CN118043504A - 碳化硅单晶晶圆、碳化硅单晶锭和碳化硅单晶的制造方法 - Google Patents

碳化硅单晶晶圆、碳化硅单晶锭和碳化硅单晶的制造方法 Download PDF

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Publication number
CN118043504A
CN118043504A CN202280066171.7A CN202280066171A CN118043504A CN 118043504 A CN118043504 A CN 118043504A CN 202280066171 A CN202280066171 A CN 202280066171A CN 118043504 A CN118043504 A CN 118043504A
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CN
China
Prior art keywords
silicon carbide
single crystal
carbide single
wafer
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280066171.7A
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English (en)
Chinese (zh)
Inventor
梅崎智典
熊谷和人
高野学
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Publication of CN118043504A publication Critical patent/CN118043504A/zh
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/206—Controlling or regulating the thermal history of growing the ingot
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/062—Vertical dipping system
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/10—Controlling or regulating

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CN202280066171.7A 2021-09-30 2022-09-26 碳化硅单晶晶圆、碳化硅单晶锭和碳化硅单晶的制造方法 Pending CN118043504A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021160607 2021-09-30
JP2021-160607 2021-09-30
PCT/JP2022/035722 WO2023054263A1 (ja) 2021-09-30 2022-09-26 炭化ケイ素単結晶ウエハ、炭化ケイ素単結晶インゴット及び炭化ケイ素単結晶の製造方法

Publications (1)

Publication Number Publication Date
CN118043504A true CN118043504A (zh) 2024-05-14

Family

ID=85782662

Family Applications (1)

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CN202280066171.7A Pending CN118043504A (zh) 2021-09-30 2022-09-26 碳化硅单晶晶圆、碳化硅单晶锭和碳化硅单晶的制造方法

Country Status (6)

Country Link
US (1) US12325935B2 (https=)
EP (1) EP4411029A4 (https=)
JP (1) JPWO2023054263A1 (https=)
KR (1) KR20240072094A (https=)
CN (1) CN118043504A (https=)
WO (1) WO2023054263A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4411030A4 (en) * 2021-09-30 2025-10-08 Central Glass Co Ltd SILICON CARBIDE MONOCRYSTALLINE WAFER AND SILICON CARBIDE MONOCRYSTALLINE INGOT

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2923260B2 (ja) 1997-03-19 1999-07-26 東洋炭素株式会社 単結晶引上装置、高純度黒鉛材料及びその製造方法
JP4853449B2 (ja) * 2007-10-11 2012-01-11 住友金属工業株式会社 ＳｉＣ単結晶の製造方法、ＳｉＣ単結晶ウエハ及びＳｉＣ半導体デバイス
EP2245217A1 (en) 2007-12-12 2010-11-03 Dow Corning Corporation Method to manufacture large uniform ingots of silicon carbide by sublimation/condensation processes
JP4469396B2 (ja) 2008-01-15 2010-05-26 新日本製鐵株式会社 炭化珪素単結晶インゴット、これから得られる基板及びエピタキシャルウェハ
JP5803519B2 (ja) * 2011-09-29 2015-11-04 トヨタ自動車株式会社 ＳｉＣ単結晶の製造方法及び製造装置
WO2014034080A1 (ja) 2012-08-26 2014-03-06 国立大学法人名古屋大学 ３Ｃ－ＳｉＣ単結晶およびその製造方法
JP6238249B2 (ja) 2013-05-20 2017-11-29 国立研究開発法人産業技術総合研究所 炭化珪素単結晶及びその製造方法
JP6152981B2 (ja) 2013-08-02 2017-06-28 株式会社デンソー 炭化珪素単結晶
KR102160863B1 (ko) * 2014-09-30 2020-09-28 쇼와 덴코 가부시키가이샤 탄화규소 단결정 웨이퍼
JP6090287B2 (ja) 2014-10-31 2017-03-08 トヨタ自動車株式会社 ＳｉＣ単結晶の製造方法
WO2017047536A1 (ja) 2015-09-14 2017-03-23 新日鐵住金株式会社 ＳｉＣ単結晶の製造装置、ＳｉＣ単結晶の製造方法及びＳｉＣ単結晶材
JP6595897B2 (ja) * 2015-12-14 2019-10-23 東洋炭素株式会社 液相エピタキシャル成長方法及び単結晶ＳｉＣの製造方法
JP6200018B2 (ja) 2016-03-15 2017-09-20 新日鉄住金マテリアルズ株式会社 炭化珪素単結晶ウェハ
US20170321345A1 (en) * 2016-05-06 2017-11-09 Ii-Vi Incorporated Large Diameter Silicon Carbide Single Crystals and Apparatus and Method of Manufacture Thereof
JP6845418B2 (ja) 2017-01-13 2021-03-17 セントラル硝子株式会社 炭化ケイ素単結晶ウェハ、インゴット及びその製造方法
JP2018188330A (ja) * 2017-05-02 2018-11-29 トヨタ自動車株式会社 ＳｉＣ単結晶基板の製造方法
JP6758491B2 (ja) * 2017-05-17 2020-09-23 三菱電機株式会社 ＳｉＣエピタキシャルウエハおよびその製造方法
JP7415224B2 (ja) 2020-03-31 2024-01-17 株式会社アイシン 移動装置
CN112779603A (zh) * 2020-12-23 2021-05-11 北京天科合达半导体股份有限公司 一种高质量低缺陷碳化硅单晶、其制备方法及应用
EP4411030A4 (en) * 2021-09-30 2025-10-08 Central Glass Co Ltd SILICON CARBIDE MONOCRYSTALLINE WAFER AND SILICON CARBIDE MONOCRYSTALLINE INGOT
JP2023127894A (ja) * 2022-03-02 2023-09-14 株式会社デンソー 炭化珪素単結晶およびその製造方法

Also Published As

Publication number Publication date
TW202336298A (zh) 2023-09-16
US12325935B2 (en) 2025-06-10
US20240368806A1 (en) 2024-11-07
EP4411029A1 (en) 2024-08-07
WO2023054263A1 (ja) 2023-04-06
JPWO2023054263A1 (https=) 2023-04-06
KR20240072094A (ko) 2024-05-23
EP4411029A4 (en) 2025-10-22

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