CN103358027A - Laser processing method and system assisted by water jet and gas jet - Google Patents
Laser processing method and system assisted by water jet and gas jet Download PDFInfo
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- CN103358027A CN103358027A CN2013102976644A CN201310297664A CN103358027A CN 103358027 A CN103358027 A CN 103358027A CN 2013102976644 A CN2013102976644 A CN 2013102976644A CN 201310297664 A CN201310297664 A CN 201310297664A CN 103358027 A CN103358027 A CN 103358027A
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Abstract
The invention discloses a laser processing method and system assisted by a water jet and a gas jet. According to the laser processing method, a laser beam is focused on the surface of a workpiece; a gas jet beam of which the diameter is greater than that of the focus point of the laser beam is coaxial with the laser beam; after the gas jet beam enters a cut slot, a water jet beam behind the gas jet beam also enters the cut slot. The center line of the water jet beam is in a plane formed by the center line of the laser beam and the cut slot; the intersection point of the center line of the water jet beam and the surface of the workpiece is 1-2 mm from the focus point of the laser beam. The system comprises a laser generating mechanism, a gas jet nozzle and a workbench, wherein the longitudinal center line of the jet hole of a water jet nozzle behind the gas jet nozzle is in the plane formed by the center line of the laser beam and the cut slot; a gas pump and a water pump are respectively connected with the gas jet nozzle and the water jet nozzle; water circulates through the water pump, the water jet nozzle, a working cavity above the workbench and a water tank. According to the invention, the water jet beam restrains gas expansion, reduces the heat effect of laser, takes away deposits, and improves the efficiency and quality of laser ablation, so that the invention achieves remarkable effects particularly in processing plates with thicknesses above 15 mm.
Description
Technical field
The invention belongs to technical field of laser processing, be specifically related to the method and system of a kind of water jet for raising Laser Processing efficient and the compound auxiliary laser processing of air-flow.
Background technology
Laser Processing is suitable for most of material, has noncontact, the advantage such as flexible and accurate.But for some application in micron, submicron order etching field, the problems such as heat affected area, deposition and impact failure effect that laser scribing produces can not be ignored.For this reason, in present Laser Processing, adopt assist gas to spray to blow away the splash that laser scribing produces, reduce simultaneously the laser processing zone temperature.But, when the laser ablation working depth strengthens, the amount that the air-flow of gas nozzle enters in the cutting seam obviously reduces, thereby reduced widely the efficient of gas nozzle, can't effectively remove chip and cooling that laser ablation produces, directly affect laser ablation efficient and crudy, can produce recast layer, residual stress and micro-crack etc. such as workpiece.Therefore, the present Laser Processing joint-cutting degree of depth can't be used for the cutting of larger thickness sheet material less than 10mm.
Summary of the invention
The objective of the invention is to disclose the method for a kind of water jet and the compound auxiliary laser processing of air-flow, utilize the expansion of water jet restriction gas, improve efficient and the quality of Laser Processing.
Another object of the present invention is a kind of water jet of the method that water jet and the compound auxiliary laser of air-flow are processed and system of the compound auxiliary laser processing of air-flow of realizing of design, with the coaxial gas nozzle rear of laser beam a water jet nozzle is set in routine again, the expansion of water jet restriction gas, improve Momentum Transfer, make better the machining area cooling simultaneously.
The method of the compound auxiliary laser processing of water jet of the present invention and air-flow, laser beam focuses on surface of the work, and air flow stream is coaxial with laser beam, and the air flow stream diameter is greater than laser beam focus point diameter, at the air flow stream rear Water projectile is arranged, Water projectile also enters in the workpiece joint-cutting of Laser Processing.
Described water jet uses ultra-pure water, and ultra-pure water is deionized water or distilled water.
The centerline of described Water projectile is in the plane of laser beam center line and workpiece joint-cutting formation.
The center line of described Water projectile and the intersection point of surface of the work and the distance of laser beam between the center of surface of the work focus point are 1～2mm.
The present invention is the water jet of the method design of realization water jet and the compound auxiliary laser processing of air-flow and the system of the compound auxiliary laser processing of air-flow, comprise the laser controlling unit, pulse laser, condenser lens, gas nozzle and workbench, workpiece is fixed in the workbench surface, the laser controlling unit connects, the control impuls laser instrument, the laser beam line focus lens bunching that pulse laser sends, focus on surface of the work after passing gas nozzle, the longitudinal centre line of gas nozzle is coaxial with laser beam, at the gas nozzle rear, be provided with water jet nozzle, the Water projectile centerline is in the plane that laser beam center line and the joint-cutting of processing consist of.
The diameter of described water jet nozzle spray orifice and gas Nozzle is the mm magnitude.
The water that described water jet nozzle sprays is the ultra-pure water of deionized water or distilled water.
The longitudinal centre line of described water jet nozzle spray orifice is in the plane of laser beam center line and workpiece joint-cutting formation.The longitudinal centre line of described water jet nozzle spray orifice and the intersection point of surface of the work and the distance of laser beam between the center of the focus point of surface of the work are 1～2mm.
The air pump that is connected to gas bomb is connected with gas nozzle, produces air flow stream.Water pump connects water jet nozzle, to produce water jet.Computer controlling center connects control air pump and water pump, controls the pressure of its start and stop and generation.Computer controlling center also connects the laser controlling unit, the control laser power.
Described workbench is equipped with workbench X-axis driving mechanism and workbench Y-axis driving mechanism, X-axis drive motors and Y-axis drive motors be connecting working table X-axis driving mechanism and workbench Y-axis driving mechanism respectively, computer controlling center connects X-axis drive motors and Y-axis drive motors, the movement of control workbench.
There is the working chamber that ultra-pure water is housed described workbench top, and the boss of bench-top is positioned at working chamber, and workbench boss end face is higher than the water surface of working chamber, and workpiece is fixed in workbench boss end face.
Working chamber has overfall, and the minimum point of overfall is lower than bench top.
The overfall of working chamber accesses the pond through overflow pipe, storage produces the ultra-pure water of water jet in the pond, the import of water pump is through the ultra-pure water in the filter access pond, in the absorption pond, and exit of pump accesses water jet nozzle, and the press water that pumps produces water jet through water jet nozzle.
Described exit of pump accesses water jet nozzle through ball valve, and ball valve is equivalent to water flow switch, opens the ball valve water pump and just can send water to water jet nozzle.
Described exit of pump is through three ends that connect pressure regulating overflow valve, and the other end of pressure regulating overflow valve takes back the pond through the overflow surge pipe.Regulate pressure regulating overflow valve adjustable water Flow Velocity, thus the water jet jet velocity of regulating water jet nozzle.The water jet jet velocity is adjusted according to the thickness of the material of processing.
Before starting working, confirm that pipeline is unimpeded, open ball valve, open water pump, regulate pressure regulating overflow valve, water jet nozzle produces the stable water jet of high speed, and making the distance at Water projectile focus point center on surface of the work at surface of the work spray site center and laser beam is 1～2mm.Add open water pump in man-hour, flow through successively filter, water pump, ball valve of water then goes out from the spray orifice high velocity jet of water jet nozzle, flows in the working chamber from surface of the work, and the overfall from working chamber is back to the pond again, water circulation work.
Compared with prior art, the advantage of the method and system of the compound auxiliary laser processing of water jet of the present invention and air-flow is: 1, Water projectile is immediately following enter joint-cutting after air flow stream, the expansion of the stable incompressible Water projectile constraint gas that sprays, make it to enter the joint-cutting depths, improve transmission of power, improve air flow stream in the power souring of joint-cutting depths; 2, Water projectile does not contact the laser beam in the joint-cutting, so applicable to the processing of different wave length laser; 3, the cooling effect of water jet also can be eliminated the heat affecting of laser, eliminates the residual stress of Laser Processing, avoids the micro-crack that produces; And the high speed of the current that spray washes away and can also take away the molten drop that Laser Processing generates, and effectively stops the generation of recast layer, obviously improves laser ablation efficient and crudy; 4, this method and system are particularly suitable for the thicker sheet material of Laser Processing, and especially the sheet material effect greater than 15mm thickness is remarkable, overcome the difficult problem of conventional laser processing thick sheet, and superiority is obvious; 5, the water jet nozzle of native system is simple in structure, and is easy for installation, is easy to realize the transformation of existing laser-processing system.
Description of drawings
Fig. 1 is the schematic diagram of the embodiment of the method for the compound auxiliary laser processing of this water jet and air-flow;
Fig. 2 is the structural representation of the system embodiment of the compound auxiliary laser processing of this water jet and air-flow.
The figure internal label is:
A, Water projectile, B, laser beam, C, air flow stream;
1, laser controlling unit, 2, pulse laser, 3, speculum, 4, condenser lens, 5, gas nozzle, 6, workpiece, 7, working chamber, 8, workbench, 9, the pond, 10, filter, 11, pressure regulating overflow valve, 12, water pump, 13, ball valve, 14, water jet nozzle, 15, air pump, 16, gas bomb.
The specific embodiment
The embodiment of the method for the compound auxiliary laser processing of water jet and air-flow
The schematic diagram of the embodiment of the method for the compound auxiliary laser of this water jet and air-flow processing as shown in Figure 1,
Laser beam B focuses on surface of the work, and air flow stream C is coaxial with laser beam B, all perpendicular to the surface of workpiece, air flow stream C diameter is greater than laser beam B focus point diameter, at air flow stream C rear Water projectile A is arranged, Water projectile A enters in workpiece 6 joint-cuttings of Laser Processing also perpendicular to the surface of workpiece.
The water of this routine water jet is deionized water, also can adopt distilled water.
The center line of this routine Water projectile and the intersection point of surface of the work and the laser beam distance at the center of the focus point of surface of the work is 1.5mm.
The system embodiment of the compound auxiliary laser processing of water jet and air-flow
The structure of the system embodiment of the compound auxiliary laser processing of this water jet and air-flow as shown in Figure 2, there is the working chamber 7 that ultra-pure water is housed workbench 8 tops, the boss at workbench 8 tops is positioned at working chamber 7, workbench 8 boss end faces are higher than the water surface of working chamber 7, and workpiece 6 is fixed in workbench 8 boss end faces.Working chamber 7 has overfall, and the minimum point of overfall is lower than workbench 8 end faces.
The overfall of working chamber 7 is through overflow pipe access pond 9, pond 9 interior storages produce the ultra-pure water of water jet, the import of water pump 12 is through the ultra-pure water in the filter 10 access ponds 9, in the absorption pond 9, water pump 12 outlet access water jet nozzles 14, the press water that pumps produces water jet through water jet nozzle 14.
This routine used ultra-pure water is deionized water, also can use distilled water.
These routine water pump 12 outlets connect threeway, and an outlet of threeway is through ball valve 13 access water jet nozzles 14, and another outlet of threeway connects an end of pressure regulating overflow valve 11, and the other end of pressure regulating overflow valve 11 takes back pond 9 through the overflow surge pipe.
Computer controlling center also connects laser controlling unit 1, air pump 15 and water pump 12.
This routine water jet nozzle injection diameter is 1mm, and the diameter of gas nozzle spray orifice is 1mm.
The longitudinal centre line of this routine water jet nozzle spout and the intersection point of surface of the work and the laser beam distance at the focus point center of surface of the work is 1.5mm.
After this routine system installation the iron plate of 15mm is fixed in workbench 8 boss end faces as workpiece 6, adjusting operating platform 8 makes the district to be processed of workpiece 6 place the Laser Focusing zone, and accommodation reflex mirror 3, condenser lens 4, laser beam focus on workpiece 6 surfaces.Regulate air pump 15, confirm that air velocity is stable, laser spot is in the air flow stream center, opens water pump 12, the jet velocity of regulate pressure regulating overflow valve 11, regulating Water projectile.Start laser controlling unit 1 and give off laser beam, carry out the compound auxiliary Laser Processing of water jet and air-flow.Because of the expansion of Water projectile constraint air flow stream, air flow stream is goed deep into the joint-cutting depths, improves the power souring of air-flow, and water jet cools off, washes away laser processing zone simultaneously, improves crudy.Reach the work piece cut face without recast layer, without residual stress, non-microcracked " three without " processing effect.
Comparative Examples, with identical laser instrument, equal-wattage, identical gas nozzle, identical gas pressure, process identical sheet material, the joint-cutting of same length is consuming time 1.3 times of present embodiment its process time, and the joint-cutting degree of depth only reaches 10～12mm, can't finish the cutting to the iron plate of 15mm.
Above-described embodiment only is the specific case that purpose of the present invention, technical scheme and beneficial effect are further described, and the present invention is defined in this.All any modifications of within scope of disclosure of the present invention, making, be equal to replacement, improvement etc., all be included within protection scope of the present invention.
Claims (10)
1. the method for the compound auxiliary laser of water jet and air-flow processing, laser beam focuses on surface of the work, and air flow stream is coaxial with laser beam, and the air flow stream diameter is characterized in that greater than laser beam focus point diameter:
There is Water projectile (A) at described air flow stream (C) rear, and Water projectile (A) also enters in workpiece (6) joint-cutting of Laser Processing.
2. the method for the compound auxiliary laser of water jet according to claim 1 and air-flow processing is characterized in that:
Described water jet uses ultra-pure water, and ultra-pure water is deionized water or distilled water.
3. the method for the compound auxiliary laser of water jet according to claim 1 and air-flow processing is characterized in that:
The centerline of described Water projectile (A) is in the plane of laser beam (B) center line and workpiece (6) joint-cutting formation.
4. the method for the compound auxiliary laser of water jet according to claim 1 and air-flow processing is characterized in that:
Intersection point and the distance of laser beam (B) between the center of the surperficial focus point of workpiece (6) on the center line of described Water projectile (A) and workpiece (6) surface are 1～2mm.
5. the system of the composite water jet of the method design of the compound auxiliary laser processing of each described water jet and air-flow and the processing of air-flow auxiliary laser in 4 according to claim 1, comprise laser controlling unit, pulse laser, condenser lens, gas nozzle and workbench, workpiece is fixed in the workbench surface, the laser controlling unit connects, the control impuls laser instrument, the laser beam line focus lens bunching that pulse laser sends, focus on surface of the work after passing gas nozzle, the longitudinal centre line of gas nozzle is coaxial with laser beam, it is characterized in that:
Described gas nozzle (5) rear is provided with water jet nozzle (14), and the Water projectile centerline that described water jet nozzle (14) produces is in the plane that laser beam center line and workpiece (6) joint-cutting of processing consist of.
6. the system of the compound auxiliary laser of water jet according to claim 5 and air-flow processing is characterized in that:
The diameter of described water jet nozzle (14) spray orifice and gas nozzle (5) spray orifice is the mm magnitude.
7. the system of the compound auxiliary laser of water jet according to claim 5 and air-flow processing is characterized in that:
Intersection point and the distance of laser beam between the center of the surperficial focus point of workpiece (6) on the longitudinal centre line of described water jet nozzle (14) spray orifice and workpiece (6) surface are 1～2mm.
8. the system of the compound auxiliary laser of water jet according to claim 5 and air-flow processing is characterized in that:
Air pump (15) connects gas nozzle (5), and water pump (12) connects water jet nozzle (14), and computer controlling center connects control air pump (15) and water pump (12); Computer controlling center also connects laser controlling unit (1).
9. the system of the compound auxiliary laser of water jet according to claim 5 and air-flow processing is characterized in that:
There is the working chamber (7) that ultra-pure water is housed described workbench (8) top, the boss at workbench (8) top is positioned at working chamber (7), workbench (8) boss end face is higher than the water surface of working chamber (7), and workpiece (6) is fixed in workbench (8) boss end face; Working chamber (7) has overfall, and the minimum point of overfall is lower than workbench (8) end face;
The overfall of working chamber (7) accesses pond (9) through overflow pipe, and storage produces the ultra-pure water of water jet in pond (9), and the import of water pump (12) accesses in the pond (9) through filter (10), water pump (12) outlet access water jet nozzle (14).
10. the system of the compound auxiliary laser of water jet according to claim 9 and air-flow processing is characterized in that:
Described workbench (5) is equipped with workbench X-axis driving mechanism and workbench Y-axis driving mechanism, X-axis drive motors and Y-axis drive motors be connecting working table X-axis driving mechanism and workbench Y-axis driving mechanism respectively, computer controlling center connects X-axis drive motors and Y-axis drive motors, the movement of control workbench.
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| CN104551393A (en) * | 2015-01-19 | 2015-04-29 | 桂林电子科技大学 | Liquid film protecting laser processing system and method |
| CN105537761A (en) * | 2016-02-23 | 2016-05-04 | 大族激光科技产业集团股份有限公司 | Laser cutting auxiliary device |
| CN106113900A (en) * | 2016-08-11 | 2016-11-16 | 浙江镭鹏智能科技有限公司 | Laser engraving machine |
| CN106112260A (en) * | 2016-08-24 | 2016-11-16 | 江苏中科大港激光科技有限公司 | Laser-beam welding machine with purifier |
| CN106312302A (en) * | 2016-10-27 | 2017-01-11 | 桂林电子科技大学 | Self-focusing laser processing device |
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| CN107073502B (en) * | 2014-06-23 | 2019-12-06 | 辛诺瓦有限公司 | Method for determining the position of a liquid jet |
| CN107073502A (en) * | 2014-06-23 | 2017-08-18 | 辛诺瓦有限公司 | For the method for the position for determining liquid jet |
| CN104551393A (en) * | 2015-01-19 | 2015-04-29 | 桂林电子科技大学 | Liquid film protecting laser processing system and method |
| CN105537761A (en) * | 2016-02-23 | 2016-05-04 | 大族激光科技产业集团股份有限公司 | Laser cutting auxiliary device |
| CN105537761B (en) * | 2016-02-23 | 2017-09-29 | 大族激光科技产业集团股份有限公司 | It is cut by laser servicing unit |
| CN106113900B (en) * | 2016-08-11 | 2019-06-14 | 浙江镭鹏智能科技有限公司 | Laser engraving machine |
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| CN106112260A (en) * | 2016-08-24 | 2016-11-16 | 江苏中科大港激光科技有限公司 | Laser-beam welding machine with purifier |
| CN106312302A (en) * | 2016-10-27 | 2017-01-11 | 桂林电子科技大学 | Self-focusing laser processing device |
| CN106312302B (en) * | 2016-10-27 | 2019-02-22 | 桂林电子科技大学 | A kind of self-focusing laser processing device |
| CN106636607A (en) * | 2017-01-03 | 2017-05-10 | 中国矿业大学 | Controllable constrained laser micro shot peening intensification device and method thereof |
| CN108326554B (en) * | 2018-04-12 | 2024-05-10 | 桂林电子科技大学 | Laser water jet composite machining system |
| CN108326554A (en) * | 2018-04-12 | 2018-07-27 | 桂林电子科技大学 | A kind of laser water jet Machining System |
| CN111312839A (en) * | 2018-12-12 | 2020-06-19 | 北京汉能光伏投资有限公司 | Method and system for manufacturing thin film light-transmitting chip |
| CN110625273A (en) * | 2019-03-25 | 2019-12-31 | 中国科学院宁波材料技术与工程研究所 | Laser processing method and device |
| CN110125532A (en) * | 2019-05-15 | 2019-08-16 | 哈尔滨工业大学 | A kind of method, system and its equipment of water guiding laser processing workpiece |
| CN110788483A (en) * | 2019-10-30 | 2020-02-14 | 上海润势科技有限公司 | Low-temperature cutting method and device suitable for HIT battery |
| CN110788483B (en) * | 2019-10-30 | 2021-10-01 | 上海润势科技有限公司 | Low-temperature cutting method and device suitable for HIT battery |
| CN111940907A (en) * | 2020-07-28 | 2020-11-17 | 南京理工大学 | Device and method for preparing micro-nano structure by flowing water assisted ultrafast laser |
| CN112192056A (en) * | 2020-09-29 | 2021-01-08 | 中国航发动力股份有限公司 | Method and device for gas-liquid assisted laser machining of micropores |
| CN112605528A (en) * | 2020-12-09 | 2021-04-06 | 淮阴工学院 | Micro-nano structure laser forming device and forming method |
| CN113210883A (en) * | 2021-04-16 | 2021-08-06 | 青岛理工大学 | Solid-liquid-gas three-phase abrasive flow laser composite cutting device |
| CN113210883B (en) * | 2021-04-16 | 2023-01-24 | 青岛理工大学 | Solid-liquid-gas three-phase abrasive flow laser composite cutting device |
| CN114425663A (en) * | 2022-01-25 | 2022-05-03 | 广州大学 | Water-based jet laser strengthening processing equipment |
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Application publication date: 20131023 |