CN105195903A - Laser microjet processing device for perforating turbine blade - Google Patents
Laser microjet processing device for perforating turbine blade Download PDFInfo
- Publication number
- CN105195903A CN105195903A CN201510686264.1A CN201510686264A CN105195903A CN 105195903 A CN105195903 A CN 105195903A CN 201510686264 A CN201510686264 A CN 201510686264A CN 105195903 A CN105195903 A CN 105195903A
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- Prior art keywords
- laser
- water cutter
- micro
- water
- generating means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/001—Turbines
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention relates to a laser microjet processing device for perforating a turbine blade. The laser microjet processing device comprises a laser system, a light beam interface, a light beam shaping system, a laser microjet generator, a processing platform and a processing control system, wherein the laser system is positioned at the foremost end; the light beam interface is positioned in the spatial light path of a laser beam output by the laser system or connected with the output port of a laser through an optical fiber; the light beam shaping system is positioned in a light path output by the light beam interface; the laser microjet generator is positioned in a light path output by the light beam shaping system; the optical axes of the laser microjet generator and the light beam shaping system are collinear in the vertical direction; the processing platform is positioned below the laser microjet generator, and the processing control system is connected with the laser system, the laser microjet generator and the processing platform.
Description
Technical field
The present invention relates to turbo blade cheesing techniques field, particularly a kind of laser micro-water cutter processing unit (plant) for turbo blade punching.
Background technology
Turbine is the critical component of aero-engine, needs to bear great thermic load and mechanical load.And in order to the thrust that promotes engine and thrust-weight ratio, need the temperature improving constantly combustion chamber, also just mean that turbo blade will bear the impact of the high-pressure gas of very high temperature in cycle of engine.Therefore, Cooling Technique Based On Thermal Driving become ensure turbine in high temperature environments reliably working, extend the feasible of part service life and approach efficiently.Wherein, air film cooling technology is that representative important feature one of is improved, and its main feature devises a large amount of air film holes, to ensure that parts surface is covered by the cold air of thin layer at positions such as turbo blade leading edge, blade profiles.
The process technology of air film hole is one of key technology of turbo blade manufacture.At present, the processing of blade film cooling holes mainly adopts the methods such as laser boring, electric spark-erosion perforation, the punching of electric liquid bundle.Traditional laser boring efficiency is high, but there is heat affected area, can produce some manufacturing deficiencies such as slag, micro-crack, fold, fusion zone and remelted layer; Electric spark-erosion perforation remelted layer is relatively thin, but can only processing metallic; Although and the punching of electric liquid bundle is without remelted layer, crudy is good, and efficiency is lower.
Laser water cutter is the effective technological means of one overcoming above-mentioned processing method shortcoming.Micro-water column center is imported into after Laser Focusing, utilize the principle that light is totally reflected at micro-water column and Air Interface, laser is guided to advance along water column, when water column and absorption surface, laser is directed to surface of the work by water column and to inside workpiece, Reciprocity of Laser & Materials, material is removed and is taken away by current, the workpiece of current cooling simultaneously, does not have heat affected area, does not produce slag.Therefore, laser water cutter not only has the advantage of conventional laser processing, also effectively eliminates the problems such as heat affected area, micro-crack, remelted layer and burr, obtains higher crudy.In addition, there is not focus because laser beam is bound in liquid stream, make the effective working distance of laser water cutter long, usually can reach 1000 times of nozzle bore.During conventional solid Laser Processing, laser beam is tapered at focus place, and the working groove that work piece is formed is the large del in upper end, and integral cutting seam is larger.Laser water cutter adds man-hour laser beam among liquid beam, without focus, is always the cylindrical of uniform diameter, and the cutting seam be processed to form is narrow.But to punch high precision and crudy requirement to meet turbo blade, the laser water cutter used must have less diameter and the energy of high concentration, therefore needs to use the micro-water cutter of laser to process.
Summary of the invention
The object of the invention is to, for improving precision and the crudy of punching, providing a kind of laser micro-water cutter processing unit (plant) for turbo blade punching.
The invention provides a kind of laser micro-water cutter processing unit (plant) for turbo blade punching.This device comprises: laser system, light beam interface, beam shaping system, laser micro-water cutter generating means, machine table and control system for processing, described laser system is positioned at foremost, described light beam interface is arranged in the space optical path of described laser system outgoing laser beam, or be connected with laser output mouth by optical fiber, described beam shaping system is arranged in the light path that described light beam interface exports, described laser micro-water cutter generating means is arranged in the light path that described beam shaping system exports, and the optical axis of the two conllinear in vertical direction, described machine table is positioned at the below of described laser micro-water cutter generating means, described control system for processing respectively with described laser system, described laser micro-water cutter generating means and described machine table are connected.
The running of the laser system described in described control system for processing controls, described laser system exports pulse laser beam, and this light beam is via free-space propagation, or coupling fiber enters described light beam interface, optical propagation direction changes into vertically downward, then by described beam shaping system; Laser beam through shaping incides described laser micro-water cutter generating means from top, and is coupled in the small current sprayed wherein downwards by condenser lens, forms water bundle optical fiber; This water bundle optical fiber carries out perforation processing to the turbo blade on described workbench.Laser micro-water cutter generating means described in described control system for processing adjustment realizes laser and is coupled with the aligning of current, and the action controlling described machine table in process is with positioning workpieces.
Described laser system comprises: solid pulse laser or solid continuous wave laser, or optical fiber laser, and power supply, water cooling unit.
Described light beam interface is laser mirror or optical fiber interface.
The optical system that described beam shaping system is made up of some lens and optical element can be also fiber optic collimator system.
Described laser micro-water cutter generating means comprises: for optical system and the fine bourn generating means of laser coupled.Described fine bourn generating means is a container be connected with miniflow pump, has the laser incidence window of a glass above this container, and have a micropore diameter water spout immediately below it, this container is connected with miniflow pump by the water inlet on sidewall.
Described machine table is manipulator or the five-axis robot system of high-precision six degree of freedom.
Described control system for processing comprises: main frame, control panel and external motion platform controller.
The output wavelength scope of described solid pulse laser or solid continuous wave laser or optical fiber laser is 515nm-1064nm.
The invention has the advantages that: the present invention can realize the superfine water bundle optical fiber that diameter reaches 20 μm-1000 μm, the micropore that diameter is less, darker can be got, remelted layer, slag burr is not produced in process, can obtain higher machining accuracy, quality and efficiency in the perforation processing of turbo blade, and yield rate is high, cost is lower.
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of the laser micro-water cutter processing unit (plant) for turbo blade punching of the present invention
Fig. 2 is the schematic diagram of laser of the present invention micro-water cutter generating means
Fig. 3 is the sectional view of coupled lens and water container in laser of the present invention micro-water cutter generating means
1, laser beam 2, coupled lens
3, water container 4, water inlet
5, water spout 6, miniflow pump
7, water filling port 8, water bundle optical fiber
9, glass window
Detailed description of the invention
Now the invention will be further described by reference to the accompanying drawings.
As shown in Figure 1, the described laser micro-water cutter processing unit (plant) for turbo blade punching comprises: laser system, light beam interface, beam shaping system, laser micro-water cutter generating means, machine table and control system for processing, described laser system is positioned at foremost, described light beam interface is arranged in the space optical path of described laser system outgoing laser beam, described beam shaping system is arranged in the light path that described light beam interface exports, described laser micro-water cutter generating means is arranged in the light path that described beam shaping system exports, and the optical axis of the two conllinear in vertical direction, described machine table is positioned at the below of described laser micro-water cutter generating means, described control system for processing respectively with described laser system, described laser micro-water cutter generating means and described machine table are connected.
As shown in Figure 1, the running of the laser system described in described control system for processing controls, described laser system outgoing laser beam, this light beam is via free-space propagation, or coupling fiber enters described light beam interface, optical propagation direction changes into vertically downward, then by described beam shaping system; Laser beam through shaping incides described laser micro-water cutter generating means from top.Described laser micro-water cutter generating means is made up of laser coupled system and fine bourn generating means, as shown in Figure 2,3, deionized water or other working solution its flow into miniflow pump 6 via water filling port 7, then injected in container 3 chamber by water inlet 4 by miniflow pump 6, then form fine bourn from water spout 5 ejection downwards; Laser beam 1 through shaping is incident from device upper vertical, focused on by coupled lens 2, be irradiated in described container 3 chamber from glass window 9, the described laser micro-water cutter generating means described in control system for processing adjustment realizes laser and is coupled with the aligning of current, laser beam 1 is made to be that small hot spot is coupled in fine bourn completely in described water spout 5 centre focus, form superfine water bundle optical fiber 8, the turbo blade that can be opposite in the machine table of below carries out playing capillary processing.Described control system for processing controls the action of described machine table with positioning workpieces in process.
Described laser system comprises: solid pulse laser and power supply thereof, water cooling unit.Laser has higher beam quality, the wavelength of described pulsed solid stale laser is 1064nm, and single pulse energy weight range is 1 μ J to 100J, and pulse duration range is 1ps to 1s, laser works repetition rate can from 1Hz to 100MHz, can strobe pulse energy, pulsewidth and repetition according to actual needs.
Described light beam interface is laser mirror or optical fiber interface, turns to laser beam into vertical downward transportation.
The optical system that described beam shaping system is made up of some lens and optical element can be also fiber optic collimator system.Laser beam incides in beam shaping system, through collimation, expands or outgoing from below after the bundle that contracts.
Described laser micro-water cutter generating means comprises: laser coupled system and fine bourn generating means, as shown in Figure 2.Described laser coupled system is a Focused Optical system, the pulse laser beam 1 of top incidence is focused into diameter and only has tens microns, aberrationless hot spot, and the hot spot of focusing accurately must be positioned the center of the water spout 5 of below fine bourn generating means.
Described fine bourn generating means comprises: miniflow pump 6 and water container 3, as shown in Figure 2.Described miniflow pump 6 is connected with described container 3 by water inlet 4, and connects external water source by water filling port 7.Described water container 3 roof has a glass window 9, and described water spout 5 is positioned at the bottom wall central immediately below described glass window 9, and described water inlet 4 is positioned at the sidewall of described water container 3.
Described water spout 5 is made up of, high temperature high voltage resistant high to laser reflectivity, material that wearability is good, the such as metal such as diamond or tungsten, and can form elongated, stable cylindrical current, and its diameter range is 20 μm-1000 μm.
Working solution described in described miniflow pump 6 constantly injects to described container 3 also provides stable hydraulic pressure, maintains flow constant in container 3, and is about 5 × 10 at described water spout 5 place generation pressure
6pa-5 × 10
7the liquid jet of Pa.
Described machine table is the manipulator of high-precision six degree of freedom.This six degree of freedom manipulator has clamping, rotates, vacillates now to the left, now to the right, pedestal revolution and two pitching six-freedom degrees altogether.
Described control system for processing comprises: main frame, control panel and external motion platform controller.It drives with multichannel I/O port and working shaft.Described main frame controls laser instrument by each control panel, miniflow pump, laser are coupled with the aligning of water bundle, and described external motion platform controller is then responsible for the manipulation of machine table.Described control system for processing is by calculating the setting process velocity of every one dimension and the acceleration and deceleration of start-up portion, multiaxial motion the most complicated resolves into the one-dimensional control instruction that can the perform triggering for the micro-water cutter of motion and laser that drives machine table translation and rotation in all directions, and the control of the interlock coordinated between them and laser energy, efficiently complete accurate process operation.
In other specific embodiments, described optical fiber interface is connected with laser output mouth by optical fiber, described solid pulse laser also can be continuous wave laser, or optical fiber laser, its wavelength also can be 1053nm, 1047nm, 1030nm, 532nm, 527nm, 523.5nm or 515nm.Described machine table also can be five-axis robot system, described five-axis robot system can do the movement on X, Y, Z axis three directions, and along the rotation of wherein diaxon, may be used for the fixing of the turbo blade that geometry is more complicated, free form surface is many and processing.
In other specific embodiments, the present invention can also be applied to the micro Process such as cutting, cutting, scribing, engraving of various high-precision requirement, is all with a wide range of applications to being processed with field that is high-accuracy, high-cleanness requirement at semiconductor, precision optical machinery and instrument, Medical Devices and equipment, electronics and microelectronics industry, aerospace industry etc.
Such as at the scribing process of semiconductor chip, use the processing of laser micro-water cutter that joint-cutting can be made little, neatly smooth, spillage of material is less, and yield rate is higher, provides cost savings simultaneously.In microelectronic industry, and for example cut the technique of slim wafer, use the impact that laser micro-water cutter process velocity is fast, eliminate mechanical stress and heat, reduce processing micro-crack and burr, shorten the process-cycle, and significantly improve working (machining) efficiency.
The machinable material of laser micro-water cutter system of processing is extensive, and silicon, metal, alloy, carbon fibre material, pottery, graphite etc., also can carry out surface treatment and surface structure etc. to material.
It should be noted last that, above embodiment is only in order to illustrate technical scheme of the present invention and unrestricted.Although with reference to embodiment to invention has been detailed description, those of ordinary skill in the art is to be understood that, modify to technical scheme of the present invention or equivalent replacement, do not depart from the spirit and scope of technical solution of the present invention, it all should be encompassed in the middle of right of the present invention.
Claims (9)
1., for laser micro-water cutter processing unit (plant) of turbo blade punching, it is characterized in that, this device comprises: laser system, light beam interface, beam shaping system, laser micro-water cutter generating means, machine table and control system for processing, described laser system is positioned at foremost, described light beam interface is arranged in the light path of described laser system outgoing laser beam, described beam shaping system is arranged in the light path that described light beam interface exports, described laser micro-water cutter generating means is arranged in the light path that described beam shaping system exports, and the optical axis of the two conllinear in vertical direction, described machine table is positioned at the below of described laser micro-water cutter generating means, described control system for processing respectively with described laser system, described laser micro-water cutter generating means and described machine table are connected.
2. the laser micro-water cutter processing unit (plant) for turbo blade punching according to claim 1, it is characterized in that, described laser system comprises: solid pulse laser or solid continuous wave laser, or optical fiber laser, and power supply, water cooling unit.
3. the laser micro-water cutter processing unit (plant) for turbo blade punching according to claim 1, it is characterized in that, described light beam interface is laser mirror or optical fiber interface.
4. the laser micro-water cutter processing unit (plant) for turbo blade punching according to claim 1, is characterized in that, the optical system that described beam shaping system is made up of some lens and optical element or fiber optic collimator system.
5. the laser micro-water cutter processing unit (plant) for turbo blade punching according to claim 1, it is characterized in that, described laser micro-water cutter generating means comprises: for optical system and the fine bourn generating means of laser coupled.
6. the laser micro-water cutter processing unit (plant) for turbo blade punching according to claim 5, it is characterized in that, described fine bourn generating means is a container be connected with miniflow pump, the laser incidence window of a glass is had above this container, have a micropore diameter water spout below it, this container is connected with described miniflow pump by the water inlet on sidewall.
7. the laser micro-water cutter processing unit (plant) for turbo blade punching according to claim 1, it is characterized in that, described machine table is manipulator or the five-axis robot system of high-precision six degree of freedom.
8. the laser micro-water cutter processing unit (plant) for turbo blade punching according to claim 1, it is characterized in that, described control system for processing comprises: main frame, control panel and external motion platform controller.
9. laser system according to claim 2, described solid pulse laser or described solid continuous wave laser, or the output wavelength scope of described optical fiber laser is 515nm-1064nm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510686264.1A CN105195903B (en) | 2015-10-21 | 2015-10-21 | A kind of micro- water knife processing unit (plant) of laser punched for turbo blade |
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| CN201510686264.1A CN105195903B (en) | 2015-10-21 | 2015-10-21 | A kind of micro- water knife processing unit (plant) of laser punched for turbo blade |
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| CN105195903A true CN105195903A (en) | 2015-12-30 |
| CN105195903B CN105195903B (en) | 2017-10-17 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109866028A (en) * | 2019-04-19 | 2019-06-11 | 山东大学 | A kind of jet stream constraint femtosecond laser ultra-precision processing system and method |
| CN111180982A (en) * | 2018-11-10 | 2020-05-19 | 鸿超光电科技股份有限公司 | Laser light source module |
| CN111331263A (en) * | 2020-03-28 | 2020-06-26 | 北京工业大学 | Device and method for accurately preparing turbine blade cooling hole by picosecond laser |
| CN111716022A (en) * | 2020-06-19 | 2020-09-29 | 西安交通大学 | Laser composite machining device and method for turbine blade air film hole with thermal barrier coating |
| CN112824004A (en) * | 2019-11-20 | 2021-05-21 | 中国科学院宁波材料技术与工程研究所 | Composite water-assisted laser processing system and processing method thereof |
| CN114799903A (en) * | 2022-04-11 | 2022-07-29 | 国泰达鸣精密机件（深圳）有限公司 | Method for processing micro-miniature part with open pore |
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