CN202114396U - Three-coordinate galvanometer scanning type laser machining head - Google Patents
Three-coordinate galvanometer scanning type laser machining head Download PDFInfo
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- CN202114396U CN202114396U CN 201120128340 CN201120128340U CN202114396U CN 202114396 U CN202114396 U CN 202114396U CN 201120128340 CN201120128340 CN 201120128340 CN 201120128340 U CN201120128340 U CN 201120128340U CN 202114396 U CN202114396 U CN 202114396U
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Abstract
The utility model provides a three-coordinate galvanometer scanning type laser machining head, which comprises an X-axis and Y-axis laser galvanometer system, a clamping mechanism, a Z-axis moving mechanism, a laser displacement sensor and a control system, wherein the Z-axis moving mechanism comprises a fixed member and a moving member; the clamping mechanism is fixed to the fixed member of the Z-axis moving mechanism; the X-axis and Y-axis laser galvanometer system and the laser displacement sensor are both fixedly installed on the moving member of the Z-axis moving mechanism; and the laser displacement sensor, the Z-axis moving mechanism and the X-axis and Y-axis laser galvanometer system are all electrically connected with the control system. The laser machining head has a dynamic focus regulation function and is independent and compact in structure, is very simple and easy in combined processing with commercial multi-axis linked digital control machine tools, such as a three-axis linked digital control machine tool, a five-axis linked digital control machine tool and the like, by design of a broach interface of a standard digital control machine tool thereof, greatly increases the technical flexibility and can conveniently change the general multi-axis linked digital control machine tool into a galvanometer scanning laser machine tool with compatible function, so that the three-coordinate galvanometer scanning laser machining head has important practical value.
Description
Technical field
The utility model belongs to the Laser Processing application, particularly a kind of three-dimensional vibration mirror scanning type laser Machining head.
Background technology
In recent years; Based on the laser processing technology (hereinafter to be referred as the vibration mirror scanning Laser Processing) of vibration mirror scanning mode because its high efficiency, high accuracy, noncontact, high flexibility degree, strong material adaptability characteristics such as (can process superhard, ultra crisp, ultra-thin etc. special substance), make it obtain extensive use in precision manufacturing field.
The vibration mirror scanning laser process equipment generally comprises laser instrument, leaded light light path, vibration mirror scanning type laser Machining head and lathe several sections; Its system principle is: after the laser beam that will from laser resonant cavity, export is accomplished beam-expanding collimation through the leaded light light path; Get into the vibration mirror scanning type laser Machining head, realize the focusing of laser beam and accurately deflection scanning motion by the XY diaxon laser galvanometer system in the laser Machining head.Specifically; The vibration mirror scanning type laser Machining head mainly comprises XY diaxon laser galvanometer system and auxiliary body; Wherein XY diaxon laser galvanometer system generally comprises two laser plane speculums and scanning focused lens; Laser beam successively through vertical install, by the reflection of a pair of laser plane speculum (being called X, Y axle laser plane speculum respectively) of driven by servomotor, get into scanning focused lens (being called F-theta object lens or telecentric lens again) and focus on the back output action on object to be processed.The rotation of X, Y axle laser plane speculum is moved the laser focal beam spot on the working face respectively on X, Y axle; Two minute surface co-operatings make the laser focal beam spot can on working face, accomplish moving of straight line and various curves; Facula position on beam incident angle and the image planes satisfies linear relationship, thereby controls the position of hot spot on image planes through the scan angle of control incident beam.
The vibration mirror scanning type laser Machining head generally is fixedly mounted on the lathe, can realize X, the Laser Processing of Y X-Y scheme in the laser galvanometer system sweep limits through the yaw motion of control light beam.Therefore; With the vibration mirror scanning type laser Machining head be installed in can straight-line X-Y-Z multi-axis numerical control lathe on; Can realize that many Laser Processings such as body laser inner carving, laser weld, laser ablation, laser marking of large format workpiece use; Method is that the zone that needs are processed is divided into experimental process piece (size of sub-piece area is decided by the sweep limits of vibration mirror scanning type laser Machining head); Utilize the characteristics that vibration mirror scanning type laser Machining head process velocity is fast, precision is high, realize each sub-block graphics processing, and lathe mainly is to drive the vibration mirror scanning type laser Machining head to next sub-block Working position.Like the patent No. is 200320116332.3 Chinese patent " galvanometer head engraving cutting multi-purpose laser engraving machine "; Number of patent application is 201020026191.6 utility model patent document " a kind of ultraviolet laser cutting machine tool ", and number of patent application is that 200910215372.5 patent documentation " CCD mirror-vibrating laser welder and method " has been reported and adopted XY diaxon laser galvanometer system to carry out the application such as flat-plate laser cutting, etching and welding of various material.
Yet in the present vibration mirror scanning laser process equipment, the structure of vibration mirror scanning type laser Machining head is comparatively simple; Except XY diaxon laser galvanometer system; Having only auxiliary bodies such as some smoke abatements, CCD processing monitoring, all is that XY two-dimensional laser galvanometer system is fixedly connected design with the multi-axis numerical control lathe, owing to do not possess modularization and stand-alone interface characteristic; Make and be difficult for removing and installing; And the adjusting of focal length must rely on the Z shaft movement mechanism of multi-axis numerical control lathe and realize that the function association degree is high, is difficult to realize the process requirements of the frequent in real time adjustment processing of complex-curved workpiece needs focal length.Further, also there is not bibliographical information self to possess processing focometry and the incorporate vibration mirror scanning type laser Machining head of regulatory function now as yet.
The utility model content
The purpose of the utility model is to propose a kind of three-dimensional vibration mirror scanning type laser Machining head; This laser Machining head have processing unit moduleization, easy to assemble, can with multiple commercial Digit Control Machine Tool combination processing, simple and reliable process, to the strong advantage of applicability of various planes, complex-curved workpiece processed and applied.
The utility model provides a kind of three-dimensional vibration mirror scanning type laser Machining head, comprises XY diaxon laser galvanometer system; Be used for this laser Machining head is mounted to the clamping mechanism of multi-axis linkage numerical control lathe; Be used to regulate the Z axle travel mechanism of XY diaxon laser galvanometer system Z shaft position; Be used to control the control system of Z axle travel mechanism and the motion of XY diaxon laser galvanometer system; Said Z axle travel mechanism comprises a fixed part and a moving component; Clamping mechanism is fixedly mounted on the fixed part of Z axle travel mechanism; XY diaxon laser galvanometer system is fixedly mounted on the moving component of Z axle travel mechanism; The light beam exit direction of XY diaxon laser galvanometer system is parallel with the direction of motion of Z axle travel mechanism moving component, and Z axle travel mechanism and XY diaxon laser galvanometer system all are electrically connected with the control system.
Further; It comprises that also one is used between measured X Y diaxon laser galvanometer system and the processing work Z to spacing; And export this Z the laser displacement sensor of control system to spacing, and this laser displacement sensor is fixedly mounted on the moving component of Z axle travel mechanism, and system is electrically connected with control.
Further, the fixed part of said Z axle travel mechanism is a guide rail, and moving component is a slide block, and slide block is installed on the guide rail, and can move up and down along guide rail.
Further, the setting angle of laser displacement sensor makes its laser displacement measurement direction parallel with the light beam exit direction of XY diaxon laser galvanometer system.
Further, described multi-axis linkage numerical control lathe is three or 5-shaft linkage numerical control lathe.
What existing vibration mirror scanning laser process equipment generally adopted is the structure of XY two-dimensional laser galvanometer system and multi-axis numerical control lathe overall fixed; Its Z axle laser spot regulatory function must rely on the cooperation of multi-axis numerical control lathe; Therefore processing head is difficult for removing and installing, and applicability is not high.The three-dimensional vibration mirror scanning type laser Machining head that the utility model provides; " 2+1 axle " structure that possesses XY diaxon laser galvanometer system, Z axle travel mechanism; Through the Z axle travel mechanism that inside carries, can realize the processing focal length self-regulating function of laser galvanometer system.This processing head structure is independent, compact; Clamping mechanism is according to criterion numeral controlled machine broaching tool Interface design; Make the combination processing of commercialization multi-axis linkage numerical control lathes such as itself and three, five very simple and easy, improved craft flexibility greatly, can be easily the multi-axis linkage numerical control lathe of routine be changed over the vibration mirror scanning type laser process machine; And function is compatible, therefore has important practical value.
In addition; This processing head also has the high-precision laser displacement transducer; Z axle travel mechanism, high-precision laser displacement transducer and control system constitute the close-loop feedback control system of Laser Processing focal length, make processing head self possess the kinetic measurement and the regulatory function of processing focal length.
Description of drawings
Fig. 1 is the three-dimensional vibration mirror scanning type laser Machining head structural representation of the utility model;
Each label implication among the figure: 1 for clamping mechanism, be used for cooperating with industrial Digit Control Machine Tool, 2 is Z axle travel mechanism, 3 is support; 4 is XY diaxon laser galvanometer system, and 5 is laser displacement sensor, and 6 is processing work; 7 is laser beam, and 8 are the control system, and 201 is that vertical rail, 202 is slide block.
The specific embodiment
Elaborate through accompanying drawing and instance exemplary embodiment below to the utility model.
The described three-dimensional vibration mirror scanning type of the utility model laser Machining head, its structure is as shown in Figure 1, comprising: clamping mechanism 1, Z axle travel mechanism 2, support 3, XY diaxon laser galvanometer system 4, laser displacement sensor 5 and control system 8.Z axle travel mechanism 2, XY diaxon laser galvanometer system 4, laser displacement sensor 5 all are electrically connected with control system 8.The bottom of clamping mechanism 1 is installed on the support 3, and it is used for this laser Machining head is mounted to the multi-axis linkage numerical control lathe; Z axle travel mechanism 2 also is installed on the support 3, is used to regulate the Z shaft position of XY diaxon laser galvanometer system, and it can move up and down along Z-direction; Support 3 is used for Z axle travel mechanism 2 is fixedly connected with clamping mechanism 1; XY diaxon laser galvanometer system 4 is used for laser beam is focused on back output at processing work 6, and presses the scanning motion of XY X-Y scheme by control system 8 control focussed laser beams; Laser displacement sensor 5 is used for the Z of measured X Y diaxon laser galvanometer system 4 and processing work 6 to spacing, and feeds back to control system 8; The moving component of 8 control Z axle travel mechanisms 2 of control system moves in Z-direction, to regulate the Laser Processing focal length.
Concretely; Z axle travel mechanism 2 comprises a fixed part and a moving component; Be vertical rail 201 and slide block 202; Vertical rail 201 is fixedly connected on the support 3, and slide block 202 is installed on the vertical rail 201 through lifter wheel, and control system 8 moves up and down along vertical rail 201 through control driven by servomotor slide block 202.The moving component that XY diaxon laser galvanometer system 4 is fixedly mounted on Z axle travel mechanism 2 is on the slide block 202; XY diaxon laser galvanometer system 4 installation positions make the light beam exit direction parallel with the direction that moves up and down (being Z-direction) of slide block 202; Therefore; The diaxon galvanometer XY X-Y scheme scanning motion ability of XY diaxon laser galvanometer system 4 and the Z axle linear motion capability of slide block 202 are combined into complete XYZ rectangular coordinate system motor function, realize self three-dimensional vibration mirror scanning type Laser Processing campaign.The fixed part of Z axle travel mechanism 2 is fixedly connected with clamping mechanism 1 through support 3; The function of clamping mechanism 1 is that this laser Machining head is mounted on the standard broaching tool tool rest of multi-axis linkage numerical control lathe; The multi-axis linkage numerical control lathe can be the three-shaft linkage Digit Control Machine Tool, also can be 5-shaft linkage numerical control lathe etc.
Laser displacement sensor 5 is fixedly mounted on the slide block 202 of Z axle travel mechanism 2; Adjacent XY diaxon laser galvanometer system 4 fixed installations, and setting angle makes its laser displacement measurement direction parallel with the light beam exit direction (being Z-direction) of XY diaxon laser galvanometer system 4.Laser displacement sensor 5, Z axle travel mechanism 2 and control system 8 form the close-loop feedback control system; And, can realize in the process kinetic measurement of processing focal length and adjustment function to laser beam 7 according to the fixing installation site conversion relation of XY diaxon laser galvanometer system 4 and laser displacement sensor 5.
The structure of clamping mechanism 1 can be circular broach, keyway broach, rectangle or hexagonal hole type broaching tool etc. according to the design of international standard broaching tool head, confirms concrete model by the broaching tool tool rest of the multi-axis linkage numerical control lathe configuration that will install.
Z axle travel mechanism 2 can be the structure that servomotor or step-by motor driven lead screw guide rails add slide block, can also be that linear motor driving type line slideway adds slide block structure, and requirement can realize that Z axle slide block movement repetitive positioning accuracy is higher than 0.05mm.
XY diaxon laser galvanometer system 4 can be the widely used any XY diaxon laser galvanometer system of industrial circle; After the clear aperture of X, Y laser plane mirror size, scanning focused lens and focal length were confirmed, parameters such as vibration mirror scanning scope, processing focal length and output beam characteristic were also correspondingly confirmed.
Laser displacement sensor 5 can be any laser displacement measurement device that can realize that accurate distance is measured, and certainty of measurement requires to be higher than 0.05mm, and the widely used high-precision laser displacement transducer of industrial circle can both satisfy this requirement at present.
The described three-dimensional vibration mirror scanning type of the utility model laser Machining head is mounted to commercial three or 5-shaft linkage numerical control lathe through clamping mechanism 1; Can constitute what is called " 3+3 " axle or " 5+3 " axle laser process machine; Drive laser Machining head by three or 5-shaft linkage numerical control lathe and be positioned to the position that the large format surface of the work need be processed; Utilize laser Machining head to accomplish vibration mirror scanning Laser Processing campaign then, can realize the Laser Processing of flat work pieces or curve surface work pieces.Concretely; Be that the laser beam launched of laser instrument is behind light-conducting system; Laser beam 7 gets into XY diaxon laser galvanometer system 4 in these laser Machining heads, through the reflection of two X, Y axle laser plane speculum, gets into scanning focused lens and focuses on the processing work 6.In process to flat work pieces; When slide block 202 drives XY diaxon laser galvanometer systems 4 and laser displacement sensor 5 when Z-direction moves up and down; But the Z on laser displacement sensor 5 real-time measurement sensors and processing work 6 surfaces is to spacing; And feed back to the control system; Because the relative bearing of laser displacement sensor 5 and XY diaxon laser galvanometer system 4 is changeless, therefore can controls the Z shaft position of Z axle travel mechanisms 2 real-time regulated slide blocks 202, thereby make the XY diaxon laser galvanometer system 4 and the Z on processing work 6 surfaces remain preset processing focal length to spacing through control system 8.In process to curve surface work pieces; At first according to the relative bearing conversion relation of laser displacement sensor 5 and XY diaxon laser galvanometer system 4; Utilize the multi-axis linkage numerical control lathe to drive the laser Machining head motion; The measuring beam of laser displacement sensor 5 is moved in the machining area to be scanned of XY diaxon laser galvanometer system 4, the Z on measuring transducer and processing work 6 surfaces to spacing, feed back to control system 8 and make the XY diaxon laser galvanometer system 4 and the Z on processing work 6 surfaces be preset processing focal length to spacing by the Z shaft position of control system 8 control and regulation slide blocks 202; Then, utilize three or the motion of 5-shaft linkage numerical control lathe drive laser Machining head, make XY diaxon laser galvanometer system 4 move to machining area to be scanned, accomplish vibration mirror scanning Laser Processing campaign by laser Machining head.
The embodiment of the utility model is not limited to the content of the above-mentioned specific embodiment; Can be not limited to industry three or 5-shaft linkage numerical control lathe with the equipment that this three-dimensional vibration mirror scanning type laser Machining head makes up processing, also can be any workpiece positioner that designs voluntarily.Persons skilled in the art can adopt other multiple specific embodiment to implement the utility model according to the disclosed content of the utility model.Therefore, technical scheme of every employing the utility model and thinking are only made some replacement known in those skilled in the art and modifications, all within the protection domain of the utility model.
Claims (5)
1. a three-dimensional vibration mirror scanning type laser Machining head comprises XY diaxon laser galvanometer system, it is characterized in that it also comprises:
Be used for this laser Machining head is mounted to the clamping mechanism of multi-axis linkage numerical control lathe;
Be used to regulate the Z axle travel mechanism of XY diaxon laser galvanometer system Z shaft position;
Be used to control the control system of Z axle travel mechanism and the motion of XY diaxon laser galvanometer system;
Said Z axle travel mechanism comprises a fixed part and a moving component; Clamping mechanism is fixedly mounted on the fixed part of Z axle travel mechanism; XY diaxon laser galvanometer system is fixedly mounted on the moving component of Z axle travel mechanism; The light beam exit direction of XY diaxon laser galvanometer system is parallel with the direction of motion of Z axle travel mechanism moving component, and Z axle travel mechanism and XY diaxon laser galvanometer system all are electrically connected with the control system.
2. three-dimensional vibration mirror scanning type laser Machining head according to claim 1; It is characterized in that; It comprises that also one is used between measured X Y diaxon laser galvanometer system and the processing work Z to spacing; And export this Z the laser displacement sensor of control system to spacing, and this laser displacement sensor is fixedly mounted on the moving component of Z axle travel mechanism, and system is electrically connected with control.
3. three-dimensional vibration mirror scanning type laser Machining head according to claim 1 and 2 is characterized in that, the fixed part of said Z axle travel mechanism is a guide rail, and moving component is a slide block, and slide block is installed on the guide rail, and can move up and down along guide rail.
4. three-dimensional vibration mirror scanning type laser Machining head according to claim 2 is characterized in that, the setting angle of laser displacement sensor makes its laser displacement measurement direction parallel with the light beam exit direction of XY diaxon laser galvanometer system.
5. three-dimensional vibration mirror scanning type laser Machining head according to claim 1 and 2 is characterized in that, described multi-axis linkage numerical control lathe is three or 5-shaft linkage numerical control lathe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120128340 CN202114396U (en) | 2011-04-27 | 2011-04-27 | Three-coordinate galvanometer scanning type laser machining head |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120128340 CN202114396U (en) | 2011-04-27 | 2011-04-27 | Three-coordinate galvanometer scanning type laser machining head |
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| CN202114396U true CN202114396U (en) | 2012-01-18 |
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| CN 201120128340 Expired - Fee Related CN202114396U (en) | 2011-04-27 | 2011-04-27 | Three-coordinate galvanometer scanning type laser machining head |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102166685A (en) * | 2011-04-27 | 2011-08-31 | 华中科技大学 | Three-coordinate galvanometer scanning laser processing head |
| WO2016107530A1 (en) * | 2014-12-29 | 2016-07-07 | 上海睿钰生物科技有限公司 | Follow-up fixed focus system |
| CN107175409A (en) * | 2017-05-26 | 2017-09-19 | 苏州菲镭泰克激光技术有限公司 | The three-dimensional laser fine machining system and method for crisp and hard material |
| CN107745188A (en) * | 2017-09-30 | 2018-03-02 | 深圳信息职业技术学院 | A kind of picosecond laser process equipment |
| CN112719573A (en) * | 2020-12-09 | 2021-04-30 | 成都宏明双新科技股份有限公司 | Method for efficiently improving laser etching efficiency of product |
-
2011
- 2011-04-27 CN CN 201120128340 patent/CN202114396U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102166685A (en) * | 2011-04-27 | 2011-08-31 | 华中科技大学 | Three-coordinate galvanometer scanning laser processing head |
| CN102166685B (en) * | 2011-04-27 | 2013-12-25 | 华中科技大学 | Three-coordinate galvanometer scanning laser processing head |
| WO2016107530A1 (en) * | 2014-12-29 | 2016-07-07 | 上海睿钰生物科技有限公司 | Follow-up fixed focus system |
| US9804379B2 (en) | 2014-12-29 | 2017-10-31 | Shanghai Ruiyu Biotech Co., Ltd. | Follow-up fixed focus system |
| CN107175409A (en) * | 2017-05-26 | 2017-09-19 | 苏州菲镭泰克激光技术有限公司 | The three-dimensional laser fine machining system and method for crisp and hard material |
| CN107745188A (en) * | 2017-09-30 | 2018-03-02 | 深圳信息职业技术学院 | A kind of picosecond laser process equipment |
| CN112719573A (en) * | 2020-12-09 | 2021-04-30 | 成都宏明双新科技股份有限公司 | Method for efficiently improving laser etching efficiency of product |
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Legal Events
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120118 Termination date: 20160427 |