CN115194271B - Laser and electrochemical composite polishing device for 3D printing metal component - Google Patents
Laser and electrochemical composite polishing device for 3D printing metal component Download PDFInfo
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- CN115194271B CN115194271B CN202211003857.XA CN202211003857A CN115194271B CN 115194271 B CN115194271 B CN 115194271B CN 202211003857 A CN202211003857 A CN 202211003857A CN 115194271 B CN115194271 B CN 115194271B
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- 239000002184 metal Substances 0.000 title claims abstract description 87
- 238000005498 polishing Methods 0.000 title claims abstract description 35
- 239000002131 composite material Substances 0.000 title claims abstract description 19
- 238000010146 3D printing Methods 0.000 title abstract description 5
- 239000007788 liquid Substances 0.000 claims abstract description 42
- 238000006243 chemical reaction Methods 0.000 claims abstract description 32
- 238000003860 storage Methods 0.000 claims abstract description 25
- 239000003792 electrolyte Substances 0.000 claims abstract description 24
- 238000003487 electrochemical reaction Methods 0.000 claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims abstract description 10
- 239000012530 fluid Substances 0.000 claims abstract description 9
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims abstract description 5
- 238000002834 transmittance Methods 0.000 claims abstract description 4
- 239000012535 impurity Substances 0.000 claims description 4
- 239000007795 chemical reaction product Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims description 2
- 238000007639 printing Methods 0.000 abstract 1
- 238000012545 processing Methods 0.000 description 26
- 238000000034 method Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000010892 electric spark Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H5/00—Combined machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H11/00—Auxiliary apparatus or details, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H5/00—Combined machining
- B23H5/14—Supply or regeneration of working media
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
The invention provides a laser and electrochemical composite polishing device for a 3D printing metal component, which comprises an optical unit, an electrochemical reaction unit and a fluid control unit, wherein the optical unit is used for printing the metal component; the optical unit comprises a nanosecond green laser, an XY two-axis laser scanning galvanometer, a focusing lens and a control system; the electrochemical reaction unit comprises a metal cathode, a metal anode workpiece, a mechanical arm, a reaction container, electrolyte, an electric moving platform, a wire, a direct current power supply, a base and a liquid storage tank; one or more straight-through grooves which are arranged along the vertical direction are arranged on the metal cathode; the reaction vessel and the liquid storage tank are transparent acrylic vessels, and the light transmittance is more than 90%. The laser beam passes through the XY two-axis laser scanning galvanometer and the focusing lens, and is focused on the surface of the metal anode workpiece after passing through the through groove on the metal cathode. The invention successfully realizes the effective combination of laser and electrochemical polishing, so that the rapid large-area polishing of the laser can be realized while the electrochemical polishing is performed.
Description
Technical Field
The invention belongs to the field of laser processing, and particularly relates to a laser and electrochemical composite polishing device for a 3D printing metal component.
Background
With the rapid development of additive manufacturing technology, particularly the popularization and application of selective laser melting (SELECTIVE LASER MELTING, SLM) technology, 3D printed metal components are increasingly applied to industries such as medical treatment, aviation, grinding tools, automobiles and the like. However, the 3D printed micron-sized powder raw material and its forming mechanism determine that there is some roughness on the surface of the printed material. To meet some of the needs, the surface of the 3D printed metal component must be polished. At present, the SLM additive manufacturing forming part is mainly polished by means of manual polishing, sand blasting, electrolytic polishing and the like, but the methods have the defects of low efficiency, difficult processing of complex inner surfaces, environmental pollution and the like.
The laser polishing is a novel polishing technology and has the advantages of non-contact, no pollution, high efficiency and the like. But the thermal effects generated during laser polishing tend to cause the creation of recast and microcracks. And it is difficult to achieve fine polishing with high accuracy and high flatness. In contrast, electrochemical polishing removes material by anodic electrochemical dissolution, which can achieve high-precision polishing, however, the surface roughness of the electrochemically polished metal member must be less than a certain value, the material with higher roughness cannot be polished, and the efficiency is low due to the occurrence of a passivation film in the polishing process. It follows that the above single polishing process is difficult to be compatible in terms of processing ability, efficiency, surface quality, and the like.
The laser and electrochemical composite processing technology combines the advantages of high laser processing efficiency, good electrochemical processing surface quality and the like, and becomes a high-surface quality precision processing technology which is widely focused at home and abroad, but the existing laser and electrochemical composite processing technology mainly realizes the processing of micropores by introducing electrolyte and laser into a hollow tube electrode with the diameter of 0.3-1mm, and has the advantages of small processing area, low efficiency and low flexibility degree, and cannot realize the large-area high-efficiency polishing of the surface of a 3D printed metal member.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the laser and electrochemical composite polishing device for the 3D printing metal member, which has high processing efficiency and large processing area.
The invention is realized by the following technical scheme:
A laser and electrochemical composite polishing device facing 3D printed metal components comprises an optical unit, an electrochemical reaction unit and a fluid control unit; the optical unit comprises a nanosecond green laser, an XY two-axis laser scanning galvanometer, a focusing lens and a control system; the electrochemical reaction unit comprises a metal cathode, a metal anode workpiece, a mechanical arm, a reaction container, electrolyte, an electric moving platform, a wire, a direct current power supply, a base and a liquid storage tank;
One or more straight-through grooves along the vertical direction are formed in the metal cathode; the reaction container and the liquid storage tank are transparent acrylic vessels, and the light transmittance is more than 90%; the reaction container is vertically and fixedly arranged above the base, and the reaction container and the base are both arranged in the liquid storage tank; a groove is formed in the bottom of the reaction container, the metal cathode is vertically placed in the groove and is fixedly clamped, a metal anode workpiece is clamped by a mechanical arm, the metal anode workpiece is opposite to the metal cathode in position and is arranged in parallel, and the metal anode workpiece can be driven by an electric moving platform to move left and right relative to the metal cathode; a slit for flowing in electrolyte is arranged at the bottom of the reaction container between the metal cathode and the metal anode workpiece; the metal cathode and the metal anode workpiece are respectively connected with the anode and the cathode of the direct current power supply through wires;
After being reflected by the XY two-axis laser scanning galvanometer and focused by the focusing lens, the laser beam output by the nanosecond green laser is acted on the surface of the metal anode workpiece through the liquid storage tank, the reaction container and the through groove on the metal cathode.
Further, the fluid control unit includes a pipe, a check valve, a filter, a micro pump, a main tank, and a nozzle; the main container is used for containing and discharging solution, the liquid inlet end of the micro pump is communicated with the main container, and after being filtered by the filter, the liquid outlet end of the micro pump passes through the liquid inlet of the liquid storage tank and the liquid inlet of the base and is injected into the nozzle arranged in the internal cavity of the base; the nozzle is arranged in the internal cavity of the base, and the outlet of the nozzle is communicated with the slit at the bottom of the reaction container and is used for spraying electrolyte into the slit at the bottom of the reaction container, so that the electrolyte rapidly flows in the tiny slit between the metal cathode and the metal anode workpiece; electrolyte in the liquid storage tank flows back into the main container through a liquid outlet and a pipeline, and a check valve for preventing the solution from flowing back is arranged on the pipeline.
Further, the fluid control unit further comprises an ultrasonic vibration platform which is arranged at the bottom of the liquid storage tank and used for taking away bubbles, reaction products and impurities generated by the electrochemical reaction through ultrasonic vibration.
The invention has the following beneficial effects:
1. According to the laser and electrochemical composite polishing device, the through groove is formed in the metal cathode, and the electric moving platform drives the metal anode workpiece to move, so that effective combination of laser polishing and electrochemical polishing of the flat electrode is successfully realized.
2. In the laser and electrochemical composite polishing process, the laser is driven to vertically scan along the vertical direction through the vibrating mirror, and the metal anode workpiece is driven to horizontally move through the electric moving platform, so that the effect of the laser on the whole workpiece is realized, the problem that the traditional pipe electrode composite processing area is too small is solved, meanwhile, the laser scanning speed is increased to match higher laser energy, the efficient removal of materials is realized, and the problem that the traditional pipe electrode composite processing efficiency is too low is solved.
3. The metal electrode in the laser and electrochemical composite polishing device can be used for adjusting the width of the through groove according to the focused laser spot size design. In the processing process, the metal anode workpiece moves left and right, laser passes through the through grooves to scan quickly in the vertical direction, on one hand, one beam of laser can be adopted to scan back and forth among a plurality of through grooves, on the other hand, according to the number of the through grooves on the electrode, an optical diffraction device is adopted to split the laser, for example, when the number of the through grooves is 10, the laser is split into 10 beams through a beam splitter, and the 10 beams of laser scan the through grooves at the same time, so that the processing efficiency can be obviously improved, and multi-beam parallel polishing is realized.
4. According to the laser and electrochemical composite polishing device, the metal workpiece to be processed is vertically placed, and meanwhile, through ingenious mechanical structure design, the electrolyte only flows through a tiny slit between two electrodes from bottom to top, so that fluctuation of polishing efficiency caused by overhigh concentration of solution in a local area in the electrochemical reaction process can be effectively avoided; and simultaneously, the ultrasonic vibration is assisted, so that the movement of bubbles generated in the processing process can be accelerated, the flow of a solution is promoted, and the scattering of the bubbles attached to the surface of the material in the processing process to the incident laser is avoided.
5. The laser and electrochemical composite polishing device solves the problem that the original electrochemical polishing cannot polish parts with higher roughness, adopts a polishing mode of electrochemical auxiliary processing by taking laser as a main part when the surface roughness of a metal component is higher, has higher energy density of the laser and lower electrochemical current density, can effectively remove slag and remelting layers generated in the laser processing process by electrochemical reaction, adopts a polishing mode of laser auxiliary processing by taking the electrochemical as a main part when the roughness is reduced to below 2 mu m, and can quickly remove passivation films by laser to promote the electrochemical reaction so as to realize efficient polishing.
Drawings
FIG. 1 is a schematic diagram of a laser and electrochemical composite polishing apparatus according to the present invention;
FIG. 2 is an assembly view of a nozzle and a base;
FIG. 3 is an assembly view of a base and a reaction vessel;
Fig. 4 is a structural view of a transparent electrode.
Detailed Description
The invention will be described in further detail with reference to the drawings and the detailed description.
As shown in fig. 1-4, the present invention provides a laser and electrochemical composite polishing apparatus for 3D printed metal members, comprising an optical unit, an electrochemical reaction unit, and a fluid control unit.
The optical unit comprises a nanosecond green laser 1, an XY two-axis laser scanning galvanometer 2, a focusing lens 3 and a control system 21.
The wavelength of the nanosecond green laser is 500-560 nm, the output power is 10-80W, the pulse width is 1-15 ns, the frequency is 30 kHz-500 Hz, the processing software arranged in the control system 21 controls the light emission of the nanosecond green laser 1, and the laser beam is output after being focused by the XY two-axis laser scanning galvanometer 2 and the focusing lens 3.
The electrochemical reaction unit comprises a metal cathode 4, a metal anode workpiece 5, a mechanical arm 6, a reaction container 7, electrolyte 8, an electric moving platform 9, a wire 10, a direct current power supply 11, a base 19 and a liquid storage tank 20.
The reaction vessel 7 and the liquid storage tank 20 are transparent acrylic vessels, and can transmit high-energy laser beams, and the light transmittance is more than 90%. The reaction vessel 7 is vertically and fixedly arranged above the base 18, and the reaction vessel 7 and the base 18 are both arranged in the liquid storage tank 20. The bottom of the reaction vessel 7 is provided with a groove, the metal cathode 4 is vertically placed in the groove and is fixedly clamped, the metal anode workpiece 5 is clamped by the mechanical arm 6, the metal anode workpiece 5 is opposite to the metal cathode 4 in position and is arranged in parallel, and the metal anode workpiece 5 can be driven by the electric moving platform 9 to move left and right relative to the metal cathode 4. The bottom of the reaction vessel 7 is provided with a slit for flowing in the electrolyte between the metal cathode 4 and the metal anode workpiece 5, the slit having a width of about 1 to 3mm. Both the metal cathode 4 and the metal anode workpiece 5 are respectively connected with the positive electrode and the negative electrode of a direct current power supply 11 through a lead 10, and the direct current power supply 11 is used for providing electrons for electrochemical reaction.
The side wall of the liquid storage tank 20 is provided with a liquid inlet and a liquid outlet, the bottom of the base 19 is provided with a liquid inlet, a cavity is arranged in the liquid storage tank, and the top is provided with an opening.
The metal cathode 4 is provided with one or more through grooves 41 along the vertical direction, the width of the through grooves 41 is 0.2-1 mm, the mutual interval between the through grooves 41 can be set according to the requirement, and the through grooves 41 can be cut by an electric spark cutting machine.
The electrolyte 8 may be a neutral salt solution or an acidic mixed solution.
After passing through the XY two-axis laser scanning galvanometer 2 and the focusing lens 3, the laser beam output by the nanosecond green laser 1 is focused on the surface of the metal anode workpiece 5 after passing through the transparent liquid storage tank 20, the reaction vessel 7 and the through groove 41 on the metal cathode 4.
The fluid control unit includes a pipe 12, a check valve 13, a filter 14, a micro pump 15, a main tank 16, a nozzle 17, and an ultrasonic vibration table 18.
The main container 16 is used for containing the electrolyte 8, the liquid inlet end of the micropump 15 is communicated with the main container 16, and the liquid outlet end is filtered by the filter 14, passes through the liquid inlet of the liquid storage tank 20 and the liquid inlet of the base 19, and is injected into the nozzle 17 arranged in the internal cavity of the base 19.
The nozzle 17 is arranged in the internal cavity of the base 19, the outlet of the nozzle 17 is communicated with the slit at the bottom of the reaction container 7, so that the electrolyte 8 can be sprayed into the slit at the bottom of the reaction container 7, the electrolyte can flow rapidly in the tiny slit between the metal cathode 4 and the metal anode workpiece 5, the rapid update of the electrolyte between the two electrodes is ensured, and the influence of concentration polarization is reduced.
Electrolyte in the reservoir 20 flows back into the main container 16 via its outlet and the pipe 12, said pipe 12 being provided with a non-return valve 13 for preventing the back flow of the solution.
An ultrasonic vibration table 18 is installed at the bottom of the liquid storage tank 20 for carrying away bubbles, reaction products and impurities generated by the electrochemical reaction by ultrasonic vibration.
The metal workpiece is polished by the device, and the specific steps are as follows:
(1) The metal cathode 4 is vertically and fixedly placed in a groove of a transparent acrylic reaction container 7 containing electrolyte, a metal anode workpiece 5 is clamped by a mechanical arm 6, and the metal anode workpiece is driven to move left and right relative to the metal cathode 4 through a moving platform 9; the anode and the cathode are respectively connected with the anode and the cathode of the direct current power supply 11.
(2) The laser focus position is regulated, laser processing parameters are input into processing software arranged in a computer 21, the nanosecond green laser 1 is controlled to emit light through the software, the laser scanning galvanometer 2 is controlled to perform scanning movement, and in the processing process, laser rapidly scans up and down after penetrating through a transparent liquid storage tank 20, a reaction container 7 and a through groove 41 on a metal cathode 4 in the vertical direction. After the scanning is completed, the electric moving platform 9 controls the metal anode workpiece 5 to move, and the moving distance is the width of the laser scanning through groove 41 each time, until the scanning of the whole surface of the metal anode workpiece 5 is completed. Simultaneously, the ultrasonic vibration platform 18, the micropump 15 and the direct current power supply 11 are started, air bubbles and electrochemical dissolved impurities generated in the processing process float upwards rapidly through ultrasonic vibration, adverse effects on laser beam conduction and electrochemical reaction are avoided, the micropump 15 can realize circulating flow of the electrolyte 8, rapid updating of the electrolyte 8 is guaranteed, electrons are provided by the direct current power supply 11 to promote electrochemical reaction, melt generated in the laser processing process of the surface of the metal anode workpiece 5 is melted, and large-area efficient fine polishing of the surface of the metal anode workpiece is finally realized through laser and electrochemical combined processing.
It will be obvious to those skilled in the art that the present invention may be varied in a number of ways without departing from the scope of the invention. All such modifications as would be obvious to one skilled in the art are intended to be included within the scope of this claims.
Claims (2)
1. A laser and electrochemical composite polishing device facing 3D printed metal components comprises an optical unit, an electrochemical reaction unit and a fluid control unit; the optical unit is characterized by comprising a nanosecond green laser (1), an XY two-axis laser scanning galvanometer (2), a focusing lens (3) and a control system (21); the electrochemical reaction unit comprises a metal cathode (4), a metal anode workpiece (5), a mechanical arm (6), a reaction container (7), electrolyte (8), an electric moving platform (9), a lead (10), a direct current power supply (11), a base (19) and a liquid storage tank (20);
One or more straight-through grooves (41) along the vertical direction are formed in the metal cathode (4); the reaction vessel (7) and the liquid storage tank (20) are transparent acrylic vessels, and the light transmittance is more than 90%; the reaction container (7) is vertically and fixedly arranged above the base (18), and the reaction container (7) and the base (18) are both arranged in the liquid storage tank (20); a groove is formed in the bottom of the reaction container (7), the metal cathode (4) is vertically placed in the groove and is fixedly clamped, the metal anode workpiece (5) is clamped by a mechanical arm (6), the metal anode workpiece (5) is opposite to the metal cathode (4) in position and is arranged in parallel, and the metal anode workpiece (5) can be driven by an electric moving platform (9) to move left and right relative to the metal cathode (4); a slit for flowing in electrolyte is arranged at the bottom of the reaction container (7) between the metal cathode (4) and the metal anode workpiece (5); the metal cathode (4) and the metal anode workpiece (5) are respectively connected with the anode and the cathode of the direct current power supply (11) through leads (10);
After being reflected by an XY two-axis laser scanning galvanometer (2) and focused by a focusing lens (3), laser beams output by the nanosecond green laser (1) are acted on the surface of a metal anode workpiece (5) through a liquid storage tank (20), a reaction container (7) and a through groove (41) on a metal cathode (4);
The fluid control unit comprises a pipeline (12), a check valve (13), a filter (14), a micropump (15), a main container (16) and a nozzle (17); the main container (16) is used for containing and discharging the solution (8), the liquid inlet end of the micropump (15) is communicated with the main container (16), and after being filtered by the filter (14), the liquid outlet end passes through the liquid inlet of the liquid storage tank (20) and the liquid inlet of the base (19) and is injected into the nozzle (17) arranged in the inner cavity of the base (19); the nozzle (17) is arranged in the inner cavity of the base (19), and the outlet of the nozzle (17) is communicated with the slit at the bottom of the reaction container (7) and is used for spraying the electrolyte (8) into the slit at the bottom of the reaction container (7) so that the electrolyte can flow rapidly in the tiny slit between the metal cathode (4) and the metal anode workpiece (5); electrolyte in the liquid storage tank (20) flows back into the main container (16) through a liquid outlet and a pipeline (12), and a check valve (13) for preventing the solution from flowing back is arranged on the pipeline (12).
2. The laser and electrochemical composite polishing apparatus for 3D printed metal members according to claim 1, wherein the fluid control unit further comprises an ultrasonic vibration table (18), the ultrasonic vibration table (18) being installed at the bottom of the liquid storage tank (20) for carrying away bubbles, reaction products and impurities generated by the electrochemical reaction by ultrasonic vibration.
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