WO1999000215A1 - Laser engraving machine for processing surface and inner of glass - Google Patents

Laser engraving machine for processing surface and inner of glass Download PDF

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Publication number
WO1999000215A1
WO1999000215A1 PCT/CN1998/000100 CN9800100W WO9900215A1 WO 1999000215 A1 WO1999000215 A1 WO 1999000215A1 CN 9800100 W CN9800100 W CN 9800100W WO 9900215 A1 WO9900215 A1 WO 9900215A1
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WO
WIPO (PCT)
Prior art keywords
laser
glass
focusing device
floor
yag
Prior art date
Application number
PCT/CN1998/000100
Other languages
French (fr)
Chinese (zh)
Inventor
Ting Chen
Original Assignee
Ting Chen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ting Chen filed Critical Ting Chen
Priority to KR1019997009055A priority Critical patent/KR100341076B1/en
Priority to AU79050/98A priority patent/AU7905098A/en
Publication of WO1999000215A1 publication Critical patent/WO1999000215A1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/10—Glass-cutting tools, e.g. scoring tools
    • C03B33/102—Glass-cutting tools, e.g. scoring tools involving a focussed radiation beam, e.g. lasers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/361—Removing material for deburring or mechanical trimming
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/08—Severing cooled glass by fusing, i.e. by melting through the glass
    • C03B33/082—Severing cooled glass by fusing, i.e. by melting through the glass using a focussed radiation beam, e.g. laser

Definitions

  • the invention relates to a laser, in particular to a laser engraving machine for processing a glass surface and a glass body.
  • Co 2 laser processing of glass such as cutting, punching, marking, is well known in practice. This is because glass can absorb 80%-90% of infrared light from a CO 2 laser. Because the absorption is negligible at a laser wavelength of 1 ⁇ m, according to traditional concepts, it is difficult to process glass with a Nd : YAG laser beam. It is also known that Nd : YAG laser beam can also be absorbed by transparent glass due to nonlinear effects when the intensity I> 1 GW / cm 2 , but it is limited to theoretical explanation.
  • the existing laser engraving machine can only engrav two-dimensionally the glass surface, but cannot three-dimensionally engrave or mark the glass body and the glass surface, and the processing efficiency is low.
  • An object of the present invention is to provide a laser engraving machine for processing glass surfaces and glass bodies, which can perform two-dimensional and three-dimensional engraving or marking on glass surfaces and glass bodies, thereby improving processing efficiency.
  • the laser engraving machine for processing glass surface and glass body includes a floor-mounted rack equipped with an upper table, a CO 2 laser set on the upper table, a pointing He-Ne laser, a beam expanding telescope, and a The laser reflecting mirror of the reflex laser, the C0 2 laser focusing device hoisted by the bracket on the floor of the floor-mounted rack, the stepping motor driving power installed in the floor-mounted rack together with the stepping motor, and the water pipe connected to the laser Water-cooled device, laser power box connected to the laser by wires, computer connected to the laser power and stepper motor drive power through shielded wires, and a two-dimensional work platform installed directly under the laser focusing device.
  • the laser focus on the glass surface causes the glass
  • the surface is cracked and broken to complete the plane engraving; it also includes a YAG laser set on the table top of the floor-standing rack, and a YAG laser focusing device hoisted by a nut screw on the top table; the YAG laser focusing device is equipped with two A metal cylinder connected by a connecting rod, a focusing lens group is installed in the metal cylinder and controlled by a stepping motor Vertical movement of the focusing lens group, so that the body of the laser spot damage the glass composition is completed three-dimensional pattern engraved in vivo.
  • the present invention combines laser and computer numerical control technology.
  • the operation uses menu-type input. It can be used for engraving on the surface and body of glass, wood, plastic and other materials. It can also be used for making trademarks, craft gifts and anti-counterfeiting signs in glass. And non-metal cutting and other processing, easy to use, completely reliable operation, has broad application prospects in the industrial field. Brief description of the drawings
  • FIG. 1 is a schematic view of a front view of a laser engraving machine for processing a glass surface and a glass body.
  • FIG. 2 is a schematic structural plan view of an upper table of the laser engraving machine.
  • FIG. 3 is a schematic structural diagram of a laser focusing device of the laser engraving machine.
  • Fig. 4 is a schematic diagram of the structure of a concave-convex virtual confocal type non-stable cavity YAG laser in the above laser engraving machine. Detailed description of the invention
  • a laser engraving machine for processing glass surfaces and glass bodies has a floor-standing frame 1, and a C0 2 laser 3, a YAG laser 4, an instruction He-Ne laser 5, and Beam telescope 6 and laser mirror 7 for refracting laser light.
  • a laser focusing device 8 is hoisted on the floor 2 of the floor-mounted frame 1.
  • the laser focusing device 8 includes a CO 2 laser focusing device 10 hoisted through a bracket 9 and a YAG laser focusing device 12 hoisted through a nut screw 11.
  • a two-dimensional working platform 13 is installed directly below the laser focusing device 8, which is an X-Y working platform.
  • a stepping motor driving power source 14 is installed in the floor-standing frame 1 together with the stepping motor 15.
  • a water cooling device 16, a laser power box 17, and a computer 18 are installed beside the floor-standing rack 1.
  • the water cooling device 16 is connected to the laser through a water pipe 19
  • the laser power box 17 is connected to the laser through a wire 20
  • the computer 18 is connected to the laser power through a shielded wire 21 Connected to stepping motor drive power.
  • the YAG laser focusing device 12 is equipped with two metal cylinders 23 connected by a connecting rod 22, and each of the metal cylinders 23 is equipped with a focusing lens group 24.
  • the stepping motor 15 controls the focusing lens group 24 to move up and down.
  • YAG laser 4 is a concave-convex virtual confocal non-stable cavity structure. It takes into account the changes in the parameters of the laser cavity caused by the thermal lens.
  • the YAG laser 4 may also be a plano-convex unstable cavity structure.
  • the computer 18 controls the YAG laser to trigger to generate a laser with a wavelength of 1.06 ⁇ m.
  • the beam is expanded and collimated by the beam expanding telescope 6, and then the laser is collected in the glass via the laser mirror 7 and the YAG laser focusing device 12, causing damage and damage points. as a white point of the burst, while the computer 18 controls the work platform 13 and the two-dimensional aggregation of a YAG laser apparatus 24 for three-dimensional movement of focus lens group 12, so that the glass body of the laser spot damage complex three-dimensional pattern.
  • the computer 18 controls the C0 2 laser 3 to be triggered to generate a laser with a wavelength of 10.6 ⁇ m.
  • the laser mirror 7 and the C0 2 laser focusing device 10 focus the laser on the glass surface to cause cracking and damage.
  • the computer 18 controls the two-dimensional working platform 13 To complete the plane engraving.
  • the CO 2 laser 2 shown in FIG. 2 is a closed-type laser tube with an output wavelength of 10.6 ⁇ , an output mode of low-order mode, an output power of 30-50W, a repetition frequency of 1000-2000Hz, and a C0 2 laser focusing lens using spherical ZnSe. lens.
  • the resonant cavity of the YAG laser 4 shown in FIG. 4 uses a concave-convex virtual confocal unstable cavity structure.
  • a positive concave-convex mirror 25, a laser convex mirror 26, and a laser output mirror 29 with a small hole in the middle are used to form a positive
  • the branch confocal unstable cavity the crystal 30 is used for Q-switching, the laser output is ring-shaped, and the divergence angle is less than 1 milliradian.
  • Such beam characteristics can not only reduce the needle-like extension caused by self-focusing, but also obtain a small melting point.
  • the YAG laser focusing lens group 24 is controlled by the stepping motor 15 to move up and down, so that the laser focus moves up and down in the glass body to complete three-dimensional movement. This eliminates the difficulty and cost of making a three-dimensional work platform, and makes the structure of the engraving machine simple and reasonable.
  • Laser power supply 17 includes two parts YAG laser power supply and the C0 2 laser, YAG laser and the power supply switch can be DC charging power supply, the operating voltage 500 - 1200V, the charging accuracy of less than five thousandths.
  • the laser triggers the TTL level and requires optical isolation.
  • C0 2 laser power supply uses high-frequency switching power supply, which can provide 30-50W laser output, repetition frequency 1-2KC, laser trigger TTL level, and requires photoelectric isolation.
  • the two-dimensional working platform 13 in the embodiment of the present invention uses a ball screw drive, an XY stroke is greater than 200 mm, a positioning accuracy is less than 3 ⁇ , a repeatability accuracy is less than 10 ⁇ m, and an origin positioning accuracy is less than 10 ⁇ m.

Abstract

The present invention relates to a laser engraving machine for processing surface and inner of glass. The machine comprise a floor frame, a CO2 laser, a YAG laser, an indicating He-Ne laser, a spreading beam telescope and a mirror which are disposed on an upper platform of the floor frame. A CO2 laser focusing device and a YAG laser focusing device are suspended from the upper table. A two-dimensional operating table is installed under the laser focusing device. A water-cooling device, a laser power box and a computer are disposed beside the floor frame. The CO2 laser is focused on the glass surface to make it cracked and to achieve plane-engraving. The focusing lens group of the YAG laser focusing device is moved up-and-downwardly, so that the point damaged inside the glass forms a three-dimensional pattern to achieve inner-engraving.

Description

加工玻璃表面和玻璃体内的激光雕刻机 本发明的技术领域  Laser engraving machine for processing glass surface and glass body TECHNICAL FIELD OF THE INVENTION
本发明涉及激光器， 特别涉及一种加工玻璃表面和玻璃体内的激光雕刻机。 本发明的技术背景  The invention relates to a laser, in particular to a laser engraving machine for processing a glass surface and a glass body. Technical background of the invention
用 co2激光加工玻璃， 如切割、 打孔、 标记在实践中已为众所周知。 这是因 为玻璃能吸收 C02激光器 80 % - 90 %的红外光，由于激光波长为 Ι μιη时吸收可 忽略， 因此根据传统观念， 利用 Nd:YAG 激光束很难加工玻璃， 同时也知道， Nd:YAG激光束在强度 I > 1 GW / cm2时由于非线性效应， 也能被透明玻璃吸收， 但仅限于理论解释。 Co 2 laser processing of glass, such as cutting, punching, marking, is well known in practice. This is because glass can absorb 80%-90% of infrared light from a CO 2 laser. Because the absorption is negligible at a laser wavelength of 1 μm, according to traditional concepts, it is difficult to process glass with a Nd : YAG laser beam. It is also known that Nd : YAG laser beam can also be absorbed by transparent glass due to nonlinear effects when the intensity I> 1 GW / cm 2 , but it is limited to theoretical explanation.
现有的激光雕刻机只能对玻璃表面进行二维雕刻， 而不能对玻璃体内和玻璃 表面进行三维雕刻或打标记， 加工效率较低。 本发明的简要说明  The existing laser engraving machine can only engrav two-dimensionally the glass surface, but cannot three-dimensionally engrave or mark the glass body and the glass surface, and the processing efficiency is low. Brief description of the invention
本发明的目的是提供一种加工玻璃表面和玻璃体内的激光雕刻机， 它能对玻 璃表面和玻璃体内进行二维和三维雕刻或打标记， 提高了加工效率。  An object of the present invention is to provide a laser engraving machine for processing glass surfaces and glass bodies, which can perform two-dimensional and three-dimensional engraving or marking on glass surfaces and glass bodies, thereby improving processing efficiency.
本发明所述的一种加工玻璃表面和玻璃体内的激光雕刻机包括装有上台面的 落地式机架， 在上台面上设置的 C02激光器， 指示 He-Ne激光器、 扩束望远镜以 及用于折反激光的激光反射镜， 在落地式机架上台面上通过支架吊装的 C02激光 聚焦装置， 在落地式机架内安装的步进电机驱动电源连同步进电机， 通过水管与 激光器连接的水冷装置， 通过电线与激光器连接的激光电源箱， 通过屏蔽线与激 光电源和步进电机驱动电源相连的计算机， 以及在激光聚焦装置正下方安装的二 维工作平台， 激光聚焦于玻璃表面引起玻璃表面龟裂破坏而完成平面雕刻； 它还 包括在落地式机架上台面上设置的 YAG激光器， 以及在上台面上通过螺母丝杆 吊装的 YAG激光聚焦装置；所述 YAG激光聚焦装置装有二个通过连杆连接的金 属筒， 在金属筒内装有聚焦透镜组， 由步进电机控制聚焦透镜组上下运动， 使玻 璃体内激光损伤点组成立体图案而完成体内雕刻。 The laser engraving machine for processing glass surface and glass body according to the present invention includes a floor-mounted rack equipped with an upper table, a CO 2 laser set on the upper table, a pointing He-Ne laser, a beam expanding telescope, and a The laser reflecting mirror of the reflex laser, the C0 2 laser focusing device hoisted by the bracket on the floor of the floor-mounted rack, the stepping motor driving power installed in the floor-mounted rack together with the stepping motor, and the water pipe connected to the laser Water-cooled device, laser power box connected to the laser by wires, computer connected to the laser power and stepper motor drive power through shielded wires, and a two-dimensional work platform installed directly under the laser focusing device. The laser focus on the glass surface causes the glass The surface is cracked and broken to complete the plane engraving; it also includes a YAG laser set on the table top of the floor-standing rack, and a YAG laser focusing device hoisted by a nut screw on the top table; the YAG laser focusing device is equipped with two A metal cylinder connected by a connecting rod, a focusing lens group is installed in the metal cylinder and controlled by a stepping motor Vertical movement of the focusing lens group, so that the body of the laser spot damage the glass composition is completed three-dimensional pattern engraved in vivo.
本发明通过激光与计算机数控技术结合， 操作采用菜单式输入， 可用于玻璃、 木板、 塑料等材料表面和体内雕刻， 可用于制作商标、 工艺礼品和玻璃内的防伪 标志， 还可用于金属打孔和非金属切割等加工， 使用方便， 运行完全可靠， 在工 业领域具有广泛的应用前景。 附图的简要说明  The present invention combines laser and computer numerical control technology. The operation uses menu-type input. It can be used for engraving on the surface and body of glass, wood, plastic and other materials. It can also be used for making trademarks, craft gifts and anti-counterfeiting signs in glass. And non-metal cutting and other processing, easy to use, completely reliable operation, has broad application prospects in the industrial field. Brief description of the drawings
下面结合附图对本发明作详细说明。  The present invention is described in detail below with reference to the drawings.
图 1是一种加工玻璃表面和玻璃体内的激光雕刻机的主视结构示意图。 确 认本 图 2是上述激光雕刻机的上台面俯视结构示意图。 FIG. 1 is a schematic view of a front view of a laser engraving machine for processing a glass surface and a glass body. Confirm this FIG. 2 is a schematic structural plan view of an upper table of the laser engraving machine.
图 3是上述激光雕刻机的激光聚焦装置结构示意图。  FIG. 3 is a schematic structural diagram of a laser focusing device of the laser engraving machine.
图 4是上述激光雕刻机中的凹凸虚共焦型非稳腔结构 YAG激光器结构示意 图。 本发明的详细说明  Fig. 4 is a schematic diagram of the structure of a concave-convex virtual confocal type non-stable cavity YAG laser in the above laser engraving machine. Detailed description of the invention
参看图 1至图 3 , —种加工玻璃表面和玻璃体内的激光雕刻机有一个落地式 机架 1 ,其上台面 2上设置 C02激光器 3 、 YAG激光器 4、指示 He-Ne激光器 5 、 扩束望远镜 6、 以及用于折反激光的激光反射镜 7。 在落地式机架 1上台面 2上 吊装激光聚焦装置 8。 激光聚焦装置 8包括一通过支架 9吊装的 C02激光聚焦装 置 10和一通过螺母丝杆 11吊装的 YAG激光聚焦装置 12。 在激光聚焦装置 8正 下方安装二维工作平台 13 , 它是 X - Y工作平台。 Referring to FIGS. 1 to 3, a laser engraving machine for processing glass surfaces and glass bodies has a floor-standing frame 1, and a C0 2 laser 3, a YAG laser 4, an instruction He-Ne laser 5, and Beam telescope 6 and laser mirror 7 for refracting laser light. A laser focusing device 8 is hoisted on the floor 2 of the floor-mounted frame 1. The laser focusing device 8 includes a CO 2 laser focusing device 10 hoisted through a bracket 9 and a YAG laser focusing device 12 hoisted through a nut screw 11. A two-dimensional working platform 13 is installed directly below the laser focusing device 8, which is an X-Y working platform.
在落地式机架 1 内安装步进电机驱动电源 14连同步进机电 15。 在落地式机 架 1旁安装水冷装置 16、 激光电源箱 17和计算机 18 , 水冷装置 16通过水管 19 与激光器连接， 激光电源箱 17通过电线 20与激光器连接， 计算机 18通过屏蔽 线 21与激光电源和步进电机驱动电源相连。  A stepping motor driving power source 14 is installed in the floor-standing frame 1 together with the stepping motor 15. A water cooling device 16, a laser power box 17, and a computer 18 are installed beside the floor-standing rack 1. The water cooling device 16 is connected to the laser through a water pipe 19, the laser power box 17 is connected to the laser through a wire 20, and the computer 18 is connected to the laser power through a shielded wire 21 Connected to stepping motor drive power.
YAG激光聚焦装置 12装有二个通过连杆 22连接的金属筒 23 , 在金属筒 23 内各装有聚焦透镜组 24 , 由步进电机 15控制聚焦透镜组 24上下运动。  The YAG laser focusing device 12 is equipped with two metal cylinders 23 connected by a connecting rod 22, and each of the metal cylinders 23 is equipped with a focusing lens group 24. The stepping motor 15 controls the focusing lens group 24 to move up and down.
YAG激光器 4是凹凸虚共焦型非稳腔结构， 它考虑到热透镜引起的激光谐振 腔参数变化， 由激光凹面反射镜 25、 激光凸面反射镜 26 、 YAG激光棒 27、 氙 灯 28、 中间带有小孔的激光输出镜 29以及调 Q晶体 30组成。 YAG laser 4 is a concave-convex virtual confocal non-stable cavity structure. It takes into account the changes in the parameters of the laser cavity caused by the thermal lens. The laser concave mirror 2 5, the laser convex mirror 2 6, the YAG laser rod 27, the xenon lamp 28, It consists of a laser output mirror 29 with a small hole in the middle and a Q-switched crystal 30.
YAG激光器 4还可以是平凸型非稳腔结构。  The YAG laser 4 may also be a plano-convex unstable cavity structure.
本发明的工作过程如下：  The working process of the present invention is as follows:
计算机 18控制 YAG激光器触发， 产生波长为 1 ·06μπι的激光， 通过扩束望远 镜 6 扩束准直，然后通过激光反射镜 7和 YAG激光聚集装置 12使激光聚集于玻 璃体内， 引起损伤， 损伤点呈炸裂的小白点， 同时计算机 18控制二维工作平台 13和 YAG激光聚集装置 12中的聚集透镜组 24作三维运动， 从而使玻璃体内激 光损伤点组成复杂的立体图案。 The computer 18 controls the YAG laser to trigger to generate a laser with a wavelength of 1.06 μm. The beam is expanded and collimated by the beam expanding telescope 6, and then the laser is collected in the glass via the laser mirror 7 and the YAG laser focusing device 12, causing damage and damage points. as a white point of the burst, while the computer 18 controls the work platform 13 and the two-dimensional aggregation of a YAG laser apparatus 24 for three-dimensional movement of focus lens group 12, so that the glass body of the laser spot damage complex three-dimensional pattern.
计算机 18控制 C02激光器 3触发， 产生波长为 10·6μηι的激光， 通过激光反 射镜 7和 C02激光聚集装置 10使激光聚焦于玻璃表面引起龟裂破坏， 同时计算 机 18控制二维工作平台 13 , 从而完成平面雕刻。 The computer 18 controls the C0 2 laser 3 to be triggered to generate a laser with a wavelength of 10.6 μm. The laser mirror 7 and the C0 2 laser focusing device 10 focus the laser on the glass surface to cause cracking and damage. At the same time, the computer 18 controls the two-dimensional working platform 13 To complete the plane engraving.
在图 2中所示的 CO2激光器 2为封闭式激光管， 输出波长为 10.6μηι , 输出模 式为低阶模， 输出功率 30 - 50W , 重复频率 1000 - 2000Hz , C02激光聚焦透 镜采用球面 ZnSe透镜。 The CO 2 laser 2 shown in FIG. 2 is a closed-type laser tube with an output wavelength of 10.6 μηι, an output mode of low-order mode, an output power of 30-50W, a repetition frequency of 1000-2000Hz, and a C0 2 laser focusing lens using spherical ZnSe. lens.
在图 4中所示的 YAG激光器 4谐振腔采用凹凸虚共焦非稳腔结构， 利用激凹 凸虚的反射镜 25 、―激光凸面反射镜 26和中间带有小孔的激光输出镜 29形成正 分支共焦非稳腔， 晶体 30用于调 Q , 激光输出为环形， 发散角小于 1 毫弧度。 这样的光束特性既可以减小自聚焦引起的针状延伸， 又可得到很小的熔融点。 The resonant cavity of the YAG laser 4 shown in FIG. 4 uses a concave-convex virtual confocal unstable cavity structure. A positive concave-convex mirror 25, a laser convex mirror 26, and a laser output mirror 29 with a small hole in the middle are used to form a positive The branch confocal unstable cavity, the crystal 30 is used for Q-switching, the laser output is ring-shaped, and the divergence angle is less than 1 milliradian. Such beam characteristics can not only reduce the needle-like extension caused by self-focusing, but also obtain a small melting point.
YAG激光聚焦透镜组 24由步进电机 15控制上下运动， 使激光焦点在玻璃体 内上下运动， 完成三维运动。 由此省去了制作三维工作平台的难度和费用， 而且 使雕刻机结构简单合理。  The YAG laser focusing lens group 24 is controlled by the stepping motor 15 to move up and down, so that the laser focus moves up and down in the glass body to complete three-dimensional movement. This eliminates the difficulty and cost of making a three-dimensional work platform, and makes the structure of the engraving machine simple and reasonable.
激光电源 17包括 YAG激光电源和 C02激光电源两部分， YAG激光电源可采 用开关电源和直流充电电源， 工作电压 500 - 1200V , 充电精度小于千分之五。 激光触发 TTL电平， 需光电隔离。 C02激光电源采用高频开关电源， 可供 30 - 50W激光输出， 重复频率 1 - 2KC , 激光触发 TTL电平， 需光电隔离。 Laser power supply 17 includes two parts YAG laser power supply and the C0 2 laser, YAG laser and the power supply switch can be DC charging power supply, the operating voltage 500 - 1200V, the charging accuracy of less than five thousandths. The laser triggers the TTL level and requires optical isolation. C0 2 laser power supply uses high-frequency switching power supply, which can provide 30-50W laser output, repetition frequency 1-2KC, laser trigger TTL level, and requires photoelectric isolation.
本发明实施例中的二维工作平台 13 采用滚珠丝杠传动， XY 行程大于 200mm , 定位精度小于 3μη , 重复精度小于 Ι Ομπι , 原点定位精度小于 ΙΟμπι 。  The two-dimensional working platform 13 in the embodiment of the present invention uses a ball screw drive, an XY stroke is greater than 200 mm, a positioning accuracy is less than 3 μη, a repeatability accuracy is less than 10 μm, and an origin positioning accuracy is less than 10 μm.

Claims

权利要求书 Claim
1 · 一种加工玻璃表面和玻璃体内的激光雕刻机， 它包括装有上台面的落地式 机架， 在上台面上设置的 C02激光器， 指示 He-Ne激光器、 扩束望远镜以及用于 折反激光的激光反射镜， 在落地式机架上台面上通过支架吊装的 CO2激光聚焦装 置， 在落地式机架内安装的步进电机驱动电源连同步进电机， 通过水管与激光器 连接的水冷装置， 通过电线与激光器连接的激光电源箱， 通过屏蔽线与激光电源 和步进电机驱动电源相连的计算机， 以及在激光聚焦装置正下方安装的二维工作 平台， 激光聚焦于玻璃表面引起玻璃表面龟裂破坏而完成平面雕刻， 其特征在 于， 它还包括在落地式机架上台面上设置的 YAG激光器， 以及在上台面上通过 螺母丝杆吊装的 YAG激光聚焦装置；所述 YAG激光聚焦装置装有二个通过连杆 连接的金属筒， 在金属筒内装有聚焦透镜组， 由步进电机控制聚焦透镜组上下运 动， 使玻璃体内激光损伤点组成立体图案而完成体内.雕刻。 1. A laser engraving machine for processing glass surfaces and glass bodies, which includes a floor-mounted rack equipped with an upper table, a CO 2 laser set on the upper table, an instruction He-Ne laser, a beam expanding telescope, and a Anti-laser laser mirror, CO 2 laser focusing device hoisted by a bracket on the floor of the floor-mounted rack, stepper motor drive power installed in the floor-mounted rack together with the stepper motor, and water-cooled water pipe connected to the laser The device, a laser power box connected to the laser through a wire, a computer connected to the laser power and stepper motor drive power through a shielded line, and a two-dimensional work platform installed directly under the laser focusing device. The laser focus on the glass surface causes the glass surface The plane engraving is completed by cracking and breaking, and it is characterized in that it also includes a YAG laser set on the table top of the floor-standing frame, and a YAG laser focusing device hoisted by a nut screw on the top table; the YAG laser focusing device Equipped with two metal cylinders connected by a connecting rod, and a focusing lens group is installed in the metal cylinder. The motor controls the focus lens group to move up and down, so that the laser damage points in the glass body form a three-dimensional pattern to complete the body. Carving.
2. 根据权利要求 1所述的加工玻璃表面和玻璃体内的激光雕刻机， 其特征在 于， 所述 YAG激光器是凹凸虚共焦型非稳腔结构。 2. The laser engraving machine for processing a glass surface and a glass body according to claim 1, wherein the YAG laser has a concave-convex virtual confocal non-stable cavity structure.
3. 根据权利要求 1所述的加工玻璃表面和玻璃体内的激光雕刻机， 其特征在 于， 所述 YAG激光器是平凸型非稳腔结构。  3. The laser engraving machine for processing a glass surface and a glass body according to claim 1, wherein the YAG laser is a plano-convex unstable cavity structure.
PCT/CN1998/000100 1997-06-27 1998-06-25 Laser engraving machine for processing surface and inner of glass WO1999000215A1 (en)

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CN97234928U CN2307790Y (en) 1997-06-27 1997-06-27 Laser carving machine for processing glass surface and side of glass

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CN107398638A (en) * 2017-09-19 2017-11-28 河南省中原华工激光工程有限公司 The specialized nc machine tool and processing method of U-shaped laser surface microscopic carvings checkered cylinder jacket

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KR20010005978A (en) 2001-01-15

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