CN107414284A - A kind of PRK aids in micro- milling method and device - Google Patents
A kind of PRK aids in micro- milling method and device Download PDFInfo
- Publication number
- CN107414284A CN107414284A CN201710783580.XA CN201710783580A CN107414284A CN 107414284 A CN107414284 A CN 107414284A CN 201710783580 A CN201710783580 A CN 201710783580A CN 107414284 A CN107414284 A CN 107414284A
- Authority
- CN
- China
- Prior art keywords
- micro
- mask
- platform
- laser
- milling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0093—Working by laser beam, e.g. welding, cutting or boring combined with mechanical machining or metal-working covered by other subclasses than B23K
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
A kind of PRK aids in micro- milling method and device, belongs to laser assisted processing technique field.The system of processing is mainly by laser, computer, laser homogenizer, mask and mask exchange platform, focusing objective len, light path deflecting system, micro- milling system, rotary table and micro- mobile work platform composition, on the premise of laser and micro- milling cutter are relatively fixed, increase by a micro- mobile work platform, position of the workpiece relative to laser is changed by the method for travelling workpiece, so as to realize that PRK aids in micro- Milling Process.The present invention is realized with quasi-molecule laser source to aid in Milling Process workpiece, and a kind of new method is provided for the processing of micro parts.
Description
Technical field
The present invention relates to laser assisted micro Process field, and micro- Milling Process side is aided in more particularly to a kind of PRK
Method and device.
Background technology
With high-techs such as aerospace industry, weapon industry, microelectronics industry, space development, marine technology, biological medicines
The rapid development in skill field, it is more and more for the demand of the micro parts with good characteristic.While material property improves
Difficulty is brought to processing.Not only speed is slow and process tool serious wear, surface matter for traditional mechanical milling method
Amount is poor.The methods of electrical discharge machining, Electrolyzed Processing, ultrasonic wave processing, increases in machining accuracy than conventional tool processing,
But there is also the loss of electrode in process, and the preparation of electrode also increases the cost of processing and extends the process-cycle；
Ion beam processing and electron beam process do not have the loss of electrode, but the former material removing rate is relatively low, and latter devices' cost is high.These
Processing method all there is it is different the defects of.
PRK is after high-power CO2Laser and Nd:After YAG Solid State Lasers, another enters the big of commercial Application
Power laser, in addition to a small number of excimer lasers, PRK is all located at ultraviolet band, the wavelength pole of PRK
Short, focal beam spot diameter can reach micron dimension, and because photon energy is high, focal beam spot is small, thus after focusing on hot spot power
Density is up to 108~1010W/cm2.And because photon energy is larger, compared with the chemical bond energy of many materials, especially without
Machine thing, its photon energy are greater than the chemical bond energy between material, so when PRK and material interact, it is accurate
Molecular laser even can directly interrupt the part chemical bond of material and realize cold working sometimes.Thus it has in micro Process field
Larger development potentiality.
Existing laser assisted milling attachment is all to transmit laser using optical fiber, and for as gas such as excimer lasers
Body laser, because laser spot position is not easy to control, it is not used also in the micro- Milling Process of auxiliary.
The content of the invention
In order to overcome the above-mentioned deficiencies of the prior art, the invention provides a kind of PRK to aid in micro- Milling Process side
Method and device.
The technical solution adopted in the present invention is：
A kind of PRK aids in micro- milling method and device, the device of the system to include：Controlled equipped with system
The even beam device (3) of computer (1), excimer laser (2), light beam of program, the mask exchange platform (4) for pasting mask, focus on
Object lens (5), prism (6), prism angular adjustment apparatus (7), electro spindle (8), the micro- milling cutter being fixed on electro spindle (8)
(9), two-dimensional micro-movement platform (10), rotary table (11), three-dimensional micro- mobile station (12), motor driver (13), wherein two dimension
Micro-displacement platform (10), rotary table (11), three-dimensional micro- mobile station (12) composition machine table, rotary table (11) pivot
With electro spindle (8) center superposition, two-dimensional micro-displacement platform (10) is fixed on rotary table (11), and workpiece is fixed on by fixture
On two-dimensional micro-movement platform (10), computer (1) connects with excimer laser (2), electro spindle (8), motor driver (13) respectively
Connect, the even beam device (3) of excimer laser (2), light beam, mask exchange platform (4), focusing objective len (5), prism (6) light path successively
Connection, mask, which is exchanged at the incident light of platform (4), a mask, mask exchange platform (4) emergent light pass sequentially through focusing objective len (5) and
On workpiece on prism (6) deviation to two-dimensional micro-displacement platform (10)；Electro spindle (8), micro- milling cutter (9) and two-dimensional micro-movement platform
(10) micro- milling system is formed；Motor driver (13) moves with two-dimensional micro-displacement platform (10), turntable (11), three-dimensional micro-shifting respectively
Platform (12) connects.
The PRK realized using described device aids in micro- milling method, it is characterised in that including following step
Suddenly：
(1) light channel structure that PRK aids in micro- Milling Process system is calibrated, makes the instruction light of excimer laser
With the same overlapping of axles of Ultra-Violet Laser of quasi-molecule, the laser beam after even beam can pass perpendicularly through the hole in mask face and through poly-
Focus objective lens optical axis and prism；
(2) mask is attached into mask to exchange at the incident light of platform (4), mask is adjusted to spot center position, makes by even beam
Hot spot afterwards can cover whole mask aperture, and fixed tight mask and mask exchange platform；
(3) workpiece is placed on two-dimensional micro-movement platform (10) and fixed, by the micro- mobile station of movement change workpiece with it is micro-
The relative position of milling cutter；
(4) incoming position of prism angular adjustment apparatus control laser facula is adjusted, material will be removed by being allowed to be radiated at
The position of material；
(5) optimization processing technology parameter is selected by temperature field finite element simulation, obtains laser energy, laser pulse frequency
The technological parameters such as rate, feed speed, the amount of feeding, the speed of mainshaft；
(6) laser is opened, according to the machining locus workpieces processing of planning.
Computer in the present invention includes following functions to the application interface of the system of processing:The triggering control of laser,
The mask selection control of mask stage, the motor control of three-dimensional micro-displacement platform, turntable and two-dimensional micro-displacement platform, and to electricity
The rotating speed control of main shaft.
Electro spindle of the present invention connects described attachment means with micro- milling cutter and sees Fig. 2, and micro- milling cutter passes through collet
It is fixed on nut in attachment means, attachment means are fixed with electro spindle again.
Beneficial effects of the present invention：
The advantages of fully combining laser milling and mechanical milling of the invention, cutting for material is improved by laser milling technology
Cut performance, reach reduce tool wear, reduce surface roughness, be obviously improved micro parts crudy purpose；
The present invention aids in micro- Milling Process workpiece using gas lasers such as excimer lasers as LASER Light Source, can
To obtain higher machined surface quality, experimental result surface roughness has machining accuracy height, material up to 40-50nm or so
The advantages that material is high to the absorptivity of light.
Brief description of the drawings
Fig. 1 is the schematic diagram that a kind of PRK of the present invention aids in micro- milling device.In figure：1. system control is housed
The computer of processing procedure sequence；2. excimer laser；3. the even beam device of light beam；4. mask exchanges platform；5. focusing objective len；6. prism；
7. prism angle regulator；8. electro spindle；9. micro- milling cutter；10. two-dimensional micro-movement platform；11. rotary table；It is 12. three-dimensional
Micro- mobile station；13. motor driver.
Fig. 2 is that electro spindle connects described attachment means schematic diagram with micro- milling cutter.
Fig. 3 is the fixture schematic diagram being fixed on prism on angular displacement platform.
Fig. 4 is prism angle regulator schematic diagram.
Embodiment
The present invention will be further described below in conjunction with the accompanying drawings, but the present invention is not limited to following examples.
Reference picture 1, a kind of PRK proposed by the present invention aid in micro- milling device to include：Computer and control
The even beam device of software, excimer laser, light beam, mask and mask exchange platform, focusing objective len, prism, prism angle adjustment
Device, electro spindle, micro- milling cutter, processing mobile work platform and motor driver.
The present invention can carry out PRK to lucite PMMA and aid in micro- milling.
PRK aids in micro- milling lucite PMMA processing specific steps to include：
(1) light channel structure that PRK aids in micro- Milling Process system is calibrated, makes the instruction light of excimer laser
With the same overlapping of axles of Ultra-Violet Laser of quasi-molecule, the laser beam after even beam can pass perpendicularly through the hole in mask face and through poly-
Focus objective lens optical axis and prism；
(2) mask is attached into mask to exchange at the incident light of platform, mask is adjusted to spot center position, makes after even beam
Hot spot can cover whole mask aperture, and fixed tight mask and mask exchange platform；
(3) lucite PMMA is placed on two-dimensional micro-movement platform and fixed, passed through the micro- mobile station of movement and change workpiece
With the relative position of micro- milling cutter；
(4) change the angle of pitch of prism by adjusting angle displacement platform, so as to control the incoming position of laser facula, be allowed to
The position of material will be removed by being radiated at；
(5) laser is opened, lucite PMMA is processed according to the machining locus of planning.
(6) machine, close laser, driving power and computer.
Embodiment described above is not intended to limit the scope of the present invention, and those skilled in the art can be according to the system
Various modifications and improvement are carried out, and all these changes are within the scope of the present invention.
Claims (3)
1. a kind of PRK aids in micro- milling device, it is characterised in that the device includes computer (1), quasi-molecule
The even beam device (3) of laser (2), light beam, the mask exchange platform (4) for pasting mask, focusing objective len (5), prism (6), Rhizoma Sparganii
Mirror angle adjusting apparatus (7), electro spindle (8), the micro- milling cutter (9) being fixed on electro spindle (8), two-dimensional micro-movement platform (10), rotation
Revolving worktable (11), three-dimensional micro- mobile station (12) and motor driver (13), wherein two-dimensional micro-displacement platform (10), rotary table
(11), three-dimensional micro- mobile station (12) composition machine table, rotary table (11) pivot and electro spindle (8) center superposition, two
Dimension micro-displacement platform (10) is fixed on rotary table (11), and workpiece is fixed on two-dimensional micro-movement platform (10) by fixture, meter
Calculation machine (1) connects with excimer laser (2), electro spindle (8), motor driver (13) respectively, excimer laser (2), light
The even beam device (3) of beam, mask exchange the light path connection successively of platform (4), focusing objective len (5), prism (6), and mask exchanges entering for platform (4)
Penetrating Guang Chu has a mask, and the emergent light that mask exchanges platform (4) passes sequentially through focusing objective len (5) and prism (6) deviation to two-dimentional micro-
On workpiece on displacement platform (10)；Electro spindle (8), micro- milling cutter (9) and two-dimensional micro-movement platform (10) form micro- milling system；Motor
Driver (13) is connected with two-dimensional micro-displacement platform (10), turntable (11), three-dimensional micro- mobile station (12) respectively.
2. device according to claim 1, it is characterised in that：Micro- milling cutter is fixed on attachment means by collet and nut
On, attachment means are fixed with electro spindle again.
3. realizing that PRK aids in micro- milling method using device as claimed in claim 1 or 2, its feature exists
In comprising the following steps：
(1) light channel structure that PRK aids in micro- milling device is calibrated, makes the instruction light and standard of excimer laser
The same overlapping of axles of Ultra-Violet Laser of molecule, the laser beam after even beam can pass perpendicularly through mask aperture and through focusing objective len light
Axle and prism；
(2) mask is attached into mask to exchange at the incident light of platform (4), mask is adjusted to spot center position, makes after even beam
Hot spot can cover whole mask aperture, and fixed tight mask and mask exchange platform；
(3) workpiece is placed on two-dimensional micro-movement platform (10) and fixed, passed through the micro- mobile station of movement and change workpiece and micro- milling cutter
Relative position；
(4) change the angle of pitch of prism by adjusting angle displacement platform, so as to control the incoming position of laser facula, be allowed to irradiate
The position of material will removed；
(5) laser is opened, according to the machining locus workpieces processing of planning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710783580.XA CN107414284A (en) | 2017-09-04 | 2017-09-04 | A kind of PRK aids in micro- milling method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710783580.XA CN107414284A (en) | 2017-09-04 | 2017-09-04 | A kind of PRK aids in micro- milling method and device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107414284A true CN107414284A (en) | 2017-12-01 |
Family
ID=60435572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710783580.XA Pending CN107414284A (en) | 2017-09-04 | 2017-09-04 | A kind of PRK aids in micro- milling method and device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107414284A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108857292A (en) * | 2018-09-11 | 2018-11-23 | 大连理工大学 | A kind of processing method of high-precision micro groove |
| CN110091054A (en) * | 2019-05-20 | 2019-08-06 | 中国科学院宁波材料技术与工程研究所 | Combined machining method based on Laser Discrete, efficient milling and laser milling |
| CN113210871A (en) * | 2021-04-29 | 2021-08-06 | 中国石油大学(北京) | Optical path system of excimer laser and preparation method of polyimide film |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1268482A (en) * | 1968-06-14 | 1972-03-29 | Nat Res Dev | Improvements in methods and apparatus for machining moving workpieces |
| JPH02255292A (en) * | 1989-03-28 | 1990-10-16 | Fuji Electric Co Ltd | Laser processing device |
| CN102430904A (en) * | 2011-10-19 | 2012-05-02 | 哈尔滨工业大学 | Auxiliary laser heating milling device and method |
| CN102476237A (en) * | 2010-11-23 | 2012-05-30 | 大连创达技术交易市场有限公司 | Coaxial positioning laser precise processing device |
| CN104625421A (en) * | 2015-01-18 | 2015-05-20 | 北京工业大学 | Micro milling control system based on rotating laser beam mechanism |
| CN204545720U (en) * | 2015-04-22 | 2015-08-12 | 李相玉 | A kind of Portable laser cutting device |
| CN204657740U (en) * | 2015-05-19 | 2015-09-23 | 济南微尔激光设备有限公司 | A kind of full three-dimensional light-guiding transmission system of laser cutting machine |
| CN105108347A (en) * | 2015-06-15 | 2015-12-02 | 北京工业大学 | Method for quickly preparing synthetic glass microlens having adjustable curvature through excimer laser rotary etching |
| CN105598703A (en) * | 2016-02-19 | 2016-05-25 | 广州中国科学院先进技术研究所 | Laser-aided machining system and method |
-
2017
- 2017-09-04 CN CN201710783580.XA patent/CN107414284A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1268482A (en) * | 1968-06-14 | 1972-03-29 | Nat Res Dev | Improvements in methods and apparatus for machining moving workpieces |
| JPH02255292A (en) * | 1989-03-28 | 1990-10-16 | Fuji Electric Co Ltd | Laser processing device |
| CN102476237A (en) * | 2010-11-23 | 2012-05-30 | 大连创达技术交易市场有限公司 | Coaxial positioning laser precise processing device |
| CN102430904A (en) * | 2011-10-19 | 2012-05-02 | 哈尔滨工业大学 | Auxiliary laser heating milling device and method |
| CN104625421A (en) * | 2015-01-18 | 2015-05-20 | 北京工业大学 | Micro milling control system based on rotating laser beam mechanism |
| CN204545720U (en) * | 2015-04-22 | 2015-08-12 | 李相玉 | A kind of Portable laser cutting device |
| CN204657740U (en) * | 2015-05-19 | 2015-09-23 | 济南微尔激光设备有限公司 | A kind of full three-dimensional light-guiding transmission system of laser cutting machine |
| CN105108347A (en) * | 2015-06-15 | 2015-12-02 | 北京工业大学 | Method for quickly preparing synthetic glass microlens having adjustable curvature through excimer laser rotary etching |
| CN105598703A (en) * | 2016-02-19 | 2016-05-25 | 广州中国科学院先进技术研究所 | Laser-aided machining system and method |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108857292A (en) * | 2018-09-11 | 2018-11-23 | 大连理工大学 | A kind of processing method of high-precision micro groove |
| CN110091054A (en) * | 2019-05-20 | 2019-08-06 | 中国科学院宁波材料技术与工程研究所 | Combined machining method based on Laser Discrete, efficient milling and laser milling |
| CN113210871A (en) * | 2021-04-29 | 2021-08-06 | 中国石油大学(北京) | Optical path system of excimer laser and preparation method of polyimide film |
| CN113210871B (en) * | 2021-04-29 | 2022-06-17 | 中国石油大学(北京) | Preparation method of polyimide film with periodic micro-nano structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101419336B (en) | Mirror-vibrating laser three-dimensional scanning system | |
| CN102430904A (en) | Auxiliary laser heating milling device and method | |
| CN203509355U (en) | Laser three-dimensional cutting machine | |
| CN104475971B (en) | A kind of beam splitting laser multistation timesharing cutting machine and processing method | |
| CN111347571A (en) | Laser-assisted low-damage cutting machining system and method for optical hard and brittle material | |
| CN107486640A (en) | It is a kind of to improve hole taper and the laser drilling device and method of inwall quality | |
| CN111548023B (en) | Method for finely processing glass surface by using red light nanosecond laser | |
| CN107414284A (en) | A kind of PRK aids in micro- milling method and device | |
| CN104325220B (en) | A kind of multifunction laser combined-machining equipment and method | |
| CN110722272A (en) | Ultrafast laser micro-nano cutting drilling equipment and method | |
| CN201529849U (en) | Laser double-surface synchronous processing system | |
| CN103567464A (en) | Laser heating auxiliary micro-turning device and laser heating auxiliary micro-turning method | |
| CN114770234B (en) | Laser composite ultrasonic auxiliary grinding machine tool and processing method | |
| CN113414889B (en) | Method and device for compounding laser-assisted diamond cutting and laser polishing in situ | |
| CN107030379A (en) | Laser processing head, laser processing device and processing method thereof | |
| CN114571064B (en) | Laser-induced oxidation auxiliary milling composite processing device and method | |
| CN105195903B (en) | A kind of micro- water knife processing unit (plant) of laser punched for turbo blade | |
| CN106181028A (en) | A kind of five-axle linkage laser pipe cutter | |
| CN117250907A (en) | Device and method for adjusting important parameters in synchronous laser auxiliary processing in real time | |
| CN111331263B (en) | Device and method for accurately preparing turbine blade cooling hole by picosecond laser | |
| CN109048088A (en) | A kind of method and device of Long Pulse LASER and plasma jet Compound Machining micropore | |
| CN205393786U (en) | Laser processing head and laser processing device | |
| CN210435558U (en) | Drilling device with controllable taper in femtosecond laser processing | |
| CN104625437A (en) | Scanning mechanism for precision processing of laser drilling and cutting of special-shaped hole | |
| CN115958287A (en) | Laser-assisted rolling modification tool system and laser-assisted rolling method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171201 |
|
| RJ01 | Rejection of invention patent application after publication |