CN203390395U - Water jet-air flow recombined assisting laser machining system - Google Patents
Water jet-air flow recombined assisting laser machining system Download PDFInfo
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- CN203390395U CN203390395U CN201320422178.6U CN201320422178U CN203390395U CN 203390395 U CN203390395 U CN 203390395U CN 201320422178 U CN201320422178 U CN 201320422178U CN 203390395 U CN203390395 U CN 203390395U
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- water jet
- laser
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Abstract
The utility model belongs to a water jet-air flow recombined assisting laser machining system, which comprises a laser producing mechanism, an air spray nozzle and a worktable; the longitudinal central line of a spray hole of a water jet spray nozzle behind an air flow spray nozzle is positioned in the plane formed by a laser beam central line and a cutting seam. An air pump and a water pump are respectively connected with the air flow spray nozzle and the water jet spray nozzle. Water is circulated by the water pump, the water jet spray nozzle, a work cavity above a worktable and a water pool. The water jet beam is used for restraining the expanding of air of an air flow beam coaxial with a laser beam, and the water jet and the air flow are recombined to reduce the thermal influence of the laser in an assisting mode and take away sediments, so the laser etching efficiency and quality are improved and the water jet-air flow recombined assisting laser machining system particularly has the obvious effect on panels of more than 15mm thick.
Description
Technical field
The utility model belongs to technical field of laser processing, is specifically related to a kind of for improving the water jet of Laser Processing efficiency and the system of the compound auxiliary laser processing of air-flow.
Background technology
Laser Processing is suitable for most of material, has noncontact, the advantage such as flexible and accurate.But for some application in micron, submicron order etching field, the problems such as heat affected area, deposition and impact failure effect that laser scribing produces can not be ignored.For this reason, in current Laser Processing, adopt assist gas to spray to blow away the splash that laser scribing produces, reduce laser processing zone temperature simultaneously.But, when laser ablation working depth strengthens, the amount that the air-flow of gas nozzle enters in cutting seam obviously reduces, thereby reduced widely the efficiency of gas nozzle, cannot effectively remove chip and cooling that laser ablation produces, directly affect laser ablation efficiency and crudy, such as workpiece, can produce recast layer, residual stress and micro-crack etc.Therefore, the current Laser Processing joint-cutting degree of depth is less than 10mm, cannot be for the cutting of larger thickness sheet material.
Utility model content
The purpose of this utility model is the system of the compound auxiliary laser processing of a kind of water jet of design and air-flow, in routine, with the coaxial gas nozzle rear of laser beam, a water jet nozzle is set again, the expansion of water jet restriction gas, improve Momentum Transfer, make better machining area cooling, improve efficiency and the quality of Laser Processing simultaneously.
The system of the compound auxiliary laser processing of the utility model water jet and air-flow, comprise laser controlling unit, pulse laser, condenser lens, gas nozzle and workbench, workpiece is fixed on workbench surface, laser controlling unit connects, control impuls laser instrument, the laser beam line focus lens bunching that pulse laser sends, through after air current spray nozzle, focus on surface of the work, the longitudinal centre line of air current spray nozzle is coaxial with laser beam, at air current spray nozzle rear, be provided with water jet nozzle, in the plane that Water projectile centerline forms in laser beam center line and the workpiece joint-cutting of processing.
The diameter of described water jet nozzle spray orifice and gas Nozzle is mm magnitude.
The water that described water jet nozzle sprays is the ultra-pure water of deionized water or distilled water.
In the plane of the longitudinal centre line of described water jet nozzle spray orifice in laser beam center line and joint-cutting formation.The longitudinal centre line of described water jet nozzle spray orifice and the intersection point of surface of the work and the distance of laser beam between the center of the focus point of surface of the work are 1～2mm.
The air pump that is connected to gas bomb is connected with air current spray nozzle, produces air flow stream.Water pump connects water jet nozzle, to produce water jet.Computer controlling center connects controls air pump and water pump, controls the pressure of its start and stop and generation.Computer controlling center also connects laser controlling unit, controls laser power.
Described workbench is provided with workbench X-axis driving mechanism and workbench Y-axis driving mechanism, X-axis drive motors and Y-axis drive motors be connecting working table X-axis driving mechanism and workbench Y-axis driving mechanism respectively, computer controlling center connects X-axis drive motors and Y-axis drive motors, controls the movement of workbench.
There is the working chamber that ultra-pure water is housed described workbench top, and the boss of bench-top is positioned at working chamber, and workbench boss end face is higher than the water surface of working chamber, and workpiece is fixed on workbench boss end face.
Working chamber has overfall, and the minimum point of overfall is lower than bench top.
The overfall of working chamber accesses pond through overflow pipe, in pond, storage produces the ultra-pure water of water jet, the import of water pump is through the ultra-pure water in filter access pond, in absorption pond, and exit of pump accesses water jet nozzle, and the press water pumping produces water jet through water jet nozzle.
Described exit of pump accesses water jet nozzle through ball valve, and ball valve is equivalent to water flow switch, opens ball valve water pump and just can send water to water jet nozzle.
Described exit of pump is through three one end that connect pressure regulating overflow valve, and the other end of pressure regulating overflow valve takes back pond through overflow surge pipe.Regulate pressure regulating overflow valve adjustable water Flow Velocity, thereby regulate the water jet jet velocity of water jet nozzle.Water jet jet velocity is adjusted according to the thickness of the material of processing.
Before starting working, confirm that pipeline is unimpeded, open ball valve, open water pump, regulate pressure regulating overflow valve, water jet nozzle produces the stable water jet of high speed, and making the distance at Water projectile focus point center on surface of the work at surface of the work spray site center and laser beam is 1～2mm.Add open water pump in man-hour, flow through successively filter, water pump, ball valve of water, goes out from the spray orifice high velocity jet of water jet nozzle, flows in working chamber, then is back to pond from the overfall of working chamber, water circulation work from surface of the work.
Compared with prior art, the advantage of the system of the compound auxiliary laser processing of the utility model water jet and air-flow is: 1, Water projectile is immediately following enter joint-cutting after air flow stream, the expansion of the stable incompressible Water projectile constraint gas spraying, make it to enter joint-cutting depths, improve transmission of power, improve air flow stream in the power souring of joint-cutting depths; 2, Water projectile does not contact the laser beam in joint-cutting, therefore applicable to the processing of different wave length laser; 3, the cooling effect of water jet also can be eliminated the heat affecting of laser, eliminates the residual stress of Laser Processing, avoids the micro-crack producing; And the high speed of the current that spray washes away and can also take away the molten drop that Laser Processing generates, effectively stop the generation of recast layer, obviously improve laser ablation efficiency and crudy; 4, native system is particularly suitable for the thicker sheet material of Laser Processing, and the sheet material effect that is especially greater than 15mm thickness is remarkable, overcomes a difficult problem for conventional laser processing thick sheet, and superiority is obvious; 5, the water jet nozzle of native system is simple in structure, easy for installation, is easy to transformation in existing laser-processing system and realizes.
Accompanying drawing explanation
Fig. 1 is the structural representation of the system embodiment of the compound auxiliary laser processing of this water jet and air-flow.
Figure internal label is:
1, laser controlling unit, 2, pulse laser, 3, speculum, 4, condenser lens, 5, air current spray nozzle, 6, workpiece, 7, working chamber, 8, workbench, 9, pond, 10, filter, 11, pressure regulating overflow valve, 12, water pump, 13, ball valve, 14, water jet nozzle, 15, air pump, 16, gas bomb.
The specific embodiment
The structure of the system embodiment of this composite water jet and the processing of air-flow auxiliary laser as shown in Figure 1, there is the working chamber 7 that ultra-pure water is housed workbench 8 tops, the boss at workbench 8 tops is positioned at working chamber 7, workbench 8 boss end faces are higher than the water surface of working chamber 7, and workpiece 6 is fixed on workbench 8 boss end faces.Working chamber 7 has overfall, and the minimum point of overfall is lower than workbench 8 end faces.
The overfall of working chamber 7 is through overflow pipe access pond 9, the interior storage in pond 9 produces the ultra-pure water of water jet, the import of water pump 12 is through the ultra-pure water in filter 10 access ponds 9, in absorption pond 9, water pump 12 outlet access water jet nozzles 14, the press water pumping produces water jet through water jet nozzle 14.
This routine ultra-pure water used is deionized water, also can use distilled water.
These routine water pump 12 outlets connect threeway, and an outlet of threeway is through ball valve 13 access water jet nozzles 14, and another outlet of threeway connects pressure regulating overflow valve 11 one end, and the other end of pressure regulating overflow valve 11 takes back pond 9 through overflow surge pipe.
Workpiece 6 is fixed on workbench 8 surfaces, workbench 8 is provided with workbench X-axis driving mechanism and workbench Y-axis driving mechanism, X-axis drive motors and Y-axis drive motors be connecting working table X-axis driving mechanism and workbench Y-axis driving mechanism respectively, computer controlling center connects X-axis drive motors and Y-axis drive motors, controls the movement of workbench 8.
Computer controlling center also connects laser controlling unit 1, air pump 15 and water pump 12.
This routine water jet nozzle injection diameter is 1mm, and the diameter of gas nozzle spray orifice is 1mm.
The longitudinal centre line of this routine water jet nozzle spout and the intersection point of surface of the work and the laser beam distance at the focus point center of surface of the work is 1.5mm.
After this routine system installation, using the iron plate of 15mm as workpiece 6, be fixed on workbench 8 boss end faces, adjusting operating platform 8, makes the district to be processed of workpiece 6 be placed in Laser Focusing region, accommodation reflex mirror 3, condenser lens 4, and laser beam focuses on workpiece 6 surfaces.Adjusting air pump 15, confirmation air velocity are stablized, and laser spot, in air flow stream center, is opened water pump 12, regulate the jet velocity of pressure regulating overflow valve 11, adjusting Water projectile.Start laser controlling unit 1 and give off laser beam, carry out the compound auxiliary Laser Processing of water jet and air-flow.Because of the expansion of Water projectile constraint air flow stream, air flow stream is goed deep into joint-cutting depths, improves the power souring of air-flow, simultaneously water jet to laser processing zone carry out cooling, wash away, improve crudy.Reach work piece cut face without recast layer, without residual stress, non-microcracked " three without " processing effect.
Comparative example, with identical laser instrument, equal-wattage, identical gas nozzle, identical gas pressure, process identical sheet material, the joint-cutting of same length is consuming time 1.3 times of the present embodiment its process time, and the joint-cutting degree of depth only reaches 10～12mm, cannot complete the cutting to the iron plate of 15mm.
Above-described embodiment, is only the specific case that the purpose of this utility model, technical scheme and beneficial effect are further described, and the utility model is not defined in this.All any modifications of making, be equal to replacement, improvement etc., within being all included in protection domain of the present utility model within scope of disclosure of the present utility model.
Claims (6)
1. the system that the compound auxiliary laser of water jet and air-flow is processed, comprise laser controlling unit, pulse laser, condenser lens, gas nozzle and workbench, workpiece is fixed on workbench surface, laser controlling unit connects, control impuls laser instrument, the laser beam line focus lens bunching that pulse laser sends, through after air current spray nozzle, focus on surface of the work, the longitudinal centre line of air current spray nozzle is coaxial with laser beam, it is characterized in that:
Described air current spray nozzle (5) rear, is provided with water jet nozzle (14), in the plane that the Water projectile centerline that described water jet nozzle (14) produces forms in laser beam center line and workpiece (6) joint-cutting of processing.
2. the system that the compound auxiliary laser of water jet according to claim 1 and air-flow is processed, is characterized in that:
The diameter of described water jet nozzle (14) spray orifice and gas nozzle (5) spray orifice is mm magnitude.
3. the system that the compound auxiliary laser of water jet according to claim 1 and air-flow is processed, is characterized in that:
Intersection point and the distance of laser beam between the center of the surperficial focus point of workpiece (6) on the longitudinal centre line of described water jet nozzle (14) spray orifice and workpiece (6) surface are 1mm～2mm.
4. the system that the compound auxiliary laser of water jet according to claim 1 and air-flow is processed, is characterized in that:
Air pump (15) connects air current spray nozzle (5), and water pump (12) connects water jet nozzle (14), and computer controlling center connects controls air pump (15) and water pump (12); Computer controlling center also connects laser controlling unit (1).
5. the system that the compound auxiliary laser of water jet according to claim 1 and air-flow is processed, is characterized in that:
There is the working chamber (7) that ultra-pure water is housed described workbench (8) top, the boss at workbench (8) top is positioned at working chamber (7), workbench (8) boss end face is higher than the water surface of working chamber (7), and workpiece (6) is fixed on workbench (8) boss end face; Working chamber (7) has overfall, and the minimum point of overfall is lower than workbench (8) end face;
The overfall of working chamber (7) accesses pond (9) through overflow pipe, and in pond (9), storage produces the ultra-pure water of water jet, and the import of water pump (12) accesses in pond (9) through filter (10), water pump (12) outlet access water jet nozzle (14).
6. the system that the compound auxiliary laser of water jet according to claim 5 and air-flow is processed, is characterized in that:
Described workbench (5) is provided with workbench X-axis driving mechanism and workbench Y-axis driving mechanism, X-axis drive motors and Y-axis drive motors be connecting working table X-axis driving mechanism and workbench Y-axis driving mechanism respectively, computer controlling center connects X-axis drive motors and Y-axis drive motors, controls the movement of workbench.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320422178.6U CN203390395U (en) | 2013-07-16 | 2013-07-16 | Water jet-air flow recombined assisting laser machining system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201320422178.6U CN203390395U (en) | 2013-07-16 | 2013-07-16 | Water jet-air flow recombined assisting laser machining system |
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| CN203390395U true CN203390395U (en) | 2014-01-15 |
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| CN201320422178.6U Expired - Fee Related CN203390395U (en) | 2013-07-16 | 2013-07-16 | Water jet-air flow recombined assisting laser machining system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104281012A (en) * | 2014-09-18 | 2015-01-14 | 合肥芯硕半导体有限公司 | Gas shielded lens |
| CN109483060A (en) * | 2018-11-23 | 2019-03-19 | 上海交通大学 | Air film hole ultrafast laser processing unit (plant) and method under water jet environment |
-
2013
- 2013-07-16 CN CN201320422178.6U patent/CN203390395U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104281012A (en) * | 2014-09-18 | 2015-01-14 | 合肥芯硕半导体有限公司 | Gas shielded lens |
| CN104281012B (en) * | 2014-09-18 | 2016-08-24 | 合肥芯硕半导体有限公司 | A kind of gas shield camera lens |
| CN109483060A (en) * | 2018-11-23 | 2019-03-19 | 上海交通大学 | Air film hole ultrafast laser processing unit (plant) and method under water jet environment |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140115 Termination date: 20150716 |
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| EXPY | Termination of patent right or utility model |