CN103212845A - Coaxial water jet device used for laser micro machining of thin-walled tube - Google Patents

Coaxial water jet device used for laser micro machining of thin-walled tube Download PDF

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Publication number
CN103212845A
CN103212845A CN2012100157386A CN201210015738A CN103212845A CN 103212845 A CN103212845 A CN 103212845A CN 2012100157386 A CN2012100157386 A CN 2012100157386A CN 201210015738 A CN201210015738 A CN 201210015738A CN 103212845 A CN103212845 A CN 103212845A
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China
Prior art keywords
nozzle
coaxial
laser
laser beam
high pressure
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Pending
Application number
CN2012100157386A
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Chinese (zh)
Inventor
魏志凌
宁军
夏发平
马秀云
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Kunshan Theta Micro Co Ltd
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Kunshan Theta Micro Co Ltd
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Application filed by Kunshan Theta Micro Co Ltd filed Critical Kunshan Theta Micro Co Ltd
Priority to CN2012100157386A priority Critical patent/CN103212845A/en
Publication of CN103212845A publication Critical patent/CN103212845A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a coaxial water jet device used for laser micro machining of a thin-walled tube. The device comprises a laser generator, a focusing mirror, a protective mirror, a nozzle, a water supply unit and a high pressure auxiliary gas unit, wherein the focusing mirror is used for focusing laser beams sent out from the laser generator; the laser beams penetrating through the focusing mirror are further focused and straightened by the protective mirror, and the protective mirror is coupled with an inner wall of the device in a sealing manner so as to prevent water vapor from entering the device; the nozzle is used for outputting the focused and straightened laser beams for machining; the water supply unit supplies cooling water coaxial with the laser beams outside the nozzle to assist the machining; and the high pressure auxiliary gas unit provides high pressure auxiliary gas coaxial with the laser beams in the nozzle through a gas inlet communicated with the nozzle, and the auxiliary gas is sprayed out from the nozzle so as to prevent the water vapor from entering the nozzle.

Description

The coaxial water jet device that is used for the thin-wall pipes Laser Micro-Machining
Technical field
The present invention relates to the thin-wall pipes laser micro-machining technology, relate in particular to a kind of coaxial water jet device that is used for the thin-wall pipes Laser Micro-Machining.
 
Background technology
Introducing coaxial water jet in laser processing procedure comes tubing to cutting to cool off and reduces pollution in the process.Do not cut stopping of part as yet owing to be subjected to workpiece when introducing coaxial water jet processing work being cooled off, make little water column backwash, simultaneously owing to the heating of laser beam to current, aqueous vapor rises and enters nozzle interior, cause the globule and aqueous vapor to enter spray nozzle device inside, influence the operate as normal of laser generator, simultaneously condensed aqueous vapor forms current can draw the laser beam that focuses on after aligning
Depart from former track, make the machining accuracy variation.
                                                                                                                                                                                                                                                                                                            
Summary of the invention
The present invention solves nozzle interior that when the Laser Micro-Machining globule and aqueous vapor be full of coaxial water jet device and causes the machining accuracy deterioration and influence problem such as laser generator operate as normal.
For solving the problems of the technologies described above, the invention discloses a kind of coaxial water jet device.This device comprises: laser generator; Focus lamp will focus on from the laser beam that laser generator sends; Protective glass makes the laser beam through focus lamp further focus on aligning, and protective glass and device inner wall sealing coupling are to prevent water vapour access to plant inside; Nozzle, output is used for processing through the laser beam that focuses on after aligning; The water supply unit provides the cooling water secondary process coaxial with laser beam in nozzle periphery; And high pressure assist gas unit, in nozzle, providing assist gas with the coaxial high pressure of laser beam by the air inlet that is communicated with nozzle, described assist gas sprays from nozzle to stop steam to enter nozzle interior.
Coaxial water jet device of the present invention solved effectively add man-hour the globule and aqueous vapor be full of the affected problem of operate as normal that nozzle interior causes machining accuracy deterioration and laser generator.
 
Description of drawings
Fig. 1 is the principle schematic of the coaxial water jet device of prior art; And
The coaxial according to an embodiment of the invention water jet device of Fig. 2.
 
The specific embodiment
Each preferred embodiment of the present invention below will be discussed.But it will be appreciated by those skilled in the art that herein detailed description not as limiting the scope of the invention, the present invention also can be achieved by modification or other equivalent way of following each embodiment.
The principle of the coaxial water jet device of thin-wall pipes Laser Micro-Machining is as shown in Figure 1: introduce cooling water auxiliary cut coaxial with laser beam in laser processing procedure, after employing focuses on laser beam, in water column is kept stable scope, workpiece is dipped in wherein workpiece to be processed is processed, the heat that makes laser energy accumulation and conduction produce is taken away by water, can avoid the heat waste of laser when thin-wall pipes is cut to injure scorching hot.The high temperature of laser rises water temperature simultaneously, and the bubble of generation and the activity of heating liquid help the discharge of slag, improves crudy.
But do not cut stopping of part as yet owing to be subjected to workpiece when introducing coaxial water jet processing work being cooled off, make little water column backwash, owing to the heating of laser beam to current, aqueous vapor rises and enters nozzle interior, causes the globule and aqueous vapor to enter spray nozzle device inside simultaneously.
Therefore, the present invention proposes a kind of new coaxial water jet device and solve the problems referred to above.As shown in Figure 2, coaxial according to an embodiment of the invention water jet device comprises: laser generator; Focus lamp will focus on from the laser beam that laser generator sends; Protective glass makes the laser beam through focus lamp further focus on aligning, and protective glass and device inner wall sealing coupling are to prevent water vapour access to plant inside; Nozzle, output is used for processing through the laser beam that focuses on after aligning; The water supply unit provides the cooling water secondary process coaxial with laser beam in nozzle periphery; And high pressure assist gas unit, in nozzle, providing assist gas with the coaxial high pressure of laser beam by the air inlet that is communicated with nozzle, described assist gas sprays from nozzle to stop steam to enter nozzle interior.In the present invention, the introducing with the coaxial high pressure assist gas of laser beam can prevent effectively that steam from entering in the coaxial water jet device.
In addition, in an example of the present invention, also can adopt the protective glass device that posts the ITO film.In other words, ITO film splashproof module can be set on protective glass, this can prevent that steam from condensing on protective glass.
ITO is the english abbreviation of indium tin oxide, it is a kind of transparent electric conductor, usually thickness has only several thousand dusts, in all transparent conductive bodies, it has the ungood performance of thing: high visible light transmissivity, high infrared reflectivity, excellent mechanical intensity and chemical stability, can be easy to form certain telegraph circuit with wet-etching technologies such as acid solutions, it is relatively easy etc. to prepare.Because the ITO film is transparent conductive body, ITO film self-heating can heat and makes it gasification condensing in steam on the protective glass.

Claims (2)

1. coaxial water jet device comprises:
Laser generator;
Focus lamp will focus on from the laser beam that laser generator sends;
Protective glass makes the laser beam through focus lamp further focus on aligning, and protective glass and device inner wall sealing coupling are to prevent water vapour access to plant inside;
Nozzle, output is used for processing through the laser beam that focuses on after aligning;
The water supply unit provides the cooling water secondary process coaxial with laser beam in nozzle periphery; And
High pressure assist gas unit provides assist gas with the coaxial high pressure of laser beam by the air inlet that is communicated with nozzle in nozzle, described assist gas sprays from nozzle to stop steam to enter nozzle interior.
2. device as claimed in claim 1 is characterized in that, described protective glass is provided with the ITO film and condenses on protective glass to prevent water vapour.
CN2012100157386A 2012-01-19 2012-01-19 Coaxial water jet device used for laser micro machining of thin-walled tube Pending CN103212845A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2012100157386A CN103212845A (en) 2012-01-19 2012-01-19 Coaxial water jet device used for laser micro machining of thin-walled tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2012100157386A CN103212845A (en) 2012-01-19 2012-01-19 Coaxial water jet device used for laser micro machining of thin-walled tube

Publications (1)

Publication Number Publication Date
CN103212845A true CN103212845A (en) 2013-07-24

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103934582A (en) * 2014-04-21 2014-07-23 机械科学研究院哈尔滨焊接研究所 Laser-flame combination cutting method
CN105195903A (en) * 2015-10-21 2015-12-30 北京中科思远光电科技有限公司 Laser microjet processing device for perforating turbine blade
CN107154572A (en) * 2016-03-03 2017-09-12 通用电气公司 The laser cap of spraying nozzle of the liquid jet guiding of decoupling
CN108237332A (en) * 2018-03-14 2018-07-03 广东正业科技股份有限公司 A kind of device and method using Water Jet Guided Laser abnormity cutting tubing
CN109434303A (en) * 2018-12-17 2019-03-08 南京理工大学 A kind of laser cutting steam seal brush method
CN110625273A (en) * 2019-03-25 2019-12-31 中国科学院宁波材料技术与工程研究所 Laser processing method and device
CN111014989A (en) * 2019-12-13 2020-04-17 济南邦德激光股份有限公司 Cooling system, laser cutting system and cooling method
CN112192056A (en) * 2020-09-29 2021-01-08 中国航发动力股份有限公司 Method and device for gas-liquid assisted laser machining of micropores

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178189A (en) * 1983-03-29 1984-10-09 Inoue Japax Res Inc Laser working device
JPS61119393A (en) * 1984-11-16 1986-06-06 Hitachi Ltd Laser working device
JPH06198485A (en) * 1993-01-11 1994-07-19 Komatsu Ltd Laser beam machine
CN2707773Y (en) * 2004-06-15 2005-07-06 华南理工大学 Bore type coaxial laser cladding nozzle
JP2008043984A (en) * 2006-08-18 2008-02-28 Nippei Toyama Corp Machining head of laser beam machine
JP2009226474A (en) * 2008-03-25 2009-10-08 Towa Corp Processing apparatus and processing method
JP2011125906A (en) * 2009-12-18 2011-06-30 Komatsu Ntc Ltd Nozzle for laser beam machining
CN202006338U (en) * 2011-04-29 2011-10-12 武汉新特光电技术有限公司 Water-cooled laser cutting head
CN202684334U (en) * 2012-01-19 2013-01-23 昆山思拓机器有限公司 Coaxial water jetting device for thin-wall tube laser micromachining

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178189A (en) * 1983-03-29 1984-10-09 Inoue Japax Res Inc Laser working device
JPS61119393A (en) * 1984-11-16 1986-06-06 Hitachi Ltd Laser working device
JPH06198485A (en) * 1993-01-11 1994-07-19 Komatsu Ltd Laser beam machine
CN2707773Y (en) * 2004-06-15 2005-07-06 华南理工大学 Bore type coaxial laser cladding nozzle
JP2008043984A (en) * 2006-08-18 2008-02-28 Nippei Toyama Corp Machining head of laser beam machine
JP2009226474A (en) * 2008-03-25 2009-10-08 Towa Corp Processing apparatus and processing method
JP2011125906A (en) * 2009-12-18 2011-06-30 Komatsu Ntc Ltd Nozzle for laser beam machining
CN202006338U (en) * 2011-04-29 2011-10-12 武汉新特光电技术有限公司 Water-cooled laser cutting head
CN202684334U (en) * 2012-01-19 2013-01-23 昆山思拓机器有限公司 Coaxial water jetting device for thin-wall tube laser micromachining

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103934582A (en) * 2014-04-21 2014-07-23 机械科学研究院哈尔滨焊接研究所 Laser-flame combination cutting method
CN105195903A (en) * 2015-10-21 2015-12-30 北京中科思远光电科技有限公司 Laser microjet processing device for perforating turbine blade
CN107154572A (en) * 2016-03-03 2017-09-12 通用电气公司 The laser cap of spraying nozzle of the liquid jet guiding of decoupling
CN107154572B (en) * 2016-03-03 2021-02-05 通用电气公司 Decoupled liquid jet guided laser nozzle cap
CN108237332A (en) * 2018-03-14 2018-07-03 广东正业科技股份有限公司 A kind of device and method using Water Jet Guided Laser abnormity cutting tubing
CN109434303A (en) * 2018-12-17 2019-03-08 南京理工大学 A kind of laser cutting steam seal brush method
CN110625273A (en) * 2019-03-25 2019-12-31 中国科学院宁波材料技术与工程研究所 Laser processing method and device
CN111014989A (en) * 2019-12-13 2020-04-17 济南邦德激光股份有限公司 Cooling system, laser cutting system and cooling method
CN112192056A (en) * 2020-09-29 2021-01-08 中国航发动力股份有限公司 Method and device for gas-liquid assisted laser machining of micropores

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Application publication date: 20130724