CN116344384A - 物品保管设备以及具备其的半导体制造工厂的物流系统 - Google Patents

物品保管设备以及具备其的半导体制造工厂的物流系统 Download PDF

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CN116344384A
CN116344384A CN202211602144.5A CN202211602144A CN116344384A CN 116344384 A CN116344384 A CN 116344384A CN 202211602144 A CN202211602144 A CN 202211602144A CN 116344384 A CN116344384 A CN 116344384A
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transport container
unit
control unit
article storage
storage facility
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李星昊
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Semes Co Ltd
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Semes Co Ltd
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Abstract

本发明的实施例提供能够以更简化的结构供应电力的半导体制造工厂的物品保管设备以及具备其的半导体制造工厂的物流系统。根据本发明的一方面的半导体制造工厂的物品保管设备包括：所述物品保管设备包括：保管单元，设置于提供输送车辆的行驶路径的轨道的周边，并保管收纳有晶圆的输送容器；吹净单元，向输送容器的内部供应惰性气体；控制单元，识别保管于所述保管单元的所述输送容器，并将所述吹净单元控制成将所述惰性气体供应到所述输送容器；以及供电单元，将从沿着所述轨道设置的供电电缆感应的电流供应到所述控制单元。

Description

物品保管设备以及具备其的半导体制造工厂的物流系统
技术领域
本发明涉及一种能够简化安装作业的半导体制造工厂的物品保管设备以及具备其的半导体制造工厂的物流系统。
背景技术
半导体制造工艺作为在基板(晶圆或者玻璃)上通过数十个至数百个步骤的处理工艺来制造最终产品的工艺，每个工艺可以通过执行相应工艺的制造设备来执行。若结束特定制造设备上的工艺，则为了执行下一个工艺而可以将物品(基板)输送到下一个制造设备，并可以在一定期间内保管在保管设备中。在此，晶圆以容纳于FOUP(Front OpeningUnified Pod；前开式晶圆盒)之类输送容器的状态保管或传送。
如上所述，物流系统是指为了制造工艺而输送或保管物品的系统，大体可以划分为输送物品的物品输送设备和储存物品的物品保管设备。
物品保管设备有如仓储柜(Stocker)那样具有仓库形态的设备。另外，作为在物品输送车辆的行驶路径周边临时保管物品的设备，可以包括设置于轨道的侧方的侧轨缓冲区(Side Track Buffer)和设置于轨道的下方的轨道下缓冲区(Under Track Buffer)。
另一方面，在侧轨缓冲区或者轨道下缓冲区之类物品保管设备中需要用于识别输送容器并向输送容器注入惰性气体(例如：N2气体)的电力以及用于与上级控制管理装置之间进行数据交换的通信设备。然而，半导体制造工厂的尺寸大型化，物品保管设备的设置面积也随之增加，由此，一一设置电力供应设备和通信设备变得非常困难。
发明内容
因此，本发明的实施例提供能够以更简化的结构供应电力的半导体制造工厂的物品保管设备以及具备其的半导体制造工厂的物流系统。
另外，本发明的实施例提供能够以更简化的结构进行通信的半导体制造工厂的物品保管设备以及具备其的半导体制造工厂的物流系统。
本发明的解决课题不限于以上提及的，本领域技术人员可以通过下面的记载明确地理解未提及的其它课题。
根据本发明的一方面的半导体制造工厂的物品保管设备包括：所述物品保管设备包括：保管单元，设置于提供输送车辆的行驶路径的轨道的周边，并保管收纳有晶圆的输送容器；吹净单元，向输送容器的内部供应惰性气体；控制单元，识别保管于所述保管单元的所述输送容器，并将所述吹净单元控制成将所述惰性气体供应到所述输送容器；以及供电单元，将从沿着所述轨道设置的供电电缆感应的电流供应到所述控制单元。
根据本发明的实施例，可以是，所述保管单元包括：框架，设置于所述轨道的侧方；支承台，设置于所述框架的下部面并构成为被安放所述输送容器；以及RFID读写器，设置于所述支承台而获取所述输送容器的识别信息并向所述控制单元传递。
根据本发明的实施例，可以是，所述吹净单元包括：气体供应端口，设置于所述支承台的安放插槽，并当所述输送容器搭载于所述安放插槽时与形成于所述输送容器的气体流入孔连通；以及气体供应部，根据从所述控制单元接收的控制信号，通过所述气体供应端口向所述输送容器内供应所述惰性气体。
根据本发明的实施例，可以是，所述气体供应部将与所述惰性气体的供应状态有关的信息传送到所述控制单元。
根据本发明的实施例，可以是，所述控制单元包括：识别信息获取部，从所述RFID读写器获取所述输送容器的识别信息；气体供应控制部，若识别到所述输送容器，则向所述气体供应部传送所述控制信号，并从所述气体供应部接收与所述惰性气体的供应状态有关的信息；以及输出部，输出所述保管单元中的被安放所述输送容器的每个安放插槽的所述输送容器的安放与否以及所述惰性气体的供应状态。
根据本发明的实施例，可以是，所述输出部包括：发光装置，分别显示每个所述安放插槽的所述输送容器的安放与否以及所述惰性气体的供应状态。
根据本发明的实施例，可以是，所述发光装置设置成朝向半导体制造工厂的地面显示所述输送容器的安放与否以及所述惰性气体的供应状态。
根据本发明的实施例，可以是，所述供电单元包括：电流转换器，从所述供电电缆感应电流；以及供电线缆，从所述电流转换器将电流供应到所述控制单元，所述供电线缆构成为紧贴或者嵌入于所述轨道以及所述保管单元的构造物，以使得不与所述输送车辆产生干扰。
根据本发明的实施例，可以是，所述电流转换器包括：环状的芯部件，设置成以环状围绕所述供电电缆，并通过沿着所述供电电缆流动的电流形成磁场；以及线圈部件，缠绕于所述芯部件，并通过所述磁场感应电流。
根据本发明的另一方面的半导体制造工厂的物品保管设备包括：保管单元，设置于提供输送车辆的行驶路径的轨道的周边，并保管收纳有晶圆的输送容器；吹净单元，向输送容器的内部供应惰性气体；控制单元，识别保管于所述保管单元的所述输送容器，并将所述吹净单元控制成将所述惰性气体供应到所述输送容器；供电单元，将从沿着所述轨道设置的供电电缆感应的电流供应到所述控制单元；以及控制器管理单元，通过无线通信连接于所述控制单元而管理所述控制单元的工作。
根据本发明的实施例，可以是，所述保管单元包括：框架，设置于所述轨道的侧方；支承台，设置于所述框架的下部面并构成为被安放所述输送容器；以及RFID读写器，设置于所述支承台而获取所述输送容器的识别信息并向所述控制单元传递。
根据本发明的实施例，可以是，所述吹净单元包括：气体供应端口，设置于所述支承台，并当所述输送容器搭载于所述支承台时与形成于所述输送容器的气体流入孔连通；以及气体供应控制单元，根据从所述控制单元接收的控制信号，通过所述气体供应端口向所述输送容器内供应所述惰性气体。
根据本发明的实施例，可以是，所述气体供应部将与所述惰性气体的供应状态有关的信息传送到所述控制单元。
根据本发明的实施例，可以是，所述控制单元包括：识别信息获取部，从所述RFID读写器获取所述输送容器的识别信息；气体供应控制部，若识别到所述输送容器，则向所述气体供应部传送所述控制信号，并从所述气体供应部接收与所述惰性气体的供应状态有关的信息；以及输出部，输出所述保管单元中的被安放所述输送容器的每个安放插槽的所述输送容器的安放与否以及所述惰性气体的供应状态。
根据本发明的实施例，可以是，所述输出部包括：发光装置，分别显示每个所述支承台的所述输送容器的安放与否以及所述惰性气体的供应状态，所述发光装置设置成朝向半导体制造工厂的地面显示所述输送容器的安放与否以及所述惰性气体的供应状态。
根据本发明的实施例，可以是，所述供电单元包括：电流转换器，从所述供电电缆感应电流；以及供电线缆，从所述电流转换器将电流供应到所述控制单元，所述供电线缆构成为紧贴或者嵌入于所述轨道以及所述保管单元的构造物，以使得不与所述输送车辆产生干扰。
根据本发明的实施例，可以是，所述电流转换器包括：环状的芯部件，设置成以环状围绕所述供电电缆，并通过沿着所述供电电缆流动的电流形成磁场；以及线圈部件，缠绕于所述芯部件，并通过所述磁场感应电流。
根据本发明的实施例，可以是，所述控制单元还包括：无线通信模组，将与每个所述支承台的所述输送容器的安放与否以及所述惰性气体的供应状态有关的信息传送到所述控制器管理单元。
根据本发明的实施例，可以是，所述控制单元以及所述控制器管理单元通过设置于半导体制造工厂的顶棚的接入点执行无线通信，所述控制器管理单元设置于所述半导体制造工厂的地上而通过所述接入点从所述控制单元接收与所述输送容器的安放与否以及所述惰性气体的供应状态有关的信息，并将用于控制所述控制单元的信号传送到所述控制单元。
根据本发明的半导体制造工厂的物流系统包括：轨道，设置于半导体制造工厂的顶棚而提供输送车辆的移动路径；供电电缆，沿着所述轨道设置而向所述输送车辆供应电力；以及物品保管设备，保管来自所述输送车辆的输送容器，所述物品保管设备包括：保管单元，设置于所述轨道的周边，并保管收纳有晶圆的输送容器；吹净单元，向输送容器的内部供应惰性气体；控制单元，识别保管于所述保管单元的所述输送容器，并将所述吹净单元控制成将所述惰性气体供应到所述输送容器；供电单元，将从所述供电电缆感应的电流供应到所述控制单元；以及控制器管理单元，通过无线通信连接于所述控制单元而管理所述控制单元的工作。
根据本发明，通过使用从沿着轨道设置的供电电缆感应的电流，能够以更简化的结构向物品保管设备的控制单元供应电力。
另外，根据本发明，控制器管理单元通过无线通信来管理控制单元的工作，从而能够以更简化的结构进行通信。
本发明的效果不限于以上提及的，本领域技术人员可以通过下面的记载明确地理解未提及的其它效果。
附图说明
图1概要示出能够适用本发明的半导体制造工厂以及物流系统。
图2以及图3示出根据本发明的实施例的半导体制造工厂的物流系统。
图4示出根据本发明的实施例的保管设备的控制单元的结构。
图5是用于说明根据本发明的实施例的控制单元的输出部的图。
图6以及图7是用于说明根据本发明的实施例的供电单元的图。
图8示出根据本发明的实施例的半导体制造工厂的物流系统的另一例。
图9示出根据本发明的实施例的保管设备的控制单元的结构。
图10示出根据本发明的实施例的半导体制造工厂的物流控制系统的个体间连接结构。
图11示出根据本发明的实施例的半导体制造工厂的物流控制系统的分层结构。
(附图标记说明)
10：轨道
100：输送车辆
20：供电电缆
30：物品保管设备
310：保管单元
312：框架
314：支承台
316：RFID读写器
320：吹净单元
322：气体供应端口
324：气体供应部
330：控制单元
332：识别信息获取部
334：气体供应控制部
336：输出部
338：无线通信模组
340：供电单元
342：电流转换器
344：供电线缆
350：控制器管理单元
5：输送容器
AP：接入点
OCS：输送控制系统
具体实施方式
以下，参照所附附图来详细说明本发明的实施例，以使得本发明所属技术领域中具有通常知识的人能够容易实施。本发明可以以各种不同形式实现，不限定于在此说明的实施例。
为了清楚地说明本发明而省略了与说明无关的部分，贯穿说明书整体对相同或类似的构成要件标注相同的附图标记。
另外，在多个实施例中，针对具有相同结构的构成要件使用相同的附图标记而仅说明代表性实施例，在其余的其它实施例中仅对代表性实施例和其它构成要件进行说明。
在说明书整体中，当表述为某部分与其它部分“连接(或者结合)”时，其不仅是“直接连接(或者结合)”的情况，还包括隔着其它部件而“间接连接(或者结合)”的情况。另外，当表述为某部分“包括”某构成要件时，只要没有特别相反的记载，其意指可以还包括其它构成要件，而不是排除其它构成要件。
只要没有不同地定义，技术或科学性术语包括在内，在此使用的所有术语与本发明所属技术领域中具有通常知识的人一般所理解的含义具有相同的含义。通常使用的词典中所定义之类的术语应解释为与相关技术文脉上具有的含义相同的含义，只要在本申请中没有明确地定义，不能理想性或过度地解释为形式上含义。
图1概要示出能够适用本发明的半导体制造工厂以及物流系统。
半导体制造工厂由一个或者其以上的无尘室构成，在各无尘室中可以设置用于执行半导体制造工艺的制造设备1。通常，可以通过在基板(例如：晶圆)重复执行多个制造工艺，最终完成被处理过的基板，若在特定半导体制造设备中结束制造工艺，则基板被输送到用于下一个制造工艺的设备中。在此，晶圆可以以保管在能够容纳多个基板的输送容器(例如：front opening unified pod，FOUP)中的状态进行输送。收纳有晶圆的输送容器可以通过输送车辆100(例如：overhead hoist transport，OHT；高架起重机输送)输送。
参照图1，可以是，在半导体制造工厂内设置有用于执行工艺的制造设备1，并提供形成用于在制造设备1间输送物品的输送路径(例如：顶棚轨道)的轨道10和行驶轨道10的同时将物品输送到制造设备1的输送车辆100。在此，当输送车辆100在制造设备1之间输送物品时，既可以物品直接从特定制造设备输送到另一制造设备，也可以物品保管到储存装置以后输送到另一制造设备。
储存装置可以使用以复层排列的架形式的仓储柜2。另外，储存装置可以提供设置于轨道10的侧方的侧轨缓冲区(Side Track Buffer)和设置于轨道10的下方的轨道下缓冲区(Under Track Buffer)之类物品保管设备30。在本文中，作为物品保管设备30以设置于轨道10的侧方的侧轨缓冲区为例进行说明，但本发明的范围不限于此，不仅是轨道下缓冲区，可以还适用于设置于输送车辆100的行驶路径周边的任何形式的储存装置。
以下，对能够简化安装作业的半导体制造工厂的物品保管设备30以及具备其的半导体制造工厂的物流系统进行说明。
图2以及图3示出根据本发明的实施例的半导体制造工厂的物流系统。
根据本发明的半导体制造工厂的物流系统包括：轨道10，设置于半导体制造工厂的顶棚而提供输送车辆100的移动路径；供电电缆20，沿着轨道10设置而向输送车辆100供电；以及物品保管设备30，保管来自输送车辆100的输送容器5。
如图2以及图3所示，轨道10可以提供用于供输送车辆100的车轮120行驶的路径，并由一对轨道部件构成。输送车辆100沿着轨道行驶并传送输送容器5。如图3所示，对夹持输送容器5的搬运单元可以通过进行滑动以及升降驱动而向物品保管设备30(或者制造设备1)装卸输送容器5。输送车辆100可以包括：行驶主体110，生成用于加速或者减速的动力；车轮120，结合于行驶主体110而沿着轨道10旋转；受电部130，从供电电缆20接收电力；物品搬动部140，夹持输送容器5并执行装卸；以及框架150，保护输送容器5并配置有用于感测前方或者后方的传感器。
供电电缆20沿着轨道10设置，并向输送车辆100供电。输送车辆100的受电部使用从供电电缆20生成的感应电流而向行驶主体110供应用于输送车辆100工作的电力。
根据本发明的物品保管设备30包括：保管单元310，设置于轨道10的侧方，并保管收纳有晶圆的输送容器5；吹净单元320，向输送容器5的内部供应惰性气体；控制单元330，识别保管于保管单元310的输送容器5并将吹净单元320控制成将惰性气体供应到输送容器5；以及供电单元340，将从沿着轨道10设置的供电电缆20感应的电流供应到控制单元。
根据本发明的实施例，保管单元310可以包括：框架312，设置于轨道10的侧方；支承台314，设置于框架312的下部面并构成为安放输送容器5；以及RFID读写器316，设置于支承台314，并获取输送容器5的识别信息而将其传递到控制单元330。
框架312作为提供用于保管输送容器5的空间的构造物，即可以如图2以及图3所示那样沿着轨道10设置于两侧面，也可以仅设置于一侧面。框架312可以设置于顶棚，并可以构成有用于设置于顶棚的支架12。
支承台314设置于框架312的下方，并提供安放输送容器5的空间。支承台314可以由能够安放输送容器5的多个安放插槽314A构成。用于向输送容器5供应惰性气体的吹净单元320可以构成于支承台314。
另一方面，可以沿着框架312以及支承台314的构造物铺设用于传输信号的线缆以及供电线缆344，并可以具备用于供应惰性气体的管道、开关等。
RFID读写器316构成于支承台314的每个安放插槽314A，并识别附着于输送容器5的RFID(radio frequency identification；射频识别)标签而将输送容器5的识别信息提供到控制单元330。另一方面，作为获取输送容器5的识别信息的方法，不仅可以使用RFID，还可以使用条形码、二维码之类标记，并可以使用用于识别标记的装置。
根据本发明，吹净单元320包括：气体供应端口322，设置于支承台314的各安放插槽314A，当输送容器5搭载于安放插槽314A时，与形成于输送容器5的气体流入孔(未图示)连通；以及气体供应部324，根据从控制单元330接收的控制信号通过气体供应端口322将惰性气体供应到输送容器5内。
吹净单元320为了使装载有晶圆的输送容器5的内部空间保持清洁环境而供应惰性气体(例如：N2气体)。气体供应端口322可以在每个安放插槽314A构成多个，并可以存在于与设置于输送容器5的气体流入孔对应的位置。气体供应部324可以为了向气体供应端口322供应惰性气体而与外部的气体供应源连接，并可以包括开放或关闭用于供应来自气体供应源的惰性气体的阀门。阀门的开放或者关闭与否可以通过控制单元330进行调节。另外，也可以根据在输送容器5的内部测定到的压力来调节阀门的开放或者关闭与否，虽未图示，也可以构成用于排除输送容器5内部的气体的排出端口。
根据本发明的实施例，气体供应部324可以将与惰性气体的供应状态有关的信息传输到控制单元330。气体供应部324可以包括流量计，并且可以是，若通过流量计测定到的气体流量比基准值大，则将指示供应有惰性气体的信号传输到控制单元330，若气体流量比基准值小，则指示没有供应惰性气体的信号传输到控制单元330。另外，气体供应部324也可以根据控制供应惰性气体的阀门的开放与否，将指示是否供应惰性气体的信号传输到控制单元330。
根据本发明的实施例，如图4所示，控制单元330可以包括：识别信息获取部332，从RFID读写器316获取输送容器5的识别信息；气体供应控制部334，若识别到输送容器5，则传输指示向气体供应部324供应惰性气体的控制信号，并从气体供应部324接收与供应惰性气体的状态有关的信息；以及输出部336，输出保管单元310中的被安放输送容器5的每个安放插槽314A的输送容器5的安放与否以及惰性气体的供应状态。
识别信息获取部332可以获取从RFID读写器316接收的输送容器5的识别信息(RFID)而进行储存。尤其，识别信息获取部332可以向气体供应控制部334以及输出部336提供保管单元310中的被安放输送容器5的每个安放插槽314A的输送容器5的安放与否以及识别信息。
若气体供应控制部334接收从识别信息获取部332提供的每个安放插槽314A的输送容器5的安放与否以及识别信息，则使得气体供应部324传输控制信号以使得惰性气体供应到安放于相应安放插槽314A的输送容器5中。另一方面，气体供应控制部334可以根据对支承台314的每个安放插槽314A所设置的负荷传感器(未图示)来判断是否安放输送容器5，若通过负荷传感器感测到输送容器5的安放，则气体供应部324可以控制成供应惰性气体。另外，若感测到输送容器5从特定安放插槽314A脱离，则气体供应控制部334可以控制成气体供应部324在相应安放插槽314A中中断供应惰性气体。气体供应控制部334可以按照各安放插槽314A向输出部336提供有关是否供应惰性气体的状态的信息。
图5是用于说明根据本发明的实施例的控制单元330的输出部336的图。
根据本发明的实施例，输出部336可以包括：发光装置336A、336B，分别显示每个安放插槽314A的输送容器5的安放与否以及惰性气体的供应状态。输出部336可以将从识别信息获取部332提供的每个安放插槽314A的输送容器5的安放与否输出到第一发光装置336A，另外，可以将从气体供应控制部334提供的每个安放插槽314A的惰性气体的供应与否输出到第二发光装置336B。如图5所示，第一发光装置336A和第二发光装置336B可以为了分别显示各安放插槽314A的每个的输送容器5的安放与否和气体供应状态而设置。第一发光装置336A和第二发光装置336B可以通过绿色、红色等颜色来显示工作状态，若在安放插槽314A中不存在输送容器5，则发光装置可以关闭。不仅如此，输出部336也可以由LCD、OLED之类显示面板来实现，并可以构成为不仅输出安放状态、气体供应与否，还输出输送容器5的ID、惰性气体供应流量之类信息。
根据本发明的实施例，发光装置336A、336B可以设置成朝向半导体制造工厂的地面显示输送容器5的安放与否以及惰性气体的供应状态。通过将发光装置336A、336B设置成朝向地面，现场作业人员可以轻松确认相应信息。
图6以及图7是用于说明根据本发明的实施例的供电单元340的图。
根据本发明的实施例，供电单元340可以包括：电流转换器342，从供电电缆20感应电流；以及供电线缆344，从电流转换器342将电流供应到控制单元330。可以是，电流转换器342以围绕供电电缆20的环状构成而将从供电电缆20的电流感应的电流提供到供电线缆344，供电线缆344从电流转换器342向控制单元330供应电力。
另一方面，供电线缆344可以设置成避开输送车辆100的移动轨迹，以使得输送车辆100行驶时不受干扰。根据本发明的实施例，供电线缆344可以构成为紧贴或嵌入于轨道10以及保管单元310的构造物，以使得不与输送车辆100产生干扰。即，从供电电缆20感应的电流可以沿着结合于轨道10以及保管单元310的构造物的供电线缆344供应到控制单元330。
如图6所示，使用从沿着轨道10设置而向输送车辆100供应电力的供电电缆20感应的电流来驱动控制单元330，从而可以大幅简化物品保管设备30的安装作业，而不是采用为了向控制单元330供应电力而在地上构成单独的电源，并从地上向物品保管设备30设置电缆的方式。当从地上向物品保管设备30供应电力时，为了设置电缆而需要大量的资材和作业人员，但若如本发明那样使用从供电电缆20感应的电流来向控制单元330供应电力，则只需设置电流转换器342和供电线缆344即可，因此可以节省设置资材和作业人员的工数。
另外，参照图6，供电线缆344设置于轨道10的下方而结合于防止供电线缆344产生下垂的钩子形状的构造物105。另外，供电线缆344构成为附着或嵌入于保管单元310的框架312中，从而可以设置成不与输送车辆100产生干扰。
根据本发明的实施例，电流转换器342可以包括：环状的芯部件3422，设置成以环状围绕供电电缆20，并通过沿着供电电缆20流动的电流(IP)形成磁场；以及线圈部件3424，缠绕于芯部件3422，并通过磁场感应电流(IS)。
如图7所示，若电流(IP)沿着供电电缆20流动，则在围绕供电电缆20的以环状构成的芯部件3422的内部空间形成圆形的磁场。另外，在构成为围绕芯部件3422的线圈部件3424中通过磁场产生感应电流(IS)而通过供电线缆344将相应感应电流(IS)提供到控制单元330，从而可以供应电力。
图8示出根据本发明的实施例的半导体制造工厂的物流系统的另一例。
根据本发明的半导体制造工厂的物品保管设备30可以包括：保管单元310，设置于提供输送车辆100的行驶路径的轨道10的周边，并保管收纳有晶圆的输送容器5；吹净单元320，向输送容器5的内部供应惰性气体；控制单元330，识别保管于保管单元310中的输送容器5，并将吹净单元320控制成将惰性气体供应到输送容器5；供电单元340，将从沿着轨道10设置的供电电缆20感应的电流供应到控制单元330；以及控制器管理单元350，通过无线通信连接于控制单元330而管理控制单元330的工作。
参照图8，在制造工厂的顶棚中可以设置提供无线接通的接入点AP，接入点AP可以使物品保管设备30的控制单元330通过无线通信收发数据。尤其，可以提供用于管理控制单元330的工作的控制器管理单元350，作业人员可以通过控制器管理单元350检查各控制单元330的工作状态，并确认保管在各物品保管设备30中的输送容器5的信息。控制器管理单元350可以设置于半导体制造工厂的地上，以使得作业人员容易地接近。另外，控制器管理单元350可以通过接入点AP与控制单元330无线连接。
接入点AP可以为客户端装置(例如：控制单元330、控制器管理单元350)提供用于无线通信的资源，并与上级网络连接而将因特网(Internet)、以太网(Ethernet)之类通信服务提供给客户端装置。
根据本发明的实施例，控制单元330可以包括：识别信息获取部332，从RFID读写器316获取输送容器5的识别信息；气体供应控制部334，若识别到输送容器5，则传输指示向气体供应部324供应惰性气体的控制信号，并从气体供应部324接收与惰性气体的供应状态有关的信息；以及输出部336，输出保管单元310中的被安放输送容器5的每个安放插槽314A的输送容器5的安放与否以及惰性气体的供应状态。另外，控制单元330可以还包括：无线通信模组338，将与支承台314的每个安放插槽314A的输送容器5的安放与否以及惰性气体的供应状态有关的信息传输到控制器管理单元350。
图10示出根据本发明的实施例的半导体制造工厂的物流控制系统的个体间连接结构。如图10所示，控制单元330和控制器管理单元350通过接入点AP彼此无线连接。另一方面，接入点AP可以通过半导体制造工厂的网络与输送控制系统OCS连接。输送控制系统OCS控制用于传送半导体制造工厂内物品的整体系统。若发生需要传送物品的事件，则输送控制系统OCS可以为了移动相应物品而控制各输送车辆100。如图11所示，输送控制系统OCS可以通过接入点AP与控制器管理单元350连接，另外，通过控制器管理单元350从物品保管设备30的各控制单元330获取信息或控制各控制单元330的工作。
输送控制系统OCS可以通过控制器管理单元350接收与安放于物品保管设备30中的输送容器5有关的信息以及惰性气体的供应状态有关的信息。输送控制系统OCS将传送所需的输送容器5的位置信息传输到周边的输送车辆100而使其执行传送。另外，输送控制系统OCS可以通过控制器管理单元350控制各控制单元330。
另外，在本发明中，由于物品保管设备30的控制单元330的电力通过供电电缆20供应，当设置有物品保管设备30的区间时，能够供应到输送车辆100的电力可能变弱。例如，可以考虑如下情况：在特定区间，供电电缆20所能够供应的电力为200kW，每辆输送车辆100所需的电力为20kW，物品保管设备30的控制单元330总消耗的电力为20kW。在特定区间，供应到物品保管设备30的电力为20kW，当在特定区间行驶中的输送车辆100为9辆时，输送控制系统OCS可以使其它输送车辆100避开且不行驶特定区间而行驶其它路径，从而可以在特定区间不产生电力超负荷。
本实施例以及本说明书所附的附图只不过是明确地表示包含在本发明中的技术构思的一部分，显而易见，本领域技术人员能够在包含在本发明的说明书以及附图中的技术构思范围内容易导出的变形例和具体实施例均包含在本发明的权利范围内。
因此，本发明的构思不应局限限定于所说明的实施例，不仅是所附的权利要求书，与其权利要求书等同或等价变形的所有构思应包含在本发明的构思范畴。

Claims (20)

1.一种物品保管设备，是半导体制造工厂的物品保管设备，其中，
所述物品保管设备包括：
保管单元，设置于提供输送车辆的行驶路径的轨道的周边，并保管收纳有晶圆的输送容器；
吹净单元，向输送容器的内部供应惰性气体；
控制单元，识别保管于所述保管单元的所述输送容器，并将所述吹净单元控制成将所述惰性气体供应到所述输送容器；以及
供电单元，将从沿着所述轨道设置的供电电缆感应的电流供应到所述控制单元。
2.根据权利要求1所述的物品保管设备，其中，
所述保管单元包括：
框架，设置于所述轨道的侧方；
支承台，设置于所述框架的下部面并构成为被安放所述输送容器；以及
RFID读写器，设置于所述支承台而获取所述输送容器的识别信息并向所述控制单元传递。
3.根据权利要求2所述的物品保管设备，其中，
所述吹净单元包括：
气体供应端口，设置于所述支承台的安放插槽，并当所述输送容器搭载于所述安放插槽时与形成于所述输送容器的气体流入孔连通；以及
气体供应部，根据从所述控制单元接收的控制信号，通过所述气体供应端口向所述输送容器内供应所述惰性气体。
4.根据权利要求3所述的物品保管设备，其中，
所述气体供应部将与所述惰性气体的供应状态有关的信息传送到所述控制单元。
5.根据权利要求4所述的物品保管设备，其中，
所述控制单元包括：
识别信息获取部，从所述RFID读写器获取所述输送容器的识别信息；
气体供应控制部，若识别到所述输送容器，则向所述气体供应部传送所述控制信号，并从所述气体供应部接收与所述惰性气体的供应状态有关的信息；以及
输出部，输出所述保管单元中的被安放所述输送容器的每个安放插槽的所述输送容器的安放与否以及所述惰性气体的供应状态。
6.根据权利要求5所述的物品保管设备，其中，
所述输出部包括：
发光装置，分别显示每个所述安放插槽的所述输送容器的安放与否以及所述惰性气体的供应状态。
7.根据权利要求6所述的物品保管设备，其中，
所述发光装置设置成朝向半导体制造工厂的地面显示所述输送容器的安放与否以及所述惰性气体的供应状态。
8.根据权利要求1所述的物品保管设备，其中，
所述供电单元包括：
电流转换器，从所述供电电缆感应电流；以及
供电线缆，从所述电流转换器将电流供应到所述控制单元，
所述供电线缆构成为紧贴或者嵌入于所述轨道以及所述保管单元的构造物，以使得不与所述输送车辆产生干扰。
9.根据权利要求8所述的物品保管设备，其中，
所述电流转换器包括：
环状的芯部件，设置成以环状围绕所述供电电缆，并通过沿着所述供电电缆流动的电流形成磁场；以及
线圈部件，缠绕于所述芯部件，并通过所述磁场感应电流。
10.一种物品保管设备，是半导体制造工厂的物品保管设备，其中，
所述物品保管设备包括：
保管单元，设置于提供输送车辆的行驶路径的轨道的周边，并保管收纳有晶圆的输送容器；
吹净单元，向输送容器的内部供应惰性气体；
控制单元，识别保管于所述保管单元的所述输送容器，并将所述吹净单元控制成将所述惰性气体供应到所述输送容器；
供电单元，将从沿着所述轨道设置的供电电缆感应的电流供应到所述控制单元；以及
控制器管理单元，通过无线通信连接于所述控制单元而管理所述控制单元的工作。
11.根据权利要求10所述的物品保管设备，其中，
所述保管单元包括：
框架，设置于所述轨道的侧方；
支承台，设置于所述框架的下部面并构成为被安放所述输送容器；以及
RFID读写器，设置于所述支承台而获取所述输送容器的识别信息并向所述控制单元传递。
12.根据权利要求11所述的物品保管设备，其中，
所述吹净单元包括：
气体供应端口，设置于所述支承台，并当所述输送容器搭载于所述支承台时与形成于所述输送容器的气体流入孔连通；以及
气体供应控制单元，根据从所述控制单元接收的控制信号，通过所述气体供应端口向所述输送容器内供应所述惰性气体。
13.根据权利要求12所述的物品保管设备，其中，
所述气体供应部将与所述惰性气体的供应状态有关的信息传送到所述控制单元。
14.根据权利要求13所述的物品保管设备，其中，
所述控制单元包括：
识别信息获取部，从所述RFID读写器获取所述输送容器的识别信息；
气体供应控制部，若识别到所述输送容器，则向所述气体供应部传送所述控制信号，并从所述气体供应部接收与所述惰性气体的供应状态有关的信息；以及
输出部，输出所述保管单元中的被安放所述输送容器的每个安放插槽的所述输送容器的安放与否以及所述惰性气体的供应状态。
15.根据权利要求14所述的物品保管设备，其中，
所述输出部包括：发光装置，分别显示每个所述支承台的所述输送容器的安放与否以及所述惰性气体的供应状态，
所述发光装置设置成朝向半导体制造工厂的地面显示所述输送容器的安放与否以及所述惰性气体的供应状态。
16.根据权利要求10所述的物品保管设备，其中，
所述供电单元包括：
电流转换器，从所述供电电缆感应电流；以及
供电线缆，从所述电流转换器将电流供应到所述控制单元，
所述供电线缆构成为紧贴或者嵌入于所述轨道以及所述保管单元的构造物，以使得不与所述输送车辆产生干扰。
17.根据权利要求16所述的物品保管设备，其中，
所述电流转换器包括：
环状的芯部件，设置成以环状围绕所述供电电缆，并通过沿着所述供电电缆流动的电流形成磁场；以及
线圈部件，缠绕于所述芯部件，并通过所述磁场感应电流。
18.根据权利要求13所述的物品保管设备，其中，
所述控制单元还包括：
无线通信模组，将与每个所述支承台的所述输送容器的安放与否以及所述惰性气体的供应状态有关的信息传送到所述控制器管理单元。
19.根据权利要求18所述的物品保管设备，其中，
所述控制单元以及所述控制器管理单元通过设置于半导体制造工厂的顶棚的接入点执行无线通信，
所述控制器管理单元设置于所述半导体制造工厂的地上而通过所述接入点从所述控制单元接收与所述输送容器的安放与否以及所述惰性气体的供应状态有关的信息，并将用于控制所述控制单元的信号传送到所述控制单元。
20.一种半导体制造工厂的物流系统，其中，所述半导体制造工厂的物流系统包括：
轨道，设置于半导体制造工厂的顶棚而提供输送车辆的移动路径；
供电电缆，沿着所述轨道设置而向所述输送车辆供应电力；以及
物品保管设备，保管来自所述输送车辆的输送容器，
所述物品保管设备包括：
保管单元，设置于所述轨道的周边，并保管收纳有晶圆的输送容器；
吹净单元，向输送容器的内部供应惰性气体；
控制单元，识别保管于所述保管单元的所述输送容器，并将所述吹净单元控制成将所述惰性气体供应到所述输送容器；
供电单元，将从所述供电电缆感应的电流供应到所述控制单元；以及
控制器管理单元，通过无线通信连接于所述控制单元而管理所述控制单元的工作。
CN202211602144.5A 2021-12-22 2022-12-13 物品保管设备以及具备其的半导体制造工厂的物流系统 Pending CN116344384A (zh)

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