CN1170205C - 用于辊涂的辐射敏感性树脂组合物和辊涂方法 - Google Patents
用于辊涂的辐射敏感性树脂组合物和辊涂方法 Download PDFInfo
- Publication number
- CN1170205C CN1170205C CNB008048576A CN00804857A CN1170205C CN 1170205 C CN1170205 C CN 1170205C CN B008048576 A CNB008048576 A CN B008048576A CN 00804857 A CN00804857 A CN 00804857A CN 1170205 C CN1170205 C CN 1170205C
- Authority
- CN
- China
- Prior art keywords
- photosensitizer
- resin composition
- radiation
- alkali soluble
- soluble resins
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0048—Photosensitive materials characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Materials For Photolithography (AREA)
- Paints Or Removers (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
表面活性剂的用量,以酚醛清漆树脂与光敏剂总量为1重量份计(ppm) | 辊的状态 | 涂层膜上的条纹 | 膜厚度分散状况() | |
实施例1 | 300 | ○ | △ | △ |
实施例2 | 600 | ○ | ○ | ○ |
实施例3 | 900 | ○ | ○ | ○ |
实施例4 | 600 | ○ | ○ | ○ |
实施例5 | 600 | ○ | △ | △ |
实施例6 | 600 | ○ | △ | △ |
比较例1 | 0 | ○ | × | × |
比较例2 | 600 | × | × | × |
Claims (3)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP75739/99 | 1999-03-19 | ||
JP75739/1999 | 1999-03-19 | ||
JP7573999A JP2000267270A (ja) | 1999-03-19 | 1999-03-19 | ロールコート用感光性樹脂組成物およびロールコート方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1343325A CN1343325A (zh) | 2002-04-03 |
CN1170205C true CN1170205C (zh) | 2004-10-06 |
Family
ID=13584962
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB008048576A Expired - Fee Related CN1170205C (zh) | 1999-03-19 | 2000-03-01 | 用于辊涂的辐射敏感性树脂组合物和辊涂方法 |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1170632A1 (zh) |
JP (1) | JP2000267270A (zh) |
KR (1) | KR100754232B1 (zh) |
CN (1) | CN1170205C (zh) |
MY (1) | MY133351A (zh) |
TW (1) | TW500977B (zh) |
WO (1) | WO2000057248A1 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI377440B (en) * | 2004-10-14 | 2012-11-21 | Sumitomo Chemical Co | Radiation sensitive resin composition |
TW200622486A (en) * | 2004-10-14 | 2006-07-01 | Sumitomo Chemical Co | Radiation sensitive resin composition |
JP4655864B2 (ja) * | 2004-10-14 | 2011-03-23 | 住友化学株式会社 | 感放射線性樹脂組成物 |
KR20070116665A (ko) * | 2005-03-30 | 2007-12-10 | 제온 코포레이션 | 패턴 형성 방법 |
KR20150051478A (ko) | 2013-11-04 | 2015-05-13 | 삼성디스플레이 주식회사 | 포토레지스트 조성물 및 이를 이용한 박막 트랜지스터 표시판의 제조 방법 |
KR101418026B1 (ko) * | 2014-02-06 | 2014-08-08 | 동우 화인켐 주식회사 | 열경화성 잉크 조성물 |
KR20180044332A (ko) * | 2015-08-21 | 2018-05-02 | 메르크 파텐트 게엠베하 | 기판 상의 패터닝된 뱅크 구조체들 및 형성 방법 |
JP6661567B2 (ja) * | 2017-03-28 | 2020-03-11 | 富士フイルム株式会社 | ポジ型感光性樹脂組成物、ポジ型平版印刷版原版、及び、平版印刷版の作製方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0721626B2 (ja) * | 1985-08-10 | 1995-03-08 | 日本合成ゴム株式会社 | 半導体微細加工用レジスト組成物 |
JPH04221956A (ja) * | 1990-12-25 | 1992-08-12 | Konica Corp | 感光性平版印刷版 |
JP3295453B2 (ja) * | 1992-03-27 | 2002-06-24 | ジェイエスアール株式会社 | ロールコート用感放射線性樹脂溶液組成物 |
JP3112229B2 (ja) * | 1993-06-30 | 2000-11-27 | 東京応化工業株式会社 | ポジ型ホトレジスト組成物 |
US5364737A (en) * | 1994-01-25 | 1994-11-15 | Morton International, Inc. | Waterbone photoresists having associate thickeners |
JPH095988A (ja) * | 1995-06-21 | 1997-01-10 | Mitsubishi Chem Corp | 感放射線性塗布組成物 |
-
1999
- 1999-03-19 JP JP7573999A patent/JP2000267270A/ja active Pending
-
2000
- 2000-03-01 KR KR1020017011957A patent/KR100754232B1/ko not_active IP Right Cessation
- 2000-03-01 EP EP00906609A patent/EP1170632A1/en not_active Withdrawn
- 2000-03-01 CN CNB008048576A patent/CN1170205C/zh not_active Expired - Fee Related
- 2000-03-01 WO PCT/JP2000/001208 patent/WO2000057248A1/ja not_active Application Discontinuation
- 2000-03-16 TW TW089104827A patent/TW500977B/zh not_active IP Right Cessation
- 2000-03-17 MY MYPI20001073A patent/MY133351A/en unknown
Also Published As
Publication number | Publication date |
---|---|
TW500977B (en) | 2002-09-01 |
WO2000057248A1 (fr) | 2000-09-28 |
MY133351A (en) | 2007-11-30 |
KR100754232B1 (ko) | 2007-09-03 |
KR20020007337A (ko) | 2002-01-26 |
EP1170632A1 (en) | 2002-01-09 |
JP2000267270A (ja) | 2000-09-29 |
CN1343325A (zh) | 2002-04-03 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: CLARIANT FINANCE (JAPAN) K.K. Free format text: FORMER OWNER: CLARIANT INTERNATIONAL LTD. Effective date: 20020322 |
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Effective date of registration: 20020322 Address after: The British Virgin Islands Thor drag Island Applicant after: Clariant Finance (BVI) Ltd. Address before: Mu Tengci, Switzerland Applicant before: Clariant International Ltd. |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: AZ ELECTRON MATERIAL ( JAPAN )) CO., LTD. Free format text: FORMER OWNER: CLARIANT FINANCE (JAPAN) K.K. Effective date: 20050318 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20050318 Address after: Tokyo, Japan, Japan Patentee after: Clariant Int Ltd. Address before: The British Virgin Islands of Tortola Patentee before: Clariant International Ltd. |
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C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20041006 Termination date: 20100301 |