CN106735871B - Liquid auxiliary laser processing method and device - Google Patents
Liquid auxiliary laser processing method and device Download PDFInfo
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- CN106735871B CN106735871B CN201710038812.9A CN201710038812A CN106735871B CN 106735871 B CN106735871 B CN 106735871B CN 201710038812 A CN201710038812 A CN 201710038812A CN 106735871 B CN106735871 B CN 106735871B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
Fluid present invention auxiliary laser processing method and device are related to technical field of laser processing, its purpose is to provide a kind of liquid auxiliary laser processing method with quick scanning function, a kind of liquid auxiliary laser processing unit (plant) is provided simultaneously, water before opposite helps laser processing technology, have machining resolution is higher, scanning speed faster, can be convenient the advantages that carrying out complex pattern processing.A kind of liquid auxiliary laser processing method of the present invention includes the following steps: that step a, laser emit laser beam, and the laser beam is directed into scanning system；Step b, the laser beam are scanned after system changes path and focuses and fluid coupling；Enter nozzle after step c, the laser beam and fluid coupling, is projected from nozzle to workpiece to be processed together with liquid.
Description
Technical field
The present invention relates to technical field of laser processing, more particularly to a kind of liquid auxiliary laser processing method and device.
Background technique
Laser processing carries out microfabrication, cutting, welding and punching etc. to material using laser beam, and application is increasingly extensive.
Conventional laser processing carries out dry-type processing in air, and when pulsewidth is larger, processing usually generates sputtering, slag, heat affected area, micro-
The defects of crackle, affects conventional pulsed laser device in the application in high-end laser assisted microprocessing field.Even in fact, picosecond
It is processed with femtosecond laser, due to accumulation of heat effect, big depth dry-type laser processing still can generate very important heat affecting
Area generates very formidable mass defect in the processing of the heat-sensitive materials such as single-crystal metal.
For the heat affecting for preferably overcoming dry laser to process, SYNOVA company, Switzerland has been invented laser and laminar flow water phase
In conjunction with Water Jet Guided Laser micrometer-nanometer processing technology (referring to international monopoly WO95/32834), the technology by laser pass through tiny nozzle coupling
It closes into laminar flow water column, the total reflection transmission of light is realized in air.Hot shadow due to the cooling effect of water flow, when pulse laser machining
Sound is inhibited well, also has the characteristics that insensitive to focusing, and laminar flow water column can be long up to 50 millimeters, to including brittleness material
The retrofit of multiclass material including material succeeds.It is the laser processing of liquid nuclear optical fibre that water, which helps the another kind of technology of laser processing,
Technology (referring to U.S. GE house journal US7211763B2), the technology use hollow conduit, and the refractive index of conduit is lower than center
Liquid medium, therefore, the transmission of laser in a liquid can be totally reflected, as solid core optical fiber is the same.The technology is broken
The high intensity laser beam energy transmission limit, optical fiber can grow 300 millimeters or more, and laser power density can be more than 4GW/cm2, by
Then solid tube wall constrains, and optical fiber can go deep into narrow regions and be laser machined.The technology projects after water flow etc. in air
It imitates in SYNOVA technology, but its solid tube wall keeps its processing more convenient.
Above-mentioned water helps laser processing technology to solve the heat affecting problem of pulse laser machining, but exists compared to dry-type processing
Some distinct disadvantages, the i.e. stability of laser coupled are limited to nozzle diameter, too major diameter, and laser intensity is insufficient, is difficult to realize
Effectively processing；Diameter is too small, and when laser coupled is easy to injure nozzle, and reliability is bad.Therefore, water helps the water Shu Zhi of laser processing
For diameter generally in 50~200um, machining resolution is low, is difficult reliably to improve.Add in addition, above-mentioned water helps laser processing to belong to single-point
Work, the multiaxial motions platforms such as three axis, five axis that need to arrange in pairs or groups when processing large area complicated shape could be completed, due to mass inertia, very
Hardly possible realizes that the scanning speed of 2 meter per seconds or more, the high-frequency advantage of short-pulse laser are difficult to bring into play.Comparatively, it does
Formula laser processing can break through 20 micron dimension resolution ratio easily, and the scanning speed of 10 meter per seconds is realized with scanning galvanometer, realize multiple
The rapid processing of miscellaneous pattern.
The problems such as laser processing reliability is not high, resolution ratio meets with bottleneck, processing complexity is limited is helped to solve current water,
It needs further to reform current water and helps laser processing technology.
Summary of the invention
Based on this, the present invention provides a kind of liquid auxiliary laser processing method with quick scanning function, provides simultaneously
A kind of liquid auxiliary laser processing unit (plant), it is opposite before water help laser processing technology, have that machining resolution is higher, scanning speed
Degree faster, can be convenient the advantages that carrying out complex pattern processing.
A kind of liquid auxiliary laser processing method includes the following steps: that step a, laser emit laser beam, the laser
Beam is directed into scanning system；Step b, the laser beam are scanned after system changes path and focuses and fluid coupling；Step
Enter nozzle after rapid c, the laser beam and fluid coupling, is projected from nozzle to workpiece to be processed together with liquid.
In one of the embodiments, in step a, before laser emits laser beam, laser beam focal length is adjusted, processing stand is made
On laser beam foucing.
In one of the embodiments, further include step d, adjusts workpiece to be processed with the movement of certain movement track, until
Workpiece to be processed obtains required shape.
A kind of liquid auxiliary laser processing unit (plant), including for emitting laser beams laser, light liquid coupling mechanism and
The liquid delivery system being connected with light liquid coupling mechanism, which is characterized in that further include be set to laser and light liquid coupler it
Between and the scanning system that is connected with laser with light liquid coupler, the laser beam that the laser issues enter scanning system
System, by the scanning system change path and focus after enter the smooth liquid coupling mechanism and fluid coupling, finally with liquid one
It rises from the nozzle of the smooth liquid coupling mechanism and projects.
The scanning system is laser galvanometer scanning system in one of the embodiments, is internally provided at least two
Vibration lens moves or controls laser beam in tri- directions movements of X, Y, Z in X, Y both direction for controlling laser beam.
The vibration lens is plane reflection eyeglass or prismatic lens in one of the embodiments,.
The scanning speed of the scanning system is 0~1000m/s in one of the embodiments,.
The liquid auxiliary laser processing unit (plant) further includes fixed focus adjusting mechanism in one of the embodiments, described solid
Focusing mechanism of setting the tone is set between scanning system and light liquid coupling mechanism and connect with scanning system and light liquid coupling mechanism, institute
Stating fixed focus adjusting mechanism includes multidirectional adjustment mechanism, for adjusting the relative position of smooth the liquid coupling mechanism and scanning system.
The multidirectional adjustment mechanism can rotate angle direction five in X, Y, Z-direction and A, B in one of the embodiments,
The relative position of light liquid coupling mechanism and scanning system is adjusted in a freedom degree；Wherein, X, Y, A, B four direction freedom degree are used
In making light liquid coupling mechanism keep coaxial with scanning system, Z-direction freedom degree is for adjusting light liquid coupling mechanism and scanning system
Distance, that is, adjust laser beam focal length.
The fixed focus adjusting mechanism further includes fixed plate in one of the embodiments, and the scanning system passes through described
Fixed plate is connect with the smooth liquid coupling mechanism, and the multidirectional adjustment mechanism is connect with the fixed plate.
The liquid auxiliary laser processing unit (plant) further includes fixed focus adjusting mechanism in one of the embodiments, described solid
Focusing mechanism of setting the tone includes fixed plate, and the scanning system is fixedly connected by the fixed plate with the smooth liquid coupling mechanism, shape
At an entirety.
The liquid auxiliary laser processing unit (plant) further includes light path system in one of the embodiments, the optical path system
It unites and enters the scanning system for conducting the laser beam of the laser transmitting.
The light path system includes optical fiber or optical mirror slip in one of the embodiments,.
The liquid auxiliary laser processing unit (plant) further includes liquid case system in one of the embodiments, the liquid case system
It unites for collecting the waste liquid after liquid auxiliary laser is processed.
The liquid auxiliary laser processing unit (plant) further includes the movement work for placing workpiece in one of the embodiments,
Make platform, the motion workbench is opposite with light liquid coupling mechanism and can move relative to light liquid coupling mechanism.
The smooth liquid coupling mechanism further includes diaphragm, cavity and feed flow connector, the confession in one of the embodiments,
Liquid connector is connected with the liquid delivery system, laser beam can through diaphragm enter the cavity, with from feed flow connector into
After the liquid entered couples in the cavity, projected together from nozzle.
The liquid delivery system includes pressurized tank, pump, gas pressure generator in one of the embodiments, described
Pump and gas pressure generator are connected with the pressurized tank respectively, and the pressurized tank is connected to the smooth liquid coupling mechanism.
It is provided with air inlet, inlet and outlet on the pressurized tank in one of the embodiments, air inlet passes through
Tracheae is connected with gas pressure generator, water inlet by pipe joint with pump be connected, from pump into pressurized tank pumping liquid, out
The mouth of a river is connected by pipe joint with pressure gauge, flowmeter, is connect eventually by pipe joint with light liquid coupling mechanism.
The liquid of the liquid auxiliary laser processing unit (plant) is the pure of the guide-lighting requirement of satisfaction in one of the embodiments,
Water, acid solution, aqueous slkali or salt water.
The nozzle is removable installed on the smooth liquid coupling mechanism in one of the embodiments,.
In one of the embodiments, the cross sectional shape of the nozzle be circle, nozzle inside diameter range be 0.5mm~
10mm。
The cross sectional shape of the nozzle is rectangle in one of the embodiments,.
The laser is 355~1064 nano wave lengths in one of the embodiments,.
Scanning system is set between aforesaid liquid auxiliary laser processing unit (plant) laser and light liquid coupler, there is scanning function
Can, nozzle diameter can be far longer than laser spot diameter, meet the transmission requirement of scanning machining laser beam, the liquid of certain pressure
Body is sprayed along nozzle, forms the water flow containing for focusing laser beam, the focus characteristics of laser are independent of optical fiber or equivalent optical fiber
Total reflection, but focusing and partial sweep in liquid medium, therefore, all size being able to achieve in dry-type processing are differentiated
Rate is also able to achieve under the technology by the liquid auxiliary laser processing unit (plant)；The scanning speed being able to achieve in dry type scanning obtains
To keep, while the help that water flow is cooling and washes away is obtained, helps to maintain optical channel.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of fluid present invention auxiliary laser processing unit (plant)；
Fig. 2 is the nozzle cross-section schematic shapes of fluid present invention auxiliary laser processing unit (plant)；
Fig. 3 is to add in fluid present invention auxiliary laser processing unit (plant) and the circular hole (left side) and conventional laser air of method processing
The comparison diagram of the circular hole (right side) of work.
Specific embodiment
Refering to fig. 1, fluid present invention auxiliary laser processing unit (plant) comprising laser 11, light path system 21, scanning system
31, light liquid coupling mechanism, fixed focus adjusting mechanism 51, liquid delivery system, motion workbench 71 and liquid case system.Liquid of the present invention
The liquid of body auxiliary laser processing unit (plant) can to meet guide-lighting desired water, acid solution, aqueous slkali or salt water etc., the present invention compared with
The liquid of good embodiment is preferably pure water, therefore light liquid coupling mechanism is light water coincidence mechanism 41, and liquid delivery system is water
Supply system 60, liquid case system are cistern system 81.
Laser 11 is 355~1064 nano wave lengths, any pulsewidth, preferably 532 for generating laser beam 12, laser 11
Nanometer green light.
Light path system 21 is made of optical fiber or optical mirror slip, enters scanning function system 31 for conducting laser beam 12.
In order to reduce the transmission loss of laser, laser 11 and scanning function system 31 can also be connected directly, what laser 11 issued
Laser beam 12 is directly conducted into scanning system 31, no setting is required light path system 21.
Scanning system 31 is laser galvanometer scanning system, and laser beam 12 enters scanning system 31, changed by scanning system 31
Enter light liquid coupling mechanism and fluid coupling after path and focusing.Scanning system 31 is internally provided at least two vibration lenies, vibration
Eyeglass can be plane mirror or prism, move or control laser beam 12 in X, Y both direction for controlling laser beam 12
It is moved in tri- directions X, Y, Z.Preferably two plane reflection eyeglasses are revolved by internal two reflecting optics high speed along axis
Turn, changes the path of laser beam 12 as required.Scanning system can do low-velocity scanning or high-velocity scanning, and scanning speed can be
0~1000m/s.
Light water coincidence mechanism 41 includes water chamber 43, and upper cover plate 46 is arranged on water chamber 43, and upper cover plate 46 passes through stud 47
It is connected and fixed with the outer wall of water chamber 43, diaphragm is set on upper cover plate 46, diaphragm is sheet glass 42, and 43 side of water chamber is set
It sets water supply joint 44 to connect with water supply system, nozzle 45 is set in water chamber bottom.Laser beam 12 enters through sheet glass 42
Light water coincidence mechanism 41 after water chamber 43 couples, ejects from nozzle 45 together with the water entered from water supply joint 44.
Fixed focus adjusting mechanism 51 be set between scanning system 31 and light liquid coupling mechanism 41 and with scanning system 31 and light
Liquid coupling mechanism 41 connects comprising fixed plate 53 and multidirectional adjustment mechanism.Scanning system 31 passes through fixed plate 53 and light water coupling
It closes mechanism 41 to connect, multidirectional adjustment mechanism is connect with fixed plate.Wherein, multidirectional adjustment mechanism includes X-direction, Y-direction, Z-direction
Adjustment mechanism 52 and A, B rotating angle adjusting mechanism 54, five freedom degrees of X, Y, Z, A, B are for adjusting 41 and of light water coincidence mechanism
The relative position of scanning system 31, wherein tetra- freedom degrees of X, Y, A, B are for the holding of Shi Guang water coincidence mechanism 41 and scanning system
31 is coaxial, and Z-direction freedom degree is used to adjust the distance of light water coincidence mechanism 41 and scanning system 31, it can adjusts laser beam
Focal length.
In order to keep the structure and volume of the device of the invention more compact, scanning system 31, is consolidated light water coincidence mechanism 41
Focusing mechanism 51 of setting the tone can be an entirety, or after structural parameters are solidified and choose optimal value, save fixed focus adjusting mechanism
Multidirectional adjustment mechanism in 51.
Water supply system 60 is by pressurized tank 61, water pump 62, gas pressure generator 63, pressure gauge 64, flowmeter 65, water pipe
Connector 69 forms.Air inlet 66, water inlet 67, water outlet 68 are disposed on pressurized tank 61.Air inlet 66 is gentle by tracheae 70
Body pressure generator 63 is connected.Water inlet 67 is connected by water pipe head 69 with water pump 62, is pumped from water pump 62 into pressurized tank 61
Enter water.Water outlet 68 is connected by water pipe head 69 with pressure gauge 64, flowmeter 65, eventually by water pipe head 69 and light water coupling
The water supply joint 44 for closing mechanism 41 connects.
Motion workbench 71 and workpiece to be processed 72 connect, and workpiece to be processed 72 is driven to transport according to the motion profile of setting
It is dynamic.
Cistern system 81 includes water tank and discharge outlet, for collecting the waste water after liquid auxiliary laser is processed and exclusion.
In the present embodiment, nozzle can be adjusted and replace, and can be changed to the spray of different inner diameters and cross sectional shape
Mouth, the shape of nozzle segment, which can automate, to be adjusted.As shown in Fig. 2, the cross sectional shape of nozzle 45 can be round section
Shape 95, it is preferable that nozzle inside diameter is 0.5mm~10mm.Due to chosen when the internal diameter of nozzle generally uses biggish 2mm~
10mm can keep for a long time whole so the difficulty of light water coincidence is far below the water coupled based on small nozzle and helps laser processing technology
The reliability of a system.Contrastively, current water helps laser processing due to relying on total reflection effect, optical fiber or equivalent optical fiber it is straight
Diameter is generally within 200 microns, to guarantee enough laser intensities.Scanning galvanometer 31 controls laser beam 12 in circular section shape
The special-shaped figure 96 of filling scanning one in 91.
As shown in Fig. 2, the cross sectional shape of nozzle 45 can also be square cross sectional shape 93.Scanning function system 31 controls
Laser beam 12 fills one triangle 94 of scanning in square cross-sectional shaped 93.
As shown in Fig. 2, the cross sectional shape of nozzle 45 can also be rectangular cross-section 91, rectangle can be slit shape
Shape.Scanning function system 31 controls laser beam 12 and fills one rectangular pattern 92 of scanning in rectangular cross-section 95.
The processing method of aforesaid liquid auxiliary laser processing unit (plant), includes the following steps:
(1) fixed focus adjusting mechanism 51 is adjusted before processing workpiece to be processed 72, makes the coke of liquid auxiliary laser processing unit (plant)
Away from being adjusted to suitable position and be fixed up.
(2) formally start workpieces processing, processing required for motion workbench 71 connects workpiece to be processed 72 and moves to
Position, while it is in processing stand in the focus of liquid auxiliary laser.
(3) water supply system 60 is started to work, and the water with certain pressure enters the water chamber of light water coincidence mechanism 41, from
It is ejected as a laminar flow at nozzle.
(4) laser 11 is started to work, and laser beam enters scanning system 31 by light path system 21, is penetrated from scanning system 31
Laser beam out enters after water chamber 43 and fluid coupling through the sheet glass 42 of light liquid coupling mechanism 41 to be projected from nozzle 45.
(5) scanning system 31 controls internal multiple vibration lenies movement, and making laser, quickly scanning carries out in nozzle cross-section
Laser processing.
(6) motion workbench 71 is connected workpiece to be processed and is moved with certain motion profile, until workpieces processing obtains institute
The shape needed.
As shown in figure 3, using the circular hole processed in the present apparatus and the circular hole (left side) and conventional laser air of method processing
(right side) comparison is as shown in the figure, it can be seen that the present apparatus and the bore edges of method processing are neat, radian is accurate, almost without hot shadow
Area is rung, and the circular hole processed in conventional laser air has slag and thermal deformation.
In the present embodiment, the water beam projected from nozzle is not re-used as water beam optical fiber, and the focus characteristics of laser are independent of water
The total reflection of beam, therefore larger size can be set in laser total reflection nozzle diameter, is far longer than laser spot diameter, such as 0.5-
The outlet of 10mm diameter nozzle, meets the transmission requirement of scanning machining laser beam.The liquid runs down nozzle of certain pressure sprays, and is formed
The water flow for focusing laser beam contains, total reflection of the focus characteristics of laser independent of water beam, but the focusing in liquid medium
And partial sweep, therefore, all size resolution ratio being able to achieve in dry-type processing is also able to achieve in the present embodiment；Dry type is swept
The scanning speed being able to achieve in retouching is maintained, while under the action of water flow is cooling and washes away, being able to maintain optical channel, greatly
It is big to reduce heat affected area.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
Limitations on the scope of the patent of the present invention therefore cannot be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to guarantor of the invention
Protect range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.
Claims (23)
1. a kind of liquid auxiliary laser processing method, which comprises the steps of:
Step a, laser emit laser beam, and the laser beam is directed into scanning system；
Step b, the laser beam are scanned after system changes path and focuses and fluid coupling；
Enter nozzle after step c, the laser beam and fluid coupling, projected from nozzle to workpiece to be processed together with liquid,
The internal diameter of the nozzle is 0.5mm~10mm；
Step d, the internal multiple vibration lenies movement of scanning system control make laser quick scanning progress laser in nozzle cross-section
Processing.
2. liquid auxiliary laser processing method according to claim 1, which is characterized in that in step a, laser transmitting swashs
Before light beam, laser beam focal length is adjusted, is in processing stand on laser beam foucing.
3. liquid auxiliary laser processing method according to claim 1, which is characterized in that further include step e, adjust to be added
Work workpiece is with the movement of certain movement track, until workpiece to be processed obtains required shape.
4. a kind of liquid auxiliary laser processing unit (plant), including for emitting laser beams laser, light liquid coupling mechanism and with
The connected liquid delivery system of light liquid coupling mechanism, which is characterized in that further include be set between laser and light liquid coupler,
And the scanning system being connected with laser with light liquid coupler, the laser beam that the laser issues enter the scanning system,
By the scanning system change path and focus after enter the smooth liquid coupling mechanism and fluid coupling, finally together with liquid from
The nozzle of the smooth liquid coupling mechanism projects, and multiple vibration lenies movement inside scanning system control makes laser in nozzle cross-section
Interior quick scanning is laser machined, and the internal diameter of the nozzle is 0.5mm~10mm.
5. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the scanning system is laser vibration
Scarnning mirror system is internally provided at least two vibration lenies, swashs for controlling laser beam and moving or control in X, Y both direction
Light beam moves in tri- directions X, Y, Z.
6. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the vibration lens is plane reflection
Eyeglass or prismatic lens.
7. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the scanning speed of the scanning system
Degree is 0~1000m/s.
8. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the liquid auxiliary laser processing
Device further includes fixed focus adjusting mechanism, the fixed focus adjusting mechanism be set between scanning system and light liquid coupling mechanism and with
Scanning system is connected with light liquid coupling mechanism, and the fixed focus adjusting mechanism includes multidirectional adjustment mechanism, for adjusting the smooth liquid
The relative position of coupling mechanism and scanning system.
9. liquid auxiliary laser processing unit (plant) according to claim 8, which is characterized in that the multidirectional adjustment mechanism can
The relative position of light liquid coupling mechanism and scanning system is adjusted in X, Y, Z-direction and A, B rotation five freedom degrees of angle direction；
Wherein, X, Y, A, B four direction freedom degree are coaxial for making the holding of light liquid coupling mechanism and scanning system, and Z-direction freedom degree is used
In the distance for adjusting light liquid coupling mechanism and scanning system, that is, adjust the focal length of laser beam.
10. liquid auxiliary laser processing unit (plant) according to claim 8 or claim 9, which is characterized in that the fixed focus adjusting mechanism
It further include fixed plate, the scanning system is connect by the fixed plate with the smooth liquid coupling mechanism, the multidirectional adjustment machine
Structure is connect with the fixed plate.
11. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the liquid auxiliary laser adds
It further includes fixed focus adjusting mechanism that tooling, which is set, and the fixed focus adjusting mechanism includes fixed plate, and the scanning system passes through the fixation
Plate is fixedly connected with the smooth liquid coupling mechanism, forms an entirety.
12. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the liquid auxiliary laser adds
It further includes light path system that tooling, which is set, and the laser beam that the light path system is used to conduct the laser transmitting is into the scanning
System.
13. liquid auxiliary laser processing unit (plant) according to claim 12, which is characterized in that the light path system includes light
Fine or optical mirror slip.
14. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the liquid auxiliary laser adds
It further includes liquid case system that tooling, which is set, and the liquid case system is used to collect the waste liquid after the processing of liquid auxiliary laser.
15. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the liquid auxiliary laser adds
It further includes motion workbench for placing workpiece that tooling, which is set, and the motion workbench is opposite with light liquid coupling mechanism and can be opposite
It is moved in light liquid coupling mechanism.
16. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the smooth liquid coupling mechanism is also
Including diaphragm, cavity and feed flow connector, the feed flow connector is connected with the liquid delivery system, and laser beam can penetrate window
Mouthful piece enters the cavity, after coupling in the cavity with from the liquid that feed flow connector enters, together from nozzle injection.
17. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the liquid delivery system packet
Pressurized tank, pump, gas pressure generator are included, the pump and gas pressure generator are connected with the pressurized tank respectively, the pressure
Power tank is connected to the smooth liquid coupling mechanism.
18. liquid auxiliary laser processing unit (plant) according to claim 17, which is characterized in that be provided on the pressurized tank
Air inlet, inlet and outlet, air inlet are connected by tracheae with gas pressure generator, water inlet pass through pipe joint and
Pump is connected, and from pump, into pressurized tank, pumping liquid, water outlet are connected by pipe joint with pressure gauge, flowmeter, eventually by
Pipe joint is connect with light liquid coupling mechanism.
19. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the liquid auxiliary laser adds
The liquid that tooling is set is to meet guide-lighting desired pure water, acid solution, aqueous slkali or salt water.
20. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the nozzle is removably set
It is placed on the smooth liquid coupling mechanism.
21. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the cross sectional shape of the nozzle
For circle.
22. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the cross sectional shape of the nozzle
For rectangle.
23. liquid auxiliary laser processing unit (plant) according to claim 4, which is characterized in that the laser be 355~
1064 nano wave lengths.
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| CN201710038812.9A CN106735871B (en) | 2017-01-19 | 2017-01-19 | Liquid auxiliary laser processing method and device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107962263B (en) * | 2017-11-16 | 2019-07-09 | 中国科学院宁波材料技术与工程研究所 | Laser and electrolysis combined machining method and its device |
| CN107971592B (en) * | 2017-11-16 | 2019-07-09 | 中国科学院宁波材料技术与工程研究所 | Laser intervenes electrochemical micromachining method and device thereof |
| CN108031986A (en) * | 2017-12-29 | 2018-05-15 | 苏州德龙激光股份有限公司 | Devices and methods therefor based on ultrashort pulse Water Jet Guided Laser processing diamond |
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