CN1191984A - 光开关、其制造方法及光通讯设备 - Google Patents

光开关、其制造方法及光通讯设备 Download PDF

Info

Publication number
CN1191984A
CN1191984A CN98103840A CN98103840A CN1191984A CN 1191984 A CN1191984 A CN 1191984A CN 98103840 A CN98103840 A CN 98103840A CN 98103840 A CN98103840 A CN 98103840A CN 1191984 A CN1191984 A CN 1191984A
Authority
CN
China
Prior art keywords
mentioned
quartz glass
girder
photoswitch
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN98103840A
Other languages
English (en)
Chinese (zh)
Inventor
堀野正也
佐藤和恭
明石照久
村西胜
小松礼文
小林大
冈野广明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Hitachi Ltd
Original Assignee
Hitachi Cable Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd, Hitachi Ltd filed Critical Hitachi Cable Ltd
Publication of CN1191984A publication Critical patent/CN1191984A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G02B6/3508—Lateral or transverse displacement of the whole waveguides, e.g. by varying the distance between opposed waveguide ends, or by mutual lateral displacement of opposed waveguide ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/355—1x2 switch, i.e. one input and a selectable single output of two possible outputs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3572—Magnetic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Communication System (AREA)
CN98103840A 1997-02-17 1998-02-16 光开关、其制造方法及光通讯设备 Pending CN1191984A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP031723/97 1997-02-17
JP9031723A JPH10227986A (ja) 1997-02-17 1997-02-17 光スイッチとその製造方法及び光スイッチを用いた光通信機器

Publications (1)

Publication Number Publication Date
CN1191984A true CN1191984A (zh) 1998-09-02

Family

ID=12338975

Family Applications (1)

Application Number Title Priority Date Filing Date
CN98103840A Pending CN1191984A (zh) 1997-02-17 1998-02-16 光开关、其制造方法及光通讯设备

Country Status (5)

Country Link
US (2) US6219472B1 (fr)
EP (1) EP0859260A3 (fr)
JP (1) JPH10227986A (fr)
CN (1) CN1191984A (fr)
CA (1) CA2228781C (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1308721C (zh) * 2001-08-10 2007-04-04 日本航空电子工业株式会社 光开关
CN100426029C (zh) * 2004-06-30 2008-10-15 施乐公司 用于光学开关的光学滑闸系统及方法
CN101510486B (zh) * 2009-03-24 2011-01-05 中北大学 微致动开关
CN105829929A (zh) * 2013-12-03 2016-08-03 英特尔公司 单块物理可移位光波导
CN107589491A (zh) * 2016-07-08 2018-01-16 上海大学 浮力型光纤开关

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6990264B2 (en) 2000-09-19 2006-01-24 Telkamp Arthur R 1×N or N×1 optical switch having a plurality of movable light guiding microstructures
JPH10227986A (ja) * 1997-02-17 1998-08-25 Hitachi Ltd 光スイッチとその製造方法及び光スイッチを用いた光通信機器
US6498870B1 (en) 1998-04-20 2002-12-24 Omm, Inc. Micromachined optomechanical switches
JP3062881B2 (ja) 1998-05-12 2000-07-12 株式会社日立製作所 光スイッチ
US6407835B1 (en) * 1999-03-05 2002-06-18 Agilent Technologies, Inc. Single site for healing dual optical rings
US6453083B1 (en) 1999-05-28 2002-09-17 Anis Husain Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring
US6445840B1 (en) 1999-05-28 2002-09-03 Omm, Inc. Micromachined optical switching devices
US6449406B1 (en) 1999-05-28 2002-09-10 Omm, Inc. Micromachined optomechanical switching devices
US6445841B1 (en) 1999-05-28 2002-09-03 Omm, Inc. Optomechanical matrix switches including collimator arrays
US6238805B1 (en) * 1999-10-08 2001-05-29 Agilent Technologies, Inc. Low-stress interface between materials having different coefficients of expansion and method for fabricating same
US6310339B1 (en) * 1999-10-28 2001-10-30 Hrl Laboratories, Llc Optically controlled MEM switches
US7388186B2 (en) * 1999-10-28 2008-06-17 Hrl Laboratories, Llc Optically controlled MEMS devices
DE10000483C1 (de) * 2000-01-07 2001-08-23 Inst Mikrotechnik Mainz Gmbh Faseroptisches Schaltelement
US7085445B2 (en) * 2000-08-04 2006-08-01 Seungug Koh Micro-opto-electro-mechanical waveguide switches
US6647170B2 (en) * 2000-09-19 2003-11-11 Newport Opticom, Inc. Optical switching system that uses movable microstructures to switch optical signals in three dimensions
US6807331B2 (en) * 2000-09-19 2004-10-19 Newport Opticom, Inc. Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials
US6567574B1 (en) 2000-10-06 2003-05-20 Omm, Inc. Modular three-dimensional optical switch
FR2816716B1 (fr) * 2000-11-10 2003-10-31 Opsitech Optical System Chip Dispositif de transmission d'une onde optique dans une structure munie d'une fibre optique et procede pour sa fabrication
CA2434466A1 (fr) * 2001-01-12 2002-07-18 David Baasch Dispositifs et procedes servant a permuter la transmission de lumiere d'une fibre a l'autre
FR2820831B1 (fr) * 2001-02-12 2004-05-28 Opsitech Optical System Chip Dispositif de transmission d'une onde optique ou lumineuse a partie mobile
US7003188B2 (en) 2001-04-17 2006-02-21 Ying Wen Hsu Low loss optical switching system
US6374010B1 (en) * 2001-06-08 2002-04-16 Wellgain Optical Communication Ltd. Optical switch
US20030012545A1 (en) * 2001-07-05 2003-01-16 Bellman Robert A. Broad-band variable optical attenuator
US6658179B2 (en) * 2001-11-08 2003-12-02 Xerox Corporation Monolithic reconfigurable optical multiplexer systems and methods
US20040057654A1 (en) * 2002-01-04 2004-03-25 David Baasch Devices and methods for switching transmission of light from one fiber to another
AU2003220915A1 (en) * 2002-03-28 2003-10-13 Nikon Corporation Waveguide type optical unit and method for detecting position
JP2004004649A (ja) * 2002-03-28 2004-01-08 Ntt Electornics Corp 光学装置
WO2004079410A1 (fr) * 2003-01-06 2004-09-16 Polychromix Corporation Reseau de diffraction a haute efficacite de rendement
US6904191B2 (en) * 2003-03-19 2005-06-07 Xerox Corporation MXN cantilever beam optical waveguide switch
US7062130B2 (en) 2003-05-01 2006-06-13 Arthur Telkamp Low-loss optical waveguide crossovers using an out-of-plane waveguide
JP4076917B2 (ja) * 2003-06-27 2008-04-16 富士通株式会社 平面光回路構造を有する光波長スイッチ
KR100626650B1 (ko) 2003-12-27 2006-09-25 한국전자통신연구원 마이크로파 대역용 슬라이드식 전도체 금속 도파관 스위치
DE102004011022B4 (de) * 2004-03-04 2009-04-09 Siemens Ag Optischer Schalter mit optischer Übertragungsstrecke
US7642628B2 (en) * 2005-01-11 2010-01-05 Rosemount Inc. MEMS packaging with improved reaction to temperature changes
CN1333278C (zh) * 2005-07-07 2007-08-22 上海交通大学 主动式微型光纤连接器
US8936404B2 (en) * 2006-05-09 2015-01-20 Alcatel Lucent Method, apparatus and system for self-aligning components, sub-assemblies and assemblies
CN103210403B (zh) * 2011-11-14 2016-08-24 松下知识产权经营株式会社 使用近距离无线通信进行介质检测的通信装置、外部介质、及外部介质通信系统
CN103185962B (zh) * 2013-03-12 2016-01-20 南京邮电大学 一种电湿活塞式光开关
WO2014150544A1 (fr) * 2013-03-15 2014-09-25 Tyco Electronics Corporation Commutateurs transversaux optiques passifs
JP6349606B2 (ja) * 2013-10-09 2018-07-04 株式会社不二レーベル スクラッチラベル及びスクラッチラベルの製造方法
MX343770B (es) * 2014-04-01 2016-11-09 Univ Nac Autónoma De México Conmutador dinamico optico.
JP7348210B2 (ja) 2018-06-13 2023-09-20 ブルーワー サイエンス アイ エヌ シー． Ｅｕｖリソグラフィ用接着層

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5922002A (ja) 1982-07-28 1984-02-04 Toshiba Corp 光スイツチ
JPS6148536A (ja) 1984-08-11 1986-03-10 Nisshin Steel Co Ltd 焼結鉱の製造法
US5759101A (en) * 1986-03-10 1998-06-02 Response Reward Systems L.C. Central and remote evaluation of responses of participatory broadcast audience with automatic crediting and couponing
GB8707854D0 (en) 1987-04-02 1987-05-07 British Telecomm Radiation deflector assembly
GB8921722D0 (en) 1989-09-26 1989-11-08 British Telecomm Micromechanical switch
FR2660444B1 (fr) * 1990-03-27 1992-10-16 Commissariat Energie Atomique Commutateur et systeme de commutation optiques multivoies integres et procede de fabrication du commutateur.
US5071217A (en) * 1990-04-25 1991-12-10 Birch Thomas F Precision focusing and locating collar for a fiber optic connector
DE4029569A1 (de) 1990-09-18 1992-03-19 Hirschmann Richard Gmbh Co Faseroptischer schalter
US5565919A (en) * 1992-03-12 1996-10-15 Hitachi, Ltd. Video camera/VTR and camera station with opto-electronic link between camera/VTR and camera station
JP3110573B2 (ja) 1992-11-05 2000-11-20 住友電気工業株式会社 光スイッチ及びその製造方法
JPH07202730A (ja) * 1993-12-28 1995-08-04 Matsushita Electric Ind Co Ltd 信号伝送装置
US5577042A (en) * 1994-01-18 1996-11-19 Mcgraw Broadcast Broadcast and presentation system and method
KR100256162B1 (ko) * 1994-04-22 2000-05-15 타테이시 요시오 광섬유의 접속 구조, 광섬유의 밀착방법 및 장치, 상기구조, 방법 및 장치를 이용한 광 개폐기 및 광 커넥터
FR2726905B1 (fr) * 1994-11-10 1996-12-06 Commissariat Energie Atomique Dispositif de compensation des deformations d'une partie d'un systeme optomecanique ou micromecanique
JP3527744B2 (ja) 1996-01-31 2004-05-17 株式会社日立製作所 導波路型光スイッチ
JPH10161046A (ja) 1996-12-02 1998-06-19 Hitachi Ltd 光導波路型光スイッチおよびその製造方法
JPH10227986A (ja) * 1997-02-17 1998-08-25 Hitachi Ltd 光スイッチとその製造方法及び光スイッチを用いた光通信機器

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1308721C (zh) * 2001-08-10 2007-04-04 日本航空电子工业株式会社 光开关
CN100426029C (zh) * 2004-06-30 2008-10-15 施乐公司 用于光学开关的光学滑闸系统及方法
CN101510486B (zh) * 2009-03-24 2011-01-05 中北大学 微致动开关
CN105829929A (zh) * 2013-12-03 2016-08-03 英特尔公司 单块物理可移位光波导
US10310196B2 (en) 2013-12-03 2019-06-04 Intel Corporation Monolithic physically displaceable optical waveguides
CN105829929B (zh) * 2013-12-03 2019-11-29 英特尔公司 单块物理可移位光波导
CN107589491A (zh) * 2016-07-08 2018-01-16 上海大学 浮力型光纤开关
CN107589491B (zh) * 2016-07-08 2019-10-11 上海大学 浮力型光纤开关

Also Published As

Publication number Publication date
EP0859260A2 (fr) 1998-08-19
EP0859260A3 (fr) 2000-12-20
US20010017957A1 (en) 2001-08-30
CA2228781A1 (fr) 1998-08-17
US6219472B1 (en) 2001-04-17
CA2228781C (fr) 2001-10-02
JPH10227986A (ja) 1998-08-25
US6487330B2 (en) 2002-11-26

Similar Documents

Publication Publication Date Title
CN1191984A (zh) 光开关、其制造方法及光通讯设备
US6404942B1 (en) Fluid-encapsulated MEMS optical switch
CN1423755A (zh) Mems光开关及其制造方法
CN1791819A (zh) 包括空芯波导的可变光衰减器
US6839479B2 (en) Optical switch
CN1668957A (zh) 带埋置式限束通道的光学mems切换阵列及其操作方法
CN1575430A (zh) 具有可动光传输微结构的光开关元件
US6542658B2 (en) Optical switch
JP3110573B2 (ja) 光スイッチ及びその製造方法
JP2002365566A (ja) ノンブロッキング機械式光ファイバマトリクススイッチ
JP3440090B1 (ja) 光通信部品、積層型光通信モジュール、およびその製造方法
US6819825B2 (en) Optical switch
US20020102061A1 (en) Planar waveguide optical switch and method of producing same
JPWO2002103432A1 (ja) 光スイッチ
JP2007017562A (ja) 多チャンネル光スイッチ
JP4433673B2 (ja) 光スイッチ
JP2003270504A (ja) 光通信部品、積層型光通信モジュールの製造方法
JP2003140203A (ja) 光学装置
JP3565430B2 (ja) 溝付きブロックおよびその製造方法
JPH05130038A (ja) 大規模マトリクス光スイツチ
JP2002196265A (ja) 光スイッチ
KR100581143B1 (ko) 다채널 광 스위치 및 그의 제조 방법
KR20050073147A (ko) 광 스위치 및 그 제조방법
KR100413522B1 (ko) 매몰된 인덕터 자기 유도형 광스위치 제작방법
JP2002287048A (ja) 光スイッチ及びその製造方法

Legal Events

Date Code Title Description
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C06 Publication
PB01 Publication
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication