CN104281012B - A kind of gas shield camera lens - Google Patents
A kind of gas shield camera lens Download PDFInfo
- Publication number
- CN104281012B CN104281012B CN201410479027.3A CN201410479027A CN104281012B CN 104281012 B CN104281012 B CN 104281012B CN 201410479027 A CN201410479027 A CN 201410479027A CN 104281012 B CN104281012 B CN 104281012B
- Authority
- CN
- China
- Prior art keywords
- protective cover
- lens barrel
- cavity
- spacer ring
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The invention discloses a kind of gas shield camera lens, including lens barrel, protective cover, gas joint, valve etc..Eyeglass, spacer ring are set in lens barrel, are the core component of exposure sources.The protective cover increased, protects the cleaning of lens barrel interior lens.Effluent air effectively takes away the heating of lens barrel, and protection is played in the calorifics deformation to lens barrel.The pure air of valve blowout can also blow away the dust of exposure area to be taken away, it is ensured that the cleanliness factor of exposure area during exposure.It is greatly improved the yield of exposure.Present configuration is simple, processes and install very convenient.The dedusting of exposure area when effectively solving exposure, the problem such as heat radiation of lens barrel.
Description
Technical field
The present invention relates to semiconductor lithography machine camera lens field, specifically a kind of gas shield camera lens.
Background technology
Camera lens is the core component of LDI direct write exposure sources.The performance parameter of camera lens affects live width and the line of pcb board exposure
The critical component of wide uniformity.So the quality of camera lens is even more important in LDI equipment.In PCB exposure manufacture process, front one work
Sequence is binding dust.Main target be glue pcb board pad pasting after the dust that is stained with and foul.Because in PCB exposes, in air
Dust and foreign body influence whether the exposure quality of pcb board, and the serious meeting of dust causes ill-exposed, and wiring board is not turned on etc. asking
Topic.So binding dust to be carried out before pcb board exposure.But before arriving exposure after binding dust, the space in the middle of this transports and in time wait,
It is also possible to part dust be stained with.Also the pcb board quality after exposure is influenced whether.
Summary of the invention it is an object of the invention to provide a kind of gas shield camera lens, to solve the cleaning of prior art camera lens
The cleaning difficulties of the exposure area in protection, the heat radiation of camera lens and exposure process.
In order to achieve the above object, the technical solution adopted in the present invention is:
A kind of gas shield camera lens, it is characterised in that: include the protective cover of hollow tube-shape, protective cover round tip, circle
Shape bottom center is respectively arranged with central through hole, and in protective cover, concentrically axle is provided with lens barrel, and the top of lens barrel, bottom are the most right
Should be arranged in protective cover round tip, rounded bottom central through hole, and lens barrel top, bottom outer wall are circular with protective cover respectively
Top, rounded bottom central through hole inner wall sealing coordinate, and described protective cover upper portion side wall is provided with and the gas connected in protective cover
Joint, protective cover rounded bottom is provided with valve that is multiple and that connect in protective cover, is filled with gas between protective cover and lens barrel.
Described a kind of gas shield camera lens, it is characterised in that: in described lens barrel top exterior walls and protective cover round tip
Connected by thread seal between heart through-hole wall.
Described a kind of gas shield camera lens, it is characterised in that: described protective cover rounded bottom central through hole inwall is arranged
Having cannelure, be provided with sealing ring in cannelure, described sealing ring sealing shroud is in lens barrel bottom outer wall.
Described a kind of gas shield camera lens, it is characterised in that: it is provided with in described protective cover round tip central through hole
It is pressed on the trim ring at lens barrel top.
Described a kind of gas shield camera lens, it is characterised in that: be filled with between protective cover and camera lens clean compressed gas or
Noble gas.
Described a kind of gas shield camera lens, it is characterised in that: it is provided with vertical cavity, cavity and mirror in described lens barrel
Cylinder, protective cover concentrically axle, cavity is set to the step-like cavity in three grades, upper, middle and lower that diameter from top to bottom is sequentially reduced, and in
Step cavity height is the highest, is vertically disposed with the first spacer ring of tubular, the second spacer ring, is positioned in cavity of topping bar
First spacer ring inner top of side, bottom are respectively arranged with eyeglass, and the second spacer ring inner bottom part being positioned at lower section is provided with eyeglass, middle
Being provided with the 3rd spacer ring of tubular in the cavity of rank, the 3rd spacer ring inner top is provided with eyeglass, is provided with circle in cavity of getting out of a predicament or an embarrassing situation
The 4th tubular spacer ring, the eyeglass that the 4th spacer ring inner top, bottom are respectively arranged with in eyeglass, and upper, middle and lower step cavity divides
Not and lens barrel, protective cover concentrically axle.
The Advantageous Effects of the present invention is embodied in following several aspect:
1. the present invention increases a lens protection cover, and adnexa on original camera lens.Processing is simple, easy for installation, manufactures
Low cost.
2. the present invention can effectively solve the cleanliness factor of exposure area during exposure, increases the yield of LDI equipment.
3. the present invention can effectively solve the heat dissipation problem of exposure cameras, it is ensured that the stable performance of exposure cameras.
Accompanying drawing explanation
Fig. 1 is present configuration sectional view.
Fig. 2 is present configuration top view.
Detailed description of the invention
Shown in Figure 1, a kind of gas shield camera lens, include the protective cover 2 of hollow tube-shape, protective cover 2 round tip,
Rounded bottom center is respectively arranged with central through hole, and in protective cover 2, concentrically axle is provided with lens barrel 1, the top of lens barrel 1, bottom
During correspondence is arranged on protective cover 2 round tip, rounded bottom central through hole respectively, and lens barrel 1 top, bottom outer wall respectively with guarantor
Guard shield 2 round tip, rounded bottom central through hole inner wall sealing coordinate, and protective cover 2 upper portion side wall is provided with and connects in protective cover 2
Logical gas joint 5, protective cover 2 rounded bottom be provided with valve 4 that is multiple and that connect in protective cover 2, protective cover 2 and lens barrel 1 it
Between be filled with gas.
It is connected by thread seal between lens barrel 1 top exterior walls with protective cover 2 round tip central through hole inwall.
Protective cover 2 rounded bottom central through hole inwall is provided with cannelure, is provided with sealing ring 3, sealing ring 3 in cannelure
Sealing shroud is in lens barrel 1 bottom outer wall.
The trim ring 6 being pressed on lens barrel 1 top it is provided with in protective cover 2 round tip central through hole.
Clean compressed gas or noble gas it is filled with between protective cover 2 and camera lens 1.
Being provided with vertical cavity, cavity and lens barrel 1, protective cover 2 concentrically axle in lens barrel 1, cavity is set to from up to
The step-like cavity in three grades, the upper, middle and lower that lower diameter is sequentially reduced, and middle step cavity height is the highest, along perpendicular in cavity of topping bar
To being disposed with first spacer ring the 81, second spacer ring 82 of tubular, the first spacer ring 81 inner top above, bottom are respectively
Being provided with eyeglass 7, the second spacer ring 82 inner bottom part being positioned at lower section is provided with eyeglass, is provided with the of tubular in middle step cavity
Three spacer rings 83, the 3rd spacer ring 83 inner top is provided with eyeglass, is provided with the 4th spacer ring 84 of tubular in cavity of getting out of a predicament or an embarrassing situation, and the 4th
Spacer ring 84 inner top, bottom be respectively arranged with the eyeglass in eyeglass, and upper, middle and lower step cavity respectively with lens barrel 1, protective cover 2
Concentrically axle.
The present invention includes that lens barrel 1, protective cover 2, sealing ring 3, valve 4(are opened on protective cover), gas joint 5, trim ring 6, mirror
Sheet 7, and spacer ring 81-84.Structural member in lens barrel includes eyeglass, spacer ring, and trim ring etc. constitutes camera lens body.Peripheral at lens barrel 1
Fixing protective cover 2, lens barrel 1 is threaded in protective cover 2 top, drives cannelure, place close inside protective cover lower central through hole
Seal 3.Protective cover central through hole inside circumference and lens barrel periphery constitute airtight cavity.Clean compressing hole passes through trachea
It is connected with gas joint, makes gassy between protective cover and lens barrel.Gas in protective cover is blown out by valve.Valve is blown
Pressure and flow velocity are by the regulation switch-mode regulation on gas joint.The optical axis of valve and optical axis has certain angle, it is ensured that blowout clean
The dust of exposure area is blown away by clean gas.
The present invention includes protective cover, lens barrel, gas joint, lens protection cover, valve, arranges different parameters specification in lens barrel
Eyeglass, and the structure such as eyeglass spacer ring.Gas joint one end is arranged on protective cover, and one end is connected on source of the gas by trachea, gas
Source is clean compressed air or noble gas, has certain pressure, it is ensured that gas constantly flows through camera lens.On gas joint permissible
Regulation blow gas pressure size.Protective cover is arranged on outside lens barrel, and protective cover top is tightly connected with lens barrel, the bottom of protective cover and mirror
Cylinder also ensures to seal.Clean gas can only blow out from the valve of protective cover.The mainly eyeglass in protection lens barrel is clean, beneficially mirror
The heat radiation of cylinder.Valve can be directly in perforate on protective cover, it is also possible to is fabricated separately, is then attached on protective cover.Valve
Protective cover bottom circumference, being directed downward of valve blowout, there is the most outwards angle with lens barrel central optical axis, it is ensured that camera lens
There are gas blow-out, the cleaning of protection exposure area in exposure process always.Valve blow-through in exposure process on protective cover
Gas, it is ensured that the cleaning of exposure area.In protective cover, the gas of flowing takes away the heat of lens barrel, the beneficially heat radiation of lens barrel, reduces
The calorifics deformation of lens barrel, the beneficially stable performance of lens barrel.
Claims (5)
1. a gas shield camera lens, it is characterised in that: include the protective cover of hollow tube-shape, protective cover round tip, circle
Bottom center is respectively arranged with central through hole, and in protective cover, concentrically axle is provided with lens barrel, the top of lens barrel, bottom correspondence respectively
Be arranged in protective cover round tip, rounded bottom central through hole, and lens barrel top, bottom outer wall respectively with protective cover circular top
End, rounded bottom central through hole inner wall sealing coordinate, and described protective cover upper portion side wall is provided with and connects with the gas connected in protective cover
Head, protective cover rounded bottom is provided with valve that is multiple and that connect in protective cover, is filled with gas between protective cover and lens barrel；Described
Being provided with vertical cavity, cavity and lens barrel, protective cover concentrically axle in lens barrel, cavity is set to diameter from top to bottom and subtracts successively
The step-like cavity in three grades, little upper, middle and lower, and middle step cavity height is the highest, is vertically disposed with in cavity of topping bar
First spacer ring of tubular, the second spacer ring, the first spacer ring inner top, bottom above are respectively arranged with eyeglass, under being positioned at
Second spacer ring inner bottom part of side is provided with eyeglass, is provided with the 3rd spacer ring of tubular in middle step cavity, top in the 3rd spacer ring
Portion is provided with eyeglass, is provided with the 4th spacer ring of tubular in cavity of getting out of a predicament or an embarrassing situation, and the 4th spacer ring inner top, bottom are respectively arranged with
Eyeglass in eyeglass, and upper, middle and lower step cavity respectively with lens barrel, protective cover concentrically axle.
A kind of gas shield camera lens the most according to claim 1, it is characterised in that: described lens barrel top exterior walls and protective cover
Connected by thread seal between round tip central through hole inwall.
A kind of gas shield camera lens the most according to claim 1, it is characterised in that: described protective cover rounded bottom center leads to
Hole inwall is provided with cannelure, is provided with sealing ring in cannelure, and described sealing ring sealing shroud is in lens barrel bottom outer wall.
A kind of gas shield camera lens the most according to claim 1, it is characterised in that: described protective cover round tip center leads to
The trim ring being pressed on lens barrel top it is provided with in hole.
A kind of gas shield camera lens the most according to claim 1, it is characterised in that: it is filled with cleaning between protective cover and camera lens
Compressed gas or noble gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410479027.3A CN104281012B (en) | 2014-09-18 | 2014-09-18 | A kind of gas shield camera lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410479027.3A CN104281012B (en) | 2014-09-18 | 2014-09-18 | A kind of gas shield camera lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104281012A CN104281012A (en) | 2015-01-14 |
| CN104281012B true CN104281012B (en) | 2016-08-24 |
Family
ID=52256026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410479027.3A Expired - Fee Related CN104281012B (en) | 2014-09-18 | 2014-09-18 | A kind of gas shield camera lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104281012B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104965393A (en) * | 2015-07-21 | 2015-10-07 | 合肥芯硕半导体有限公司 | Exposure lens protection structure |
| CN105223786B (en) * | 2015-10-30 | 2017-11-07 | 武汉华星光电技术有限公司 | Method and device for preventing camera lens atomized inside |
| CN105398068A (en) * | 2015-11-27 | 2016-03-16 | 江苏视客光学眼镜有限公司 | Green manufacturing method and system of spectacle lenses |
| CN106997150B (en) * | 2016-01-22 | 2018-10-16 | 上海微电子装备（集团）股份有限公司 | A kind of method and its application reducing lithographic objective pressure-sensitivity |
| CN114995024A (en) * | 2022-06-02 | 2022-09-02 | 中冶赛迪信息技术(重庆)有限公司 | Industrial camera heat dissipation device based on industrial scene |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1877455A (en) * | 2005-06-10 | 2006-12-13 | 国际商业机器公司 | Immersion photo-etching device with equal pressure at least on projection optical part and wafer and method thereof |
| CN203390395U (en) * | 2013-07-16 | 2014-01-15 | 桂林电子科技大学 | Water jet-air flow recombined assisting laser machining system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004092834A2 (en) * | 2003-04-15 | 2004-10-28 | Carl Zeiss Smt Ag | System for regulating and maintaining a gas atmosphere in an optical system |
| US7446849B2 (en) * | 2004-07-22 | 2008-11-04 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
-
2014
- 2014-09-18 CN CN201410479027.3A patent/CN104281012B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1877455A (en) * | 2005-06-10 | 2006-12-13 | 国际商业机器公司 | Immersion photo-etching device with equal pressure at least on projection optical part and wafer and method thereof |
| CN203390395U (en) * | 2013-07-16 | 2014-01-15 | 桂林电子科技大学 | Water jet-air flow recombined assisting laser machining system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104281012A (en) | 2015-01-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104281012B (en) | A kind of gas shield camera lens | |
| CN101244498B (en) | Partial dry type automatic welding drainage arrangement | |
| CN206122930U (en) | Frock clamp blows | |
| CN207746553U (en) | Laser soldering device and laser welding coaxial shielding gas mouth | |
| CN106392073A (en) | Selective laser sintering and melting equipment | |
| JP2017518882A5 (en) | ||
| CN106772903A (en) | Suction nozzle for assembling trim ring | |
| CN102166894A (en) | Blowing protection device of vibration mirror of marking machine | |
| CN107953031A (en) | A kind of laser cutting head | |
| CN205453941U (en) | Control mounting bracket with automatically function of cooling down | |
| CN201907274U (en) | Air blowing protector for marking machine scanner | |
| CN213507204U (en) | Annular gas protection assembly for annular laser wire feeding cladding head | |
| CN205587837U (en) | Laser cutting head blows protection gas device | |
| CN209035741U (en) | Assist guiding device | |
| CN218612447U (en) | Centering welding tool for semiconductor base block | |
| CN207103840U (en) | A kind of blowning installation of the transmissive mirror of the laser lens of protection 3D printer | |
| CN104965393A (en) | Exposure lens protection structure | |
| CN205038436U (en) | Exposure camera lens protection architecture | |
| CN209206733U (en) | Laser cutting head | |
| CN209868106U (en) | Base and platform are placed to work piece | |
| CN203904429U (en) | Peeping device for continuous hot dipping boiler nose of strip steel zinc pot | |
| CN209741005U (en) | Convenient high-efficient optic fibre coating of dismantling removes bubble device | |
| CN105689892B (en) | Laser cutting head protecting gas blowing device | |
| CN113977077B (en) | Height-adjustable coaxial blowing protection device for coaxial wire feeding laser head | |
| CN213437791U (en) | Coaxial blowing nozzle of ultrafast laser cutting head |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160824 Termination date: 20210918 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |