CN115997104B - 缺陷检查装置 - Google Patents

缺陷检查装置

Info

Publication number
CN115997104B
CN115997104B CN202080103681.8A CN202080103681A CN115997104B CN 115997104 B CN115997104 B CN 115997104B CN 202080103681 A CN202080103681 A CN 202080103681A CN 115997104 B CN115997104 B CN 115997104B
Authority
CN
China
Prior art keywords
excitation
inspection object
unit
leg
defect inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202080103681.8A
Other languages
English (en)
Chinese (zh)
Other versions
CN115997104A (zh
Inventor
堀川浩司
田窪健二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of CN115997104A publication Critical patent/CN115997104A/zh
Application granted granted Critical
Publication of CN115997104B publication Critical patent/CN115997104B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/043—Analysing solids in the interior, e.g. by shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
    • G01B9/02095—Speckle interferometers, i.e. for detecting changes in speckle pattern detecting deformation from original shape
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G01B9/02098—Shearing interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/045—Analysing solids by imparting shocks to the workpiece and detecting the vibrations or the acoustic waves caused by the shocks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654—Imaging
    • G01N29/069—Defect imaging, localisation and sizing using, e.g. time of flight diffraction [TOFD], synthetic aperture focusing technique [SAFT], Amplituden-Laufzeit-Ortskurven [ALOK] technique
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/0289—Internal structure, e.g. defects, grain size, texture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2694—Wings or other aircraft parts

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN202080103681.8A 2020-07-02 2020-07-02 缺陷检查装置 Active CN115997104B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/026071 WO2022003916A1 (ja) 2020-07-02 2020-07-02 欠陥検査装置

Publications (2)

Publication Number Publication Date
CN115997104A CN115997104A (zh) 2023-04-21
CN115997104B true CN115997104B (zh) 2025-08-01

Family

ID=79315004

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080103681.8A Active CN115997104B (zh) 2020-07-02 2020-07-02 缺陷检查装置

Country Status (4)

Country Link
US (1) US12345653B2 (https=)
JP (1) JP7444257B2 (https=)
CN (1) CN115997104B (https=)
WO (1) WO2022003916A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024076652A (ja) * 2022-11-25 2024-06-06 株式会社大気社 検査装置および検査方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101576717A (zh) * 2003-07-09 2009-11-11 株式会社尼康 结合装置、曝光装置、器件制造方法
CN107462581A (zh) * 2016-06-02 2017-12-12 株式会社岛津制作所 缺陷检测方法以及缺陷检测装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6121961U (ja) * 1984-07-16 1986-02-08 神奈川県 超音波探触子の保持装置
JPH10227768A (ja) 1997-02-13 1998-08-25 Aisin Seiki Co Ltd 雨滴検出装置
JPH10253604A (ja) 1997-03-07 1998-09-25 Matsushita Electric Ind Co Ltd 超音波探触子
JPH10308997A (ja) 1997-05-08 1998-11-17 Olympus Optical Co Ltd 超音波振動子
US6134006A (en) * 1998-02-25 2000-10-17 Becthel Bwxt Idaho, Llc Imaging photorefractive optical vibration measurement method and device
JPH11315883A (ja) * 1998-04-30 1999-11-16 Canon Inc 除振装置、露光装置およびデバイス製造方法
JP2002177271A (ja) 2000-12-07 2002-06-25 Ge Medical Systems Global Technology Co Llc 超音波プローブ製造方法、超音波プローブ、および超音波撮像装置
WO2005006416A1 (ja) * 2003-07-09 2005-01-20 Nikon Corporation 結合装置、露光装置、及びデバイス製造方法
JP4244172B2 (ja) * 2003-08-13 2009-03-25 株式会社Ｉｈｉ 高温用超音波探触子
JP4801457B2 (ja) * 2006-02-02 2011-10-26 株式会社リコー 表面欠陥検査装置、表面欠陥検査方法及び表面欠陥検査プログラム
JP5456010B2 (ja) * 2011-08-31 2014-03-26 三菱電機株式会社 薄板検査装置
US9495737B2 (en) 2012-10-31 2016-11-15 The Boeing Company Thermal sound inspection system
JP5996415B2 (ja) * 2012-12-19 2016-09-21 株式会社東芝 超音波探傷装置及び方法
TWI585519B (zh) * 2015-11-06 2017-06-01 艾斯邁科技股份有限公司 光罩檢測裝置及其方法
CN108088913B (zh) * 2018-01-09 2023-08-25 东莞理工学院 用于钢轨轨底探伤的压电超声导波探头及其探伤方法
CN208282930U (zh) * 2018-05-08 2018-12-25 辛迈 基于振动分析的动力机组无线监测系统
CN208872452U (zh) * 2019-01-08 2019-05-17 中国大唐集团新能源科学技术研究院有限公司 一种便携式风电机组用螺栓预紧力检测设备
CN210525404U (zh) * 2019-03-01 2020-05-15 郑淑选 一种水泥混凝土振实装置
CN209416526U (zh) * 2019-03-15 2019-09-20 江苏万宝电子有限公司 一种电机轴承用热电阻
US11898926B2 (en) * 2019-09-13 2024-02-13 Technical Manufacturing Corporation Inspection apparatus and methods for precision vibration-isolation tabletops

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101576717A (zh) * 2003-07-09 2009-11-11 株式会社尼康 结合装置、曝光装置、器件制造方法
CN107462581A (zh) * 2016-06-02 2017-12-12 株式会社岛津制作所 缺陷检测方法以及缺陷检测装置

Also Published As

Publication number Publication date
US12345653B2 (en) 2025-07-01
JP7444257B2 (ja) 2024-03-06
WO2022003916A1 (ja) 2022-01-06
JPWO2022003916A1 (https=) 2022-01-06
CN115997104A (zh) 2023-04-21
US20230251204A1 (en) 2023-08-10

Similar Documents

Publication Publication Date Title
US10254252B2 (en) Surface and subsurface detection sensor
JP5249975B2 (ja) レーザ超音波探傷装置
CN113167767B (zh) 缺陷检查装置和缺陷检查方法
CN113646627B (zh) 缺陷检查装置和缺陷检查方法
KR20010007337A (ko) 검사 장비
JP7326292B2 (ja) 基板上のターゲット構造の位置を決定するための装置及び方法
JP2016105052A (ja) 基板検査装置
JP7099545B2 (ja) 欠陥検査装置および欠陥検査方法
WO2021145034A1 (ja) 欠陥検査装置および欠陥検査方法
CN115997104B (zh) 缺陷检查装置
WO2022059710A1 (ja) 欠陥検査装置
IL209291A (en) Method and system for ultrasonic inspection
CN1415067A (zh) 采用光学全息摄影干涉测量术的物体无损检查方法及装置
WO2021149307A1 (ja) 欠陥検査装置および欠陥検査方法
US12596105B2 (en) Defect inspection apparatus and defect inspection method
JP7632621B2 (ja) 欠陥検査システム、欠陥検査装置、および、欠陥検査方法
CN100375885C (zh) 实时无损检测系统和方法
CN115791982A (zh) 基于正交热栅的激光超声残余应力检测系统及方法
JPS6345541A (ja) 検査方法および装置
JP4255586B2 (ja) 試料検査装置
JP4552202B2 (ja) 表面検査装置
TWI461650B (zh) 影像處理系統及其方法
JPWO2022003916A5 (https=)
KR102786763B1 (ko) 비접촉식 광음향 검사 장치
KR20230144220A (ko) Euv 노광공정용 종합 검사 장치

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant