CN107486640A - It is a kind of to improve hole taper and the laser drilling device and method of inwall quality - Google Patents

It is a kind of to improve hole taper and the laser drilling device and method of inwall quality Download PDF

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Publication number
CN107486640A
CN107486640A CN201710732697.5A CN201710732697A CN107486640A CN 107486640 A CN107486640 A CN 107486640A CN 201710732697 A CN201710732697 A CN 201710732697A CN 107486640 A CN107486640 A CN 107486640A
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China
Prior art keywords
laser
directions
workpiece
hole
air
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Granted
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CN201710732697.5A
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Chinese (zh)
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CN107486640B (en
Inventor
任乃飞
石春辉
王亮
王后孝
夏凯波
王琪琪
林卿
薛宁
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Jiangsu University
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Jiangsu University
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • B23K26/382Removing material by boring or cutting by boring
    • B23K26/384Removing material by boring or cutting by boring of specially shaped holes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0823Devices involving rotation of the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/083Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0869Devices involving movement of the laser head in at least one axial direction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/146Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B23K37/0426Fixtures for other work
    • B23K37/0435Clamps
    • B23K37/0443Jigs

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)

Abstract

Improve hole taper and the laser drilling device and method of inwall quality the invention discloses a kind of, its method is that x direction of the workpiece around hole after first time laser boring is rotated into 180 ° by rotatable clamp, so that workpiece is just under water and does not change x, y of aperture coordinate, induced with laser cavitation technique is recycled to carry out the process of second of laser boring;A kind of improvement hole taper and the laser drilling device of inwall quality, including power supply box, uncovered cuboid container, laser head, light pipe, ccd video camera, laser, z directions travel mechanism, stationary fixture device, x y mobile platforms, rotatable clamp device are designed in addition;The present invention is coupled laser with punching in water in atmosphere, secondary punching is completed to improve hole taper by overturning workpiece, laser drilling is combined with induced with laser cavitation technique in second of drill process, utilizes shock wave Strengthening Hole inwall caused by cavitation.

Description

It is a kind of to improve hole taper and the laser drilling device and method of inwall quality
Technical field
The present invention relates to laser drilling field, and in particular to is beaten to a kind of laser for improving hole taper and inwall quality Aperture apparatus and method.
Background technology
At present laser drilling have been applied to auto industry, shipbuilding, Aero-Space, instrument and meter and Among all conglomeraties such as medical technology.Compared with the method for tradition machinery drilling, laser drilling have precision is high, speed is fast, Efficiency high, it is good in economic efficiency, without cutter loss, aspect ratio is big the advantages that, have become Laser Processing main application fields it One.Induced with laser cavitation technique is that water is ionized, and will form plasma chamber by inside Laser Focusing to water with lens, Plasma continues strong absorption laser energy, and cavity expands rapidly, forms vacuole, bubble collapse generates shock wave.
But punching on high-accuracy instrument is directed to, it is necessary to get the group hole of high quality, such as aero-turbine leaf Film cooling holes on piece, the taper and inwall quality requirement of device to hole are very high, and taper too conference has a strong impact on the gas on turbo blade The flow rate of air in fenestra, reduce the cooling performance of air film hole.
For the above situation, Chinese invention patent CN201610350992 proposes to place reflection unit and anti-below workpiece Governor motion setting is penetrated, laser beam is fallen on the plane of reflection of the reflection unit after passing through through hole, anti-through the plane of reflection Hole week and the inwall of the through hole are fallen on after penetrating, taper is eliminated with this, still, laser beam passes through after condenser lens, focus The energy density of position is maximum, and the laser beam in the space up and down of focus is that divergent state is presented, so when laser beam reaches lower section Reflection unit plane of reflection mirror on when laser beam energy density very little, then make by the reflection of plane of reflection mirror Possibly can not eliminate material vaporization with the laser beam for reaching workpiece, if the energy of laser beam can also make workpiece, vaporization removes, Ablation removal amount therein can not also ensure that the material slag ejected in addition below aperture can fall on plane of reflection mirror, Have a negative impact to device.Chinese invention patent CN201310284493 proposes that chemistry occurs using chemical solution and aluminium alloy Reaction is to eliminate through hole taper, so as to obtain the through hole of zero draft.But the proportioning of the chemical solution is just for aluminium alloy, its His material needs to match chemical solution again, and cumbersome and corrosion process wastes time, and chemical reaction process is in device to hole in addition All parts of wall are corroded, and are not unnecessary aluminum alloy materials in an etch pit, so taper improves possible unobvious.
The content of the invention
The present invention's is directed to above-mentioned the deficiencies in the prior art, proposes a kind of laser boring for improving hole taper and inwall quality Method, this method are first to allow workpiece to form through hole in the presence of laser beam in atmosphere, and now through hole is tapered, then utilizes Rotatable clamp device rotates 180 ° around the x-axis of aperture, because now workpiece is in the uncovered cuboid container for having water, profit Second is carried out with induced with laser cavitation technique to punch, present lower opening rotates to above, heat caused by second of pulse laser It is delivered to around hole, improves hole taper so as to remove the material of redundance, while z directions travel mechanism is with slow speed To lower feeding, the laser boring that focus moves down is done, the focal point of pulse laser is formed empty in the water of hole central axis Bubble, bubble collapse generate shock wave, and on the inwall of shock wave to hole, device to hole inwall plays invigoration effect.This hair simultaneously It is bright to additionally provide a kind of improvement hole taper and the laser drilling device of inwall quality.
Technical scheme is as follows:
It is a kind of to improve hole taper and the laser drilling device of inwall quality, including power supply box, uncovered cuboid container, laser Head, light pipe, ccd video camera, laser, z directions travel mechanism, stationary fixture device, x-y mobile platforms and rotatable clamp Device;
The power supply box is arranged on the left side vertical face of lathe base, and x-y shiftings are provided with the base upper surface of lathe Moving platform;Be provided with the horizontal plane of L-type workbench on the x-y mobile platforms uncovered cuboid container, workbench it is perpendicular Face directly and rotatable clamp device is installed;The stationary fixture device is directly installed on the rear vertical of lathe by connecting plate On face;Z directions travel mechanism is installed in the upright slide rail opened up on the rear vertical face of the lathe base;The z directions Laser is installed in travel mechanism;The laser is connected by light pipe with laser head;The surface of the laser head On ccd video camera is installed;
The laser head includes plane mirror and condenser lens;The laser beam of the laser transmitting is shone by light pipe It is mapped on the reflective plane mirror of 45 ° of settings, is got to after reflective plane mirror is reflexed on condenser lens and focused on workpiece;
The rotatable clamp device includes the second control unit, motor, rotary shaft, the second air-actuated jaw, rolling Bearing;The motor is fixed on the vertical side plate of L-type workbench, and rotary shaft is connected through rolling bearing with motor Connect, rotary shaft is designed with the second air-actuated jaw up and down, the second control unit be used for controlling motor rotation and two second The clamping and release of air-actuated jaw;
The stationary fixture device include the first control unit, the first air-actuated jaw, connecting rod, connecting plate, described first Control unit is used for controlling the first air-actuated jaw of connecting rod installation symmetrical above and below to carry out clamping and dismounting to workpiece;
The x-y mobile work platforms include L-type workbench, the guide rail in y directions, leading screw support frame, shaft coupling, the first servo Motor, the first motor support block, the guide rail supporting frame in y directions, the leading screw in y directions, the bottom plate in x directions, the guide supporting in x directions Frame, the second servomotor, the guide rail in x directions, the second motor support block, the leading screw in x directions and the bottom plate in y directions;
The bottom of the x-y mobile work platforms is the bottom plate in x directions, and the silk in x directions is provided with the bottom plate in x directions Thick stick, the leading screw in x directions are connected by shaft coupling with the second servomotor, the second servomotor by the second motor support block come Support, parallel to the guide rail for being arranged with x directions at left and right sides of the leading screw in x directions in parallel, y side on the plate upper surface in x directions To bottom plate lower surface can be in the x-direction guide rail slide, the plate upper surface in y directions passes through leading screw support frame and supports y directions Leading screw, the leading screw in the y directions are connected by shaft coupling with the first servomotor, and the first servomotor passes through the first motor branch Block supports, parallel to being provided with y side in the left and right sides parallel direction of the leading screw in y directions on the upper surface of the bottom plate in y directions To guide rail, be connected with workbench on the guide rail in y directions.
Further, the stationary fixture device is directly to be connected by connecting plate with bed piece, it is impossible to it is mobile, only Clamping workpiece.
Further, the rotatable clamp device is to be arranged on x-y mobile platforms by the vertical side plate of L-type workbench On, realize movement of the rotatable clamp device in x-y directions.
Further, what is filled inside the uncovered cuboid container is water, and the height of water is parallel with the upper surface of workpiece.
Further, the laser, light pipe, laser head and ccd video camera can be with z directions travel mechanisms up and down It is mobile.
Further, the height of the second air-actuated jaw on the rotatable clamp device is different, when motor drives When rotary shaft rotates 180 °, height of the workpiece in z directions is different, but needs hole center x, the y-coordinate of secondary punching not to have Change.
Further, the second air-actuated jaw on the rotatable clamp device be on rotary shaft axis it is symmetrical above and below 's.
Further, second control unit and the first control unit are connected with digital control computer.
Based on a kind of method for improving hole taper and the laser drilling device of inwall quality, comprise the following steps:
Step 1:By workpiece (3.3) clamping on the first air-actuated jaw of fixed workpiece-holder device, now workpiece is to put In air;
Step 2:Start laser boring, open the pumping of laser, z directions travel mechanism starts downward with certain speed Feeding, make its focus just in workpiece surface apart from the position of workpiece when laser head arrives, i.e., defocusing amount for 0 when, laser is sent Pulse laser, for laser beam after plane of reflection mirror and condenser lens, light beam focuses on workpiece surface, with the increasing of pulse number Add, until the hole on workpiece is got through, the through hole is hole A;
Step 3:By in hole A of the rotation axis of x-y mobile platform rotatable workpiece grip devices on workpiece The underface in heart coordinate x directions, i.e. y-coordinate is identical, rotatable workpiece grip device by the second air-actuated jaw by Workpiece clamping, The first air-actuated jaw of fixed workpiece-holder device is unclamped by the first control unit, driving electricity is controlled by the second control unit Machine causes workpiece to rotate 180 ° around the x directions of hole A coordinates, and now hole A x-y does not change, simply on z directions under workpiece An end movement is dropped, allows workpiece to be in uncovered cuboid container, now the water surface of uncovered cuboid container is just upper with workpiece Flush, now hole A be filled with water;
Step 4:Laser boring is equally started again at, opens the pumping of laser, z directions travel mechanism starts with certain Speed is to lower feeding, when laser head makes its focus when that is, defocusing amount is 0, swash in workpiece surface just to apart from the position of workpiece Light device sends pulse laser, and for laser beam after plane of reflection mirror and condenser lens, light beam focuses on the water surface at hole A centers, Now z directions travel mechanism starts with slow speed to lower feeding, and the amount of feeding is the thickness of workpiece.
The present invention tool beneficial effect be:
First, laser is irradiated in the water at hole center in the present invention, around caused heat transfer to hole, due to first time arteries and veins Rush laser boring and make it that lower Porous materials removal is inconsistent with upper hole, so that forming tapered hole, present lower opening rotates to Face, the energy of second of pulse laser is absorbed, improves hole taper so as to remove the material of redundance.
2nd, the present invention can realize that optional position is punched on workpiece, is adapted to group's hole machined by x-y mobile platforms.
3rd, the present invention in z directions travel mechanism with slow speed to lower feeding, do the pulse laser that focus moves down Punching, for the focal point of pulse laser in the water of hole central axis, water is breakdown, and luminous plasma is formed in breakdown area Body cavity body, plasma continue strong absorption laser energy, and cavity expands rapidly, forms vacuole, and bubble collapse generates shock wave, For shock wave on the inwall of hole, device to hole inwall plays invigoration effect.
4th, workpiece takes air-actuated jaw to carry out clamping in the present invention, easy to operate, can greatly reduce labor intensity, and And chucking power is stablized adjustable, pneumatic reaction speed is fast, thus can shorten non-cutting time in process of production, improves work production Rate.
Brief description of the drawings
Fig. 1 is the structural representation of workpiece laser drilling device in atmosphere;
Fig. 2 be 180 ° of workpiece turning after in water laser drilling device structural representation;
Fig. 3 is the structural representation of x-y mobile work platforms;
Fig. 4 is the structural representation of rotatable clamp device;
Fig. 5 is the structural representation of stationary fixture device;
Fig. 6 is the inside index path of laser head;
Reference is as follows:
1- power supply boxs, 2- uncovereds cuboid container, 3- laser heads, 4- light pipes, 5-CCD video cameras, 6- lasers, 7-z Direction travel mechanism, 8- stationary fixtures device, 9-x-y mobile platforms, 10- rotatable clamps device, 3.1 plane mirrors, 3.2- condenser lenses, 3.3- workpiece, the control units of 8.1- first, the air-actuated jaws of 8.2- first, 8.3- connecting rods, 8.4- connections Plate, 9.1-L types workbench, the guide rail in 9.2-y directions, 9.3- leading screws support frame, 9.4- shaft couplings, the servomotors of 9.5- first, The first motor supports of 9.6- block, the guide rail supporting frame in 9.7-y directions, the leading screw in 9.8-y directions, 9.9-x directions bottom plate, Guide rail supporting frame, the servomotors of 9.11- second, the guide rail in 9.12-x directions, the motor supports of 9.13- second in 9.10-x directions Block, the leading screw in 9.14-x directions, the bottom plate in 9.15-y directions, the control units of 10.1- second, 10.2- motors, 10.3- rotations Rotating shaft, the air-actuated jaws of 10.4- second, 10.5- rolling bearings.
Embodiment
In order to preferably illustrate the implementation detail of the present invention, technical scheme is made below in conjunction with the accompanying drawings further Explanation.
It is a kind of to improve hole taper and the laser drilling device of inwall quality, it is characterised in that including power supply with reference to accompanying drawing 1 Case 1, uncovered cuboid container 2, laser head 3, light pipe 4, ccd video camera 5, laser 6, z directions travel mechanism 7, geometrical clamp Have device 8, x-y mobile platforms 9, rotatable clamp device 10;
The power supply box 1 is arranged on the left side vertical face of lathe base, and x-y shiftings are provided with the base upper surface of lathe Moving platform 9;Uncovered cuboid container 2 and rotatable clamp device 10 are installed on the x-y mobile platforms 9;The geometrical clamp It is to be directly installed on by connecting plate 8.4 on the lathe bed of lathe to have device 8;Opened up on the rear vertical face of the lathe base Z directions travel mechanism 7 is installed in upright slide rail;Laser 6 is installed in the z directions travel mechanism 7;The laser 6 It is connected by light pipe 4 with laser head 3;Ccd video camera 5 is installed on directly over the 3 of the laser head;
It is a kind of to improve hole taper and the laser drilling device of inwall quality with reference to accompanying drawing 2, it is now rotatable clamp device The state of device after 10 180 ° of rotations, workpiece 3.3 is in the water of uncovered cuboid container 2, and the upper surface of workpiece 3.3 just with The water surface is concordant, and this state carries out second of punching of laser.
With reference to accompanying drawing 3, the x-y mobile work platforms include workbench 9.1, the guide rail 9.2 in y directions, leading screw support frame 9.3rd, shaft coupling 9.4, the first servomotor 9.5, the first motor support block 9.6, the guide rail supporting frame 9.7 in y directions, y directions Leading screw 9.8, the bottom plate 9.9 in x directions, the guide rail supporting frame 9.10 in x directions, the second servomotor 9.11, the guide rail in x directions 9.12nd, the second motor support block 9.13, the leading screw 9.14 in x directions, the bottom plate 9.15 in y directions;Turned by motor driven shaft coupling Dynamic, shaft coupling drives leading screw to rotate, it is achieved thereby that the movement of workbench in x-y direction.
With reference to accompanying drawing 4, the rotatable clamp device 10 includes the second control unit 10.1, motor 10.2, rotation Axle 10.3, the second air-actuated jaw 10.4, rolling bearing 10.5;The motor 10.2 is fixed on the vertical of L-type workbench 9.1 On side plate, rotary shaft 10.3 is connected through rolling bearing 10.5 with motor 10.2, and one is respectively equipped with rotary shaft 10.3 On two the second air-actuated jaws 10.4 once, by the second control unit 10.1 can control motor 10.2 rotation and The clamping and release of two the second air-actuated jaws 10.4;
With reference to accompanying drawing 5, the stationary fixture device 8 includes the first control unit 8.1, the first air-actuated jaw 8.2, connecting rod 8.3rd, connecting plate 8.4, two the first air-actuated jaws 8.2 in connecting rod 8.3 can be controlled to work by the first control unit 8.1 Part 3.3 carries out clamping and dismounting;
With reference to accompanying drawing 6, the laser 3 includes plane mirror 3.1 and condenser lens 3.2;What the laser 6 was launched swashs Light beam is irradiated to by light pipe 4 on the plane mirror 3.1 of 45 ° of settings, and condenser lens is reflexed to through plane mirror 3.1 Got to after being focused on 3.2 on workpiece 3.3;
The fixed workpiece-holder device 8 is directly to be connected by connecting plate 8.4 with bed piece, it is impossible to it is mobile, only Can clamping workpiece 3.3.
The rotatable clamp device 10 is to be arranged on by 9.1 vertical side plate of L-type workbench on x-y mobile platforms 9, real Movement of the existing rotatable clamp device 10 in x-y directions.
The inside of uncovered cuboid container 2 dress is water, and the height of water is parallel with the upper surface of workpiece 3.3.
The laser 6, light pipe 4, laser head 3 and ccd video camera 5 can be with moving down in z directions travel mechanism 7 It is dynamic.
The height of the second air-actuated jaw 10.4 on the rotatable clamp device 10 is different, when motor 10.2 drives When dynamic rotary shaft 10.3 rotates 180 °, height of the workpiece 3.3 in z directions is different, but needs hole center x, y of secondary punching Coordinate does not change.
The second air-actuated jaw 10.4 on the rotatable clamp device 10 is axis on rotary shaft 10.3 or so pair Claim.
Second control unit 10.1 is connected with the first control unit 8.1 with digital control computer.
Based on a kind of method for improving hole taper and the laser drilling device of inwall quality, comprise the following steps:
Step 1:By the clamping of workpiece 3.3 on the first air-actuated jaw 8.2 of stationary fixture device 8, now workpiece 3.3 is to put In air.
Step 2:Start laser boring, open laser 6 pumping, z directions travel mechanism 7 start with certain speed to Lower feeding, when laser head 3 makes its focus on the surface of workpiece 3.3 just to apart from the position of workpiece 3.3, i.e., defocusing amount is 0, swash Light device 6 sends pulse laser, and for laser beam after plane mirror 3.1 and condenser lens 3.2, light beam focuses on the table of workpiece 33. Face, with the increase of pulse number, until workpiece 3.3 is got through.
Step 3:By the rotation axis of the rotatable workpiece grip device 10 of x-y mobile platforms 9 in the through hole of workpiece 3.3 The underface in centre coordinate x directions, i.e. y-coordinate is identical, and rotatable workpiece grip device 10 will by the second air-actuated jaw 10.4 Workpiece 3.3 is clamped, and the first air-actuated jaw 8.2 of fixed workpiece-holder device 8 is unclamped by the first control unit 8.1, by the Two control units 10.1 control motor 10.2 causes workpiece 3.3 around the x directions of through hole coordinate to rotate 180 °, now through hole X-y does not change, and simply workpiece declines an end movement on z directions, allows workpiece 3.3 to be in uncovered cuboid container 2, this When container the water surface it is just concordant with the upper surface of workpiece 3.3, now through hole is filled with water.
Step 4:Laser boring is equally started again at, opens the pumping of laser 6, z directions travel mechanism 7 starts with certain Speed to lower feeding, when laser head 3 makes its focus on the surface of workpiece 3.3, i.e. defocusing amount just to apart from the position of workpiece 3.3 For 0 when, laser 6 sends pulse laser, and after plane mirror 3.1 and condenser lens 3.2, light beam focuses on logical laser beam The water surface at hole center, now z directions travel mechanism 7 start with slow speed to lower feeding, the amount of feeding is the thickness of workpiece.
The embodiment is preferred embodiment of the invention, but the present invention is not limited to above-mentioned embodiment, not Away from the present invention substantive content in the case of, those skilled in the art can make it is any it is conspicuously improved, replace Or modification belongs to protection scope of the present invention.

Claims (9)

1. a kind of improve hole taper and the laser drilling device of inwall quality, it is characterised in that is grown including power supply box (1), uncovered Cube container (2), laser head (3), light pipe (4), ccd video camera (5), laser (6), z directions travel mechanism (7), fixation Grip device (8), x-y mobile platforms (9) and rotatable clamp device (10);
The power supply box (1) is arranged on the left side vertical face of lathe base, and x-y movements are provided with the base upper surface of lathe Platform (9);Uncovered cuboid container is installed on the horizontal plane of L-type workbench (9.1) on the x-y mobile platforms (9) (2) rotatable clamp device (10), is installed on the vertical plane of workbench (9.1);The stationary fixture device (8) passes through connection Plate (8.4) is directly installed on the rear vertical face of lathe;The upright slide rail opened up on the rear vertical face of the lathe base Z directions travel mechanism (7) is inside installed;Laser (6) is installed on the z directions travel mechanism (7);The laser (6) It is connected by light pipe (4) with laser head (3);Ccd video camera (5) is installed on directly over (3) of the laser head;
The laser head (3) includes plane mirror (3.1) and condenser lens (3.2);The laser beam of laser (6) transmitting It is irradiated to by light pipe (4) on the reflective plane mirror (3.1) of 45 ° of settings, condenser lens is reflexed to through reflective plane mirror (3.1) (3.2) got to after being focused on on workpiece (3.3);
The rotatable clamp device (10) include the second control unit (10.1), motor (10.2), rotary shaft (10.3), Second air-actuated jaw (10.4), rolling bearing (10.5);The motor (10.2) is fixed on the perpendicular of L-type workbench (9.1) On front plate, rotary shaft (10.3) is connected through rolling bearing (10.5) with motor (10.2), in rotary shaft (10.3) Under be designed with the second air-actuated jaw (10.4), the second control unit (10.1) is used for controlling the rotation and two of motor (10.2) The clamping and release of individual second air-actuated jaw (10.4);
The stationary fixture device (8) includes the first control unit (8.1), the first air-actuated jaw (8.2), connecting rod (8.3), company Fishplate bar (8.4), first control unit (8.1) are used for controlling the first air-actuated jaw of connecting rod (8.3) installation symmetrical above and below (8.2) clamping and dismounting are carried out to workpiece (3.3);
The x-y mobile work platforms (9) include L-type workbench (9.1), the guide rail (9.2) in y directions, leading screw support frame (9.3), Shaft coupling (9.4), the first servomotor (9.5), the first motor support block (9.6), the guide rail supporting frame (9.7) in y directions, y side To leading screw (9.8), the bottom plate (9.9) in x directions, the guide rail supporting frame (9.10) in x directions, the second servomotor (9.11), x side To guide rail (9.12), the second motor support block (9.13), the leading screw (9.14) in x directions and the bottom plate (9.15) in y directions;
The bottom of the x-y mobile work platforms (9) is the bottom plate (9.9) in x directions, and x is provided with the bottom plate (9.9) in x directions The leading screw (9.14) in direction, the leading screw (9.14) in x directions are connected by shaft coupling (9.4) with the second servomotor (9.11), Second servomotor (9.11) is supported by the second motor support block (9.13), parallel on bottom plate (9.9) upper surface in x directions The guide rail (9.12) in x directions is arranged with parallel at left and right sides of the leading screw (9.14) in x directions, under the bottom plate (9.15) in y directions Surface can be in the x-direction guide rail (9.12) slide, bottom plate (9.15) upper surface in y directions passes through leading screw support frame (9.3) and supports y The leading screw (9.8) in direction, the leading screw (9.8) in the y directions are connected by shaft coupling (9.4) with the first servomotor (9.5), First servomotor (9.5) is supported by the first motor support block (9.6), parallel on the upper surface of the bottom plate (9.15) in y directions In the guide rail (9.2) that y directions are provided with the left and right sides parallel direction of the leading screw (9.8) in y directions, the guide rail (9.2) in y directions On be connected with workbench (9.1).
2. a kind of according to claim 1 improve hole taper and the laser drilling device of inwall quality, it is characterised in that described Stationary fixture device (8) is directly to be connected by connecting plate (8.4) with bed piece, it is impossible to mobile a, clamping workpiece (3.3)。
3. a kind of according to claim 1 improve hole taper and the laser drilling device of inwall quality, it is characterised in that described Rotatable clamp device (10) is to be arranged on by the vertical side plate of L-type workbench (9.1) on x-y mobile platforms (9), and realization can Movement of the rotation jig device (10) in x-y directions.
4. a kind of according to claim 1 improve hole taper and the laser drilling device of inwall quality, it is characterised in that described Dress is water inside uncovered cuboid container (2), and the height of water is parallel with the upper surface of workpiece (3.3).
5. a kind of according to claim 1 improve hole taper and the laser drilling device of inwall quality, it is characterised in that described Laser (6), light pipe (4), laser head (3) and ccd video camera (5) can move up and down with z directions travel mechanism (7).
6. a kind of according to claim 1 improve hole taper and the laser drilling device of inwall quality, it is characterised in that described The height of the second air-actuated jaw (10.4) on rotatable clamp device (10) is different, when motor (10.2) drives rotary shaft (10.3) when rotating 180 °, height of the workpiece (3.3) in z directions is different, but needs hole center x, the y-coordinate of secondary punching Do not change.
7. a kind of according to claim 6 improve hole taper and the laser drilling device of inwall quality, it is characterised in that described The second air-actuated jaw (10.4) on rotatable clamp device (10) be on rotary shaft (10.3) axis it is symmetrical above and below.
8. a kind of according to claim 1 improve hole taper and the laser drilling device of inwall quality, it is characterised in that described Second control unit (10.1) and the first control unit (8.1) are connected with digital control computer.
9. a kind of method of the laser drilling device according to claim 1 based on improvement hole taper and inwall quality, its It is characterised by, comprises the following steps:
Step 1:By workpiece (3.3) clamping on the first air-actuated jaw (8.2) of fixed workpiece-holder device (8), now workpiece (3.3) it is placed in air;
Step 2:Start laser boring, open laser (6) pumping, z directions travel mechanism (7) start with certain speed to Lower feeding, when laser head (3) makes its focus be in workpiece (3.3) surface, i.e. defocusing amount just to apart from the position of workpiece (3.3) When 0, laser (6) sends pulse laser, and after plane of reflection mirror (3.1) and condenser lens (3.2), light beam focuses on laser beam On workpiece (3.3) surface, with the increase of pulse number, until the hole on workpiece (3.3) is got through, the through hole is hole A;
Step 3:By the rotation axis of x-y mobile platforms (9) rotatable workpiece grip device (10) on workpiece (3.3) Hole A centre coordinate x directions underface, i.e. y-coordinate is identical, and rotatable workpiece grip device (10) passes through the second air-actuated jaw (10.4) workpiece (3.3) is clamped, it is pneumatic by the first of the first control unit (8.1) release fixed workpiece-holder device (8) Fixture (8.2), motor (10.2) workpiece (3.3) is controlled around the x side of hole A coordinates by the second control unit (10.1) To 180 ° of rotation, now hole A x-y does not change, and simply workpiece (3.3) declines an end movement on z directions, allows workpiece (3.3) it is in uncovered cuboid container (2), now the water surface of uncovered cuboid container (2) the just upper table with workpiece (3.3) Face is concordant, and now hole A is filled with water;
Step 4:Laser boring is equally started again at, opens the pumping of laser (6), z directions travel mechanism (7) starts with certain Speed to lower feeding, when laser head (3) makes its focus on workpiece (3.3) surface just to apart from the position of workpiece (3.3), i.e., Defocusing amount be 0 when, laser (6) sends pulse laser, laser beam after plane of reflection mirror (3.1) and condenser lens (3.2), Light beam focuses on the water surface at hole A centers, and now z directions travel mechanism (7) starts with slow speed to lower feeding, the amount of feeding For the thickness of workpiece (3.3).
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CN108381665A (en) * 2018-02-13 2018-08-10 李政远 A kind of water meter inner cavity inclined hole punch device
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CN109079347A (en) * 2018-08-28 2018-12-25 江苏大学 A kind of laser drilling device and method improving drilling quality based on vacuum environment
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CN110216369A (en) * 2018-03-02 2019-09-10 武汉华工激光工程有限责任公司 Laser processing equipment for surface
CN110280915A (en) * 2019-05-24 2019-09-27 江苏大学 A kind of laser drilling device and method improving drilling quality based on underwater punching
CN110446349A (en) * 2019-07-29 2019-11-12 华芯电子(天津)有限责任公司 A kind of core layer through-hole copper facing filling perforation processing method
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CN112317765A (en) * 2020-11-06 2021-02-05 山东创瑞激光科技有限公司 High-stability double-laser metal printing equipment
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CN113523613A (en) * 2020-04-29 2021-10-22 中国科学院宁波材料技术与工程研究所 Device and method for laser processing taper hole
CN114101914A (en) * 2021-11-23 2022-03-01 江苏大学 High-precision involute gear tooth surface microtexture laser processing method and device
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CN115091063A (en) * 2022-08-24 2022-09-23 绵阳新能智造科技有限公司 Femtosecond laser inner hole wall machining device

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CN110000465A (en) * 2017-12-28 2019-07-12 战马(北京)饮料有限公司 A method of forming text on beverage bottle
CN110000465B (en) * 2017-12-28 2021-04-27 战马(北京)饮料有限公司 Method for forming characters on beverage bottle
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CN115091063A (en) * 2022-08-24 2022-09-23 绵阳新能智造科技有限公司 Femtosecond laser inner hole wall machining device

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