CN109048088A - A kind of method and device of Long Pulse LASER and plasma jet Compound Machining micropore - Google Patents
A kind of method and device of Long Pulse LASER and plasma jet Compound Machining micropore Download PDFInfo
- Publication number
- CN109048088A CN109048088A CN201810966408.2A CN201810966408A CN109048088A CN 109048088 A CN109048088 A CN 109048088A CN 201810966408 A CN201810966408 A CN 201810966408A CN 109048088 A CN109048088 A CN 109048088A
- Authority
- CN
- China
- Prior art keywords
- plasma jet
- laser
- micropore
- laser head
- long pulse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/346—Working by laser beam, e.g. welding, cutting or boring in combination with welding or cutting covered by groups B23K5/00 - B23K25/00, e.g. in combination with resistance welding
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses the method and device of a kind of Long Pulse LASER and plasma jet Compound Machining micropore, be related to field of laser processing, processing method be (1) by clamping workpiece on work piece holder；(2) workpiece is carried out to knife by the positioning system of lathe；(3) laser starts to punch；(4) when material is punched, laser head stops laser out, and laser head is rotated by 90 ° around rotary shaft, so that plasma jet nozzle faces the position in hole, gives plasma jet device logical upper ac high voltage source at this time；The device includes laser, power supply box, laser head, CCD camera, light pipe, x-y mobile platform, the direction z mobile mechanism, work piece holder, plasma jet device；The present invention combines Long Pulse LASER punching and plasma jet process for treating surface, and the performance change of micropore inwall slag capable of washing, inner wall effectively improves the quality of micropore, and vent surface splash removes after solving the problems, such as laser boring.
Description
Technical field
It the present invention relates to the use of laser micropore manufacture field, and in particular to arrive a kind of Long Pulse LASER and plasma jet
The method and device of Compound Machining micropore.
Background technique
Plasma (Plasma) is one kind by free electron and charged ion physical form as main component, is deposited extensively
It is in universe, is often considered to be the 4th state of substance, referred to as plasma state, or " super gaseous state ", also referred to as " plasma-based body ".
For low pressure discharge, since the density of gas is lower, the collision frequency of electronics and neutral particle is also relatively low, because
This electronics is easier to obtain higher energy under the action of electric field.This allows for ionization and is relatively easy to occur, and causes low
It is easier to obtain the plasma of higher density under air pressure conditions, the concentration of active particle is also relatively high at this time, simultaneously also
It can guarantee that the temperature of gas is maintained at lower level.This, which allows for low pressure nonequilibrium plasma in the industry, has extensively
Application, such as plasma etching, material surface modifying and cleaning, improve material bio-compatibility, generate nano material.
In addition, being easier to generate uniform plasma at low pressure, this is for many applications, such as surface is modified, etching is
It is vital.However, under low pressure generate plasma have the shortcomings that one it is fatal, i.e., vacuum system is inevitable
's.This allows for low pressure plasma and is only used for those with high added value and the application that is suitable under vacuum condition.
To overcome the above disadvantages, Recent study person has developed atmospheric non-equilibrium plasma jet stream.Due to big
Air pressure nonequilibrium plasma jet stream can generate atmospheric pressure nonequilibrium plasma in open space rather than in gap
Body, this allows for the compound processing course that can be achieved with plasma and laser under atmospheric pressure.
At present laser drilling had been applied to auto industry, shipbuilding, aerospace, instrument and meter and
Among all conglomeraties such as medical technology.Compared with the method for tradition machinery drilling, laser drilling is high with precision, speed is fast,
It is high-efficient, good in economic efficiency, without cutter loss, aspect ratio is big the advantages that, have become laser processing main application fields it
One.But for punching on high-accuracy instrument, need to get the group hole of high quality, such as aero engine turbine blades, no
Only there are the performance requirements such as wear-resisting, high temperature resistant, corrosion-resistant to the matrix of turbo blade, and to the gaseous film control on turbo blade
The quality in hole also requires very high, and the quality in hole is evaluated in addition to taper, circularity, and the quality of hole inner wall is also critically important, and hole wall has
The problems such as re cast layer, micro-crack, slag, furthermore aperture upper surface nearby has many slag splashes, once after solidification again
Removal is just more troublesome.
Summary of the invention
Deficiency for above-mentioned laser micropore processing technology of the invention, proposes that a kind of Long Pulse LASER is penetrated with plasma
The method of Compound Machining micropore is flowed, this method is to combine laser boring with plasma jet processing micropore, when laser is made
With on material, moment completes the process of laser boring, at this time 90 degree of rotating laser head at once, so that plasma jet device
Nozzle be just aligned aperture on micropore, lead to upper ac high voltage source, and the nitrogen of logical upper certain flow rate, generate plasma and penetrate
Stream, plasma jet act on micropore aperture and on inner wall, and the slag in aperture can be removed, and aperture nearby can also become
Very finishing is obtained, while can be also removed under the action of plasma jet on inner wall due to not spraying fusant after laser action
Fall, selects nitrogen as working gas, nitrogen gas plasma jet stream can also be to inner wall while cleaning micropore inwall slag
Performance change, such as improve material hardness and wearability, effectively improve the quality of micropore.The present invention is gone back simultaneously
Provide the device of a kind of Long Pulse LASER and plasma jet Compound Machining micropore.
To achieve the above object, technical scheme is as follows:
A kind of device of Long Pulse LASER and plasma jet Compound Machining micropore, which is characterized in that including power supply box,
Work piece holder, laser head, light pipe, CCD camera, laser, rotary shaft, the direction z mobile mechanism, x-y mobile platform, etc. from
Daughter fluidic device, nitrogen gas tank, laser head assist gas tank；
The power supply box is mounted on the left side of lathe base, and the submounts of lathe are x-y mobile platform, mobile in x-y
Work piece holder is mounted on platform；
The laser is mounted in Z-direction mobile mechanism, and laser is connected by light pipe with laser head, described to swash
Shaven head includes plane of reflection mirror and condenser lens, is equipped with CCD camera on the surface of laser head；
The laser head is to be connected by rotary shaft with the direction z mobile mechanism, and the plasma jet device is
It is mounted on laser head.
The x-y mobile work platform includes workbench, the guide rail in the direction y, lead screw support frame, shaft coupling, the first servo electricity
Machine, first motor supporting block, the guide rail supporting frame in the direction y, the lead screw in the direction y, the bottom plate in the direction x, the direction x guide supporting
Frame, the second servo motor, the guide rail in the direction x, the second motor support block, the lead screw in the direction x and the direction y bottom plate；
The bottom of the x-y mobile work platform is the bottom plate in the direction x, and the silk in the direction x is provided on the bottom plate in the direction x
The lead screw of thick stick, the direction x is connected by shaft coupling with the second servo motor, the second servo motor by the second motor support block come
It supports, is parallel to the guide rail for being arranged in parallel with the direction x at left and right sides of the lead screw in the direction x, the side y on the plate upper surface in the direction x
To lower surface of base plate can guide rail sliding in the x-direction, the plate upper surface in the direction y supports the direction y by lead screw support frame
The lead screw of lead screw, the direction y is connected by shaft coupling with first servo motor, and first servo motor passes through first motor branch
Block supports are provided with the side y in the left and right sides parallel direction for the lead screw for being parallel to the direction y on the upper surface of the bottom plate in the direction y
To guide rail, be connected with workbench on the guide rail in the direction y.
Preferably, the laser head and plasma jet device are at 90 degree, laser head, plasma jet device and rotation
Shaft, the axis of these three are met at a bit, can be rotated by 90 ° around rotary shaft, in this way can rapid switched laser head and plasma
Body fluidic device position, to carry out plasma jet processing at once after laser boring.
Preferably, the plasma jet device includes ac high voltage source, two round aluminium flakes, dielectric piece, spy
Teflon tube, high-pressure hose, two electrode aluminium flakes are separated by a circular dielectric piece.
Preferably, the plasma jet device is by high-pressure hose and gas flow controller and nitrogen gas tank
It is connected.
Preferably, described two round aluminium flakes, their diameter is all 20mm, with a thickness of 3mm, the electricity of the two aluminium flakes
There is the circular hole of 500 μm of diameter at the center of pole；The dielectric piece with a thickness of 1.5mm, its center also have one it is straight
The circular hole that diameter is 500 μm.
Preferably, what the plasma jet device connect is ac high voltage source, and the size of supply frequency is adjustable
's.
Preferably, for the working gas that the plasma jet device uses for nitrogen, the flow velocity of nitrogen is to pass through gas
Flow controller is adjusted, and can adjust the length of plasma jet according to the hole of material different depth in this way, to meet
Different processing requests.
A kind of method of Long Pulse LASER and plasma jet Compound Machining micropore, includes the following steps:
Step 1: by clamping workpiece on fixture.
Step 2: workpiece being carried out to knife by the positioning system of lathe.
Step 3: laser starts to punch, when laser head moves down, when so that laser spot being assembled on the surface of the material,
The pumping of laser is opened, the direction z mobile mechanism starts to feed down with certain speed at this time, so that focus acts on always
On the surface of material.
Step 4: when material is punched, laser head stops laser out, and laser head is rotated by 90 ° around rotary shaft so that wait from
Daughter jet nozzle faces the position in hole, gives plasma jet device logical upper ac high voltage source at this time, while being passed through height
The nitrogen of fast flow velocity, so that nozzle sprays plasma jet, jet stream is injected within micropore, is acted on the hole wall of micropore and hole
Mouth upper surface, improves the quality of aperture and hole wall.
Tool beneficial effect of the invention is:
One, the present invention is acted on by laser micropore processing and nitrogen plasma jet stream Compound Machining, plasma jet
In micropore inwall, the fusant being attached on inner wall can be removed under the action of plasma jet, select nitrogen as work
Gas, nitrogen gas plasma jet stream can also change the performance of inner wall while cleaning micropore inwall slag, such as mention
Hardness and wearability of high material etc. effectively improve the quality of micropore.
Two, the present invention in this way may be used by being integrated with microplasma fluidic device on the laser head of laser machining centre
So that capillary processing is very fast and conveniently, so that processing efficiency is able to very big raising.
Three, gasification is generated since after Long Pulse LASER acts on material, material absorbs the energy of laser in the present invention
With the process of fusing, ultimately form aperture, material fusion process can near aperture splashing molten object, form slag, so
Usual material is secondary treatment to be carried out after laser machining to remove the slag on surface, and melt surface object setting and hardening adheres to
In the more difficult removal in the surface of material, however this plasma jet is injected on aperture, can solve laser boring metapore
The problem of discharge surface splash removes.
Detailed description of the invention
Fig. 1 is a kind of structural representation of the method and device of Long Pulse LASER and plasma jet Compound Machining micropore
Figure；
Fig. 2 is the working principle diagram for the nitrogen gas plasma fluidic device being related in Fig. 1 of the present invention；
Fig. 3 is the structural schematic diagram for the x-y mobile work platform being related in Fig. 1 of the present invention；
Fig. 4 is the inside index path of laser head.
Appended drawing reference is as follows:
Power supply box 1, work piece holder 2, laser head 3, light pipe 4, CCD camera 5, laser 6, rotary shaft 7, the direction z are moved
Motivation structure 8, x-y mobile platform 9, plasma jet device 10, nitrogen gas tank 11, laser head assist gas tank 12, plane reflection
Mirror 3.1, condenser lens 3.2, workbench 9.1, the guide rail 9.2 in the direction y, lead screw support frame 9.3, shaft coupling 9.4, the first servo electricity
Machine 9.5, first motor supporting block 9.6, the guide rail supporting frame 9.7 in the direction y, the lead screw 9.8 in the direction y, the direction x bottom plate 9.9, x
The guide rail supporting frame 9.10 in direction, the second servo motor 9.11, the guide rail 9.12 in the direction x, the second motor support block 9.13, the side x
To lead screw 9.14, the bottom plate 9.15 in the direction y, the round aluminium flake of the round aluminium flake 10.2, second of ac high voltage source 10.1, first
10.3, dielectric piece 10.5, teflon pipe 10.6, high-pressure hose 10.7, gas flow controller 10.8.
Specific embodiment
In order to preferably illustrate implementation detail of the invention, technical solution of the present invention is made with reference to the accompanying drawing further
Explanation.
In conjunction with attached drawing 1, a kind of device of Long Pulse LASER and plasma jet Compound Machining micropore, which is characterized in that
Power supply box 1, work piece holder 2, laser head 3, light pipe 4, CCD camera 5, laser 6, rotary shaft 7, the direction z mobile mechanism 8,
X-y mobile platform 9, plasma jet device 10, nitrogen gas tank 11, laser head assist gas tank 12；
The laser head 3, plasma jet device 10 are rotated by 90 ° around rotary shaft 7 together.When rotating clockwise 90 °, etc.
Gas ions fluidic device 10 vertically downward, is rotated by 90 ° counterclockwise, laser head 3, vertically downward.
By numerical control program can control rotary shaft 7 clockwise, rotation counterclockwise, so as to rapid switched laser head 3 back and forth
With the position of plasma jet device 10 plasma jet processing can be carried out at once after laser boring；It can cut rapidly
The position of laser head 3 and plasma jet device 10 is changed, plasma jet processing can be carried out at once after laser boring.
The power supply box 1 is mounted on the left side of lathe base, and the submounts of lathe are x-y mobile platform 9, moves in x-y
Work piece holder 2 is mounted on moving platform 9.
In conjunction with attached drawing 2, the plasma jet device 10 includes ac high voltage source 10.1, two round aluminium flakes
10.2,10.3, dielectric piece 10.5, teflon pipe 10.6, high-pressure hose 10.7, gas flow controller 10.8, two electrodes
Aluminium flake is separated by a circular dielectric piece 10.5；
The plasma jet device 10 is by high-pressure hose 10.7 and gas flow controller 10.8 and nitrogen
Gas tank 11 is connected；
Described two round aluminium flakes, their diameter is all 20mm, with a thickness of 3mm, in the electrode of the two aluminium flakes
The heart has the circular hole of 500 μm of diameter；The dielectric piece 10.5 with a thickness of 1.5mm, also there is a diameter at its center
For 500 μm of circular hole.
In conjunction with attached drawing 3, the x-y mobile work platform includes workbench 9.1, the guide rail 9.2 in the direction y, lead screw support frame
9.3, shaft coupling 9.4, first servo motor 9.5, first motor supporting block 9.6, the guide rail supporting frame 9.7 in the direction y, the direction y
Lead screw 9.8, the bottom plate 9.9 in the direction x, the guide rail supporting frame 9.10 in the direction x, the second servo motor 9.11, the direction x guide rail
9.12, the second motor support block 9.13, the lead screw 9.14 in the direction x, the direction y bottom plate 9.15；Shaft coupling is driven to turn by motor
Dynamic, shaft coupling drives lead screw rotation, to realize the movement of workbench in x-y direction.
In conjunction with attached drawing 1 and 4, the laser 6 is mounted in the direction z mobile mechanism 8, and laser 6 is by light pipe 4 and swashs
Shaven head 3 is connected, and the laser head 3 includes plane of reflection mirror 3.1 and condenser lens 3.2, is equipped on 3 surfaces of laser head
CCD camera 5.
The laser head 3 and plasma jet device 10 are in 90 °, laser head 3, plasma jet device 10 and rotation
Axis 7, the axis of these three are met at a bit, can be rotated by 90 ° around rotary shaft 7, in this way can rapidly switched laser head 3 and it is equal from
The position of daughter fluidic device 10, to carry out plasma jet processing at once after laser boring.
What the plasma jet device 10 connect is ac high voltage source 10.1, and the size of supply frequency is adjustable
's.
For the working gas that the plasma jet device 10 uses for nitrogen, the flow velocity of nitrogen is by gas flow control
Device processed is adjusted, and can adjust the length of plasma jet according to the hole of material different depth in this way, different to meet
Processing request.
The method of a kind of Long Pulse LASER provided by the invention and plasma jet Compound Machining micropore, specifically include as
Lower step:
Step 1: by clamping workpiece on work piece holder 2；
Step 2: workpiece is carried out to knife by the positioning system of lathe；
Step 3: laser starts to punch, when laser head 3 moves down, so that laser spot aggregation is on the surface of the material
When, the pumping of laser is opened, the direction z mobile mechanism 8 starts to feed down with certain speed at this time, so that focus is made always
With on the surface of the material.
Step 4: when material is punched, laser head 3 stops laser out, and laser head 3 is rotated by 90 ° around rotary shaft 8, so that
Plasma jet nozzle faces the position in hole, gives plasma jet device 10 logical upper ac high voltage source at this time, simultaneously
It is passed through the nitrogen of certain flow rate, so that nozzle sprays plasma jet, jet stream is injected within micropore, acts on the hole wall of micropore
Upper and aperture upper surface improves the quality of aperture and hole wall.
The embodiment is a preferred embodiment of the present invention, but present invention is not limited to the embodiments described above, not
In the case where substantive content of the invention, any conspicuous improvement that those skilled in the art can make, replacement
Or modification all belongs to the scope of protection of the present invention.
Claims (8)
1. the device of a kind of Long Pulse LASER and plasma jet Compound Machining micropore, which is characterized in that including power supply box
(1), work piece holder (2), laser head (3), light pipe (4), CCD camera (5), laser (6), rotary shaft (7), the direction z are moved
Motivation structure (8), x-y mobile platform (9) and plasma jet device (10)；
The power supply box (1) is mounted on the left side of lathe base, and the submounts of lathe are x-y mobile platform (9), moves in x-y
Work piece holder (2) are installed on moving platform (9)；
The laser (6) is mounted on Z-direction mobile mechanism (8), and laser (6) passes through light pipe (4) and laser head (3) phase
Connection, the laser head (3) include plane of reflection mirror (3.1) and condenser lens (3.2), are equipped with CCD right above laser head (3)
Video camera (5)；
The laser head (3) is connected by rotary shaft (7) with the direction z mobile mechanism (8), the plasma jet device
(10) it is mounted on laser head (3), and axis between the two is in 90 °.
2. the device of Long Pulse LASER according to claim 1 and plasma jet Compound Machining micropore, feature exist
In, the axis of the laser head (3), plasma jet device (10) and rotary shaft (7) is met at a bit, the laser head (3),
Plasma jet device (10) can be rotated by 90 ° around rotary shaft (7).
3. the device of Long Pulse LASER according to claim 1 and plasma jet Compound Machining micropore, feature exist
In the plasma jet device (10) includes ac high voltage source (10.1), the first round aluminium flake (10.2), the second circle
Aluminium flake (10.3), dielectric piece (10.5), teflon pipe (10.6), high-pressure hose (10.7) and gas flow controller
(10.8)；First round aluminium flake (10.2), the second round aluminium flake (10.3) are separated by a circular dielectric piece (10.5).
4. the device of Long Pulse LASER according to claim 1 and plasma jet Compound Machining micropore, feature exist
In the plasma jet device (10) is by high-pressure hose (10.7), gas flow controller (10.8) and nitrogen
Tank (11) is connected.
5. the device of Long Pulse LASER according to claim 3 and plasma jet Compound Machining micropore, feature exist
In, the first round aluminium flake (10.2), second round aluminium flake (10.3) diameter are 20mm, with a thickness of 3mm, the first round aluminium flake
(10.2), there is the circular hole of 500 μm of diameter at the center of the electrode of the second round aluminium flake (10.3)；The dielectric piece
(10.5) with a thickness of 1.5mm, center offer the circular hole that a diameter is 500 μm.
6. the device of Long Pulse LASER according to claim 1 and plasma jet Compound Machining micropore, feature exist
In the plasma jet device (10) is connected with ac high voltage source (10.1), and the size of supply frequency is adjustable.
7. the device of Long Pulse LASER according to claim 1 and plasma jet Compound Machining micropore, feature exist
In for the working gas that the plasma jet device (10) uses for nitrogen, the flow velocity of nitrogen is controlled by gas flow
Device is adjusted, and the length of plasma jet can be adjusted according to the hole of material different depth, is wanted with the processing for meeting different
It asks.
8. a kind of method of Long Pulse LASER and plasma jet Compound Machining micropore, which comprises the steps of:
Step 1: by clamping workpiece work piece holder (2) above；
Step 2: workpiece being carried out to knife by the positioning system of lathe；
Step 3: laser starts to punch, when laser head (3) moves down, when so that laser spot being assembled on the surface of the material,
The pumping of laser (6) is opened, the direction z mobile mechanism (8) starts to feed down with certain speed at this time, so that focus is always
Effect is on the surface of the material；
Step 4: when material is punched, laser head (3) stops laser out, and laser head (3) is rotated by 90 ° around rotary shaft (7), so that
Plasma jet nozzle faces the position in hole, gives plasma jet device (10) logical upper ac high voltage source at this time
(10.1), while it being passed through the nitrogen of certain flow rate, so that nozzle sprays plasma jet, jet stream is injected within micropore, effect
With aperture upper surface on the hole wall of micropore, improve the quality of aperture and hole wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810966408.2A CN109048088B (en) | 2018-08-23 | 2018-08-23 | Method and device for processing micropores by combining long-pulse laser and plasma jet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810966408.2A CN109048088B (en) | 2018-08-23 | 2018-08-23 | Method and device for processing micropores by combining long-pulse laser and plasma jet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109048088A true CN109048088A (en) | 2018-12-21 |
| CN109048088B CN109048088B (en) | 2020-09-25 |
Family
ID=64755881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810966408.2A Active CN109048088B (en) | 2018-08-23 | 2018-08-23 | Method and device for processing micropores by combining long-pulse laser and plasma jet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109048088B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114193942A (en) * | 2021-11-23 | 2022-03-18 | 华中科技大学 | Multi-process in-situ processing method and device for flexible electronic device |
| CN114344511A (en) * | 2021-12-31 | 2022-04-15 | 桂林电子科技大学 | Plasma sterilization apparatus and plasma sterilization method |
| CN114473189A (en) * | 2021-12-18 | 2022-05-13 | 太仓戴尔塔精密科技有限公司 | Production process of quick-response high-precision throttle valve filtering device for aircraft engine |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56114591A (en) * | 1980-02-15 | 1981-09-09 | Nippon Steel Corp | Nozzle for laser welding |
| CN101897240A (en) * | 2007-12-10 | 2010-11-24 | 建筑研究和技术有限公司 | Method and device for the treatment of surfaces |
| CN101942546A (en) * | 2010-10-19 | 2011-01-12 | 江苏大学 | Method and device for laser shock processing of fastening holes |
| CN103008293A (en) * | 2012-12-25 | 2013-04-03 | 江苏大学 | Tiny hole cleaning method |
| CN103491699A (en) * | 2013-09-30 | 2014-01-01 | 东南大学 | Shunt capacitance type low-temperature plasma jet generating device |
| CN102764747B (en) * | 2012-07-03 | 2015-02-25 | 安徽工业大学 | Method and device for descaling inner wall of metal pipeline based on laser impact wave technology |
| CN107695543A (en) * | 2017-08-24 | 2018-02-16 | 江苏大学 | One kind utilizes eddy current effect auxiliary heating laser spiral perforating device and method |
-
2018
- 2018-08-23 CN CN201810966408.2A patent/CN109048088B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56114591A (en) * | 1980-02-15 | 1981-09-09 | Nippon Steel Corp | Nozzle for laser welding |
| CN101897240A (en) * | 2007-12-10 | 2010-11-24 | 建筑研究和技术有限公司 | Method and device for the treatment of surfaces |
| CN101942546A (en) * | 2010-10-19 | 2011-01-12 | 江苏大学 | Method and device for laser shock processing of fastening holes |
| CN102764747B (en) * | 2012-07-03 | 2015-02-25 | 安徽工业大学 | Method and device for descaling inner wall of metal pipeline based on laser impact wave technology |
| CN103008293A (en) * | 2012-12-25 | 2013-04-03 | 江苏大学 | Tiny hole cleaning method |
| CN103491699A (en) * | 2013-09-30 | 2014-01-01 | 东南大学 | Shunt capacitance type low-temperature plasma jet generating device |
| CN107695543A (en) * | 2017-08-24 | 2018-02-16 | 江苏大学 | One kind utilizes eddy current effect auxiliary heating laser spiral perforating device and method |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114193942A (en) * | 2021-11-23 | 2022-03-18 | 华中科技大学 | Multi-process in-situ processing method and device for flexible electronic device |
| CN114473189A (en) * | 2021-12-18 | 2022-05-13 | 太仓戴尔塔精密科技有限公司 | Production process of quick-response high-precision throttle valve filtering device for aircraft engine |
| CN114473189B (en) * | 2021-12-18 | 2024-06-04 | 太仓戴尔塔精密科技有限公司 | Production process of quick-response high-precision throttle valve filtering device for aero-engine |
| CN114344511A (en) * | 2021-12-31 | 2022-04-15 | 桂林电子科技大学 | Plasma sterilization apparatus and plasma sterilization method |
| CN114344511B (en) * | 2021-12-31 | 2024-02-23 | 桂林电子科技大学 | Plasma sterilization apparatus and plasma sterilization method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109048088B (en) | 2020-09-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107486640B (en) | A kind of laser drilling device and method improving hole taper and inner wall quality | |
| CN108526627B (en) | Laser-electrochemical composite micromachining method and device for semiconductor material | |
| CN104014880B (en) | Laser-electrolysis composite machining device and method of tiny holes in non-recast layer | |
| CN109048088A (en) | A kind of method and device of Long Pulse LASER and plasma jet Compound Machining micropore | |
| Kou et al. | Machining characteristics and removal mechanisms of moving electric arcs in high-speed EDM milling | |
| WO2020172835A1 (en) | Method and apparatus for using laser and electrochemistry to micromachine back of semiconductor material | |
| CN110340471B (en) | Laser-induced plasma-assisted electric spark combined machining device and method under action of magnetic field | |
| CN107695543A (en) | One kind utilizes eddy current effect auxiliary heating laser spiral perforating device and method | |
| CN107363399B (en) | A kind of method of electric arc auxiliary laser weldering | |
| CN109226778B (en) | Metal powder particle preparation device | |
| CN109014620B (en) | Laser hole making device based on direct current electric field and magnetic field | |
| CN213196184U (en) | Double-light-source composite laser processing device | |
| CN105195903B (en) | A kind of micro- water knife processing unit (plant) of laser punched for turbo blade | |
| CN113732515A (en) | Controllable liquid flow-vibration coupling auxiliary laser milling and polishing processing method and system | |
| Tianyu et al. | Electrochemical discharge machining for fabricating holes in conductive materials: A review | |
| Liu et al. | Improvements to machining surface quality by controlling the flow direction of electrolyte during electrochemical sinking and milling of titanium alloy | |
| Kou et al. | Machining mechanisms and characteristics of moving electric arcs in high-speed EDM milling | |
| CN111940895A (en) | Method and device for micromachining liquid plasma through laser induction based on flowing water layer | |
| Zhang et al. | Research on the quality of micro-holes processed by laser and backside electrolytic hybrid machining | |
| CN107414284A (en) | A kind of PRK aids in micro- milling method and device | |
| Rahman et al. | Comparative studies in electro-physical processes (ECM & EDM) for circular micro-holes drilling | |
| CN114700568B (en) | Method and device for processing groove structure by combining electric spark and electrolysis of belt electrode | |
| CN114939741B (en) | Ultrasonic jet assisted femtosecond laser rotary-cut composite machining equipment and method for turbine blade air film cooling hole | |
| CN113681155B (en) | Method and device for electrochemically processing hole quality under assistance of laser | |
| CN115365639A (en) | Method for processing C/SiC composite material based on ultrasonic vibration assisted femtosecond laser |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |