CN111548023B - Method for finely processing glass surface by using red light nanosecond laser - Google Patents
Method for finely processing glass surface by using red light nanosecond laser Download PDFInfo
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- CN111548023B CN111548023B CN202010399404.8A CN202010399404A CN111548023B CN 111548023 B CN111548023 B CN 111548023B CN 202010399404 A CN202010399404 A CN 202010399404A CN 111548023 B CN111548023 B CN 111548023B
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- Prior art keywords
- laser
- glass sheet
- glass
- auxiliary material
- ablation
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- 239000011521 glass Substances 0.000 title claims abstract description 86
- 238000000034 method Methods 0.000 title claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 56
- 238000002679 ablation Methods 0.000 claims abstract description 17
- 239000011248 coating agent Substances 0.000 claims abstract description 14
- 238000000576 coating method Methods 0.000 claims abstract description 14
- 238000005459 micromachining Methods 0.000 claims description 11
- 239000000843 powder Substances 0.000 claims description 8
- 239000007921 spray Substances 0.000 claims description 7
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 239000000243 solution Substances 0.000 claims description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000009736 wetting Methods 0.000 claims description 3
- 229910000859 α-Fe Inorganic materials 0.000 claims description 3
- 239000010410 layer Substances 0.000 abstract description 10
- 230000007547 defect Effects 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 abstract description 5
- 239000011247 coating layer Substances 0.000 abstract description 4
- 238000009826 distribution Methods 0.000 abstract description 4
- 238000002834 transmittance Methods 0.000 abstract description 3
- 238000003754 machining Methods 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/001—Other surface treatment of glass not in the form of fibres or filaments by irradiation by infrared light
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
Abstract
The invention discloses a method for finely processing the surface of glass by using red light nanosecond laser, which comprises the following steps: uniformly coating a layer of auxiliary materials on the surface of the glass material; horizontally standing the glass sheet at room temperature; the glass sheet is subjected to microfabrication. The invention utilizes the characteristic of higher absorptivity of auxiliary materials to realize the focusing of laser in the coating layer, and effectively overcomes the defect that the laser cannot be focused on the surface due to the overhigh light transmittance of glass in the current red nanosecond laser processing. The invention focuses the laser inside the coating layer, generates the ablation micropores according with Gaussian energy distribution at the laser focus, effectively reduces the pulse energy of the nanosecond laser because the main part of the pulse energy of the laser is consumed in the ablation process of the auxiliary material, and overcomes the defect of overhigh pulse energy in the prior nanosecond laser processing technology relative to the precision micro-nano processing. The invention realizes the lossless precise micro-nano processing on the surface of the glass.
Description
Technical Field
The invention belongs to a micro-machining method in the field of laser machining, and particularly relates to a method for micro-machining a glass surface by using red nanosecond laser.
Background
The laser processing technology is a one-step processing technology for cutting, welding, surface processing, punching, micro-processing and the like of materials (including metals and non-metals) by utilizing the interaction characteristic of a laser beam and a substance. The construction of the micro-nano structure on the surface of the glass by utilizing a laser technology is part of surface engineering research, and the glass material with the micro-nano structure is widely applied to the fields of biology, automobiles, aerospace and the like.
The red nanosecond laser is a common laser source with extremely high cost performance, has the characteristics of central emission wavelength of 1064nm and average pulse width of 100ns, and when the red nanosecond laser is used for performing micro-processing on the surface of glass, the glass has excellent permeability to light beams with the wavelength due to the wavelength characteristics, so that the laser is difficult to focus on the surface of the glass. Meanwhile, the laser pulse energy corresponding to the pulse width is about 1mJ, and if the energy value is directly acted on the surface of a glass material, the glass can be seriously burned, a large number of micro cracks are generated, and the precise processing of the micro structure is difficult to realize.
Disclosure of Invention
In order to overcome the above problems in the prior art, the present invention provides a method for micro-machining a glass surface using a red nanosecond laser, which can overcome the disadvantage that laser focusing is difficult to achieve due to the excellent light transmittance of the glass itself, and can also reduce the energy of a single laser pulse well to perform precise micro-machining of the glass surface without causing burn to the glass.
The technical scheme for solving the technical problems is as follows: a method for finely processing the surface of glass by using red light nanosecond laser comprises the following steps:
step A, uniformly coating a layer of auxiliary materials on the surface of a glass material;
before laser processing, selecting auxiliary materials, preparing the auxiliary materials into aqueous solution with the solid content of 8-15%, and coating the auxiliary materials on the surface of the glass;
horizontally mounting the glass sheet on a special fixture, wherein the special fixture is fixedly mounted on a two-dimensional precision workbench to realize two-dimensional motion of the special fixture in a horizontal plane;
when in coating, 0.4-0.6 mL of auxiliary material is dropped on the surface of a glass sheet, an elastic element is driven to move by adjusting and controlling the head, so that the elastic element is ensured to be in contact with the auxiliary material, and the elastic element is a thin sheet made of PVC material and has the thickness of 0.2-0.6 mm;
controlling the two-dimensional precision workbench to move along the horizontal direction, and ensuring that the auxiliary material solution is uniformly covered on the glass sheet under the pressure of 0.5-0.8 Pa; meanwhile, the spray head sprays the fog-state water on the surface of the glass sheet to ensure the sufficient wetting of the glass sheet;
b, horizontally standing the glass sheet at room temperature;
after the coating of the auxiliary materials is finished, the glass sheet is placed at room temperature and horizontally kept stand for 48-60 hours, and the thickness of the auxiliary material layer is measured to be within the range of 0.2-0.3 mm;
step C, performing micro-machining on the glass sheet;
fixing a glass sheet on a precision machine tool fixture, starting a laser source to enable a laser emitting head to generate infrared laser, adjusting the power of the laser to be below 6W, enabling the pulse frequency to be less than 100kHz, focusing the laser into a laser beam through a lens, and ensuring that the focal point of the laser beam is in an auxiliary material layer and the distance between the focal point and the upper surface of the glass sheet is 0.05-0.02 mm; the auxiliary material layer is cut off under the energy ablation effect of the laser beam, an ablation spot area is formed on the surface of the glass sheet in a laser energy influence area, the ablation area and depth of the laser beam on the surface of the glass sheet are controlled by adjusting the position of the focus of the laser in the Z-axis direction and the basic frequency and power parameters of the laser in the process, meanwhile, the glass sheet is horizontally fed in the X-Y direction under the driving of a precise clamp and an X-Y slide carriage of a machine tool, different surface qualities are obtained by adopting different feeding speeds, and the micro-machining of the surface of the glass sheet is completed.
Furthermore, the auxiliary material adopts TiO2ZnO, Fe powder, Ne powder or ferrite powder.
Compared with the prior art, the invention realizes the following beneficial effects:
1. the invention utilizes the characteristic of higher absorptivity of auxiliary materials to realize the focusing of laser in the coating layer, and effectively overcomes the defect that the laser cannot be focused on the surface due to the overhigh light transmittance of glass in the current red nanosecond laser processing.
2. The invention focuses laser in the coating layer, generates ablation micropores which accord with Gaussian energy distribution at the laser focus, the influence area of the micropores covers the upper surface of the glass sheet, a processing area is formed on the surface, the energy of the processing area is enough more than the damage threshold of the glass, thus the glass sheet is ablated, the pulse energy of nanosecond laser is effectively reduced because the main part of the laser pulse energy is consumed in the ablation process of auxiliary materials, and the defect of overhigh pulse energy relative to precise micro-nano processing in the prior nanosecond laser processing technology is overcome.
3. According to the invention, in the processing process, the characteristics of Gaussian energy distribution are effectively controlled by accurately controlling the frequency and power parameters of the laser and adjusting the position of the focal point of the laser in the Z-axis direction, the diameter, the depth and the energy distribution of micropores formed on the surface of the glass are indirectly controlled, the accurate single-point ablation of the glass sheet is completed, and the lossless precise micro-nano processing on the surface of the glass is realized.
Drawings
FIG. 1 is a schematic view of an apparatus for applying a light-absorbing supplementary material according to the present invention.
FIG. 2 is a schematic view of laser micromachining of the present invention.
Fig. 3 is a schematic view of the focusing position of the laser processing area in fig. 2.
In the figure: 1. the device comprises a two-dimensional precision workbench, 2, a special fixture, 3, a glass sheet, 4, a spray head, 5, auxiliary materials, 6, an elastic element, 7, a control head, 8, a laser emission head, 9, a lens, 10, an auxiliary material layer, 11, a precision machine tool fixture, 12, an X-Y slide carriage, 13 and a laser beam 13.
Detailed Description
The invention will be further described with reference to the accompanying drawings. As shown in fig. 1 to 3, a method for micro-machining a glass surface using a red nanosecond laser includes the steps of:
step A, uniformly coating a layer of auxiliary material 5 on the surface of a glass material;
before laser processing, selecting an auxiliary material 5, preparing the auxiliary material 5 into an aqueous solution with solid content of 8-15%, and coating the auxiliary material 5 on the surface of the glass;
horizontally mounting a glass sheet 3 on a special fixture 2, wherein the special fixture 2 is fixedly mounted on a two-dimensional precision workbench 1, and realizing two-dimensional motion of the special fixture 2 in a horizontal plane;
when coating, 0.4-0.6 mL of auxiliary material 5 is dropped on the surface of the glass sheet 3, the control head 7 is adjusted to drive the elastic element 6 to move, so that the elastic element 6 is ensured to be in contact with the auxiliary material 5, the elastic element 6 is a thin sheet made of PVC material, and the thickness of the elastic element 6 is 0.2-0.6 mm;
controlling the two-dimensional precision workbench 1 to move along the horizontal direction, and ensuring that the auxiliary material 5 solution is uniformly covered on the glass sheet 3 under the pressure of 0.5-0.8 Pa; meanwhile, the spray head 4 sprays the fog-state water on the surface of the glass sheet 3 to ensure the sufficient wetting of the glass sheet 3;
step B, placing the glass sheet 3 at room temperature for horizontal standing;
after the coating of the auxiliary material 5 is finished, the glass sheet 3 is placed at room temperature and horizontally kept stand for 48-60 h, and the thickness of the auxiliary material layer 10 is measured to be within the range of 0.2-0.3 mm;
step C, carrying out micro-machining on the glass sheet 3;
fixing the glass sheet 3 on a precision machine tool clamp 11, starting a laser source to enable a laser emitting head 8 to generate infrared laser, adjusting the power of the laser to be below 6W, enabling the pulse frequency to be less than 100kHz, focusing the laser into a laser beam 13 through a lens 9, ensuring that the focal point of the laser beam 13 is positioned in an auxiliary material layer 10, and enabling the focal point to be 0.05-0.02mm away from the upper surface of the glass sheet 3; the auxiliary material layer 10 is cut off under the energy ablation effect of the laser beam 13, an ablation spot area is formed on the surface of the glass sheet 3 in a laser energy influence area, the ablation area and the ablation depth of the laser beam 13 on the surface of the glass sheet 3 are controlled by adjusting the position of the focus of the laser in the Z-axis direction and the basic frequency and the power parameter of the laser in the process, meanwhile, the glass sheet 3 is driven by a precise clamp and an X-Y slide carriage 12 of a machine tool to finish the X-Y direction horizontal feeding of the glass sheet 3, different surface qualities are obtained by adopting different feeding speeds, and the fine machining of the surface of the glass sheet 3 is finished.
Furthermore, the auxiliary material 5 adopts TiO2ZnO, Fe powder, Ne powder or ferrite powder.
The method adopts infrared nanosecond laser with the wavelength of 1064nm and the average pulse width of 100ns, and the processing material is glass with extremely low absorption rate on the infrared nanosecond laser and easy penetration, or similar transparent high polymer materials and the like. Laser is focused in the coating of the light absorption material, the generated Gaussian pulse can ablate the upper surface of the glass, the height of the focal point from the upper surface of the glass sheet is adjusted to accurately control ablation energy, and the defect that the nanosecond laser has high energy when the surface of the glass cannot be focused is effectively overcome.
The invention can process the surface fine structure of transparent and hard material with the similar property to glass.
The present invention is not limited to the embodiment, and any equivalent idea or change within the technical scope of the present invention is to be regarded as the protection scope of the present invention.
Claims (1)
1. A method for finely processing the surface of glass by using red light nanosecond laser is characterized in that: the method comprises the following steps:
step A, uniformly coating a layer of auxiliary materials (5) on the surface of a glass material;
before laser processing, selecting an auxiliary material (5), preparing the auxiliary material (5) into an aqueous solution with the solid content of 8-15%, and coating the auxiliary material (5) on the surface of the glass;
horizontally mounting a glass sheet (3) on a special fixture (2), wherein the special fixture (2) is fixedly mounted on a two-dimensional precision workbench (1) to realize two-dimensional motion of the special fixture (2) in a horizontal plane;
when in coating, 0.4-0.6 mL of auxiliary material (5) is dripped on the surface of the glass sheet (3), the elastic element (6) is driven to move by adjusting the control head (7), so that the elastic element (6) is ensured to be contacted with the auxiliary material (5), the elastic element (6) is a thin sheet made of PVC material, and the thickness of the elastic element is 0.2-0.6 mm;
controlling the two-dimensional precision workbench (1) to move along the horizontal direction, and ensuring that the auxiliary material (5) solution is uniformly covered on the glass sheet (3) under the pressure of 0.5-0.8 Pa; meanwhile, the spray head (4) sprays the fog-state water on the surface of the glass sheet (3) to ensure the sufficient wetting of the glass sheet (3);
step B, placing the glass sheet (3) at room temperature for horizontal standing;
after the coating of the auxiliary material (5) is finished, the glass sheet (3) is placed at room temperature and horizontally stands for 48-60 hours, and the thickness of the auxiliary material layer (10) is measured to be within the range of 0.2-0.3 mm;
step C, carrying out micro-machining on the glass sheet (3);
fixing a glass sheet (3) on a precision machine tool fixture (11), starting a laser source to enable a laser emitting head (8) to generate infrared laser, adjusting the power of the laser to be below 6W, enabling the pulse frequency to be less than 100kHz, focusing the laser into a laser beam (13) through a lens (9), and ensuring that the focal point of the laser beam (13) is located in an auxiliary material layer (10), wherein the distance from the focal point to the upper surface of the glass sheet (3) is 0.05-0.02 mm; the auxiliary material layer (10) is cut off under the energy ablation effect of the laser beam (13), an ablation spot area is formed on the surface of the glass sheet (3) in a laser energy influence area, the ablation area and the ablation depth of the laser beam (13) on the surface of the glass sheet (3) are controlled by adjusting the position of the focus of the laser in the Z-axis direction and the basic frequency and power parameters of the laser in the process, meanwhile, the glass sheet (3) is driven by a precision machine tool clamp and an X-Y slide carriage (12) of the machine tool to finish the horizontal feeding of the glass sheet (3) in the X-Y direction, different surface qualities are obtained by adopting different feeding speeds, and the micro-machining of the surface of the glass sheet (3) is finished;
the auxiliary material (5) adopts TiO2ZnO, Fe powder or ferrite powder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010399404.8A CN111548023B (en) | 2020-05-12 | 2020-05-12 | Method for finely processing glass surface by using red light nanosecond laser |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010399404.8A CN111548023B (en) | 2020-05-12 | 2020-05-12 | Method for finely processing glass surface by using red light nanosecond laser |
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| CN111548023A CN111548023A (en) | 2020-08-18 |
| CN111548023B true CN111548023B (en) | 2022-06-17 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111321395B (en) * | 2020-03-09 | 2021-07-02 | 山东大学 | Method for preparing antibacterial surface by compounding nanosecond laser ablation on stainless steel surface and thermal decomposition of zinc acetate, antibacterial material and application |
| CN112062479B (en) * | 2020-09-14 | 2021-11-19 | 北京航空航天大学 | Laser preparation method of self-cleaning antibacterial glass |
| CN112939487B (en) * | 2021-01-28 | 2023-03-10 | 佛山科学技术学院 | Sandwich type glass microfluidic chip double-sided laser processing device and method |
| CN114571086B (en) * | 2021-12-31 | 2023-06-20 | 华侨大学 | Nanosecond laser-induced plasma composite femtosecond laser processing device and processing method |
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2020
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| JP2002028799A (en) * | 2000-07-10 | 2002-01-29 | Seiko Epson Corp | Method of fine machining by laser beam |
| CN1610597A (en) * | 2001-04-02 | 2005-04-27 | 太阳诱电株式会社 | Method for machining translucent material by laser beam and machined translucent material |
| CN101745742A (en) * | 2008-12-01 | 2010-06-23 | 蒂萨公司 | Method of marking or inscribing a workpiece |
| JP2013082565A (en) * | 2011-10-06 | 2013-05-09 | Disco Corp | Ablation processing method for glass substrate |
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Non-Patent Citations (1)
| Title |
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