CN104551393B - A kind of laser-processing system of liquid film protection and method - Google Patents
A kind of laser-processing system of liquid film protection and method Download PDFInfo
- Publication number
- CN104551393B CN104551393B CN201510024855.2A CN201510024855A CN104551393B CN 104551393 B CN104551393 B CN 104551393B CN 201510024855 A CN201510024855 A CN 201510024855A CN 104551393 B CN104551393 B CN 104551393B
- Authority
- CN
- China
- Prior art keywords
- jet
- workpiece
- liquid film
- laser
- main burner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The present invention is laser-processing system and the method for the protection of a kind of liquid film, and the workbench of native system fixation workpiece is installed in container, and Laser Focusing is in surface of the work.Be furnished with main burner and pilot jet, the two angle of cut comparing the center line of main burner and horizontal plane is less, and with surface of the work close together, main burner jet pressure 5 ~ 50Mpa, Laser Focusing point is in main burner jet beam and surface of the work intersecting area.Pilot jet is relative with main burner, be positioned at laser beam opposite side, jet pressure 0.05 ~ 0.2Mpa.Laser processing is that the jet of main burner and pilot jet ejection is formed stably to the thin liquid film protective layer of workpiece outer rim flowing at surface of the work, laser beam through liquid film, focus on surface of the work and process.The thin water film of continuous-flow of the present invention takes away chip and heat, and high-pressure spray also can remove thermoplastic material, and continuous liquid film covers whole surface of the work, avoids suspended particulate to adhere to, and improves cleannes.
Description
Technical field
The present invention relates to technical field of laser processing, be specially laser-processing system and the method for the protection of a kind of liquid film.
Background technology
Laser is an effective tool being used for processing macroscopic view and sub-micro manufacture, because its light beam that is tiny, high energy can meet all primary demands of materials processing.But inevitably there is fire damage in Laser Processing.Although ultrashort laser can reduce the fuel factor to material, there is the defect that low material removes rate and the cost of high photon.In recent years, scholars are constantly carrying out the laser processing research reducing fire damage, and wherein, traditional underwater laser processing method is a selection preferably.But, under water in laser processing procedure, because LASER HEATING causes the aqueous solution to produce ripple and bubble etc., upset the transmission of laser, affect the stability of underwater laser processing technology and reduce crudy.
In addition, when the print processed has multiple tracks line of cut, for the vacuum cup meeting absorbent solution of fixing print, processed print dry tack free, causes the suspended particulate attachment produced in process, affects its surface cleanness.
So traditional underwater laser processing method haves much room for improvement, the solution of stable water layer thickness and smooth flow be had fast chip could to be taken away processing district, avoid because the reflection of laser and refraction cause the energy loss of laser simultaneously.
Summary of the invention
The object of the invention is the laser-processing system designing the protection of a kind of liquid film; comprise laser aid, workbench and container; main burner distance Laser Focusing point is comparatively near, and jet pressure is comparatively large, and Laser Processing point is in the main burner jet beam region crossing with surface of the work.
Another object of the present invention is the laser processing of a kind of liquid film protection of design; the jet of main burner is formed to stablize around processing stand certain thickness flowing moisture film; reduce the fuel factor of Laser Processing; high-pressure spray can also remove the softening material of laser; improve crudy, realize the Laser Processing of cleaner low damage.
The laser-processing system of a kind of liquid film protection of the present invention's design comprises laser aid and workbench, and workpiece to be processed is fixed on the upper surface of workbench, and workpiece surface to be processed is level, and the laser beam focus that laser aid produces is in workpiece surface to be processed.Also is furnished with the main burner producing jet, the nozzle diameter d of main burner
1=0.5 ~ 3mm, the center line of main burner and the angle of cut θ of horizontal plane
1be 30 ° ~ 60 °, the spout central of main burner and surface of the work distance SOD
1=2 ~ 5mm, the center line of main burner jet beam and the intersection point of surface of the work and the distance of laser beam between the center of surface of the work focus point are d
p1=0 ~ 0.2mm, namely the focal spot of laser beam is in the region that main burner jet beam is crossing with surface of the work; Main burner jet pressure is 5 ~ 50Mpa; Main burner connects the first centrifugal pump.Described workbench is installed in container, and the drainpipe of container is lower than worktable upper surface.
The first control valve, the first stream device is connected with between main burner and the first centrifugal pump.With the flow of regulation and control main burner and maintenance pressure.
Relative with main burner, laser beam opposite side is also furnished with a pilot jet, the nozzle diameter d of pilot jet
2=3 ~ 5mm, the center line of pilot jet and the angle of cut θ of horizontal plane
2be 45 ° ~ 90 °, the spout central of pilot jet and surface of the work distance SOD
2=8 ~ 12mm, the center line of pilot jet jet beam and the intersection point of surface of the work and the distance of laser beam between the center of surface of the work focus point are d
p2=0.5 ~ 2mm.Pilot jet jet pressure is 0.05 ~ 0.2Mpa.Pilot jet connects the second centrifugal pump.The second control valve, the second stream device is connected with between pilot jet and the second centrifugal pump.
The drainpipe of container takes back closed cans.
The laser processing of a kind of liquid film protection of the present invention's design, adopts the laser-processing system of a kind of liquid film protection of the invention described above, the steps include:
I, workpiece fixed in position to be processed is in worktable upper surface;
II, start the first centrifugal pump, main burner sprays jet to surface of the work, and jet is formed stably to the thin liquid film protective layer of workpiece outer rim flowing at surface of the work; The liquid flowed down from workpiece falls in container, discharges from the drainpipe of container;
III, laser aid Emission Lasers bundle through liquid film, focus on surface of the work and process, remove workpiece material on processing stand.The jet of the elevated pressures of main burner, being formed to stablize around processing stand has certain thickness flowing moisture film, reduces the fuel factor of Laser Processing, and high-pressure spray can also remove the softening material of laser, improves crudy.
Relative with main burner, laser beam opposite side is also furnished with a pilot jet, step II starts the second centrifugal pump simultaneously, pilot jet jet directive surface of the work, the whole surface of liquid film coating workpieces of formation, prevent the suspended particulate attachment produced in process, realize cleaner Laser Processing.
The jet acting in conjunction of main burner and pilot jet is around Laser Processing point (namely laser beam is at surface of the work focus point), and form the liquid film of step-thickness, liquid film is divided into three regions:
The region that 1. namely the main burner high-speed jet of spraying is crossing with surface of the work, region, Laser Processing point be in region 1. in, thickness of liquid film h
1be 0.1 ~ 0.3mm.
2. region is transition region, is in region 1. peripheral, is 1. formed to the liquid of outflow and the comparatively low-speed jet of pilot jet, region thickness of liquid film h 2. by from region
2be 0.3 ~ 0.5mm.
3. region is 2. peripheral surface of the work region, region, due to region 1. with region jet pressure 2., the liquid of surface of the work can only flow from work pieces process point to workpiece outer rim, and the surface of the work that the surface tension of liquid is 2. peripheral in region forms liquid film, the thickness of liquid film h in this region
3it is 0.5 ~ 5 millimeter.
Liquid flows down from the marginal surface of workpiece and workbench, enters container, discharges from the drainpipe of container.
The drainpipe access recycling can of container, liquid is recyclable to be recycled.
Described liquid is any one in the sodium nitrate aqueous solution of water, the ethanol water of (10 ~ 100) v%, the aqueous propanol solution of (10 ~ 100) v%, glycerine, the potassium hydroxide aqueous solution of (15 ~ 60) wt%, the aqueous solution of nitric acid of (15 ~ 60) v%, the sodium-chloride water solution of (15 ~ 60) wt%, (15 ~ 60) wt% methyl-sulfoxide (DMSO) aqueous solution and (15 ~ 60) wt%.
Compared with prior art, laser-processing system and the advantage of method of the protection of a kind of liquid film of the present invention are: the thin water film of the continuous-flow that the high-speed jet that 1, main burner is constant provides one deck stable at surface of the work, avoid because LASER HEATING causes the strenuous exercise of solution on the impact of processing, and chip in laser processing procedure and unnecessary heat are taken away by fluid, decrease the deposition of splash, reduce the heat affected area of laser; Ripples, bubble etc. that Laser Processing produces also are passed to workpiece outer rim by the directed flow of solution, eliminate the impact of uneven liquid on Laser Transmission; 2, laser is processed under liquid film, the jet of elevated pressures not only cools surface of the work, reduce fire damage and surperficial splash deposition, jet can also be removed surface of the work and be softened the portion of material but not yet reaching fusing point by LASER HEATING, improve working (machining) efficiency, and remove material because of comparatively low temperature, reduce fuel factor, make Laser Processing have the advantages that damage is low, crudy is high; 3, the low-speed jet of pilot jet is increased, match with the high-speed jet of main burner, guarantee that certain thickness continuous liquid film covers whole surface of the work, the liquid film of continuous liquid supply prevents from making suspended particulate be attached to surface of the work because of the evaporation of liquid, after Laser Processing completes, removing liquid film, also just removes suspended particulate wherein, improves surface of the work cleannes further; Adding man-hour to the print of multiple tracks line of cut, even if the vacuum cup of fixing print absorbs moisture, but the liquid film of pilot jet jet is covered in whole print surface, rarely suspended particulate attachment; 4, regulate the pH value of the low-speed jet liquid of pilot jet or add corresponding buffer, the liquid film produced can control the chemical reaction process of surface of the work, and prevents static discharge (ESD) defective work piece surface; 5, easy to use, by the flow of control valve and adjustable two nozzles; 6, the silicon wafer etc. that the thin fragile material of Laser Processing, heat-sensitive material and process easily produce a large amount of suspended particulate is applicable to.
Accompanying drawing explanation
Fig. 1 is the structural representation of the laser-processing system embodiment of this liquid film protection.
Fig. 2 is the close-up schematic view of Fig. 1.
Number in the figure is:
1, container, 2, workbench, 3, workpiece, 4, drainpipe, 5, recycling can, 6, the second centrifugal pump, 7, the second control valve, 8, second stream device, 9, pilot jet, 10, laser aid, 11, laser beam, 12, main burner, 13, first flow device, 14, the first control valve, 15, the first centrifugal pump.
Detailed description of the invention
The laser-processing system embodiment of liquid film protection
The laser-processing system embodiment of this liquid film protection comprises laser aid 10, workbench 2, jet nozzle and container 1; workpiece 3 to be processed is fixed on the upper surface of workbench 2; workpiece 3 surface to be processed is level; the laser beam 11 that laser aid 10 produces focuses on workpiece 3 surface to be processed; workbench 2 is installed in container 1, and the drainpipe 4 of container 1 is lower than workbench 2 upper surface.Also is furnished with nozzle, the nozzle diameter d of main burner 12
1=1.5mm, the center line of main burner 12 and the angle of cut θ of horizontal plane
1be 45 °, the spout central of main burner 12 and workpiece 3 surface distance SOD
1=3mm, the center line of main burner 12 jet beam and the intersection point on workpiece 3 surface and the distance of laser beam 11 between the center of the surperficial focus point of workpiece 3 are d
p1=0.1mm, namely the focal spot of laser beam 11 is in the region that main burner 12 jet beam is crossing with workpiece 3 surface.Main burner 12 jet pressure is 20Mpa.
Main burner 12 is connected the first centrifugal pump 15 through the first control valve 14 with the first stream device 13.
Opposite side that is relative with main burner 12, laser beam 11 is also furnished with a pilot jet 9, the nozzle diameter d of pilot jet 9
2=4mm, the center line of pilot jet 9 and the angle of cut θ of horizontal plane
2be 60 °, the spout central of pilot jet 9 and workpiece 3 surface distance SOD
2=10mm, the center line of pilot jet 9 jet beam and the intersection point on workpiece 3 surface and the distance of laser beam 11 between the center of the surperficial focus point of workpiece 3 are d
p2=1mm.Pilot jet 9 jet pressure is 0.1Mpa.Pilot jet 9 is connected the second centrifugal pump 6 through the second control valve 7 with the second stream device 8.
The drainpipe 4 of container 1 takes back closed cans 5.
The laser processing embodiment of liquid film protection
The laser processing embodiment of this liquid film protection, adopts the laser-processing system embodiment that above-mentioned liquid film is protected, the steps include:
I, workpiece 3 fixed in position to be processed is in workbench 2 upper surface.
II, this routine liquid used is water.Start the first centrifugal pump 15, main burner 12 is to workpiece 3 surface ejection jet, and jet is formed stably to the thin liquid film protective layer of workpiece 3 outer rim flowing on workpiece 3 surface; The liquid flowed down from workpiece 3 falls in container 1, discharges from the drainpipe 4 of container 1; Start the second centrifugal pump 6, pilot jet 9 jet directive workpiece 3 surface, the whole surface of liquid film coating workpieces 3 of formation simultaneously.
III, laser aid 10 Emission Lasers bundle 11 through liquid film, focus on workpiece 3 surface and process, remove the workpiece material on processing stand.The jet of the elevated pressures of main burner 12, being formed around processing stand stable has certain thickness flowing moisture film.
The jet acting in conjunction of main burner 12 and pilot jet 9 forms the liquid film of step-thickness around Laser Processing point, and liquid film is divided into three regions:
The region that 1. namely main burner 12 high-speed jet of spraying is surperficial crossing with workpiece 3, region, Laser Processing point be in region 1. in, thickness of liquid film h
1be 0.1 ~ 0.3mm.
2. region is transition region, is in region 1. peripheral, is 1. formed to the liquid of outflow and the comparatively low-speed jet of pilot jet 9, region thickness of liquid film h 2. by from region
2be 0.3 ~ 0.5mm.
3. region is 2. peripheral workpiece 3 surf zone in region, due to region 1. with region jet pressure 2., the liquid on workpiece 3 surface can only flow from workpiece 3 processing stand to workpiece 3 outer rim, and workpiece 3 surface that the surface tension of liquid is 2. peripheral in region forms liquid film, the thickness of liquid film h in this region
3be 0.5 ~ 5mm.
Liquid flows down from the marginal surface of workpiece 3 and workbench 2, enters container 1, discharges from the drainpipe 4 of container 1.
The drainpipe 4 of container 1 accesses recycling can 5, and liquid is recyclable to be recycled.
Above-described embodiment, be only the specific case further described object of the present invention, technical scheme and beneficial effect, the present invention is not defined in this.All make within scope of disclosure of the present invention any amendment, equivalent replacement, improvement etc., be all included within protection scope of the present invention.
Claims (8)
1. the laser-processing system of a liquid film protection, comprise laser aid (10) and workbench (2), workpiece (3) to be processed is fixed on the upper surface of workbench (2), workpiece (3) surface to be processed is level, and the laser beam (11) that laser aid (10) produces focuses on workpiece (3) surface to be processed; It is characterized in that:
Also is furnished with the main burner (12) producing jet, the nozzle diameter d of main burner (12)
1=0.5 ~ 3mm, the angle of cut θ of main burner (12) center line and horizontal plane
1be 30 ° ~ 60 °, the spout central of main burner (12) and workpiece (3) surface distance SOD
2=2 ~ 5mm, intersection point and the distance of laser beam (11) between the center of workpiece (3) surperficial focus point on the center line of main burner (12) jet beam and workpiece (3) surface are d
p1=0 ~ 0.2mm, namely the focal spot of laser beam (11) is in the region that main burner (12) jet beam is crossing with workpiece (3) surface; Main burner (12) jet pressure is 5 ~ 50Mpa;
Main burner (12) connects the first centrifugal pump (15);
Described workbench (2) is installed in container (1), and the drainpipe (4) of container (1) is lower than workbench (2) upper surface;
The first control valve (14) and the first stream device (13) is connected with between described main burner (12) and the first centrifugal pump (15);
Opposite side that is relative with main burner (12), laser beam (11) is also furnished with a pilot jet (9), the nozzle diameter d of pilot jet (9)
2=3 ~ 5mm, the center line of pilot jet (9) and the angle of cut θ of horizontal plane
2be 45 ° ~ 90 °, the spout central of pilot jet (9) and workpiece (3) surface distance SOD
1=8 ~ 12mm, intersection point and the distance of laser beam (11) between the center of workpiece (3) surperficial focus point on the center line of pilot jet (9) jet beam and workpiece (3) surface are d
p2=0.5 ~ 2mm, pilot jet (9) jet pressure is 0.05 ~ 0.2Mpa, and pilot jet (9) connects the second centrifugal pump (6).
2. the laser-processing system of liquid film protection according to claim 1, is characterized in that:
The second control valve (7) and the second stream device (8) is connected with between described pilot jet (9) and the second centrifugal pump (6).
3. the laser-processing system of liquid film protection according to claim 1 and 2, is characterized in that:
The drainpipe (4) of described container (1) takes back closed cans (5).
4. adopt the laser processing of a kind of liquid film protection of the laser-processing system of liquid film according to claim 1 protection, the steps include:
I, workpiece (3) fixed in position to be processed is in workbench (2) upper surface;
II, the first centrifugal pump (15) is started, main burner (12) is to workpiece (3) surface ejection jet, and jet is formed stably to the thin liquid film protective layer of workpiece (3) outer rim flowing on workpiece (3) surface; The liquid flowed down from workpiece (3) falls in container (1), discharges from the drainpipe of container (1);
III, the laser beam (11) launched of laser aid (10) is through liquid film, focuses on workpiece (3) surface and processes, and removes the workpiece material on processing stand.
5. the laser processing of liquid film protection according to claim 4, is characterized in that:
Described step II starts the second centrifugal pump (6) simultaneously, pilot jet (9) jet directive workpiece (3) surface, liquid film coating workpieces (3) the whole surface of formation.
6. the laser processing of liquid film protection according to claim 5, is characterized in that:
The jet acting in conjunction of described main burner (12) and pilot jet (9) is around Laser Processing point, and form the liquid film of step-thickness, liquid film is divided into three regions:
The region that 1. namely main burner (12) high-speed jet of spraying is surperficial crossing with workpiece (3), region, Laser Processing point be in region 1. in, thickness of liquid film h
1be 0.1 ~ 0.3mm;
2. region is transition region, is in region 1. peripheral, is 1. formed to the liquid of outflow and the comparatively low-speed jet of pilot jet (9), region thickness of liquid film h 2. by from region
2be 0.3 ~ 0.5mm;
3. region is 2. peripheral workpiece (3) surf zone in region, the liquid on workpiece (3) surface flows from work pieces process point to workpiece (3) outer rim, the surface of the work that the surface tension of liquid is 2. peripheral in region forms liquid film, the thickness of liquid film h in this region
3it is 0.5 ~ 5 millimeter;
Liquid flows down from the marginal surface of workpiece (3) and workbench (2), enters container (1), discharges from the drainpipe (4) of container (1).
7. the laser processing of liquid film protection according to claim 4, is characterized in that:
The drainpipe (4) access recycling can (5) of container (1), liquids recovery recycles.
8. the laser processing of liquid film protection according to claim 4, is characterized in that:
Described liquid is any one in the sodium nitrate aqueous solution of water, the ethanol water of (10 ~ 100) v%, the aqueous propanol solution of (10 ~ 100) v%, glycerine, the potassium hydroxide aqueous solution of (15 ~ 60) wt%, the aqueous solution of nitric acid of (15 ~ 60) v%, the sodium-chloride water solution of (15 ~ 60) wt%, (15 ~ 60) wt% methyl-sulfoxide aqueous solution and (15 ~ 60) wt%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510024855.2A CN104551393B (en) | 2015-01-19 | 2015-01-19 | A kind of laser-processing system of liquid film protection and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510024855.2A CN104551393B (en) | 2015-01-19 | 2015-01-19 | A kind of laser-processing system of liquid film protection and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104551393A CN104551393A (en) | 2015-04-29 |
| CN104551393B true CN104551393B (en) | 2016-04-13 |
Family
ID=53069032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510024855.2A Active CN104551393B (en) | 2015-01-19 | 2015-01-19 | A kind of laser-processing system of liquid film protection and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104551393B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106702411B (en) * | 2016-12-16 | 2019-12-13 | 中国人民解放军装甲兵工程学院 | Method for cleaning carbon deposit on metal surface by using pulse laser |
| CN108526091B (en) * | 2018-04-12 | 2023-09-19 | 桂林电子科技大学 | Jet laser composite cleaning method and cleaning system |
| CN110834149B (en) * | 2018-08-16 | 2022-06-28 | 中国科学院上海光学精密机械研究所 | Laser welding device with cooling system and method |
| CN109620429B (en) * | 2018-12-03 | 2020-09-25 | 北京航空航天大学 | Degradable metal-guided tissue regeneration barrier membrane and preparation method thereof |
| CN110153707B (en) * | 2019-04-25 | 2020-06-16 | 孙树峰 | Laser-jet liquid beam autogenous abrasive flow combined machining device and method |
| CN111167803A (en) * | 2019-12-14 | 2020-05-19 | 上海航翼高新技术发展研究院有限公司 | Laser wet cleaning method and device |
| CN111014912A (en) * | 2019-12-25 | 2020-04-17 | 广州市市政集团有限公司 | Bubble eliminating device for underwater wet welding |
| CN111822876B (en) * | 2020-09-15 | 2020-12-08 | 中电化合物半导体有限公司 | Method for patterning silicon carbide seed crystal based on solution jet assisted laser |
| CN112317961B (en) * | 2020-10-09 | 2022-06-24 | 哈尔滨工业大学 | Ultra-thin water film auxiliary pulse laser micromachining device and machining method thereof |
| CN114682929A (en) * | 2020-12-31 | 2022-07-01 | 华为技术有限公司 | Method and system for drilling diamond film |
| CN115365230B (en) * | 2021-05-17 | 2024-03-22 | 中国科学院沈阳自动化研究所 | Uniform water film wafer particulate matter nondestructive laser cleaning method |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003028943A1 (en) * | 2001-10-03 | 2003-04-10 | Lambda Physik Application Center, L.L.C. | Method and apparatus for fine liquid spray assisted laser material processing |
| DE102005027800A1 (en) * | 2005-06-13 | 2006-12-14 | Jenoptik Automatisierungstechnik Gmbh | Device for multiple separation of a flat workpiece from a brittle material by means of laser |
| US8134098B2 (en) * | 2007-09-28 | 2012-03-13 | Sugino Machine Limited | Laser machining apparatus using laser beam introduced into jet liquid column |
| CN102528280A (en) * | 2012-01-16 | 2012-07-04 | 山东大学 | Laser-water jet composite micromachining process and device |
| CN103358028A (en) * | 2013-07-16 | 2013-10-23 | 桂林电子科技大学 | Method and system for scribing brittle ultrathin piece by water jet and laser |
| CN103358027A (en) * | 2013-07-16 | 2013-10-23 | 桂林电子科技大学 | Laser processing method and system assisted by water jet and gas jet |
-
2015
- 2015-01-19 CN CN201510024855.2A patent/CN104551393B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104551393A (en) | 2015-04-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104551393B (en) | A kind of laser-processing system of liquid film protection and method | |
| CN101142050B (en) | Hybrid laser processing system | |
| CN103358027A (en) | Laser processing method and system assisted by water jet and gas jet | |
| CN101844274B (en) | Laser processing device, manufacturing method for laser processing device and laser processing method | |
| CN208390517U (en) | A kind of jet stream laser composite cleaning system | |
| CN204430562U (en) | A kind of laser-processing system of liquid film protection | |
| CN108526091A (en) | A kind of jet stream laser compound cleaning method and cleaning system | |
| CN103358028A (en) | Method and system for scribing brittle ultrathin piece by water jet and laser | |
| CN202506971U (en) | Coaxial water-jet device for laser micromachining on thin-wall tubing | |
| CN108081137A (en) | A kind of emery wheel double excitation trimming device and method with gas-liquid parallel connection tubular type | |
| CN212705711U (en) | Precise machine tool chip flushing device for machining hydraulic element oil way pipeline | |
| CN108000147A (en) | A kind of laser jet stream composite polishing method and device | |
| CN203390389U (en) | System for etching fragile material ultrathin sheet with water jet and laser | |
| CN202506983U (en) | Laser cutting machine with coaxial water-jet structure | |
| CN102465195B (en) | Light-water coaxial laser shock reinforcing head | |
| CN112475613B (en) | Laser processing device for water-gas coaxial auxiliary galvanometer scanning | |
| CN103212819A (en) | Coaxial water jet device used for laser micro machining of thin-walled tube | |
| CN204603963U (en) | Numerically controlled lathe cooling fluid sparge pipe | |
| CN114346411A (en) | Gas-liquid spray jet cooling system and method for assisting laser processing | |
| CN213888651U (en) | Laser cutting machine heat radiation structure | |
| TWI425994B (en) | Water jet guided laser device | |
| CN103212803A (en) | Laser cutting machine comprising front spraying and water guiding structure | |
| CN205650961U (en) | Laser jet cutting device | |
| CN202506965U (en) | Laser cutting machine with front spray water guide structure | |
| EP2261179B1 (en) | Cooling nozzle, cooling method using the same, and brittle material substrate division method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |