN1413175A (zh) 2003-04-23
CA2395501A1 (en) 2001-06-28
TW548246B (en) 2003-08-21
JP2004500299A (ja) 2004-01-08
KR20020066333A (ko) 2002-08-14
KR100716485B1 (ko) 2007-05-10
EP1240114A1 (de) 2002-09-18

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