TW548246B - Process for producing opaque quartz glass, SiO2 granulate suitable for the process, and an article of opaque quartz glass - Google Patents

Process for producing opaque quartz glass, SiO2 granulate suitable for the process, and an article of opaque quartz glass Download PDF

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Publication number
TW548246B
TW548246B TW089127771A TW89127771A TW548246B TW 548246 B TW548246 B TW 548246B TW 089127771 A TW089127771 A TW 089127771A TW 89127771 A TW89127771 A TW 89127771A TW 548246 B TW548246 B TW 548246B
Authority
TW
Taiwan
Prior art keywords
particles
patent application
item
scope
quartz glass
Prior art date
Application number
TW089127771A
Other languages
English (en)
Chinese (zh)
Inventor
Waltraud Werdecker
Heinz Fabian
Udo Gertig
Johann Leist
Rolf Gobel
Original Assignee
Shinetsu Quartz Prod
Heraeus Quarzglas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Quartz Prod, Heraeus Quarzglas filed Critical Shinetsu Quartz Prod
Application granted granted Critical
Publication of TW548246B publication Critical patent/TW548246B/zh

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
    • C03C1/02—Pretreated ingredients
    • C03C1/026—Pelletisation or prereacting of powdered raw materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/10—Forming beads
    • C03B19/1005—Forming solid beads
    • C03B19/106—Forming solid beads by chemical vapour deposition; by liquid phase reaction
    • C03B19/1065—Forming solid beads by chemical vapour deposition; by liquid phase reaction by liquid phase reactions, e.g. by means of a gel phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
    • C03C2201/24—Doped silica-based glasses containing non-metals other than boron or halide containing nitrogen, e.g. silicon oxy-nitride glasses
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
    • C03C2201/26—Doped silica-based glasses containing non-metals other than boron or halide containing carbon
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/30—Doped silica-based glasses containing metals
    • C03C2201/32—Doped silica-based glasses containing metals containing aluminium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/80—Glass compositions containing bubbles or microbubbles, e.g. opaque quartz glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00—Production processes
    • C03C2203/10—Melting processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00—Production processes
    • C03C2203/50—After-treatment
    • C03C2203/52—Heat-treatment
    • C03C2203/54—Heat-treatment in a dopant containing atmosphere

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Silicon Compounds (AREA)
  • Glass Compositions (AREA)
TW089127771A 1999-12-22 2000-12-22 Process for producing opaque quartz glass, SiO2 granulate suitable for the process, and an article of opaque quartz glass TW548246B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19962451A DE19962451C1 (de) 1999-12-22 1999-12-22 Verfahren für die Herstellung von opakem Quarzglas und für die Durchführung des Verfahrens geeignetes Si0¶2¶-Granulat

Publications (1)

Publication Number Publication Date
TW548246B true TW548246B (en) 2003-08-21

Family

ID=7934123

Family Applications (1)

Application Number Title Priority Date Filing Date
TW089127771A TW548246B (en) 1999-12-22 2000-12-22 Process for producing opaque quartz glass, SiO2 granulate suitable for the process, and an article of opaque quartz glass

Country Status (9)

Country Link
US (1) US6380110B1 (cg-RX-API-DMAC10.html)
EP (1) EP1240114B1 (cg-RX-API-DMAC10.html)
JP (1) JP4681189B2 (cg-RX-API-DMAC10.html)
KR (1) KR100716485B1 (cg-RX-API-DMAC10.html)
CN (1) CN1200896C (cg-RX-API-DMAC10.html)
CA (1) CA2395501A1 (cg-RX-API-DMAC10.html)
DE (2) DE19962451C1 (cg-RX-API-DMAC10.html)
TW (1) TW548246B (cg-RX-API-DMAC10.html)
WO (1) WO2001046079A1 (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
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TWI705045B (zh) * 2016-05-24 2020-09-21 德商何瑞斯廓格拉斯公司 用於製備含有孔洞之不透明石英玻璃的方法

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DE10019693B4 (de) * 2000-04-20 2006-01-19 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Bauteils aus opakem, synthetischen Quarzglas, nach dem Verfahren hergestelltes Quarzglasrohr, sowie Verwendung desselben
DE10020955A1 (de) * 2000-04-28 2001-11-22 Fraunhofer Ges Forschung Formkörper und Verfahren zur Herstellung
DE10055362C1 (de) * 2000-11-08 2002-01-24 Heraeus Quarzglas Verfahren zur Herstellung eines SiO¶2¶-Rohlings und Vorrichtung zur Durchführung des Verfahrens
DE10055357C1 (de) * 2000-11-08 2002-08-14 Heraeus Quarzglas Verfahren und Vorrichtung zur Herstellung eines SiO¶2¶-Rohlings
DE10159959A1 (de) * 2001-12-06 2003-06-26 Heraeus Quarzglas Quarzglasrohling für ein optisches Bauteil und Verwendung desselben
DE10243953B4 (de) * 2002-09-21 2005-11-17 Heraeus Quarzglas Gmbh & Co. Kg Verfahren für die Herstellung eines Bauteils aus opakem Quarzglas
CN100509669C (zh) * 2002-11-29 2009-07-08 信越石英株式会社 合成石英玻璃的制造方法及合成石英玻璃体
WO2005054139A1 (de) * 2003-12-08 2005-06-16 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur herstellung von laseraktivem quarzglas und verwendung desselben
DE102004038602B3 (de) * 2004-08-07 2005-12-29 Heraeus Quarzglas Gmbh & Co. Kg Elektrogeschmolzenes, synthetisches Quarzglas, insbesondere für den Einsatz in der Lampen- und in der Halbleiterfertigung und Verfahren zur Herstellung desselben
DE102004052312A1 (de) * 2004-08-23 2006-03-02 Heraeus Quarzglas Gmbh & Co. Kg Beschichtetes Bauteil aus Quarzglas sowie Verfahren zur Herstellung des Bauteils
DE102004051846B4 (de) * 2004-08-23 2009-11-05 Heraeus Quarzglas Gmbh & Co. Kg Bauteil mit einer Reflektorschicht sowie Verfahren für seine Herstellung
US7563512B2 (en) * 2004-08-23 2009-07-21 Heraeus Quarzglas Gmbh & Co. Kg Component with a reflector layer and method for producing the same
DE102006018711B4 (de) * 2006-04-20 2008-09-25 Heraeus Quarzglas Gmbh & Co. Kg Werkstoff, insbesondere für ein optisches Bauteil zum Einsatz in der Mikrolithographie und Verfahren zur Herstellung eines Formkörpers aus dem Werkstoff
JP5314429B2 (ja) * 2006-12-05 2013-10-16 信越石英株式会社 合成不透明石英ガラス及びその製造方法
DE102007017004A1 (de) * 2007-02-27 2008-08-28 Heraeus Quarzglas Gmbh & Co. Kg Optisches Bauteil aus synthetischem Quarzglas mit erhöhter Strahlenbeständigkeit, sowie Verfahren zur Herstellung des Bauteils
JP5171098B2 (ja) * 2007-04-24 2013-03-27 岩崎電気株式会社 石英ガラス製品の製造方法、それに用いるシリカ顆粒とその生成方法
DE102009005446A1 (de) * 2009-01-21 2010-07-22 Schott Ag Granulat, Verfahren zu dessen Herstellung sowie dessen Verwendung
KR101246157B1 (ko) * 2010-12-09 2013-03-20 한국세라믹기술원 엔지니어드 스톤의 제조방법
TWI652240B (zh) * 2014-02-17 2019-03-01 日商東曹股份有限公司 不透明石英玻璃及其製造方法
EP3000790B2 (de) 2014-09-29 2023-07-26 Heraeus Quarzglas GmbH & Co. KG Verfahren für die Herstellung von Bauteilen aus synthetischem Quarzglas aus SiO2-Granulat
JP6558137B2 (ja) * 2015-08-07 2019-08-14 東ソー株式会社 不透明シリカガラス製造用の高強度成形体
CN108698892A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 从二氧化硅颗粒制备石英玻璃体
CN108698890A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 利用在熔融烘箱中的露点监测制备石英玻璃体
US11299417B2 (en) 2015-12-18 2022-04-12 Heraeus Quarzglas Gmbh & Co. Kg Preparation of a quartz glass body in a melting crucible of refractory metal
JP2019502632A (ja) * 2015-12-18 2019-01-31 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 立設式焼結坩堝内での石英ガラス体の調製
JP2019506349A (ja) * 2015-12-18 2019-03-07 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 吊り下げ式金属シート坩堝内での石英ガラス体の調製
CN108698888A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 在石英玻璃制备中作为中间物的经碳掺杂的二氧化硅颗粒的制备
TWI808933B (zh) * 2015-12-18 2023-07-21 德商何瑞斯廓格拉斯公司 石英玻璃體、二氧化矽顆粒、光導、施照體、及成型體及其製備方法
KR20180095619A (ko) 2015-12-18 2018-08-27 헤래우스 크바르츠글라스 게엠베하 & 컴파니 케이지 실리카 유리 제조 동안 규소 함량의 증가
KR20180095880A (ko) 2015-12-18 2018-08-28 헤래우스 크바르츠글라스 게엠베하 & 컴파니 케이지 합성 석영 유리 결정립의 제조
WO2017103153A1 (de) 2015-12-18 2017-06-22 Heraeus Quarzglas Gmbh & Co. Kg Glasfasern und vorformen aus quarzglas mit geringem oh-, cl- und al-gehalt
CN108698894A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 在多腔式烘箱中制备石英玻璃体
EP3390306A2 (de) * 2015-12-18 2018-10-24 Heraeus Quarzglas GmbH & Co. KG Herstellung eines quarzglaskörpers in einem hängenden sintertiegel
TWI733723B (zh) 2015-12-18 2021-07-21 德商何瑞斯廓格拉斯公司 不透明石英玻璃體的製備
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JP6878829B2 (ja) * 2016-10-26 2021-06-02 東ソー株式会社 シリカ粉末及び高流動性シリカ造粒粉末並びにその製造方法
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI705045B (zh) * 2016-05-24 2020-09-21 德商何瑞斯廓格拉斯公司 用於製備含有孔洞之不透明石英玻璃的方法

Also Published As

Publication number Publication date
EP1240114B1 (de) 2005-12-07
US6380110B1 (en) 2002-04-30
JP4681189B2 (ja) 2011-05-11
DE50011832D1 (de) 2006-01-12
WO2001046079A1 (de) 2001-06-28
DE19962451C1 (de) 2001-08-30
CN1413175A (zh) 2003-04-23
CA2395501A1 (en) 2001-06-28
JP2004500299A (ja) 2004-01-08
KR20020066333A (ko) 2002-08-14
KR100716485B1 (ko) 2007-05-10
CN1200896C (zh) 2005-05-11
EP1240114A1 (de) 2002-09-18

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