CN2860713Y - Laser boring device - Google Patents

Laser boring device Download PDF

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Publication number
CN2860713Y
CN2860713Y CN 200520144908 CN200520144908U CN2860713Y CN 2860713 Y CN2860713 Y CN 2860713Y CN 200520144908 CN200520144908 CN 200520144908 CN 200520144908 U CN200520144908 U CN 200520144908U CN 2860713 Y CN2860713 Y CN 2860713Y
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CN
China
Prior art keywords
axis
laser
movable stand
rail frame
total reflective
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Expired - Lifetime
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CN 200520144908
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Chinese (zh)
Inventor
王智勇
左铁钏
辛凤兰
刘学胜
张东明
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Beijing University of Technology
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Beijing University of Technology
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Priority to CN 200520144908 priority Critical patent/CN2860713Y/en
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Publication of CN2860713Y publication Critical patent/CN2860713Y/en
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Abstract

The utility model discloses a laser punch device, which comprises laser components connecting with each other, optics beacon, and laser focusing mirror. The laser focusing mirror includes main parts of x axis, y axis at an angle of 45 degrees with entire counter-mirror, upper guide rail frame, x axis flexible frame, central guide rail frame, and focusing lens. The frame of upper guide rail, x axis, central guide rail and y axis are all vacuum, x axis at an angle of 45 degrees with entire counter- mirror is fixed on the x axis frame, the y axis laser light-guide pipe on the lower part of y axis at an angle of 45 degrees with entire counter- mirror is fixed with y axis flexible frame and makes the focusing lens fix on. The x axis flexible frame slides along the x axis upper guide frame and the y axis flexible frame slides along the y axis central guide frame. The utility model is suitable for the holes D3 which diameter size is between 0.5mm-2mm, and the utility model can make a high quality work.

Description

A kind of laser drilling device
Technical field
The utility model relates to a kind of free laser pulse and compound processing unit (plant) that carries out the high-quality micropore of modulated laser pulse of adopting, and belongs to technical field of laser processing.
Background technology
Laser boring compare with other drilling method have processing flexibly, cost is low, process velocity is fast, efficient is high, contactless, can in air, transmit, the aspect ratio height that punches, can process advantages such as any materials, environmental protection, be widely used in punching to pottery and composite, also can get a series of apertures and the hole with certain inclination angle, for example punching of aircraft engine turbo blade at superhard and high-temperature alloy material.
Laser boring method mainly comprises replica method and rotary method at present.Replica method comprises pulse punching and multiple-pulse punching again.The pulse punching is applicable to when sheet part is beaten blind hole to be used, and deep hole machining generally adopts the multiple-pulse punching, promptly adopts the narrower modulating pulse punching of a series of pulsewidths.Adopt the acousto-optic modulation laser pulse to punch, can reduce a series of problems such as recast layer in the laser boring and micro-crack and heat affected area be big, but the aperture of being punched is less, the speed of punching is slow, and powerless to bigger aperture.Adopt the laser pulse punching of freely turning round, the aperture of being punched is bigger, and punching speed is fast, but pore-forming is second-rate.During the hole of Laser Processing larger aperture, adopt rotary method now, promptly workpiece winds to depart from the axle revolution of laser focused spot centre distance D/2 more.Return when speed of gyration slow (relative pulse Laser emission frequency) and circle, just on workpiece, cut the hole that next aperture is D.But the laser energy that needs when adopting rotary method to cut the hole is bigger, the hole of cutting second-rate, moreover present existing laser cutting device cost an arm and a leg, efficient is low.Above-mentioned some limited the development of laser processing technology.
Summary of the invention
The purpose of this utility model is to propose a kind of free laser pulse and compound laser drilling device of modulated laser pulsion phase of adopting; Solved existing replica method device and can not beat macropore, and the ropy technical problem of the macropore that the rotary method device is beaten has solved the recast layer and the big technical problem of micro-crack and heat-affected zone that occur in the laser boring.
It is as follows that the utility model solves the technical scheme that above-mentioned purpose adopted.A kind of laser drilling device, comprise the laser instrument 1 and the optics light guide member 2 thereof that are coupled to each other, the ccd video camera 3 of locating laser punch position, the photodetector 5 of exploring laser light pulse output, realize the computer 6 of control, be used to show the digital oscillography digital oscilloscope 7 and the laser condensing lens parts 4 of laser pulse signal and computer output signal, it directly over the laser condensing lens parts ccd video camera 3, the laser condensing lens parts are connected with the optics light guide member, the side of photodetector 5 outside laser condensing lens parts top, its feature also comprises: described laser condensing lens parts 4 mainly are X-axis 45 degree total reflective mirrors 12 and Y-axis 45 degree total reflective mirrors 13 from top to bottom, upper rail frame 14, X-axis movable stand 25, intermediate rail frame 16, Y-axis movable stand 22, amasthenic lens 24; Upper rail frame 14, X-axis movable stand 25, intermediate rail frame 16, Y-axis movable stand 22 all are hollow structures, the holder of X-axis 45 degree total reflective mirror bottoms passes the guide rail bracket 14 that is fixed on the workbench and is fixed on the X-axis movable stand 25, the Y-axis laser light pipe of Y-axis 45 degree total reflective mirrors 13 bottoms passes upper rail frame 14, X-axis movable stand 25, intermediate rail frame 16, fixing with Y-axis movable stand 22, fixed-focus camera lens 24 under the Y-axis laser light pipe; The upper rail frame is fixed on the frame of described laser condensing lens parts, and X-axis movable stand and intermediate rail frame are fixed together; X-axis movable stand 25 connects with upper rail frame 14, do to slide relatively along X axis by the X-axis driving mechanism of computer 6 controls between the two, Y-axis movable stand 22 connects with intermediate rail frame 16, slide relatively to work along Y-axis by computer-controlled Y-axis driving mechanism between the two, X-axis is axially axially mutual vertical with Y-axis; The camera lens of the camera lens of X-axis 45 degree total reflective mirrors and Y-axis 45 degree total reflective mirrors over against, laser beam is behind X-axis 45 degree total reflective mirrors and Y-axis 45 degree total reflective mirrors, become direction perpendicular to workbench by the direction that is parallel to workbench, passing between the two laser beam, to be parallel to Y-axis axial.
X-axis guide rail 31 of the present invention is installed in the two bottom sides of upper rail frame 14, and Y-axis guide rail 17 is installed in the two bottom sides of intermediate rail frame 16; Y-axis movable stand 22 contacts with Y-axis guide rail 17 by the Y-axis slide block 21 above it, and X-axis movable stand 31 contacts with X-axis guide rail 31 by the X-axis slide block 30 above it.
X-axis driving mechanism of the present invention is included in X-axis motor, the X-axis motor drum in-phase of fixing on the side of upper rail frame 14 20, X-axis leading screw synchronizing wheel 15.Y-axis driving mechanism of the present invention is included in y-axis motor, the y-axis motor synchronizing wheel of fixing on the side of Y-axis movable stand 22 28, Y-axis leading screw synchronizing wheel 19; X-axis leading screw synchronizing wheel 15 is with through synchronously with X-axis motor drum in-phase 20 and is connected; Y-axis leading screw synchronizing wheel 19 is connected by being with synchronously with y-axis motor synchronizing wheel 28.
The present invention establishes an X-axis leading screw 26, one ends and is fixed in the axle center of X-axis leading screw synchronizing wheel 15, and the other end screws in 32 li of X-axis feed screw nuts, and the X-axis feed screw nut is fixed on a side of X-axis movable stand 25; If a Y-axis leading screw 23, one ends are fixed in the axle center of Y-axis leading screw synchronizing wheel 19, the other end screws in 33 li of Y-axis feed screw nuts, and the Y-axis feed screw nut is fixed on a side of Y-axis movable stand 22.
The present invention has the constant assist gas nozzle 11 of relative position around amasthenic lens 24.
The relative movement distance scope of X-axis movable stand 25 of the present invention, Y-axis movable stand 22 is 0~40mm.According to workpiece CCD location, the position of adjusting focus lamp are adopted in the position of needs punching.According to the aperture of workpiece needs punching and the relational expression (I) of the degree of depth and energy, adjust each input parameter of laser instrument, the control power output, the output energy is E 1The laser pulse of (utilize near the high characteristics of little energy laser pulse beam quality of nearly threshold value, export little energy laser pulse) as long as the hole is punched.
D = 2 [ 3 E π ( L B + 2 L M ) ] 1 / 3 H = 2 [ 3 E π tg 2 θ ( L B + 2 L M ) ] 1 / 3 - - - ( I )
E is laser energy (J) in the formula, and LB is the vaporization specific energy (J/cm of processing work material (for example steel plate, mild steel etc.) 2), L MMelting heat specific energy (J/cm for rapidoprint 2), θ is the divergence half-angle (rad) of laser when entering material, and H is the degree of depth (being the thickness of institute's rapidoprint) of laser boring, and D is the aperture of laser boring.Adopt Compressed Gas, nitrogen, argon gas or oxygen as assist gas according to different materials, under gas shield, export high-peak power (10 6W/CM 2~10 9W/CM 2) 1~3 laser pulse of modulated laser pulse with work piece penetration, just obtain the aperture D of aperture 50~300 μ m 1
If have only the X-axis machine operation or have only y-axis motor work can realize the one dimension cutting, two motors are worked simultaneously and can be realized two dimensional motion.Keep X-direction leading screw and Y direction leading screw motionless, both kept focus lamp motionless, static punching; Two spindle motors are worked simultaneously, drive focus lamp and make two dimensional motion, and motion path is exactly the aperture of required reparation.
The focus lamp parts have realized duplicating the combination of punching and rotary-cut punching.
The beneficial effects of the utility model are: realized the laser pulse cutting of little energy; Improve the precision of laser boring, and can improve the efficient of laser boring, and can obtain bigger aperture; And it is more convenient to shifting out of undersized fusion point material; Reduce the laser heat action influence area, reduced the thickness of recast layer, the roundness height, hole wall is straight and surface clean.
Description of drawings
Fig. 1 is the utility model laser condensing lens modular construction figure;
Fig. 2 is the utility model device overall structure framework schematic diagram;
Fig. 3 is the utility model laser condensing lens modular construction exploded view;
Fig. 4 is the utility model laser condensing lens components A-A cutaway view;
1; laser instrument 2; optics light-conducting system 3; ccd video camera 4; focus lamp parts 5; photodetector 6; computer 7; digital oscilloscope 11; Y-axis 45 degree total reflective mirror mirror holders 12; X-axis 45 degree total reflective mirrors 13; Y-axis 45 degree total reflective mirrors 14; upper rail frame 15; X-axis leading screw synchronizing wheel 16; intermediate rail frame 17; Y-axis guide rail 18; Y-axis bearing 19; Y-axis leading screw synchronizing wheel 20; X-axis motor drum in-phase 21; Y-axis slide block 22; Y-axis movable stand 23; Y-axis leading screw 24; amasthenic lens 25; X-axis movable stand 26; X-axis leading screw 27; Y-axis laser light pipe 28; y-axis motor synchronizing wheel 29; X-axis bearing 30; X-axis slide block 31; X-axis guide rail 32; X-axis feed screw nut 33; Y-axis feed screw nut 34; lens 235; the protection eyeglass.
The specific embodiment
Below in conjunction with drawings and Examples, the utility model is described in further detail.
In the embodiment shown in fig. 1, focus lamp parts 4 mainly are that X-axis 45 degree total reflective mirrors 12 and Y-axis 45 are spent total reflective mirrors 13, upper rail frame 14, X-axis movable stand 25, intermediate rail frame 16, Y-axis movable stand 22, amasthenic lens 24 from top to bottom.
Referring to laser condensing lens modular construction exploded view shown in Figure 3 and A-A cutaway view shown in Figure 4.
Upper rail frame 14, X-axis movable stand 25, intermediate rail frame 16, Y-axis movable stand 22 all are hollow structures, the holder of X-axis 45 degree total reflective mirror bottoms passes the guide rail bracket 14 that is fixed on the workbench, be fixed on the X-axis movable stand 25, the Y-axis laser light pipe of Y-axis 45 degree total reflective mirrors 13 bottoms passes upper rail frame 14, X-axis movable stand 25, intermediate rail frame 16, fixing with Y-axis movable stand 22, fixed-focus camera lens 24 under the Y-axis laser light pipe.The upper rail frame is fixed on the frame of described laser condensing lens parts, and X-axis movable stand and intermediate rail frame are fixed together.
X-axis 45 degree total reflective mirrors 12 are fixed on X-axis movable stand 25 tops by screw, with 25 motions of X-axis movable stand.Y-axis 45 degree total reflective mirrors 13 are connected with the cylindrical light pipe 27 of hollow by screw, and laser light pipe and Y-axis movable stand 22 connect as one, and move with the Y-axis movable stand.The camera lens of the camera lens of X-axis 45 degree total reflective mirrors and Y-axis 45 degree total reflective mirrors over against, laser beam is behind X-axis 45 degree total reflective mirrors and Y-axis 45 degree total reflective mirrors, become direction by the direction that is parallel to workbench perpendicular to workbench, passing between the two laser beam, to be parallel to Y-axis axial, and X-axis 45 degree total reflective mirrors and Y-axis 45 degree total reflective mirrors all are 45 degree Nd:YAG total reflective mirrors.
X-axis movable stand 25 connects with upper rail frame 14, can slide relatively along X axis between the two, and Y-axis movable stand 22 connects with intermediate rail frame 16, between the two can be along Y-axis to relative slip, and X-axis is axially axially vertical mutually with Y-axis.By 30 contacts of four uniform X-axis slide blocks, contact by four uniform Y-axis slide blocks 21 between intermediate rail frame and the Y-axis movable stand between upper rail frame and the X-axis movable stand.
X-axis guide rail 31 is installed in the two bottom sides of upper rail frame; X-axis motor drum in-phase 20 and X-axis leading screw synchronizing wheel 15 are separately fixed at the left and right sides of upper rail frame bottom, the X-axis motor also is fixed on the bottom of upper rail frame, X-axis leading screw 26 1 ends are fixed in the axle center of X-axis leading screw synchronizing wheel 15, and the X-axis motor drum in-phase is connected by being with synchronously with X-axis leading screw synchronizing wheel.
The X-axis movable stand is a cavity structure, and the bottom and the intermediate rail frame 16 of both sides X-axis movable stand link together before and after the outside of cavity, and the other end of X-axis leading screw 26 screws in 32 li of X-axis feed screw nuts.Slide block 30 is fixed on X-axis movable stand top, and be in guide rail 31 under.X-axis feed screw nut 32 is fixed together with the left side of X-axis movable stand, and rotatablely moving of X-axis leading screw 26 become the motion of the X-direction of self, drives the motion of X-axis movable stand, moves on guide rail thereby drive X-axis slide block 30.
Y-axis motor is fixed on the outside of Y-axis movable stand 22, and an end of Y-axis leading screw 23 is fixed in the axle center of Y-axis leading screw synchronizing wheel 19, and the other end of Y-axis leading screw 23 screws in 33 li of Y-axis feed screw nuts.In Y-axis movable stand lower raft, be provided with screw thread, connect amasthenic lens 24.
Y-axis feed screw nut 33 is fixed together with the rear side of Y-axis movable stand, and rotatablely moving of Y-axis leading screw 23 is converted into the rectilinear motion of the Y direction of self, drives the motion of Y-axis movable stand.
X-axis motor drum in-phase 20 links to each other with X-axis, y-axis motor respectively with y-axis motor synchronizing wheel 28, and X, Y motor adopt high speed high pulling torque precision electric motor.Under y-axis motor drove, Y-axis leading screw 23 drove 22 motions of Y-axis movable stand, and slide block 21 moves on guide rail 17, and Y-axis 45 is spent total reflective mirrors 13 and focus lamp 24 is synchronized with the movement thereby drive, and realizes the motion in one dimension of Y direction.
Laser straightline propagation reflexes to Y-axis 45 degree total reflective mirrors then to X-axis 45 degree total reflective mirrors, is transferred to focus lamp 24 output laser through Y-axis 45 degree total reflective mirror reflection backs by light pipe 27 again and processes.The camera lens of X-axis 45 degree total reflective mirrors 12 and Y-axis 45 degree total reflective mirrors 13 all the time over against.
When having only the running of X-axis motor drum in-phase, remove the upper rail frame and keep motionless with X-axis motor drum in-phase and X-axis leading screw synchronizing wheel that the upper rail frame is fixed together, other parts are moved with the X-axis movable stand, be that Y-axis motion parts and X-axis motion parts are synchronized with the movement, X-axis 45 degree total reflective mirrors 12 and the 13 equidirectional motions of Y-axis 45 degree total reflective mirrors, guarantee that light passes through the center of two mirrors all the time, guarantee in the process of motion light simultaneously all the time from the center outgoing of focus lamp, thereby realize the motion in one dimension of X-direction.
When y-axis motor and X-axis motor move simultaneously, under the drive of X-axis leading screw and Y-axis leading screw, X-axis movable stand and Y-axis movable stand move simultaneously, X-axis 45 degree total reflective mirrors 12 and Y-axis 45 degree total reflective mirrors 13 move simultaneously, Y-axis 45 degree total reflective mirrors are in assurance and the equidirectional motion of X-axis 45 degree total reflective mirrors, under the drive of Y-axis feed screw nut,, realize the two dimensional motion of focus lamp, guaranteed the cutting of circular hole to the Y direction motion.
In the embodiment shown in Figure 2, whole described device comprise ccd video camera 3, the exploring laser light output pulse of the laser instrument 1 that is coupled to each other and optics light guide member 2 thereof, locating laser punch position photodetector 5, realize control computer 6, show the digital oscilloscope 7 and the laser condensing lens parts 4 of laser pulse and computer output signal.Be ccd video camera 3 directly over the laser condensing lens parts 4, the laser condensing lens parts are connected with the optics light guide member, the side of photodetector 5 outside laser condensing lens parts top.

Claims (6)

1. laser drilling device, comprise the laser instrument (1) and the optics light guide member (2) thereof that are coupled to each other, the ccd video camera of locating laser punch position (3), the photodetector (5) of exploring laser light output pulse, realize the computer (6) of control, be used to show the digital oscilloscope (7) and the laser condensing lens parts (4) of laser pulse and Computer signal, directly over the laser condensing lens parts (4) ccd video camera (3), the laser condensing lens parts are connected with the optics light guide member, the side of photodetector (5) outside laser condensing lens parts top, its feature also comprises: described laser condensing lens parts (4) mainly are X-axis 45 degree total reflective mirrors (12) and Y-axis 45 degree total reflective mirrors (13) from top to bottom, upper rail frame (14), X-axis movable stand (25), intermediate rail frame (16), Y-axis movable stand (22), amasthenic lens (24); Upper rail frame (14), X-axis movable stand (25), intermediate rail frame (16), Y-axis movable stand (22) all are hollow structures, the holder of X-axis 45 degree total reflective mirror bottoms passes the upper rail frame (14) that is fixed on the workbench and is fixed on the X-axis movable stand (25), the Y-axis laser light pipe of Y-axis 45 degree total reflective mirror (13) bottoms passes upper rail frame (14), X-axis movable stand (25), intermediate rail frame (16), fixing with Y-axis movable stand (22), fixed-focus camera lens (24) under the Y-axis laser light pipe; The upper rail frame is fixed on the frame of described laser condensing lens parts, and X-axis movable stand and intermediate rail frame are fixed together; X-axis movable stand (25) connects with upper rail frame (14), do to slide relatively along X axis by the X-axis driving mechanism of computer (6) control between the two, Y-axis movable stand (22) connects with intermediate rail frame (16), slide relatively to work along Y-axis by computer-controlled Y-axis driving mechanism between the two, X-axis is axially axially mutual vertical with Y-axis; The camera lens of the camera lens of X-axis 45 degree total reflective mirrors and Y-axis 45 degree total reflective mirrors over against, laser beam is behind X-axis 45 degree total reflective mirrors and Y-axis 45 degree total reflective mirrors, become direction perpendicular to workbench by the direction that is parallel to workbench, passing between the two laser beam, to be parallel to Y-axis axial.
2. a kind of laser drilling device according to claim 1 is characterized by: X-axis guide rail (31) is installed in the two bottom sides of upper rail frame (14), and Y-axis guide rail (17) is installed in the two bottom sides of intermediate rail frame (16); Y-axis movable stand (22) contacts with Y-axis guide rail (17) by the Y-axis slide block (21) above it, and X-axis movable stand (31) contacts with X-axis guide rail (31) by the X-axis slide block (30) above it.
3. a kind of laser drilling device according to claim 1 is characterized by: described X-axis driving mechanism is included in X-axis motor, the X-axis motor drum in-phase of fixing on the side of upper rail frame (14) (20), X-axis leading screw synchronizing wheel (15); Described Y-axis driving mechanism is included in y-axis motor, the y-axis motor synchronizing wheel of fixing on the side of Y-axis movable stand (22) (28), Y-axis leading screw synchronizing wheel (19); X-axis leading screw synchronizing wheel (15) is with through synchronously with X-axis motor drum in-phase (20) and is connected; Y-axis leading screw synchronizing wheel (19) is connected by being with synchronously with y-axis motor synchronizing wheel (28).
4. according to claim 1 or 3 described a kind of laser drilling devices, it is characterized by: establish an X-axis leading screw (26), one end is fixed in the axle center of X-axis leading screw synchronizing wheel (15), and the other end screws in X-axis feed screw nut (32) lining, and the X-axis feed screw nut is fixed on a side of X-axis movable stand (25); If a Y-axis leading screw (23), an end are fixed in the axle center of Y-axis leading screw synchronizing wheel (19), the other end screws in Y-axis feed screw nut (33) lining, and the Y-axis feed screw nut is fixed on a side of Y-axis movable stand (22).
5. a kind of laser drilling device according to claim 1 is characterized by: the nozzle (11) that the constant assist gas of relative position is arranged around amasthenic lens (24).
6. a kind of laser drilling device according to claim 4 is characterized by: the relative movement distance scope of X-axis movable stand (25), Y-axis movable stand (22) is 0~40mm.
CN 200520144908 2005-12-21 2005-12-21 Laser boring device Expired - Lifetime CN2860713Y (en)

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Application Number Priority Date Filing Date Title
CN 200520144908 CN2860713Y (en) 2005-12-21 2005-12-21 Laser boring device

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100441360C (en) * 2005-12-21 2008-12-10 北京工业大学 Laser perforating method and its perforating device
CN104162745A (en) * 2014-07-11 2014-11-26 北京工业大学 GaAs-based microwave device and laser drilling processing method for monolithic integrated circuit back holes
WO2016008080A1 (en) * 2014-07-14 2016-01-21 西门子公司 System and method for machining holes on workpiece using laser pulses
CN103537810B (en) * 2012-07-16 2016-08-17 中国电子科技集团公司第九研究所 Ferrite substrate laser boring method
CN106346144A (en) * 2016-08-25 2017-01-25 安庆市兴丰工贸有限公司 Punching assembly of plastic film production system
CN106346558A (en) * 2016-08-25 2017-01-25 安庆市兴丰工贸有限公司 Laser drilling device for plastic film

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100441360C (en) * 2005-12-21 2008-12-10 北京工业大学 Laser perforating method and its perforating device
CN103537810B (en) * 2012-07-16 2016-08-17 中国电子科技集团公司第九研究所 Ferrite substrate laser boring method
CN104162745A (en) * 2014-07-11 2014-11-26 北京工业大学 GaAs-based microwave device and laser drilling processing method for monolithic integrated circuit back holes
WO2016008080A1 (en) * 2014-07-14 2016-01-21 西门子公司 System and method for machining holes on workpiece using laser pulses
CN106346144A (en) * 2016-08-25 2017-01-25 安庆市兴丰工贸有限公司 Punching assembly of plastic film production system
CN106346558A (en) * 2016-08-25 2017-01-25 安庆市兴丰工贸有限公司 Laser drilling device for plastic film

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Effective date of abandoning: 20081210

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