CN107486640B - A kind of laser drilling device and method improving hole taper and inner wall quality - Google Patents

A kind of laser drilling device and method improving hole taper and inner wall quality Download PDF

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Publication number
CN107486640B
CN107486640B CN201710732697.5A CN201710732697A CN107486640B CN 107486640 B CN107486640 B CN 107486640B CN 201710732697 A CN201710732697 A CN 201710732697A CN 107486640 B CN107486640 B CN 107486640B
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China
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laser
workpiece
hole
air
lead screw
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CN107486640A (en
Inventor
任乃飞
石春辉
王亮
王后孝
夏凯波
王琪琪
林卿
薛宁
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Jiangsu University
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Jiangsu University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • B23K26/382Removing material by boring or cutting by boring
    • B23K26/384Removing material by boring or cutting by boring of specially shaped holes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0823Devices involving rotation of the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/083Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0869Devices involving movement of the laser head in at least one axial direction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/146Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B23K37/0426Fixtures for other work
    • B23K37/0435Clamps
    • B23K37/0443Jigs

Abstract

The invention discloses a kind of laser drilling devices and method for improving hole taper and inner wall quality, its method is that x direction of the workpiece after first time laser boring around hole is rotated 180 ° by rotatable clamp, so that the coordinate of x, y of aperture are just soaked and do not changed to workpiece in water, induced with laser cavitation technique is recycled to carry out the process of second of laser boring;In addition a kind of laser drilling device for improving hole taper and inner wall quality, including power supply box, uncovered cuboid container, laser head, light pipe, CCD camera, laser, the direction z mobile mechanism, stationary fixture device, x-y mobile platform, rotatable clamp device are designed;The present invention couples laser with punching in water in air, secondary punching is completed by overturning workpiece to improve hole taper, laser drilling is combined with induced with laser cavitation technique in second of drill process, the shock wave Strengthening Hole inner wall generated using cavitation.

Description

A kind of laser drilling device and method improving hole taper and inner wall quality
Technical field
The present invention relates to laser drilling fields, and in particular to the laser to a kind of improvement hole taper and inner wall quality is beaten Aperture apparatus and method.
Background technique
At present laser drilling had been applied to auto industry, shipbuilding, aerospace, instrument and meter and Among all conglomeraties such as medical technology.Compared with the method for tradition machinery drilling, laser drilling is high with precision, speed is fast, It is high-efficient, good in economic efficiency, without cutter loss, aspect ratio is big the advantages that, have become laser processing main application fields it One.Induced with laser cavitation technique is to be focused on laser inside water with lens, and water is ionized, and just will form plasma chamber, Plasma continues strong absorption laser energy, and cavity expands rapidly, forms vacuole, bubble collapse produces shock wave.
But for punching on high-accuracy instrument, need to get the group hole of high quality, such as aero-turbine leaf On piece film cooling holes, the taper and inner wall quality requirement of device to hole are very high, the too big gas that can be seriously affected on turbo blade of taper The flow rate of air in fenestra, reduces the cooling performance of air film hole.
For above situation, Chinese invention patent CN201610350992 proposes to place reflection unit and anti-below workpiece Regulating mechanism setting is penetrated, laser beam is fallen on the plane of reflection of the reflection unit after passing through through-hole, anti-through the plane of reflection Hole week and the inner wall that the through-hole is fallen on after penetrating, eliminate taper with this, still, laser beam passes through after condenser lens, focus The energy density of position is maximum, and the laser beam of the upper down space of focus is that divergent state is presented, so when laser beam reaches lower section Reflection unit plane of reflection mirror on when laser beam energy density very little, make using the reflection of plane of reflection mirror Material vaporization possibly can not be made to eliminate with the laser beam for reaching workpiece, if the energy of laser beam can also make workpiece vaporization removal, Ablation removal amount therein not can guarantee yet, and the material slag furthermore ejected below aperture can be fallen on plane of reflection mirror, Have an adverse effect to device.Chinese invention patent CN201310284493 proposes that chemistry occurs using chemical solution and aluminium alloy Reaction is to eliminate through-hole taper, to obtain the through-hole of zero draft.But the proportion of the chemical solution is just for aluminium alloy, His material needs to match chemical solution again, and more troublesome and corrosion process wastes time, and furthermore chemical reaction process is in device to hole All parts of wall are corroded, and are not extra aluminum alloy materials in etch pit, so taper improvement may be unobvious.
Summary of the invention
It is of the invention in view of the above shortcomings of the prior art, propose it is a kind of improve hole taper and inner wall quality laser boring Method, this method are that workpiece is first allowed to form through-hole under the action of laser beam in air, and through-hole is tapered at this time, then utilizes Rotatable clamp device rotates 180 ° around the x-axis of aperture, since workpiece is in the uncovered cuboid container for having water at this time, benefit Second is carried out with induced with laser cavitation technique to punch, and first rotates to lower opening above, the heat that second of pulse laser generates It is transmitted to around hole, to remove the material of redundance and improve hole taper, while the direction z mobile mechanism is with slow speed It feeds down, does the laser boring that focus moves down, the focal point of pulse laser is formed empty in the water of hole central axis Bubble, bubble collapse produce shock wave, and on the inner wall of shock wave to hole, device to hole inner wall plays invigoration effect.This hair simultaneously It is bright to additionally provide a kind of laser drilling device for improving hole taper and inner wall quality.
Technical scheme is as follows:
A kind of laser drilling device improving hole taper and inner wall quality, including power supply box, uncovered cuboid container, laser Head, light pipe, CCD camera, laser, the direction z mobile mechanism, stationary fixture device, x-y mobile platform and rotatable clamp Device;
The power supply box is mounted on the left side vertical face of lathe base, and x-y shifting is equipped on the base upper surface of lathe Moving platform;Be equipped on the horizontal plane of L-type workbench on the x-y mobile platform uncovered cuboid container, workbench it is perpendicular It faces directly and rotatable clamp device is installed;The stationary fixture device is directly installed on the rear vertical of lathe by connecting plate On face;The direction z mobile mechanism is installed in the upright slide rail opened up on the rear vertical face of the lathe base;The direction z Laser is installed in mobile mechanism;The laser is connected by light pipe with laser head;The surface of the laser head On CCD camera is installed;
The laser head includes plane mirror and condenser lens;The laser beam of the laser transmitting is shone by light pipe It is mapped on the reflective plane mirror of 45 ° of settings, is got on workpiece after reflective plane mirror is reflected on condenser lens and focuses;
The rotatable clamp device includes the second control unit, driving motor, rotary shaft, the second air-actuated jaw, rolls Bearing;The driving motor is fixed on the vertical side plate of L-type workbench, and rotary shaft passes through rolling bearing and is connected with driving motor Connect, rotary shaft is designed with the second air-actuated jaw up and down, the second control unit be used to control driving motor rotation and two second The clamping and release of air-actuated jaw;
The stationary fixture device includes first control unit, the first air-actuated jaw, connecting rod, connecting plate, and described first The first air-actuated jaw that control unit is used to control connecting rod installation symmetrical above and below carries out clamping and disassembly to workpiece;
The x-y mobile platform includes L-type workbench, the guide rail in the direction y, lead screw support frame, shaft coupling, the first servo electricity Machine, first motor supporting block, the guide rail supporting frame in the direction y, the lead screw in the direction y, the bottom plate in the direction x, the direction x guide supporting Frame, the second servo motor, the guide rail in the direction x, the second motor support block, the lead screw in the direction x and the direction y bottom plate;
The bottom of the x-y mobile platform is the bottom plate in the direction x, and the lead screw in the direction x, x are provided on the bottom plate in the direction x The lead screw in direction is connected by shaft coupling with the second servo motor, and the second servo motor is propped up by the second motor support block It supports, is parallel to the guide rail for being arranged in parallel with the direction x at left and right sides of the lead screw in the direction x, the direction y on the plate upper surface in the direction x Lower surface of base plate can guide rail sliding in the x-direction, the plate upper surface in the direction y supports the silk in the direction y by lead screw support frame The lead screw of thick stick, the direction y is connected by shaft coupling with first servo motor, and first servo motor is supported by first motor Block supports, and is provided with the direction y in the left and right sides parallel direction for the lead screw for being parallel to the direction y on the upper surface of the bottom plate in the direction y Guide rail, be connected with workbench on the guide rail in the direction y.
Further, the stationary fixture device is directly to be connected by connecting plate with bed piece, immovable, only Clamping workpiece.
Further, the rotatable clamp device is to be mounted on x-y mobile platform by the vertical side plate of L-type workbench On, realize rotatable clamp device in the movement in the direction x-y.
Further, what is filled inside the uncovered cuboid container is water, and the height of water and the upper surface of workpiece are parallel.
Further, the laser, light pipe, laser head and CCD camera can be with the direction z mobile mechanisms up and down It is mobile.
Further, the height of the second air-actuated jaw on the rotatable clamp device is different, when driving motor drives When rotary shaft rotates 180 °, height of the workpiece in the direction z is different, but hole center x, the y-coordinate of secondary punching is needed not to have Change.
Further, the second air-actuated jaw on the rotatable clamp device be about rotary shaft axis it is symmetrical above and below 's.
Further, second control unit and first control unit are connected with digital control computer.
A kind of method of laser drilling device based on improvement hole taper and inner wall quality, includes the following steps:
Step 1: by clamping workpiece on the first air-actuated jaw of fixed workpiece-holder device, workpiece is placed in air at this time In;
Step 2: starting laser boring, open the pumping of laser, the direction z mobile mechanism starts downward with certain speed Feeding makes its focus in workpiece surface just when laser head to the position apart from workpiece, i.e., when defocusing amount is 0, laser is issued Pulse laser, for laser beam after plane of reflection mirror and condenser lens, light beam focuses on workpiece surface, with the increasing of pulse number Add, until the hole on workpiece is got through, the Kong Weikong A got through;
Step 3: making the rotation axis of rotatable workpiece grip device in the hole A on workpiece by x-y mobile platform The underface in the direction heart coordinate x, i.e. y-coordinate is identical, rotatable workpiece grip device by the second air-actuated jaw by Workpiece clamping, The first air-actuated jaw that fixed workpiece-holder device is unclamped by first control unit controls driving electricity by the second control unit Machine makes workpiece rotate 180 ° around the direction x of hole A coordinate, and the x-y coordinate of hole A does not change at this time, only on the direction z under workpiece An end movement is dropped, workpiece is allowed to be in uncovered cuboid container, the water surface of uncovered cuboid container is just upper with workpiece at this time Flush, hole A is filled with water at this time;
Step 4: equally starting again at laser boring, open the pumping of laser, the direction z mobile mechanism starts with certain Speed is fed down, and is made its focus in workpiece surface just to the position apart from workpiece when laser head, i.e., when defocusing amount is 0, is swashed Light device issues pulse laser, and for laser beam after plane of reflection mirror and condenser lens, light beam focuses on the water surface at the hole center A, The direction z mobile mechanism starts to feed down with slow speed at this time, and the amount of feeding is the thickness of workpiece.
Tool beneficial effect of the invention is:
One, laser irradiation is into the water at hole center in the present invention, around the heat transfer to hole of generation, due to first time arteries and veins Rushing laser boring makes lower Porous materials removal inconsistent with upper hole, so that forming tapered hole, present lower opening is rotated to Face absorbs the energy of second of pulse laser, to remove the material of redundance and improve hole taper.
Two, any position punching on workpiece may be implemented by x-y mobile platform in the present invention, is suitble to group's hole machined.
Three, the direction z mobile mechanism is fed down in the present invention with slow speed, does the pulse laser that focus moves down Punching, for the focal point of pulse laser in the water of hole central axis, water is breakdown, and luminous plasma is formed in breakdown area Body cavity body, plasma continue strong absorption laser energy, and cavity expands rapidly, forms vacuole, and bubble collapse produces shock wave, On shock wave to hole inner wall, device to hole inner wall plays invigoration effect.
Four, workpiece takes air-actuated jaw to carry out clamping in the present invention, easy to operate, can greatly reduce labor intensity, and And chucking power is stablized adjustable, pneumatic reaction speed is fast, thus can be shortened non-cutting time in process of production, improves labour production Rate.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of workpiece laser drilling device in air;
Fig. 2 is the structural schematic diagram of laser drilling device in water after 180 ° of workpiece turning;
Fig. 3 is the structural schematic diagram of x-y mobile platform;
Fig. 4 is the structural schematic diagram of rotatable clamp device;
Fig. 5 is the structural schematic diagram of stationary fixture device;
Fig. 6 is the inside index path of laser head;
Appended drawing reference is as follows:
1- power supply box, 2- uncovered cuboid container, 3- laser head, 4- light pipe, 5-CCD video camera, 6- laser, 7-z Direction mobile mechanism, 8- stationary fixture device, 9-x-y mobile platform, 10- rotatable clamp device, 3.1 plane mirrors, 3.2- condenser lens, 3.3- workpiece, 8.1- first control unit, the first air-actuated jaw of 8.2-, 8.3- connecting rod, 8.4- connection Plate, 9.1-L type workbench, the guide rail in the direction 9.2-y, 9.3- lead screw support frame, 9.4- shaft coupling, 9.5- first servo motor, 9.6- first motor supporting block, the guide rail supporting frame in the direction 9.7-y, the lead screw in the direction 9.8-y, the direction 9.9-x bottom plate, Guide rail supporting frame, the second servo motor of 9.11-, the guide rail in the direction 9.12-x, second motor support of 9.13- in the direction 9.10-x Block, the lead screw in the direction 9.14-x, the bottom plate in the direction 9.15-y, the second control unit of 10.1-, 10.2- driving motor, 10.3- rotation Shaft, the second air-actuated jaw of 10.4-, 10.5- rolling bearing.
Specific embodiment
In order to preferably illustrate implementation detail of the invention, technical solution of the present invention is made with reference to the accompanying drawing further Explanation.
In conjunction with attached drawing 1, a kind of laser drilling device improving hole taper and inner wall quality, which is characterized in that including power supply Case 1, uncovered cuboid container 2, laser head 3, light pipe 4, CCD camera 5, laser 6, the direction z mobile mechanism 7, fixing clamp Have device 8, x-y mobile platform 9, rotatable clamp device 10;
The power supply box 1 is mounted on the left side vertical face of lathe base, and x-y shifting is equipped on the base upper surface of lathe Moving platform 9;Uncovered cuboid container 2 and rotatable clamp device 10 are installed on the x-y mobile platform 9;The fixing clamp Having device 8 is directly installed on the lathe bed of lathe by connecting plate 8.4;It is opened up on the rear vertical face of the lathe base The direction z mobile mechanism 7 is installed in upright slide rail;Laser 6 is installed in the direction the z mobile mechanism 7;The laser 6 It is connected by light pipe 4 with laser head 3;CCD camera 5 is installed on right above the 3 of the laser head;
In conjunction with attached drawing 2, a kind of laser drilling device improving hole taper and inner wall quality, is at this time rotatable clamp device The state of device after 10 180 ° of rotations, workpiece 3.3 is in the water of uncovered cuboid container 2, and 3.3 upper surface of workpiece just with The water surface is concordant, this state carries out second of laser and punches.
In conjunction with attached drawing 3, the x-y mobile platform 9 include workbench 9.1, the guide rail 9.2 in the direction y, lead screw support frame 9.3, Shaft coupling 9.4, first servo motor 9.5, first motor supporting block 9.6, the guide rail supporting frame 9.7 in the direction y, the direction y lead screw 9.8, the bottom plate 9.9 in the direction x, the guide rail supporting frame 9.10 in the direction x, the second servo motor 9.11, the guide rail 9.12 in the direction x, Two motor support blocks 9.13, the lead screw 9.14 in the direction x, the direction y bottom plate 9.15;Shaft coupling rotation, shaft coupling are driven by motor Device drives lead screw rotation, to realize the movement of workbench in x-y direction.
In conjunction with attached drawing 4, the rotatable clamp device 10 includes the second control unit 10.1, driving motor 10.2, rotation Axis 10.3, the second air-actuated jaw 10.4, rolling bearing 10.5;The driving motor 10.2 is fixed on the vertical of L-type workbench 9.1 On side plate, rotary shaft 10.3 passes through rolling bearing 10.5 and is connected with driving motor 10.2, is respectively equipped with one in rotary shaft 10.3 On two the second air-actuated jaws 10.4 once, by the second control unit 10.1 can control driving motor 10.2 rotation and The clamping and release of two the second air-actuated jaws 10.4;
In conjunction with attached drawing 5, the stationary fixture device 8 includes first control unit 8.1, the first air-actuated jaw 8.2, connecting rod 8.3, connecting plate 8.4 can control two the first air-actuated jaws 8.2 in connecting rod 8.3 to work by first control unit 8.1 Part 3.3 carries out clamping and disassembly;
In conjunction with attached drawing 6, the laser 3 includes plane mirror 3.1 and condenser lens 3.2;What the laser 6 emitted swashs Light beam is irradiated on the plane mirror 3.1 of 45 ° of settings by light pipe 4, is reflected into condenser lens through plane mirror 3.1 It is got on workpiece 3.3 after being focused on 3.2;
The fixed workpiece-holder device 8 is directly to be connected by connecting plate 8.4 with bed piece, immovable, only It can clamping workpiece 3.3.
The rotatable clamp device 10 is mounted on x-y mobile platform 9 by the vertical side plate of L-type workbench 9.1, real Movement of the existing rotatable clamp device 10 in the direction x-y.
What is filled inside the uncovered cuboid container 2 is water, and the height of water is parallel with the upper surface of workpiece 3.3.
The laser 6, light pipe 4, laser head 3 and CCD camera 5 can be with moving down in the direction z mobile mechanism 7 It is dynamic.
The height of the second air-actuated jaw 10.4 on the rotatable clamp device 10 is different, when driving motor 10.2 drives When dynamic rotary shaft 10.3 rotates 180 °, height of the workpiece 3.3 in the direction z is different, but needs hole center x, y of secondary punching Coordinate does not change.
The second air-actuated jaw 10.4 on the rotatable clamp device 10 is axis about rotary shaft 10.3 or so pair Claim.
Second control unit 10.1 is connected with first control unit 8.1 with digital control computer.
A kind of method of laser drilling device based on improvement hole taper and inner wall quality, includes the following steps:
Step 1: by 3.3 clamping of workpiece on the first air-actuated jaw 8.2 of stationary fixture device 8, workpiece 3.3 is to set at this time In air.
Step 2: start laser boring, open laser 6 pumping, the direction z mobile mechanism 7 start with certain speed to Lower feeding makes its focus on 3.3 surface of workpiece just, i.e., when defocusing amount is 0, swashs when laser head 3 to the position apart from workpiece 3.3 Light device 6 issues pulse laser, and for laser beam after plane mirror 3.1 and condenser lens 3.2, light beam focuses on 33. table of workpiece Face, with the increase of pulse number, until workpiece 3.3 is got through.
Step 3: making the rotation axis of rotatable workpiece grip device 10 in 3.3 through-hole of workpiece by x-y mobile platform 9 The underface in the direction centre coordinate x, i.e. y-coordinate is identical, and rotatable workpiece grip device 10 will by the second air-actuated jaw 10.4 Workpiece 3.3 clamps, and the first air-actuated jaw 8.2 of fixed workpiece-holder device 8 is unclamped by first control unit 8.1, by the Two control units 10.1 control driving motor 10.2 makes the workpiece 3.3 to rotate 180 ° around the direction x of through-hole coordinate, at this time through-hole X-y coordinate does not change, and only workpiece declines an end movement on the direction z, and workpiece 3.3 is allowed to be in uncovered cuboid container 2, this When container the water surface it is just concordant with the upper surface of workpiece 3.3, through-hole is filled with water at this time.
Step 4: equally starting again at laser boring, open the pumping of laser 6, the direction z mobile mechanism 7 starts with certain Speed feed down, make its focus on 3.3 surface of workpiece, i.e. defocusing amount just to the position apart from workpiece 3.3 when laser head 3 When being 0, laser 6 issues pulse laser, and after plane mirror 3.1 and condenser lens 3.2, light beam focuses on logical laser beam The water surface at hole center, the direction z mobile mechanism 7 starts to feed down with slow speed at this time, and the amount of feeding is the thickness of workpiece.
The embodiment is a preferred embodiment of the present invention, but present invention is not limited to the embodiments described above, not In the case where substantive content of the invention, any conspicuous improvement that those skilled in the art can make, replacement Or modification all belongs to the scope of protection of the present invention.

Claims (9)

1. a kind of laser drilling device for improving hole taper and inner wall quality, which is characterized in that long including power supply box (1), uncovered Cube container (2), light pipe (4), CCD camera (5), laser (6), the direction z mobile mechanism (7), is fixed laser head (3) Grip device (8), x-y mobile platform (9) and rotatable clamp device (10);
The power supply box (1) is mounted on the left side vertical face of lathe base, and it is mobile that x-y is equipped on the base upper surface of lathe Platform (9);Uncovered cuboid container is installed on the horizontal plane of L-type workbench (9.1) on the x-y mobile platform (9) (2), rotatable clamp device (10) are installed on the vertical plane of workbench (9.1);The stationary fixture device (8) passes through connection Plate (8.4) is directly installed on the rear vertical face of lathe;The upright slide rail opened up on the rear vertical face of the lathe base The direction z mobile mechanism (7) is inside installed;Laser (6) are installed on the direction the z mobile mechanism (7);The laser (6) It is connected by light pipe (4) with laser head (3);CCD camera (5) are installed on the surface of the laser head (3);
The laser head (3) includes plane mirror (3.1) and condenser lens (3.2);The laser beam of laser (6) transmitting It is irradiated to by light pipe (4) on the reflective plane mirror (3.1) of 45 ° of settings, is reflected into condenser lens through reflective plane mirror (3.1) (3.2) it is got on workpiece (3.3) after being focused on;
The rotatable clamp device (10) include the second control unit (10.1), driving motor (10.2), rotary shaft (10.3), Second air-actuated jaw (10.4), rolling bearing (10.5);The driving motor (10.2) is fixed on the perpendicular of L-type workbench (9.1) On front plate, rotary shaft (10.3) passes through rolling bearing (10.5) and is connected with driving motor (10.2), in rotary shaft (10.3) Under be designed with the second air-actuated jaw (10.4), the second control unit (10.1) is used to control the rotation and two of driving motor (10.2) The clamping and release of a second air-actuated jaw (10.4);
The stationary fixture device (8) includes first control unit (8.1), the first air-actuated jaw (8.2), connecting rod (8.3), connects Fishplate bar (8.4), the first control unit (8.1) are used to control the first air-actuated jaw of connecting rod (8.3) installation symmetrical above and below (8.2) clamping and disassembly are carried out to workpiece (3.3);
The x-y mobile platform (9) includes L-type workbench (9.1), the guide rail (9.2) in the direction y, lead screw support frame (9.3), connection Axis device (9.4), first servo motor (9.5), first motor supporting block (9.6), the guide rail supporting frame (9.7) in the direction y, the direction y Lead screw (9.8), the bottom plate (9.9) in the direction x, the guide rail supporting frame (9.10) in the direction x, the second servo motor (9.11), the direction x Guide rail (9.12), the second motor support block (9.13), the lead screw (9.14) in the direction x and the direction y bottom plate (9.15);
The bottom of the x-y mobile platform (9) is the bottom plate (9.9) in the direction x, is provided with the side x on the bottom plate (9.9) in the direction x To lead screw (9.14), the lead screw (9.14) in the direction x is connected by shaft coupling (9.4) with the second servo motor (9.11), the Two servo motors (9.11) are supported by the second motor support block (9.13), are parallel on bottom plate (9.9) upper surface in the direction x The guide rail (9.12) in the direction x, bottom plate (9.15) following table in the direction y are arranged in parallel at left and right sides of the lead screw (9.14) in the direction x Face can guide rail (9.12) sliding in the x-direction, bottom plate (9.15) upper surface in the direction y supports the side y by lead screw support frame (9.3) To lead screw (9.8), the lead screw (9.8) in the direction y is connected by shaft coupling (9.4) with first servo motor (9.5), the One servo motor (9.5) is supported by first motor supporting block (9.6), is parallel to y on the upper surface of the bottom plate (9.15) in the direction y The guide rail (9.2) in the direction y is provided in the left and right sides parallel direction of the lead screw (9.8) in direction, on the guide rail (9.2) in the direction y It is connected with workbench (9.1).
2. a kind of laser drilling device for improving hole taper and inner wall quality according to claim 1, which is characterized in that described Stationary fixture device (8) is directly to be connected by connecting plate (8.4) with bed piece, immovable, clamping workpiece (3.3)。
3. a kind of laser drilling device for improving hole taper and inner wall quality according to claim 1, which is characterized in that described Rotatable clamp device (10) is mounted on x-y mobile platform (9) by the vertical side plate of L-type workbench (9.1), and realization can Movement of the rotation jig device (10) in the direction x-y.
4. a kind of laser drilling device for improving hole taper and inner wall quality according to claim 1, which is characterized in that described What is filled inside uncovered cuboid container (2) is water, and the height of water is parallel with the upper surface of workpiece (3.3).
5. a kind of laser drilling device for improving hole taper and inner wall quality according to claim 1, which is characterized in that described Laser (6), light pipe (4), laser head (3) and CCD camera (5) can be moved up and down with the direction z mobile mechanism (7).
6. a kind of laser drilling device for improving hole taper and inner wall quality according to claim 1, which is characterized in that described The height of the second air-actuated jaw (10.4) on rotatable clamp device (10) is different, when driving motor (10.2) drive rotary shaft (10.3) when rotating 180 °, height of the workpiece (3.3) in the direction z is different, but needs hole center x, the y-coordinate of secondary punching Do not change.
7. a kind of laser drilling device for improving hole taper and inner wall quality according to claim 6, which is characterized in that described The second air-actuated jaw (10.4) on rotatable clamp device (10) be about rotary shaft (10.3) axis it is symmetrical above and below.
8. a kind of laser drilling device for improving hole taper and inner wall quality according to claim 1, which is characterized in that described Second control unit (10.1) and first control unit (8.1) are connected with digital control computer.
9. a kind of method for the laser drilling device for improving hole taper and inner wall quality based on claim 1, feature It is, includes the following steps:
Step 1: by workpiece (3.3) clamping on the first air-actuated jaw (8.2) of fixed workpiece-holder device (8), workpiece at this time (3.3) it is placed in air;
Step 2: start laser boring, open laser (6) pumping, the direction z mobile mechanism (7) start with certain speed to Lower feeding makes its focus on workpiece (3.3) surface just when laser head (3) to the position apart from workpiece (3.3), i.e. defocusing amount is When 0, laser (6) issues pulse laser, and after plane of reflection mirror (3.1) and condenser lens (3.2), light beam focuses laser beam On workpiece (3.3) surface, with the increase of pulse number, until the hole on workpiece (3.3) is got through, the Kong Weikong A got through;
Step 3: making the rotation axis of rotatable workpiece grip device (10) on workpiece (3.3) by x-y mobile platform (9) The hole direction A centre coordinate x underface, i.e. y-coordinate is identical, rotatable workpiece grip device (10) pass through the second air-actuated jaw (10.4) workpiece (3.3) are clamped, it is pneumatic by the first of first control unit (8.1) release fixed workpiece-holder device (8) Fixture (8.2) makes workpiece (3.3) around the side x of hole A coordinate by the second control unit (10.1) control driving motor (10.2) To 180 ° of rotation, the x-y coordinate of hole A does not change at this time, and only workpiece (3.3) declines an end movement on the direction z, allows workpiece (3.3) it is in uncovered cuboid container (2), at this time the water surface of uncovered cuboid container (2) the just upper table with workpiece (3.3) Face is concordant, and hole A is filled with water at this time;
Step 4: equally starting again at laser boring, open the pumping of laser (6), the direction z mobile mechanism (7) starts with certain Speed feed down, make its focus on workpiece (3.3) surface just to the position apart from workpiece (3.3) when laser head (3), i.e., Defocusing amount be 0 when, laser (6) issue pulse laser, laser beam after plane of reflection mirror (3.1) and condenser lens (3.2), Light beam focuses on the water surface at the hole center A, and the direction z mobile mechanism (7) starts to feed down with slow speed at this time, the amount of feeding For the thickness of workpiece (3.3).
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