CN108000147A - A kind of laser jet stream composite polishing method and device - Google Patents
A kind of laser jet stream composite polishing method and device Download PDFInfo
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- CN108000147A CN108000147A CN201711284504.0A CN201711284504A CN108000147A CN 108000147 A CN108000147 A CN 108000147A CN 201711284504 A CN201711284504 A CN 201711284504A CN 108000147 A CN108000147 A CN 108000147A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0093—Working by laser beam, e.g. welding, cutting or boring combined with mechanical machining or metal-working covered by other subclasses than B23K
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
Abstract
The invention discloses a kind of laser jet stream composite polishing method and device.This method and device make laser beam converge to workpiece to be processed surface and form laser beam focal spot by adjusting the condenser lens of laser polishing module；Nozzle ejection is flowed through by conveying polishing fluid for press pump, the jet beam impact of generation forms jet beam shock zone in workpiece to be processed surface；Ensure that laser beam focal spot is overlapping with jet beam shock zone by mechanical structure, and then change the relative position of jet beam shock zone, laser beam focal spot and workpiece to be processed, complete the composite polishing process on workpiece to be processed surface.This method solves conventional polishing technique there are the relatively low bottleneck problem of thermal stress, processing efficiency with device, improves Ultraprecise polished efficiency, while improve quality of finish.
Description
Technical field
The invention belongs to the Ultraprecise polished field in field of machining, and in particular to a kind of laser jet stream composite polishing
Method and apparatus.
Background technology
Ultraprecise polished last procedure as ultraprecise finishing, carries definite workpiece surface face type, improves
Workpiece surface machining accuracy, the reducing workpiece surface machining damage of the task.Existing Ultraprecise polished method has very much, such as magnetic current
Become polishing, ion beam polishing, air bag polishing, Jet Polishing, laser polishing etc..Compared to other polishing technologies, Jet Polishing and
There are machinable material scope is wide, the unique advantage such as adaptable to workpiece shapes for laser polishing.
Oliver W. Fahnle of Dutch Delft universities et al. propose a kind of jet stream for optical element polishing and throw
Light technology [Fluid jet polishing of optical surfaces, Applied Optics, 1998,37,
6671-6673], which is delivered to nozzle acceleration ejection using for press pump by the polishing fluid for carrying abrasive material, forms penetrating for flexibility
Beam impacts workpiece surface, produces minor material by the high velocity impact of abrasive material and workpiece and removes.Patent " total flooding Jet Polishing
Device and method "（ZL201010586835.1）A kind of submerged Jet Polishing method is disclosed, jet expansion and workpiece is equal
It is submerged in polishing fluid, is not in the bounce-back sputtering of polishing fluid, operation is safer.
" green light and ultraviolet laser composite technique for polishing sapphire " disclosed in Chinese patent literature storehouse（Application number
200910037055.9）It is a kind of process with ultraviolet laser polishing sapphire wafer, focuses the laser beam to workpiece
Surface, by photo-thermal coupling, in the form of evaporating, melt etc. producing material removes, and makees with small broken and photochemistry
Removed with mechanism material." liquid auxiliary laser processing method and device "（Application number 201710038812.9）It is that one kind has
The liquid auxiliary laser processing method of quick scan function, laser beam are projected to work to be processed after being mixed with liquid by nozzle
Part, for the liquid to meet guide-lighting desired pure water, acid solution, aqueous slkali or brine, its essence, which is appointed, is produced using laser
Green material removes, and liquid does not produce material removal in itself.
However, simple Jet Polishing and laser polishing still remains certain technical limitation.The material of Jet Polishing
Removal rate is low, causes polishing efficiency relatively low；Laser polishing directly produces material using the coupling of laser beam photo-thermal and removes, can be right
Workpiece to be machined produces certain fuel factor, causes after processing to have impact on to a certain extent there are certain thermal stress in workpiece
Processing quality.
The content of the invention
A technical problem to be solved by this invention is to provide a kind of laser jet stream composite polishing method, and the present invention wants
Another technical problem solved is to provide a kind of laser jet stream composite polishing device.
The laser jet stream composite polishing method of the present invention comprises the following steps：
A. workpiece to be processed surface is positioned on positioning plate downward, and is fixed by fixed plate；
B. laser polishing module is positioned over above workpiece to be processed, Jet Polishing module is positioned over below workpiece to be processed；
C. the condenser lens of laser polishing module is adjusted, laser beam is converged to workpiece to be processed lower surface and forms laser beam Jiao
Spot；
D. the confession press pump conveying polishing fluid of Jet Polishing module flows through nozzle ejection, and the jet beam of generation is impacted in work to be processed
Part lower surface, forms jet beam shock zone；
E. laser polishing module is adjusted respectively, the locus of Jet Polishing module makes laser beam focal spot and jet beam impact zone
Domain overlaps, and carries out the workpiece to be processed lower surface material of any and removes, completes the composite polishing process of this point；
F. change the relative position of jet beam shock zone, laser beam focal spot and workpiece to be processed, complete workpiece to be processed following table
The composite polishing process in face.
In the step c, by the relative distance for adjusting condenser lens and workpiece to be processed so that at laser beam focal spot
Laser beam energy be less than or equal to and produce the less laser energy value of threshold that workpiece to be processed material removes.The laser beam is avoided in work
The defects of being cracked inside part.
In the step f, changing the relative position of jet beam shock zone, laser beam focal spot and workpiece to be processed
During, laser beam focal spot is remained with jet beam shock zone and overlapped.
In the step f, change a method of the relative position of jet beam shock zone, laser beam focal spot and workpiece
It is mobile workpiece to be processed, another method is by varying laser beam and incidence of the jet beam on workpiece to be processed lower surface
Angle and incoming position, while laser beam focal spot and jet beam shock zone are moved, laser beam focal spot and jet beam in moving process
Shock zone remains coincidence.
The composite polishing device for laser jet stream composite polishing method of the present invention includes laser polishing module, fixation
Plate, positioning plate, workbench and Jet Polishing module；Wherein, the laser polishing module includes putting successively along optical path direction
Laser light source, switch, polariscope, speculum, neutral density mirror and the condenser lens put, laser polishing module transmitting laser beam；
The Jet Polishing module includes fluid reservoir, polishing fluid, stirring motor, nozzle, pipeline I, pipeline II and for press pump；
Its connection relation is：Through hole is provided with workbench, positioning plate is fixed with around through hole, workpiece to be processed is positioned at fixed
The center of position plate, the lower surface of workpiece to be processed are located in the space surrounded by positioning plate and workbench；Workpiece to be processed presss from both sides
Tightly between fixed plate and positioning plate；Fixed plate is fixedly connected by screw with positioning plate；
The laser polishing module is placed in the top of workpiece to be processed, and Jet Polishing module is placed in the lower section of workpiece to be processed；
The fluid reservoir is located at the lower section of workbench, and is fixedly connected with workbench；Polishing fluid is filled with fluid reservoir,
Stirring motor is installed on liquid storage pot bottom, for homogenizing polishing fluid；It is equipped with the outside of fluid reservoir for press pump, one end of pipeline I
Connected with for press pump, the other end is stretched into fluid reservoir from bottom；One end of pipeline II is connected with for press pump, and the other end is stretched from top
Enter fluid reservoir and connected with the nozzle of fluid reservoir center；Polishing fluid is extracted from fluid reservoir by pipeline I for press pump and is led to
Piping II is delivered to nozzle ejection, forms jet beam；
Neutral density mirror, condenser lens, positioning plate, workbench, fluid reservoir and the nozzle is concentric setting.
Laser jet stream composite polishing method and the device of the present invention is by laser polishing module and the organic knot of Jet Polishing module
Close, ensure that both material removal areas are overlapping by mechanical structure, effectively increase polishing efficiency, solve single polishing technology
The problem of processing efficiency is relatively low；Meanwhile the characteristics of constantly updating iteration using jet beam, by the material chips produced in polishing and
When take away, and polishing fluid can play the role of good circulating cooling, can effectively eliminate the fuel factor produced in polishing process, avoid
Thermal stress, quality of finish higher are produced to workpiece to be processed.
Brief description of the drawings
Fig. 1 is the laser jet stream composite polishing device structure diagram of the present invention；
Fig. 2 is the BK7 workpiece surface appearance figures under the electron microscope before polishing；
Fig. 3 is the BK7 workpiece surface appearance figures under the electron microscope after polishing；
Fig. 4 is the fused silica workpiece surface appearance figure under the electron microscope before polishing；
Fig. 5 is the fused silica workpiece surface appearance figure under the electron microscope after polishing；
In figure, 1. laser polishing module, 2. laser light source 3. switchs 4. laser beam, 5. polariscope, 6. speculum 7.
11. positioning plate of neutral density mirror 8. condenser lens, 9. workpiece to be processed, 10. fixed plate, 12. workbench 13.
18. pipeline of fluid reservoir 14. polishing fluid, 15. stirring motor, 16. nozzle, 17. jet beam, I 19. pipeline II 20.
For 21. Jet Polishing module of press pump.
Specific embodiment
The present invention will be described in detail with reference to the accompanying drawings and examples.
Following embodiments are merely to illustrate the present invention, and not limitation of the present invention.Related person skilled in the art exists
It in the case of not departing from the spirit and scope of the present invention, can also make a variety of changes, replace and modification, therefore equal technology
Scheme falls within scope of the invention.
The laser jet stream composite polishing method of the present invention comprises the following steps：
A. workpiece to be processed surface is positioned on positioning plate downward, and is fixed by fixed plate；
B. laser polishing module is positioned over above workpiece to be processed, Jet Polishing module is positioned over below workpiece to be processed；
C. the condenser lens of laser polishing module is adjusted, laser beam is converged to workpiece to be processed lower surface and forms laser beam Jiao
Spot；
D. the confession press pump conveying polishing fluid of Jet Polishing module flows through nozzle ejection, and the jet beam of generation is impacted in work to be processed
Part lower surface, forms jet beam shock zone；
E. laser polishing module is adjusted respectively, the locus of Jet Polishing module makes laser beam focal spot and jet beam impact zone
Domain overlaps, and carries out the workpiece to be processed lower surface material of any and removes, completes the composite polishing process of this point；
F. change the relative position of jet beam shock zone, laser beam focal spot and workpiece to be processed, complete workpiece to be processed following table
The composite polishing process in face.
In the step c, by the relative distance for adjusting condenser lens and workpiece to be processed so that at laser beam focal spot
Laser beam energy be less than or equal to and produce the less laser energy value of threshold that workpiece to be processed material removes.
In the step f, changing the relative position of jet beam shock zone, laser beam focal spot and workpiece to be processed
During, laser beam focal spot is remained with jet beam shock zone and overlapped.
In the step f, change a method of the relative position of jet beam shock zone, laser beam focal spot and workpiece
It is mobile workpiece to be processed, another method is by varying laser beam and incidence of the jet beam on workpiece to be processed lower surface
Angle and incoming position, while laser beam focal spot and jet beam shock zone are moved, laser beam focal spot and jet beam in moving process
Shock zone remains coincidence.
As shown in Figure 1, the composite polishing device for laser jet stream composite polishing method of the present invention includes laser polishing
Module 1, fixed plate 10, positioning plate 11, workbench 12 and Jet Polishing module 21；Wherein, the laser polishing module 1 is wrapped
The laser light source 2 being sequentially placed along optical path direction, switch 3, polariscope 5, speculum 6, neutral density mirror 7 and condenser lens 8 are included,
Laser polishing module 1 launches laser beam 4；The Jet Polishing module 21 includes fluid reservoir 13, polishing fluid 14, stirring motor
15th, nozzle 16, pipeline I 18, pipeline II 19 and confession press pump 20；
Its connection relation is：Through hole is provided with workbench 12, positioning plate 11, workpiece to be processed 9 are fixed with around through hole
Positioned at the center of positioning plate 11, the lower surface of workpiece to be processed 9 is located in the space surrounded by positioning plate 11 and workbench 12；
Workpiece to be processed 9 is clamped between fixed plate 10 and positioning plate 11；Fixed plate 10 is fixedly connected by screw with positioning plate 11；
The laser polishing module 1 is placed in the top of workpiece to be processed 9, and Jet Polishing module 21 is placed in workpiece to be processed 9
Lower section；
The fluid reservoir 13 is located at the lower section of workbench 12, and is fixedly connected with workbench 12；Filling in fluid reservoir 13
There is polishing fluid 14, stirring motor 15 is installed on 13 bottom of fluid reservoir, for homogenizing polishing fluid 14；It is equipped with the outside of fluid reservoir 13
For press pump 20, one end of pipeline I 18 is connected with for press pump 20, and the other end is stretched into fluid reservoir 13 from bottom；The one of pipeline II 19
End is connected with for press pump 20, and the other end stretches into fluid reservoir 13 from top and connected with the nozzle 16 of 13 center of fluid reservoir；For
Press pump 20, which is extracted from fluid reservoir 13 polishing fluid 14 by pipeline I 18 and is delivered to nozzle 16 by pipeline II 19, to be sprayed, and is formed
Jet beam 17；
Neutral density mirror 7, condenser lens 8, positioning plate 11, workbench 12, fluid reservoir 13 and the nozzle 16 is concentric
Set.
Embodiment 1
Using the BK7 that 100 × 100mm thickness is 10mm as workpiece to be processed 9, its initial surface pattern is measured as shown in Fig. 2, just
Beginning surface roughness Sq value is 7.032nm.Selection phase same material, the BK7 workpiece of size are placed on positioning as spot part is adopted
On plate 11, and fixed by fixed plate 10, individually open laser polishing module, 2 energy modulation of laser light source is minimum, by laser beam
4 focus to and adopt spot part lower surface.2 energy of laser light source is incrementally increased, and detects and adopts whether spot part surface face type changes.
If not changing, further increase 2 energy of laser light source, until face type changes, with laser light source parameter at this time
As the machined parameters during laser jet stream composite polishing.
Spot part will be adopted and replace with BK7 workpieces to be processed 9,9 surface of workpiece to be processed is positioned on positioning plate 11 downward, and by
Fixed plate 10 is fixed；Laser polishing module 1 is positioned over the top of workpiece to be processed 9, Jet Polishing module 21 is positioned over to be added
The lower section of work workpiece 9；The condenser lens 8 of laser polishing module 1 is adjusted, laser beam 4 is converged to 9 lower surface of workpiece to be processed and is formed
Laser beam focal spot；The confession conveying polishing fluid 14 of press pump 20 of Jet Polishing module 21 flows through nozzle 16 and sprays, the jet beam 17 of generation
Impact in 9 lower surface of workpiece to be processed, form jet beam shock zone；Laser polishing module 1, Jet Polishing module are adjusted respectively
21 locus makes laser beam focal spot be overlapped with jet beam shock zone, carries out 9 lower surface of the workpiece to be processed material of a bit
Remove, complete the composite polishing process of this point；It is opposite with workpiece to be processed 9 to change jet beam shock zone, laser beam focal spot
Position, completes the composite polishing process of workpiece to be processed lower surface.
BK7 workpiece surface appearances after composite polishing are as shown in figure 3, surface roughness Sq values drop to 1.756nm, explanation
The composite polishing method of the present invention effectively increases BK7 workpiece surface precision.
Embodiment 2
The implementation steps of the present embodiment are substantially the same manner as Example 1, and the main distinction is, workpiece to be processed material is fused silica,
Laser light source energy in polishing process is different, and the surface topography of fused quartz workpiece is as shown in figure 4, rough surface before composite polishing
It is 140.5nm to spend Sq values；The surface topography of fused quartz workpiece is as shown in figure 5, surface roughness Sq values are after composite polishing
4.388nm, illustrates that the composite polishing method of the present invention effectively increases the surface accuracy of fused quartz workpiece.
Claims (5)
1. a kind of laser jet stream composite polishing method, it is characterised in that the composite polishing method comprises the following steps：
Workpiece to be processed surface is positioned on positioning plate downward, and is fixed by fixed plate；
Laser polishing module is positioned over above workpiece to be processed, Jet Polishing module is positioned over below workpiece to be processed；
The condenser lens of laser polishing module is adjusted, laser beam is converged to workpiece to be processed lower surface and forms laser beam focal spot；
Jet Polishing module flows through nozzle ejection for press pump conveying polishing fluid, and the jet beam of generation is impacted under workpiece to be processed
Surface, forms jet beam shock zone；
Adjust laser polishing module respectively, the locus of Jet Polishing module makes laser beam focal spot and jet beam shock zone weight
Close, carry out the workpiece to be processed lower surface material of any and remove, complete the composite polishing process of this point；
Change the relative position of jet beam shock zone, laser beam focal spot and workpiece to be processed, complete workpiece to be processed lower surface
Composite polishing process.
2. laser jet stream composite polishing method according to claim 1, it is characterised in that：In the step c, pass through tune
Save the relative distance of condenser lens and workpiece to be processed so that the laser beam energy at laser beam focal spot is treated less than or equal to generation
The less laser energy value of threshold that workpieces processing material removes.
3. laser jet stream composite polishing method according to claim 1, it is characterised in that：In the step f, changing
During the relative position of jet beam shock zone, laser beam focal spot and workpiece to be processed, laser beam focal spot is rushed with jet beam
Hit region and remain coincidence.
4. laser jet stream composite polishing method according to claim 1, it is characterised in that：In the step f, change is penetrated
One method of the relative position in beam impacts region, laser beam focal spot and workpiece is mobile workpiece to be processed, another method
It is by varying laser beam and incidence angle and incoming position of the jet beam on workpiece to be processed lower surface, while movement laser beam
Focal spot and jet beam shock zone, laser beam focal spot is remained with jet beam shock zone in moving process overlaps.
A kind of 5. device of laser jet stream composite polishing method for described in claim 1, it is characterised in that：The device
Including laser polishing module（1）, fixed plate（10）, positioning plate（11）, workbench（12）With Jet Polishing module（21）；It is described
Laser polishing module（1）Including the laser light source set gradually along optical path direction（2）, switch（3）, polariscope（5）, speculum
（6）, neutral density mirror（7）And condenser lens（8）, laser polishing module（1）Launch laser beam（4）；The Jet Polishing mould
Block（21）Including fluid reservoir（13）, polishing fluid（14）, stirring motor（15）, nozzle（16）, pipeline I（18）, pipeline II（19）With
For press pump（20）；
Its connection relation is：Workbench（12）On be provided with through hole, positioning plate is fixed with around through hole（11）, work to be processed
Part（9）Positioned at positioning plate（11）Center, workpiece to be processed（9）Lower surface be located at by positioning plate（11）With workbench（12）
In the space surrounded；Workpiece to be processed（9）It is clamped in fixed plate（10）With positioning plate（11）Between；Fixed plate（10）Pass through screw
With positioning plate（11）It is fixedly connected；
The laser polishing module（1）It is placed in workpiece to be processed（9）Top, Jet Polishing module（21）It is placed in work to be processed
Part（9）Lower section；
The fluid reservoir（13）Positioned at workbench（12）Lower section, and and workbench（12）It is fixedly connected；Fluid reservoir
（13）It is interior to be filled with polishing fluid（14）, stirring motor（15）It is installed on fluid reservoir（13）Bottom, for homogenizing polishing fluid（14）；
Fluid reservoir（13）Outside be equipped with for press pump（20）, pipeline I（18）One end and supply press pump（20）Connection, the other end are stretched from bottom
Enter fluid reservoir（13）It is interior；Pipeline II（19）One end and supply press pump（20）Connection, the other end stretch into fluid reservoir from top（13）And
With fluid reservoir（13）The nozzle of center（16）Connection；For press pump（20）Pass through pipeline I（18）From fluid reservoir（13）Middle extraction
Polishing fluid（14）And pass through pipeline II（19）It is delivered to nozzle（16）Spray, form jet beam（17）；
The neutral density mirror（7）, condenser lens（8）, positioning plate（11）, workbench（12）, fluid reservoir（13）And nozzle
（16）For concentric setting.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711284504.0A CN108000147B (en) | 2017-12-07 | 2017-12-07 | A kind of laser jet stream composite polishing method and device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711284504.0A CN108000147B (en) | 2017-12-07 | 2017-12-07 | A kind of laser jet stream composite polishing method and device |
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| CN108000147B CN108000147B (en) | 2019-04-09 |
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ID=62057080
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110421489A (en) * | 2019-08-14 | 2019-11-08 | 苏州科技大学 | A kind of focusing ultrasonic abrasive jet stream composite polishing device and method |
| CN110936021A (en) * | 2019-12-25 | 2020-03-31 | 浙江工业大学 | Scanning type laser composite chemical polishing device and method |
| CN113814882A (en) * | 2021-08-30 | 2021-12-21 | 浙江工业大学 | Laser-assisted polishing method and device |
| CN114227546A (en) * | 2021-08-30 | 2022-03-25 | 浙江工业大学 | Polishing method and device for realizing surface fine structure |
| CN114346337A (en) * | 2022-01-21 | 2022-04-15 | 江苏大学 | Abrasive particle assisted laser electrolysis self-coupling cooperative alignment punching method and system |
| CN116652837A (en) * | 2023-07-31 | 2023-08-29 | 烟台大学 | Diamond coating polishing equipment and method |
| CN114346337B (en) * | 2022-01-21 | 2024-05-14 | 江苏大学 | Abrasive particle-assisted laser electrolysis self-coupling collaborative alignment punching method and system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110936021B (en) * | 2019-12-25 | 2023-12-19 | 浙江工业大学 | Scanning type laser composite chemical polishing device and method |
| CN113814882A (en) * | 2021-08-30 | 2021-12-21 | 浙江工业大学 | Laser-assisted polishing method and device |
| CN114227546A (en) * | 2021-08-30 | 2022-03-25 | 浙江工业大学 | Polishing method and device for realizing surface fine structure |
| CN113814882B (en) * | 2021-08-30 | 2023-01-10 | 浙江工业大学 | Laser-assisted polishing method and device |
| CN114346337A (en) * | 2022-01-21 | 2022-04-15 | 江苏大学 | Abrasive particle assisted laser electrolysis self-coupling cooperative alignment punching method and system |
| CN114346337B (en) * | 2022-01-21 | 2024-05-14 | 江苏大学 | Abrasive particle-assisted laser electrolysis self-coupling collaborative alignment punching method and system |
| CN116652837A (en) * | 2023-07-31 | 2023-08-29 | 烟台大学 | Diamond coating polishing equipment and method |
| CN116652837B (en) * | 2023-07-31 | 2023-10-03 | 烟台大学 | Diamond coating polishing equipment and method |
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|---|---|
| CN108000147B (en) | 2019-04-09 |
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