CN115338533A - Scanning method for accurate and controllable track of femtosecond laser beam - Google Patents
Scanning method for accurate and controllable track of femtosecond laser beam Download PDFInfo
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- CN115338533A CN115338533A CN202210887116.6A CN202210887116A CN115338533A CN 115338533 A CN115338533 A CN 115338533A CN 202210887116 A CN202210887116 A CN 202210887116A CN 115338533 A CN115338533 A CN 115338533A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
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Abstract
The invention discloses a scanning method for accurate and controllable track of a femtosecond laser beam, which translates an incident beam of a research focusing lens, leads the translation direction to be opposite to the deflection direction of the beam, ensures that the translation distance is at least more than half of the diameter of the beam, ensures that the edge of the beam is more than zero degree with the axis of a hole in the light propagation direction, rotates around an optical axis and feeds layer by layer, and realizes the formation of an inverted cone hole; meanwhile, coordinated programming control is carried out in the X/Y/Z directions, process tests including power, focus position, scanning time and other factors influencing the taper are carried out, and the technical development of the high-precision control process of the hole-making taper is realized.
Description
[ technical field ] A method for producing a semiconductor device
The invention belongs to the technical field of femtosecond laser processing, and particularly relates to a scanning method for accurate and controllable trajectory of a femtosecond laser beam.
[ background ] A method for producing a semiconductor device
Since the advent of laser, the laser micro-nano processing technology has been one of the main means of micro-nano processing technology. The laser direct-writing micro-nano processing technology is to directly expose the surface of a material by using a laser beam with adjustable intensity so as to form a required micro-nano structure. Compared with the traditional long pulse laser, the femtosecond laser has small processing energy loss and high utilization rate. The femtosecond laser micro-nano processing provides a brand-new method for preparing a large-area micro-nano structure due to the characteristics of no pollution, no contact, low damage threshold, high processing precision, cold processing and the like, and the successful application of the method covers a plurality of fields of microelectronics, bionics, material chemistry and the like.
The traditional micro-hole processing technology mainly comprises the technologies of mechanical processing, electric spark, chemical corrosion, ultrasonic punching and the like, which have various characteristics but can not meet higher micro-hole processing requirements. In order to obtain the optimal oil injection atomization effect and improve the fuel combustion efficiency, part of automobile injection parts are required to be provided with spray holes with different hole type tapers.
Currently, there are related researches, for example, chinese patent application No. CN201910299942.7, a system for processing array micro-holes by femtosecond laser based on spatial light beam shaping, which utilizes a spatial light modulator SLM to shape a single femtosecond laser into a multi-beam array light field with specific spatial distribution by designing different phases, adjusts laser repetition frequency, laser beam waist radius, and laser pulse energy, and finally builds a light path through an optical device to focus the shaped femtosecond laser on the surface of a sample, thereby realizing high-quality, non-contact, high-efficiency, large-area array micro-hole processing on various materials, having high repeatability and flexibility.
In the micro-nano processing process, a single laser beam can be focused by a lens to manufacture a single micropore structure on a material by utilizing a laser direct writing technology, so that the preparation efficiency of a large-area micropore array is severely restricted. In addition, for the single laser beam focusing of linear polarization, the depth ratio of the processed micro-hole is very low.
At present, the oil spray hole is machined mostly by adopting an electric spark process, and part of the oil spray hole is machined by adopting a long pulse laser. A great deal of development and research work is carried out on related machining processes and equipment by a plurality of organizations at home and abroad, but the engineering application of the high-accuracy inverted cone spray hole machining needs to be further researched.
[ summary of the invention ]
The invention provides a scanning method for accurately and controllably scanning a femtosecond laser beam track, aiming at the defects that an electric spark process or a long pulse laser processing mode is mostly adopted for processing an oil spray hole in the prior art, both the two processing modes belong to hot melting processing, and burrs, residues and the like can be formed on the edge of the hole and the wall of the hole in the processing process.
The purpose of the invention is realized by the following technical scheme:
the inventor translates the incident beam of the focusing lens, makes the translation direction opposite to the deflection direction of the beam, and the translation distance at least greater than half of the beam diameter, ensures the edge of the beam to be greater than zero degree with the hole axis in the light propagation direction, rotates around the optical axis and feeds layer by layer, and realizes the formation of the inverted cone hole; meanwhile, coordinated programming control is carried out in the X/Y/Z directions, process tests including power, focus position, scanning time and other factors influencing the taper are carried out, and the technical development of the high-precision control process of the hole-making taper is realized.
Offset P of the light beam when changing with the rotation angle in the present invention:
processing the aperture r:
machining hole taper beta:
where f is the focal length of the focusing lens, θ 1 Is parallel to the flat plate and opposite to the horizontal directionAngle of inclination, θ 2 For deflecting wedge angle of optical wedge,
The relative rotation angles of the two optical wedges when the deflection optical wedge is 0 relative to the initial composite deflection angle, phi is the relative rotation angle of the two parallel flat plates relative to the minimum offset state, h represents the sum of the thicknesses of the two parallel flat plates, d is the diameter of a laser beam, and n represents the refractive indexes of the optical wedges and the flat plates.
The invention provides a femtosecond laser beam track accurate control scanning system, which comprises an industrial personal computer, a femtosecond laser, a cooperative control system, a laser control module, a beam deflection module, a beam translation module, a beam expander, a deflection light wedge group, a parallel flat plate group and parameter control modules such as scanning distribution, speed, laser power, conicity and the like; the beam expander comprises a concave lens and a first convex lens, the deflection optical wedge group comprises an upper deflection optical wedge and a lower deflection optical wedge, the parallel flat plate group comprises an upper flat plate of the parallel flat plate group and a lower flat plate of the parallel flat plate group, and the concave lens, the first convex lens, the total reflection prism, the upper deflection optical wedge, the lower deflection optical wedge, the upper flat plate of the parallel flat plate group, the lower flat plate of the parallel flat plate group and the focusing convex lens are sequentially arranged on an output light path of the femtosecond laser; the laser control module controls a femtosecond laser, the light beam deflection control module controls an upper deflection light wedge and a lower deflection light wedge of a deflection light wedge group, and the light beam translation control module controls an upper flat plate of a parallel flat plate group and a lower flat plate of the parallel flat plate group; the laser control module, the light beam deflection control module and the light beam translation control module are connected with the cooperative control system through data lines, and the cooperative control system is connected with the industrial personal computer through the data lines;
the light beam translation control module controls an upper flat plate of the parallel flat plate group and a lower flat plate of the parallel flat plate group, controls the light beam translation distance by controlling the deflection angle of the flat plates, can conveniently, quickly and accurately realize the rotation of light beams around an optical axis and the layer-by-layer feeding during high-speed rotation, and realizes the processing and forming of inverted cone holes;
the wedge angle of the upper deflection optical wedge and the lower deflection optical wedge is less than or equal to 5 degrees, an air gap is formed between the upper deflection optical wedge and the lower deflection optical wedge, the upper deflection optical wedge and the lower deflection optical wedge rotate around the optical axis relatively, a light beam passes through the optical wedges and then forms an included angle with the optical axis, and the included angle is equal to the combined angle of the two deflection optical wedges; when the wedge angle directions of the two deflection optical wedges are opposite, the generated deflection angle is 0 degree, the double optical wedges have the function of being equivalent to a parallel flat plate, and light rays only generate tiny offset at the upper position and the lower position; when the wedge angle directions of the two deflection optical wedges are the same, the relative rotation of the two deflection optical wedges is 180 degrees, and the maximum deflection angle generated at the moment is 2 times of that of a single optical wedge; if the relative rotation angle of the two optical wedges is 360 degrees, a reverse maximum deflection angle is generated;
the upper deflection optical wedge and the lower deflection optical wedge rotate around the optical axis relatively, the optical axis is a light path, and the included angle is obtained through a detailed calculation process, is a dynamic angle and is not a static angle; the light beam generates an included angle with the optical axis after passing through the optical wedge, the included angle is equal to the combined angle of the two deflection optical wedges, and the combined angle is obtained through a detailed calculation process and is a dynamic angle;
when light beams with a certain angle are incident on the parallel flat plates, the relative rotation angle of the two parallel flat plates is controlled through a driving motor, and the emergent light beams have a displacement offset relative to the incident light beams; when the inclination angle of the parallel flat plates is fixed and the two flat plates are parallel, the offset is the largest; when the two plates are complementary (when the translation amount is 0) and the two plates rotate mutually, the offset of the plates increases along with the increase of the relative rotation angle in the range of 0-90 degrees.
The light beam emitted by the laser passes through the beam expander to carry out beam expansion collimation on the light beam, then passes through the deflection light wedge group to form a small included angle with the optical axis, then passes through the parallel plate group to generate certain translation, and then passes through the focusing lens to be focused on a focal plane which deviates from the optical axis by a small distance; when the deflection optical wedge group and the parallel flat plate group synchronously rotate at high speed, a circular track can be formed on a focal plane, and the processing of the micropore with large depth-diameter ratio and controllable taper can be realized by changing the relative deflection angle of the optical wedge and the relative rotation angle of the parallel flat plate in real time.
The light beam offset is adjusted by changing the inclination angle between the parallel flat plate and the horizontal direction; adjusting the processing aperture by changing the synthetic angle of the deflection optical wedge and the focal length of the focusing lens; the taper of the processing hole is adjusted by changing the total thickness of the parallel flat plate, the diameter of a light beam, the distance from the lower optical wedge to the focusing lens and the focal length of the focusing lens.
Therefore, the programmable processing track and the controllable hole pattern can be realized by only accurately controlling the relative rotation angle of the double optical wedges and the inclination of the parallel flat plate.
The invention also relates to a scanning method for the femtosecond laser beam track to be accurately controlled, which comprises the following steps:
1) The beam emitted by the femtosecond laser in the femtosecond laser beam track accurate control scanning system is expanded and collimated by the beam expander, reaches an upper deflection optical wedge of the deflection optical wedge group through the total reflection prism, sequentially passes through a lower deflection optical wedge of the deflection optical wedge group, and can realize accurate deflection of the beam under the condition of controlling the corner accuracy;
2) The deflected light beams enter an upper flat plate of the parallel flat plate group and a lower flat plate of the parallel flat plate group, and the translation distance of the light beams can be accurately realized due to the difference of the included angles of the upper flat plate of the parallel flat plate group and the lower flat plate of the parallel flat plate group;
3) The translated light beam enters a focusing convex lens, the focused light beam reaches a processed workpiece, and accurate processing is performed under the accurate control of parameters such as comprehensive control scanning distribution of an industrial personal computer, motor rotating speed, laser power, taper and the like.
Compared with the prior art, the invention has the following advantages:
1. the femtosecond laser beam track accurate control scanning system is a key technology for controlling laser beams to realize the processing of high-precision cylindrical holes, taper holes and special-shaped holes as a core device of laser hyperfine hole making, and is also an important means for realizing non-thermal effect micromachining. Meanwhile, the structural designs of ceramic ball bearing support, ultra-light rotor and the like are adopted, so that the scanning module can work at high speed, long service life and high reliability; and the running state monitoring technology ensures the stability and reliability of the scanning module.
2. According to the scanning method for the femtosecond laser beam with the accurately controllable track, synchronous dynamic translation of the laser beam in the machining process is realized by controlling the synchronous motion of the double optical wedges and the parallel flat plate, and the transverse displacement of the beam can be changed by changing the deflection angle, so that the precision and controllability of the taper of the machined hole are realized, and the large K coefficient inverted cone micro-hole machining which is difficult to realize in the traditional electric spark machining and has good surface integrity is broken through.
[ description of the drawings ]
FIG. 1 is a diagram of a femtosecond laser beam trajectory precision control scanning system in an embodiment of the invention;
FIG. 2 is a schematic diagram of a wedge angle of deflected light in an embodiment of the present invention;
FIG. 3 is a schematic diagram illustrating an offset of a set of parallel plates according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of femtosecond laser processing of different hole patterns in an embodiment of the invention;
FIG. 5 is a schematic diagram of a track programmable scanning processing method according to an embodiment of the present invention;
FIG. 6 is a graph comparing the femtosecond laser beam trajectory precisely controlled scanning process with the electric discharge process in example 1 (FIG. 6a is a graph of an electric discharge process for forming a micro-hole, FIG. 6b is a graph of a femtosecond laser beam trajectory precisely controlled scanning process for forming a micro-hole)
Reference numerals are as follows:
1. an upper deflection optical wedge; 2. a lower deflection optical wedge; 3. the parallel flat plate group is provided with a flat plate; 4. a lower plate of the parallel plate group; 5. a focusing convex lens; 6. and (4) processing the workpiece.
[ detailed description ] A
The following examples are provided to further illustrate the embodiments of the present invention.
The embodiment is as follows:
a scanning method for accurate controllable track of femtosecond laser beam comprises the following steps:
1) The beam emitted by the femtosecond laser in the femtosecond laser beam track accurate control scanning system firstly passes through a beam expander to carry out beam expansion collimation on the beam, then reaches an upper deflection optical wedge 1 of a deflection optical wedge group through a total reflection prism, and sequentially passes through a lower deflection optical wedge 2 of the deflection optical wedge group, and the deflection optical wedge group can realize accurate deflection of the beam under the condition of controlling the corner accuracy;
2) The deflected light beams enter an upper flat plate 3 of the parallel flat plate group and a lower flat plate 4 of the parallel flat plate group, and the translation distance of the light beams can be accurately realized due to the difference of the included angles of the upper flat plate 3 of the parallel flat plate group and the lower flat plate 4 of the parallel flat plate group;
3) The translated light beam enters a focusing convex lens 5, the focused light beam reaches a processed workpiece, and accurate processing is performed under the accurate control of parameters such as comprehensive control scanning distribution of an industrial personal computer, motor rotating speed, laser power, taper and the like;
the femtosecond laser beam track precise control scanning system comprises an industrial personal computer, a femtosecond laser, a cooperative control system, a laser control module, a beam deflection module, a beam translation module, a beam expander, a deflection light wedge group, a parallel flat plate group and parameter control modules such as scanning distribution, speed, laser power, taper and the like; the beam expander comprises a concave lens and a first convex lens, the deflection optical wedge group comprises an upper deflection optical wedge 1 and a lower deflection optical wedge 2, the parallel flat plate group comprises a parallel flat plate group upper flat plate 3 and a parallel flat plate group lower flat plate 4, and the concave lens, the first convex lens, the total reflection prism, the upper deflection optical wedge 1, the lower deflection optical wedge 2, the parallel flat plate group upper flat plate 3, the parallel flat plate group lower flat plate 4 and the focusing convex lens 5 are sequentially arranged on an output light path of the femtosecond laser; the laser control module controls a femtosecond laser, the light beam deflection control module controls an upper deflection light wedge 1 and a lower deflection light wedge 2 of a deflection light wedge group, and the light beam translation control module controls an upper flat plate 3 and a lower flat plate 4 of a parallel flat plate group; the laser control module, the light beam deflection control module and the light beam translation control module are connected with the cooperative control system through data lines, and the cooperative control system is connected with the industrial personal computer through the data lines;
the light beam translation control module controls the upper flat plate 3 and the lower flat plate 4 of the parallel flat plate group, controls the light beam translation distance by controlling the deflection angle of the flat plates, can conveniently, quickly and accurately realize the rotation of the light beam around the optical axis and the layer-by-layer feeding during high-speed rotation, and then realizes the processing and forming of the inverted taper hole;
the wedge angle of the upper deflection optical wedge 1 and the lower deflection optical wedge 2 is less than or equal to 5 degrees, an air gap is arranged between the upper deflection optical wedge 1 and the lower deflection optical wedge 2, the upper deflection optical wedge 1 and the lower deflection optical wedge 2 can rotate around an optical axis relatively, a light beam passes through the optical wedges and then forms an included angle with the optical axis, and the included angle is equal to the combined angle of the two deflection optical wedges; when the wedge angle directions of the two deflection optical wedges are opposite, the generated deflection angle is 0 degrees, the double optical wedges have the function of being equivalent to a parallel flat plate, and light rays only generate tiny offset at the upper position and the lower position; when the wedge angle directions of the two deflection optical wedges are the same, namely the relative rotation of the two deflection optical wedges is 180 degrees, the maximum deflection angle generated at the moment is 2 times of that generated by a single optical wedge; if the relative rotation angle of the two optical wedges is 360 degrees, a reverse maximum deflection angle is generated;
the upper deflection optical wedge 1 and the lower deflection optical wedge 2 rotate around the optical axis relatively, wherein the optical axis is a light path, and the included angle is obtained through a detailed calculation process, is a dynamic angle and is not a static angle; the light beam generates an included angle with the optical axis after passing through the optical wedge, the included angle is equal to the combined angle of the two deflection optical wedges, and the combined angle is obtained through a detailed calculation process and is a dynamic angle;
when light beams with a certain angle are incident on the parallel flat plates, the relative rotation angle of the two parallel flat plates is controlled through a driving motor, and the emergent light beams have a displacement offset relative to the incident light beams; when the inclination angle of the parallel flat plates is constant and the two flat plates are parallel, the offset is maximum; when the two flat plates are complementary and the translation amount is 0 and the two flat plates rotate mutually, the offset of the flat plates is increased along with the increase of the relative rotation angle within the range of 0-90 degrees;
the light beam emitted by the laser passes through the beam expander to carry out beam expansion collimation on the light beam, then passes through the deflection light wedge group to form a small included angle with the optical axis, then passes through the parallel plate group to generate certain translation, and then passes through the focusing lens to be focused on a focal plane which deviates from the optical axis by a small distance; when the deflection optical wedge group and the parallel flat plate group synchronously rotate at a high speed, a circular track can be formed on a focal plane, and the processing of the micropore with large depth-diameter ratio and controllable taper can be realized by changing the relative deflection angle of the optical wedge and the relative rotation angle of the parallel flat plate in real time;
adjusting the light beam offset by changing the inclination angle of the parallel flat plate and the horizontal direction; adjusting the processing aperture by changing the synthetic angle of the deflection optical wedge and the focal length of the focusing lens; the taper of the processing hole is adjusted by changing the total thickness of the parallel flat plates, the diameter of the light beam, the distance from the lower optical wedge to the focusing lens and the focal length of the focusing lens.
FIG. 1 is a femtosecond laser beam trajectory precision control scanning system;
FIG. 2 is a schematic diagram of a wedge angle of deflected light;
FIG. 3 is a schematic illustration of a parallel plate set offset;
FIG. 4 is a schematic diagram of femtosecond laser processing different hole patterns;
FIG. 5 is a schematic diagram of a track programmable scanning process.
Comparative example:
the traditional oil spray hole is mostly processed by adopting an electric spark process, and the electric spark processing method comprises the following steps:
when the electric spark machining is carried out, the tool electrode and the workpiece are respectively connected with two poles of a pulse power supply and immersed in working liquid, or the working liquid is filled into a discharge gap, the tool electrode is controlled to feed to the workpiece by a gap automatic control system, and when the gap between the two electrodes reaches a certain distance, pulse voltage applied on the two electrodes punctures the working liquid to generate spark discharge.
A large amount of heat energy is instantaneously concentrated in a discharge micro-channel, the temperature can reach more than ten thousand ℃, and the pressure is also changed rapidly, so that a local trace metal material on the working surface is melted and gasified immediately, splashed into working liquid in an explosive manner, and condensed rapidly to form solid metal particles which are taken away by the working liquid; at this time, a tiny pit trace is left on the surface of the workpiece, the discharge is stopped for a short time, and the working fluid between the two electrodes recovers the insulation state; then, the next pulse voltage breaks down at another point where the two electrodes are relatively close to each other to generate spark discharge, and the process is repeated; thus, even though the amount of metal to be removed by the pulse discharge is extremely small, a large amount of metal can be removed by the pulse discharge operation for thousands of times per second, and the metal of the workpiece can be removed with a constant productivity, and the tool electrode is continuously fed to the workpiece while the metal of the workpiece is removed, and finally, the shape corresponding to the shape of the tool electrode is machined, while maintaining a constant discharge gap between the tool electrode and the workpiece.
Because the electric spark discharge process produces the melting pit, the processing surface is rough, and the processing precision is low.
Fig. 6 is a comparison graph of the electrical discharge machining and the scanning method of the femtosecond laser beam trajectory with the precise control in example 1 (fig. 6a is a graph of the electrical discharge machining of a micro-hole, and fig. 6b is a graph of the scanning method of the femtosecond laser beam trajectory with the precise control in machining of a micro-hole).
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the inventive concept of the present invention, which falls into the protection scope of the present invention.
Claims (5)
1. A scanning method for accurate and controllable track of femtosecond laser beam is characterized in that: the system comprises a femtosecond laser beam track accurate control scanning system, and comprises an industrial personal computer, a femtosecond laser, a cooperative control system, a laser control module, a beam deflection module, a beam translation module, a beam expander, a deflection light wedge group, a parallel flat plate group, and parameter control modules for scanning distribution, speed, laser power, taper and the like; the beam expander comprises a concave lens and a first convex lens, the deflection optical wedge group comprises an upper deflection optical wedge (1) and a lower deflection optical wedge (2), the parallel flat plate group comprises a parallel flat plate group upper flat plate (3) and a parallel flat plate group lower flat plate (4), and the concave lens, the first convex lens, the total reflection prism, the upper deflection optical wedge (1), the lower deflection optical wedge (2), the parallel flat plate group upper flat plate (3), the parallel flat plate group lower flat plate (4) and the focusing convex lens (5) are sequentially arranged on an output light path of the femtosecond laser; the laser control module controls a femtosecond laser, the light beam deflection control module controls an upper deflection light wedge (1) and a lower deflection light wedge (2) of a deflection light wedge group, and the light beam translation control module controls an upper flat plate (3) and a lower flat plate (4) of a parallel flat plate group; the laser control module, the light beam deflection control module and the light beam translation control module are connected with the cooperative control system through data lines, and the cooperative control system is connected with the industrial personal computer through the data lines;
the method specifically comprises the following steps:
1) The beam emitted by the femtosecond laser in the femtosecond laser beam track accurate control scanning system firstly passes through a beam expander to carry out beam expansion collimation on the beam, then reaches an upper deflection optical wedge (1) of a deflection optical wedge set through a total reflection prism, and sequentially passes through a lower deflection optical wedge (2) of the deflection optical wedge set, and the deflection optical wedge set can realize accurate deflection of the beam under the condition of controlling the corner accuracy;
2) The deflected light beams enter an upper flat plate (3) of the parallel flat plate group and a lower flat plate (4) of the parallel flat plate group, and the translation distance of the light beams can be accurately realized due to the difference of the included angles between the upper flat plate (3) of the parallel flat plate group and the lower flat plate (4) of the parallel flat plate group;
3) The translated light beam enters a focusing convex lens (5), the focused light beam reaches a processed workpiece, and accurate processing is performed under the comprehensive control of the industrial personal computer on scanning distribution, the motor rotating speed, the laser power and the taper parameter.
2. The method for scanning a femtosecond laser beam track with accurately controllable trajectory according to claim 1, wherein the method comprises the following steps: the wedge angle of the upper deflection optical wedge (1) and the lower deflection optical wedge (2) is less than or equal to 5 degrees, an air gap is formed between the upper deflection optical wedge (1) and the lower deflection optical wedge (2), the upper deflection optical wedge (1) and the lower deflection optical wedge (2) rotate around the optical axis relatively, an included angle is formed between a light beam and the optical axis after the light beam passes through the optical wedges, and the included angle is equal to the combined angle of the two deflection optical wedges; when the wedge angle directions of the two deflection optical wedges are opposite, the generated deflection angle is 0 degree, the double optical wedges have the function of being equivalent to a parallel flat plate, and light rays only generate tiny offset at the upper position and the lower position; when the wedge angle directions of the two deflection optical wedges are the same, namely the relative rotation of the two deflection optical wedges is 180 degrees, the maximum deflection angle generated at the moment is 2 times of that generated by a single optical wedge; if the relative rotation angle of the two wedges is 360 °, a maximum reverse deflection angle is generated.
3. The scanning method for the femtosecond laser beam track accurate control according to the claim 1, characterized in that: when light beams with a certain angle are incident on the parallel flat plates, the relative rotation angle of the two parallel flat plates is controlled through a driving motor, and the emergent light beams have a displacement offset relative to the incident light beams; when the inclination angle of the parallel flat plates is fixed and the two flat plates are parallel, the offset is the largest; when the two flat plates are complementary and the translation amount is 0, and the two flat plates rotate mutually, the offset of the flat plates increases along with the increase of the relative rotation angle in the range of 0-90 degrees.
4. The method for scanning a femtosecond laser beam track with accurately controllable trajectory according to claim 1, wherein the method comprises the following steps: the light beam emitted by the laser firstly passes through the beam expander to carry out beam expansion collimation on the light beam, then passes through the deflection light wedge group to form a small included angle with the optical axis, then passes through the parallel plate group to generate certain translation, and then passes through the focusing lens to be focused on a focal plane which deviates from the optical axis by a small distance; when the deflection optical wedge group and the parallel flat plate group synchronously rotate at high speed, a circular track can be formed on a focal plane, and the processing of the micropore with large depth-diameter ratio and controllable taper can be realized by changing the relative deflection angle of the optical wedge and the relative rotation angle of the parallel flat plate in real time.
5. The scanning method for the femtosecond laser beam track accurate control according to the claim 1, characterized in that: adjusting the light beam offset by changing the inclination angle of the parallel flat plate and the horizontal direction; adjusting the processing aperture by changing the synthetic angle of the deflection optical wedge and the focal length of the focusing lens; the taper of the processing hole is adjusted by changing the total thickness of the parallel flat plate, the diameter of a light beam, the distance from the lower optical wedge to the focusing lens and the focal length of the focusing lens.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116387946A (en) * | 2023-02-02 | 2023-07-04 | 广东豪德数控装备股份有限公司 | Fiber laser using homogenized fiber output |
| CN118287859A (en) * | 2024-06-05 | 2024-07-05 | 苏州菲镭泰克激光技术有限公司 | Multi-axis linkage type laser drilling device and method |
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2022
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116387946A (en) * | 2023-02-02 | 2023-07-04 | 广东豪德数控装备股份有限公司 | Fiber laser using homogenized fiber output |
| CN118287859A (en) * | 2024-06-05 | 2024-07-05 | 苏州菲镭泰克激光技术有限公司 | Multi-axis linkage type laser drilling device and method |
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