CN114769845A - Laser rotary cutting drill device based on burst mode and drilling method - Google Patents
Laser rotary cutting drill device based on burst mode and drilling method Download PDFInfo
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- CN114769845A CN114769845A CN202210413574.6A CN202210413574A CN114769845A CN 114769845 A CN114769845 A CN 114769845A CN 202210413574 A CN202210413574 A CN 202210413574A CN 114769845 A CN114769845 A CN 114769845A
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- 238000005553 drilling Methods 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims abstract description 12
- 238000005520 cutting process Methods 0.000 title claims abstract description 9
- 238000009826 distribution Methods 0.000 claims abstract description 15
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000001174 ascending effect Effects 0.000 claims description 2
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 238000003754 machining Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 241001074085 Scophthalmus aquosus Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/384—Removing material by boring or cutting by boring of specially shaped holes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Abstract
The invention discloses a burst mode-based laser rotary cutting drill device and a drilling method, wherein the device comprises: the device comprises a laser, a quarter-wave plate, a beam expander, a light beam modulation system, a focusing lens, a workpiece and a workbench; the method comprises the following steps: the beam emitted by the laser passes through the quarter-wave plate and then enters the beam expander, the beam expander outputs parallel beams which enter a two-dimensional scanning galvanometer of the beam modulation system to form rotary conical beams with a deflection angle theta, the conical beams pass through the conical lens to form rotary laser beams, the rotary laser beams enter the focusing lens to form rotary focusing spots after being focused to act on a workpiece, and hole forming on the workpiece is completed. The invention improves the drilling quality and the drilling speed by selecting different numbers of sub-pulses and different height distributions of the sub-pulses by means of the laser with the burst mode. The invention is suitable for processing different hole types of cylindrical holes, circular right cone holes or reverse cone holes, and has the advantages of simple and convenient operation, low cost and high precision.
Description
Technical Field
The invention relates to the technical field of laser drilling, in particular to a burst mode-based laser rotary drilling device and a drilling method.
Background
Laser drilling is a non-contact drilling mode, and is more and more accepted by the machining industry in recent years due to the irreplaceable advantage. However, in the traditional drilling mode, due to the gaussian beam characteristic of laser, the hole forming taper is difficult to control, which is a fatal weakness that laser drilling cannot be popularized in the machining industry.
In order to overcome the problem that the taper is difficult to control, the prior art also adopts a laser rotary-cut drilling technology, the currently adopted rotary-cut drilling scheme is mainly a three-wedge-shaped mirror or a four-wedge-shaped mirror rotary-cut drilling, and the problems that the precision of the hole pattern is difficult to control, the requirement on the operation process is extremely high, the purchase cost of equipment is also very high, and the rotary-cut drilling technology is difficult to widely popularize in the machining industry due to the fact that the control requirement on the prior art is too high and the operation difficulty is large.
Disclosure of Invention
The invention aims to provide a burst mode-based laser rotary cutting device and a drilling method aiming at the defects of the prior art, wherein the device comprises: the device comprises a laser, a quarter-wave plate, a beam expander, a light beam modulation system, a focusing lens, a workpiece and a workbench; the light beam modulation system is composed of a two-dimensional scanning galvanometer and a cone lens, and the two-dimensional scanning galvanometer is connected with a light path of the cone lens; two groups of lenses driven by a rotary driving motor are arranged in the two-dimensional scanning galvanometer, and the rotary driving motor drives the two-dimensional scanning galvanometer to generate a conical light beam with a light beam deflection angle theta; and a position driving motor is arranged on the conical lens and drives the conical lens to move along the light path so as to adjust the distance h between the conical lens and the two-dimensional scanning galvanometer.
The method comprises the following steps: the laser is started, light beams emitted by the laser penetrate into the beam expanding lens after passing through the quarter-wave plate, parallel light beams output by the beam expanding lens enter the light beam modulation system, then pass through the two-dimensional scanning vibration lens of the light beam modulation system to form conical light beams with a rotary light beam deflection angle theta, the conical light beams form rotary laser light beams after the conical light beams are matched with the light beam deflection angle theta through the vertex angle of the conical lens, the rotary laser light beams penetrate into the focusing lens and are focused to form rotary focusing light spots to act on a workpiece, and hole forming of the workpiece is completed.
When the device works, the aperture of the orifice on the workpiece can be determined by setting the beam deflection angle theta of the two-dimensional scanning galvanometer; the hole pattern of the workpiece can be determined by setting the distance h between the conical lens and the two-dimensional scanning galvanometer. The invention improves the drilling quality and the drilling speed by selecting different numbers of sub-pulses and different height distributions of the sub-pulses by means of the laser with the burst mode. The invention is suitable for processing different hole types of cylindrical holes, conical holes or inverted conical holes, and has the advantages of simple and convenient operation, low cost and high precision.
The specific technical scheme for realizing the purpose of the invention is as follows:
the utility model provides a based on burst mode laser rotary-cut brill device which characteristics include: the device comprises a laser, a quarter-wave plate, a beam expander, a light beam modulation system, a focusing lens, a workpiece and a workbench; the laser, the quarter-wave plate, the beam expander, the light beam modulation system and the focusing lens are sequentially connected along a light path;
the quarter-wave plate is used for changing the polarization state of the laser beam into circular polarization;
the beam expander is used for changing the size of the laser beam, and the axis of the beam expander is coaxial with the optical path;
the workpiece is arranged on the workbench;
the focusing point of the focusing lens acts on the workpiece;
the light beam modulation system consists of a two-dimensional scanning galvanometer and a cone lens, and the two-dimensional scanning galvanometer is connected with a light path of the cone lens;
the tapered lens is provided with a position driving motor which drives the tapered lens to move along a light path so as to adjust the distance h between the tapered lens and the two-dimensional scanning galvanometer.
Two groups of scanning mirror pieces driven by a rotary driving motor are arranged in the two-dimensional scanning galvanometer, the beam deflection angle of the rotary driving motor for driving the two-dimensional scanning galvanometer is theta, the rotary driving motor for driving the two-dimensional scanning galvanometer generates a conical beam of a male light path, and the deflection range of the beam deflection angle theta is as follows: 0 to 90 degrees.
The vertex angle range of the conical lens is as follows: 0 to 180 degrees.
And the conical light beam forms a high-speed rotating laser light beam after the vertex angle of the conical light beam is matched with the light beam deflection angle theta.
The laser adopts a burst mode laser, and the wavelength range of the burst mode laser is as follows: 10 nm-100 um; the adjustable range of the number of burst sub-pulses is as follows: 1 to 1000; and the height distribution of the sub-pulses is adjustable.
A burst mode-based laser rotary cutting and drilling method implemented based on the device is characterized by comprising the following steps of:
firstly, placing a workpiece to be processed on a workbench, and enabling the orifice position of the workpiece to be positioned at the focus of a focusing lens;
secondly, setting a beam deflection angle theta of the two-dimensional scanning galvanometer according to the aperture of the orifice of the workpiece;
thirdly, according to the hole pattern of the workpiece, the hole pattern of the workpiece is set by moving the conical lens along the light path by a position driving motor relative to the distance h between the two-dimensional scanning galvanometers; the hole pattern of the workpiece is divided into a cylindrical hole, a right circular cone hole or an inverted circular cone hole;
fourthly, setting the wavelength of the laser as follows: 10 nm-100 um; the number range of burst sub-pulses is adjusted as follows: 1 to 1000 parts; setting the height distribution state of burst sub-pulses; the height distribution state of the sub-pulses is divided into: ascending in an increasing way, descending in a decreasing way and equal in height;
and fifthly, starting the laser, enabling light beams emitted by the laser to pass through the quarter-wave plate and then enter the beam expanding lens, enabling parallel light beams output by the beam expanding lens to enter the light beam modulation system, enabling the parallel light beams to pass through a two-dimensional scanning vibration mirror of the light beam modulation system to form a conical light beam with a rotating light beam deflection angle theta, enabling the conical light beam to pass through a vertex angle of the conical lens to be matched with the light beam deflection angle theta to form a rotating laser light beam, enabling the rotating laser light beam to enter the focusing lens to be focused to form a rotating focusing light spot to act on the workpiece, and completing hole forming of the workpiece.
When the device works, the caliber of the orifice on the workpiece is determined by a light beam deflection angle theta of the two-dimensional scanning galvanometer;
the hole pattern of the hole on the workpiece is determined by the distance h between the cone lens and the two-dimensional scanning galvanometer.
Based on the burst mode laser, the invention realizes high-speed rotary cutting of the cylindrical hole, the conical hole or the inverted conical hole by matching the high-speed two-dimensional scanning galvanometer with the conical lens, and has the advantages of simple and convenient operation, low cost and high precision.
Drawings
FIG. 1 is a schematic view of the structure of the present invention;
FIG. 2 is a schematic diagram of pulses of a laser with a burst sub-pulse number of 1;
FIG. 3 is a schematic diagram showing the distribution of equal sub-pulse heights when the number of burst sub-pulses of the laser is 4;
FIG. 4 is a schematic diagram showing the distribution of the increasing heights of the burst sub-pulses of the laser when the number of the burst sub-pulses is 4;
FIG. 5 is a schematic view of a working condition of a right circular conical hole formed in a workpiece;
FIG. 6 is a schematic view of a cylindrical hole formed in a workpiece in use;
fig. 7 is a schematic view of the usage state of the inverted conical hole formed on the workpiece.
Detailed Description
The invention is described in detail below with reference to the drawings and examples.
Referring to fig. 1, the present invention includes: the device comprises a laser 1, a quarter-wave plate 2, a beam expander 3, a light beam modulation system 4, a focusing lens 5, a work 6 and a workbench 7; the laser 1 emits laser beams which sequentially pass through the quarter-wave plate 2, the beam expander 3, the beam modulation system 4 and the focusing lens 5 along a light path and then act on a workpiece 6, and the workpiece 6 is placed on the workbench 7.
Referring to fig. 1 and 2, the laser 1 according to the present invention is a burst mode laser, the number of sub-pulses is 1, energy is concentrated in one pulse, a positive taper is easily generated during processing, and a hole type suitable for processing is a positive taper hole.
Referring to fig. 1 and 3, the laser 1 of the present invention is a burst mode laser, the number of sub-pulses is 4, and the height distribution state of the sub-pulses is: in the state of equal height, the same single pulse energy is uniformly distributed in the four sub-pulses, and the subsequent pulses are helpful for repairing the aperture size of the drilling outlet, so that the drilling taper can be better controlled, and the hole pattern suitable for machining is a cylindrical hole.
Referring to fig. 1 and 4, the laser 1 of the present invention is a burst mode laser, the number of sub-pulses is 4, and the height distribution state of the sub-pulses is: the increasing and rising state is increased, the same single pulse energy is distributed in the four sub-pulses, the sub-pulse energy is increased gradually, the subsequent higher sub-pulses are beneficial to repairing the aperture size of the drilled hole outlet, therefore, the drilling taper can be better controlled, and the hole type suitable for machining is the inverted conical hole.
Referring to fig. 1, in the invention, a light path of a laser beam emitted from a laser 1 sequentially passes through a quarter-wave plate 2 and then enters a beam expander 3, the beam expander 3 outputs a parallel beam, and the parallel beam passes through a beam modulation system 4 and then enters a focusing lens 5 to form a rotating focusing spot which is focused and acts on a workpiece 6, so that the hole forming of the workpiece 6 is completed.
Firstly, the light beam modulation system 4 consists of a high-speed two-dimensional scanning galvanometer 41 and a cone lens 42, a light beam passes through the two-dimensional scanning galvanometer 41 to form a conical light beam with a rotary light beam deflection angle theta, and the conical light beam passes through the vertex angle of the cone lens 42 and is matched with the light beam deflection angle theta to form a rotary laser light beam;
secondly, a position driving motor 43 is arranged on the axicon lens 42, the position driving motor 43 drives the axicon lens 42 to move along the light path so as to adjust the distance h between the axicon lens 42 and the two-dimensional scanning galvanometer 41, and the selection of the number of burst sub-pulses and the selection of the height distribution state of the burst sub-pulses are matched through the change of the distance h so as to complete the drilling of different hole patterns on the workpiece 6.
Referring to fig. 1, two sets of mirrors driven by a rotary driving motor are arranged in a high-speed two-dimensional scanning galvanometer 41, and a laser beam can be adjusted by the two-dimensional scanning galvanometer 41 to generate a cone beam with a beam deflection angle θ; the conical light beam forms a rotating laser beam after matching the vertex angle of the conical lens 42 with the light beam deflection angle theta, and the rotating laser beam enters the focusing lens 5 and is focused to form a rotating focusing spot to act on the workpiece 6.
The aperture of an orifice on a workpiece 6 is determined by a light beam deflection angle theta of a two-dimensional scanning galvanometer 41;
the pass of the hole in the workpiece 6 of the present invention is determined by the distance h between the axicon lens 42 relative to the two-dimensional scanning galvanometer 41.
In the case of the example 1, the following examples are given,
referring to fig. 1, 2 and 5, a method for generating a right circular conical bore comprises the following steps:
firstly, placing a workpiece 6 to be processed on a workbench 7, and enabling the position of an orifice of the workpiece 6 to be positioned at the focus of a focusing lens 5;
secondly, setting the beam deflection angle theta of the two-dimensional scanning galvanometer 41 to be 30 degrees;
thirdly, setting the distance h1 between the cone lens 42 and the two-dimensional scanning galvanometer 41 through a position driving motor 43; at this time: h1=3/4 h;
and step four, setting the wavelength of the laser 1 as follows: 1030 nm; setting the number of burst sub-pulses as 1;
and fifthly, starting the laser 1, enabling the light beam emitted by the laser 1 to pass through the quarter-wave plate 2 and then enter the beam expanding lens 3, enabling the beam expanding lens 3 to output parallel light beams to enter the light beam modulation system 4, enabling the parallel light beams to pass through the two-dimensional scanning vibration lens 41 of the light beam modulation system 4 to form a conical light beam with a rotary light beam deflection angle theta, enabling the conical light beam to pass through the vertex angle of the conical lens 42 and be matched with the light beam deflection angle theta to form a rotary laser light beam, enabling the rotary laser light beam to enter the focusing lens 5 and be focused to form a rotary focusing light spot to act on the workpiece 6, and completing drilling of the right circular cone hole of the workpiece 6.
In the case of the example 2, the following examples are given,
referring to fig. 1, 3 and 6, a method for producing a cylindrical hole includes the steps of:
firstly, placing a workpiece 6 to be processed on a workbench 7, and enabling the position of an orifice of the workpiece 6 to be positioned at the focus of a focusing lens 5;
secondly, setting the beam deflection angle theta of the two-dimensional scanning galvanometer 41 to be 30 degrees;
thirdly, setting the distance h2 between the axicon lens 42 and the two-dimensional scanning galvanometer 41 through a position driving motor 43; at this time: h2=1/2 h;
and step four, setting the wavelength of the laser 1 as follows: 1030 nm; setting the number of burst sub-pulses to be 4; setting the height distribution state of burst sub-pulses to be a height equal state;
and fifthly, starting the laser 1, enabling the light beam emitted by the laser 1 to pass through the quarter-wave plate 2 and then enter the beam expanding lens 3, enabling the beam expanding lens 3 to output parallel light beams to enter the light beam modulation system 4, enabling the parallel light beams to pass through the two-dimensional scanning vibration mirror 41 of the light beam modulation system 4 to form a conical light beam with a rotary light beam deflection angle theta, enabling the conical light beam to pass through the vertex angle of the conical lens 42 and be matched with the light beam deflection angle theta to form a rotary laser light beam, enabling the rotary laser light beam to enter the focusing lens 5 and be focused to form a rotary focusing light spot to act on the workpiece 6, and completing drilling of a cylindrical hole of the workpiece 6.
In the case of the example 3, the following examples are given,
referring to fig. 1, 4 and 7, a method for generating an inverted conical bore includes the steps of:
firstly, placing a workpiece 6 to be processed on a workbench 7, and enabling the position of an orifice of the workpiece 6 to be positioned at the focus of a focusing lens 5;
secondly, setting the beam deflection angle theta of the two-dimensional scanning galvanometer 41 to be 30 degrees;
thirdly, setting the distance h3 between the cone lens 42 and the two-dimensional scanning galvanometer 41 through a position driving motor 43; at this time: h3=1/4 h;
and step four, setting the wavelength of the laser 1 as follows: 1030 nm; setting the number of burst sub-pulses to be 4; setting the height distribution state of burst sub-pulses as incremental increase;
and fifthly, starting the laser 1, enabling the light beam emitted by the laser 1 to pass through the quarter-wave plate 2 and then enter the beam expanding lens 3, enabling the beam expanding lens 3 to output parallel light beams to enter the light beam modulation system 4, enabling the parallel light beams to pass through the two-dimensional scanning vibration lens 41 of the light beam modulation system 4 to form a conical light beam with a rotary light beam deflection angle theta, enabling the conical light beam to pass through the vertex angle of the conical lens 42 and be matched with the light beam deflection angle theta to form a rotary laser light beam, enabling the rotary laser light beam to enter the focusing lens 5 and be focused to form a rotary focusing light spot to act on the workpiece 6, and completing drilling of the inverted conical hole of the workpiece 6.
The technical solutions provided by the embodiments of the present invention are described in detail above, and the principles and embodiments of the present invention are explained in the present invention by applying specific examples, and the descriptions of the embodiments are only used to help understanding the principles of the embodiments of the present invention; meanwhile, for a person skilled in the art, according to the embodiments of the present invention, there may be variations in the specific implementation manners and application ranges, and in summary, the content of the present description should not be construed as a limitation to the present invention.
Claims (5)
1. A laser rotary cutting and drilling device based on burst mode is characterized by comprising: the device comprises a laser (1), a quarter-wave plate (2), a beam expander (3), a beam modulation system (4), a focusing lens (5), a workpiece (6) and a workbench (7); the laser (1), the quarter-wave plate (2), the beam expander (3), the light beam modulation system (4) and the focusing lens (5) are sequentially connected along a light path;
the workpiece (6) is arranged on the workbench (7);
the focusing point of the focusing lens (5) acts on a workpiece (6);
the light beam modulation system (4) is composed of a two-dimensional scanning galvanometer (41) and a conical lens (42), the two-dimensional scanning galvanometer (41) is connected with the optical path of the conical lens (42), a position driving motor (43) is arranged on the conical lens (42), and the position driving motor (43) drives the conical lens (42) to move along the optical path so as to adjust the distance h between the conical lens (42) and the two-dimensional scanning galvanometer (41).
2. The burst-mode-based laser rotary cutting device according to claim 1, wherein two sets of lenses driven by a rotary driving motor are arranged in the two-dimensional scanning galvanometer (41), a beam deflection angle of the rotary driving motor driving the two-dimensional scanning galvanometer (41) is θ, the rotary driving motor driving the two-dimensional scanning galvanometer (41) generates a rotating conical beam, and a deflection range of the beam deflection angle θ is: 0 to 90 degrees.
3. The burst-mode-based laser rotational atherectomy device according to claim 1, wherein the axicon lens (42) has a vertex angle ranging from: 0 to 180 degrees.
4. The burst-mode-based laser rotary cutting device according to claim 1, wherein the laser (1) is a burst-mode laser, and the wavelength range of the burst-mode laser is as follows: 10 nm-100 um; the adjustable range of the number of burst sub-pulses is as follows: 1 to 1000 parts; and the height distribution of the sub-pulses is adjustable.
5. A burst-mode-based laser rotational atherectomy drilling method implemented on the basis of the device of claim 1, comprising the steps of:
firstly, a workpiece (6) to be processed is placed on a workbench (7), and the position of an orifice of the workpiece (6) is positioned at the focus of a focusing lens (5);
secondly, setting a beam deflection angle theta of a two-dimensional scanning galvanometer (41) according to the aperture of the orifice of the workpiece (6);
thirdly, according to the hole pattern of the workpiece (6), the hole pattern of the workpiece (6) is set by moving the conical lens (42) along the light path by a position driving motor (43) relative to the distance h between the two-dimensional scanning galvanometers (41); the hole pattern of the workpiece (6) is divided into a cylindrical hole, a right circular cone hole or an inverted circular cone hole;
fourthly, setting the wavelength of the laser (1) as follows: 10 nm-100 um; adjusting the range of the number of burst sub-pulses as follows: 1 to 1000 parts; setting the height distribution state of burst sub-pulses; the height distribution state of the sub-pulses is divided into: ascending in an increasing way, descending in a decreasing way and equal in height;
fifthly, starting the laser (1), enabling light beams emitted by the laser (1) to pass through the quarter-wave plate (2) and then enter the beam expanding lens (3), outputting parallel light beams by the beam expanding lens (3) and then enter the light beam modulation system (4), forming a rotary conical light beam with a light beam deflection angle theta through the two-dimensional scanning galvanometer (41) of the light beam modulation system (4), enabling the conical light beam to pass through the vertex angle of the conical lens (42) to be matched with the light beam deflection angle theta to form a rotary laser light beam, enabling the rotary laser light beam to enter the focusing lens (5) and then focused to form a rotary focusing light spot to act on the workpiece (6), and completing hole forming on the workpiece (6); when the device works, the aperture of an upper orifice of a workpiece (6) is determined by a beam deflection angle theta of a two-dimensional scanning galvanometer (41); the pass of the hole in the workpiece (6) is determined by the distance h between the axicon lens (42) and the two-dimensional scanning galvanometer (41).
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| CN202210413574.6A CN114769845A (en) | 2022-04-20 | 2022-04-20 | Laser rotary cutting drill device based on burst mode and drilling method |
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| CN202210413574.6A CN114769845A (en) | 2022-04-20 | 2022-04-20 | Laser rotary cutting drill device based on burst mode and drilling method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116372360A (en) * | 2023-02-21 | 2023-07-04 | 中国工程物理研究院激光聚变研究中心 | Micropore rotary-cut scanning processing optical system |
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