CN108857292A - A kind of processing method of high-precision micro groove - Google Patents
A kind of processing method of high-precision micro groove Download PDFInfo
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- CN108857292A CN108857292A CN201811053495.9A CN201811053495A CN108857292A CN 108857292 A CN108857292 A CN 108857292A CN 201811053495 A CN201811053495 A CN 201811053495A CN 108857292 A CN108857292 A CN 108857292A
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- groove
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0093—Working by laser beam, e.g. welding, cutting or boring combined with mechanical machining or metal-working covered by other subclasses than B23K
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- Optics & Photonics (AREA)
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- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention belongs to accurate and special process fields, provide a kind of processing method of high-precision micro groove, this method combines underwater laser and precision milling, including two procedures, and two procedures are successively completed on same lathe：It is processed first with underwater laser and removes most of material, obtain inverted trapezoidal section grooves；Then it recycles to follow and the trapezoid cross section groove after underwater laser processing is finished in laser generator subsequent accurate milling cutter, finally obtain high-precision rectangular section groove.The present invention organically combines underwater laser and precision milling technology on same lathe, compared with only with milling cutter machining high-precision groove, tool wear can be effectively reduced, and can be avoided the problem to knife hardly possible generated by multiple clamping, improve Pocket Machining precision and efficiency and reduces processing cost.
Description
Technical field
The invention belongs to accurate and special process fields, are related to a kind of processing method of high-precision micro groove, this method
Underwater laser and precision milling are combined.
Background technique
High-precision micro groove is widely used in medical microfluidic analysis chip, various sensors, radiator, fuel cell
Equal fields.Processing method used in machining high-precision micro-recesses mainly has MEMS processing, machining, electrical spark working at present
Work, Electrolyzed Processing and laser processing etc..MEMS technology is derived from microelectric technique, needs super-clean environment, and complex process is main to add
Work object is limited on the materials such as silicon, can not process metal material；Tool-electrode is lossy in electrical discharge machining；Electrolyzed Processing
Runner design complexity (CN201610877053.0), there are dispersion corrosions to be difficult to ensure precision, and workpiece is easily scrapped.
The shortcomings that compared to above-mentioned processing, laser processing can process hard material due to having, and not use milling cutter, work
Have the physical instruments head such as electrode, the advantages that without tool wear and relevant machine vibration, is widely used in current manufacturing industry
A kind of manufacturing technology.However, removing material by melting due to laser machining, this would generally be produced in laser-irradiated domain
The heat zone of influence, heat affected area can from laser-irradiated domain to external diffusion, to generate crack and fragmentation, oxidation and fusing
The defects of ejecta is adhered to again on the surface of the workpiece, drawbacks described above is especially apparent when being processed in air.Further, since
There are temperature gradient in machining area, marangoni effect may cause melted material from the side compared with thermal center (-tre) to colder edge
It flows up.And when the material of evaporation is after injection condensing, the kickback pressure of generation can push away melted material from machining area
To edge.Both effects cause to be also easy to produce raised brim or burr in laser drill or processing groove jointly.
Material to be processed is put under water by underwater laser processing technology, can be rapid since the specific heat capacity of water is higher than air
Reduce the temperature of machining area, reduce heat affected area and to the pollution in machined area, to reduce raised brim, burr and double teeming
The defects of.Water can also completely cut off air, can reduce the oxidation of processing district.However, the depth with groove deepens, laser can be by
Gradually out of focus, energy is no longer concentrated, so as to cause processing efficiency decline.In addition, being processed using Gaussian beam, due to laser energy
Amount is unevenly distributed, and the groove section after laser processing is an inverted trapezoidal.
Precision milling can process the groove that section is rectangle, and machining accuracy is very high, but since precision milling uses
Milling cutter diameter it is very thin (tens arrive several hundred microns), the easy to wear, vibration in processing leads to the raising and processing essence of processing cost
The decline of degree.Patent CN102891325B describes a kind of method and its cutter for being machined precision groove, and this method can only
Rows of precision groove is processed, and needs to process dedicated cutter, which is made of multiple micro- teeth placed side by side, improves
Tool stiffness reduces vibration, but not can be reduced the abrasion of cutter, if furthermore only processing a precision groove, monodentate cutter gesture
Must because of rigidity reduction and generate very big vibration.
Summary of the invention
For the present invention in order to meet the needs of processing precise micro-recesses, a kind of processing method of high-precision micro groove should
Method combines underwater laser and precision milling.This method is processed first with underwater laser removes most of material, then
It recycles and the ultraprecise milling cutter after laser generator is followed to finish the groove after underwater laser processing, finally obtain
High-precision micro-recesses.
In order to achieve the above object, the technical solution adopted by the present invention is：
A kind of processing method of high-precision micro groove, this method combine underwater laser and precision milling, including two
Procedure, two procedures are successively completed on same lathe, and specific step is as follows：
Underwater laser processing technology is used to process cross section on machined material as trapezoidal groove first：Using one
Cuboid airtight cavity, upper cover embed fused silica glass forms, and respectively there are enter water and water outlet on vertical opposite side two sides.It will be to be added
Work material is put into cavity, and water is full of in cavity, starts water flow, workpiece to be processed surface and the water surface are spaced apart.Laser
The surface that workpiece to be processed is focused on through glass forms and water processes transversal in the scanned in regions for needing to process groove
Face is the groove of inverted trapezoidal, kerf width and depth of groove are slightly less than required size.
Then it is processed using precision milling, accurate milling cutter follow behind laser and processed along underwater laser trapezoidal section
Face groove moves towards movement, and material extra in groove is removed, high-precision micro-recesses are obtained.The accurate milling cutter
Diameter is of same size with required groove.
Compared with prior art, beneficial effects of the present invention are：
(1) using underwater laser process, have groove vicinity without protrusion, impulse- free robustness, without double teeming, oxidation less, removal rate height
The advantages that, avoid single MEMS technology machinable material, machining and electrical discharge machining tool heads serious wear, electrolysis adds
The disadvantages of work runner design is complicated.
(2) it is processed and removes by underwater laser due to most of material in milling forward recess, so in milling
Cutter wear and vibration will be greatly reduced, to improve Pocket Machining precision and reduce processing cost.
(3) underwater laser and precision milling technology are organically combined on same lathe, is processed compared to only with milling cutter high-precision
Degree groove can effectively reduce tool wear, can be avoided the problem to knife hardly possible generated by multiple clamping.
Detailed description of the invention
Fig. 1 is process figure of the invention.
In figure：1 laser；2 accurate milling cutters；3 water；4 materials to be processed；The trapezoid cross section groove of 41 underwater lasers processing；42
Rectangular section groove after accurate milling cutter processing.
Specific embodiment
Below in conjunction with example, the present invention will be further described.
Material 4 to be processed, is put into sink by a kind of processing method of high-precision micro groove first, and water is full of in sink
3,4 surface of material to be processed and the water surface are spaced apart.Laser 1 focuses on the surface of material 4 to be processed through water, is needing
The scanned in regions for processing groove, processes trapezoid cross section groove 41.Then carry out precision milling processing, ultraprecise milling cutter 2 with
It is moved with the trend of the trapezoid cross section groove processed behind laser and along underwater laser, material extra in groove is gone
It removes, obtains high-precision Precise Rectangular Section groove 42.The width phase of the diameter of the ultraprecise milling cutter 2 and required groove
Together.
Using the method for the invention, in copper surface processing precise groove, specific step is as follows：
1) removing oxide layer is removed into copper sheet polishing and puts in the sink.
2) sink water inlet water pump, water outlet water receiving case, opening water pump makes water 3 full of sink, flow 20ml/s, copper
Piece finished surface and water surface interval 7.2mm.
3) using Multiwave MOPA-DY-20 nanosecond optical fiber laser collocation vibration mirror scanning head and 100mm focal length telecentricity
Laser 1 is focused on copper sheet finished surface by camera lens, and laser power 11.8W, laser scanning region are 5mm*165 μm, scanning is fast
960mm/s, parallel sweep 500 times, laser pulse frequency 200kHz, pulse width 10ns in scanning area are spent, is obtained
Trapezoid cross section groove 41.
4) accurate milling cutter 2 follows behind laser 1, feeds along 41 direction of trapezoid cross section groove, after underwater laser is processed
Remaining material removal, obtains high-precision rectangular section groove 42.
Embodiment described above only expresses embodiments of the present invention, and but it cannot be understood as to the invention patent
Range limitation, it is noted that for those skilled in the art, without departing from the inventive concept of the premise, also
Several modifications and improvements can be made, these are all belonged to the scope of protection of the present invention.
Claims (1)
1. a kind of processing method of high-precision micro groove, which is characterized in that the method is by underwater laser and precision milling
It combines, including two procedures, two procedures are successively completed on same lathe, and steps are as follows：
Underwater laser processing technology is used to process cross section on machined material as trapezoidal groove first：By material to be processed
Material is put into sink, and water is full of in sink, and workpiece to be processed surface is located at below the water surface；Laser light water focuses on work to be processed
The surface of part processes the groove that cross section is inverted trapezoidal, kerf width and groove in the scanned in regions for needing to process groove
Size needed for depth is respectively less than；
Then it is processed using precision milling, accurate milling cutter follows behind laser and recessed along the trapezoid cross section that underwater laser processes
Slot moves towards movement；Finally, material extra in groove is removed, high-precision precision groove is obtained；The ultraprecise milling
The diameter of knife is of same size with required groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811053495.9A CN108857292A (en) | 2018-09-11 | 2018-09-11 | A kind of processing method of high-precision micro groove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811053495.9A CN108857292A (en) | 2018-09-11 | 2018-09-11 | A kind of processing method of high-precision micro groove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108857292A true CN108857292A (en) | 2018-11-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811053495.9A Pending CN108857292A (en) | 2018-09-11 | 2018-09-11 | A kind of processing method of high-precision micro groove |
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| CN101062532A (en) * | 2006-04-26 | 2007-10-31 | 微邦科技股份有限公司 | Method for making micro groove by laser processing mode and its device |
| CN201389713Y (en) * | 2009-01-16 | 2010-01-27 | 深圳市木森科技有限公司 | Laser processing device |
| CN104959736A (en) * | 2015-07-23 | 2015-10-07 | 深圳英诺激光科技有限公司 | Apparatus and method for processing micropore through filamentous laser |
| CN107414284A (en) * | 2017-09-04 | 2017-12-01 | 北京工业大学 | A kind of PRK aids in micro- milling method and device |
| CN107717355A (en) * | 2017-11-10 | 2018-02-23 | 厦门大学 | A kind of reactor microchannel manufacture method based on laser secondary operation |
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2018
- 2018-09-11 CN CN201811053495.9A patent/CN108857292A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5286946A (en) * | 1992-09-02 | 1994-02-15 | Beloit Technologies, Inc. | Method and apparatus for securing an end of a headbox flow tube |
| CN101062532A (en) * | 2006-04-26 | 2007-10-31 | 微邦科技股份有限公司 | Method for making micro groove by laser processing mode and its device |
| CN201389713Y (en) * | 2009-01-16 | 2010-01-27 | 深圳市木森科技有限公司 | Laser processing device |
| CN104959736A (en) * | 2015-07-23 | 2015-10-07 | 深圳英诺激光科技有限公司 | Apparatus and method for processing micropore through filamentous laser |
| CN107414284A (en) * | 2017-09-04 | 2017-12-01 | 北京工业大学 | A kind of PRK aids in micro- milling method and device |
| CN107717355A (en) * | 2017-11-10 | 2018-02-23 | 厦门大学 | A kind of reactor microchannel manufacture method based on laser secondary operation |
Non-Patent Citations (2)
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| 姚晨佼: ""激光诱导氧化辅助微细铣削硬质合金的基础研究"", 《中国优秀硕士学位论文全文数据库工程科技Ⅰ辑》 * |
| 李彦文等: ""45#钢圆筒外表面水下刻槽工艺研究"", 《中国激光》 * |
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