CN107971592B - Laser intervenes electrochemical micromachining method and device thereof - Google Patents
Laser intervenes electrochemical micromachining method and device thereof Download PDFInfo
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- CN107971592B CN107971592B CN201711136281.3A CN201711136281A CN107971592B CN 107971592 B CN107971592 B CN 107971592B CN 201711136281 A CN201711136281 A CN 201711136281A CN 107971592 B CN107971592 B CN 107971592B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
- B23H9/14—Making holes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
- B23H7/38—Influencing metal working by using specially adapted means not directly involved in the removal of metal, e.g. ultrasonic waves, magnetic fields or laser irradiation
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- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
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Abstract
This application discloses a kind of laser to intervene electrochemical micromachining method, at least includes the following steps: tool-electrode and workpiece to be processed are connect with the cathode of power supply and anode respectively；Laser and electrolyte are transmitted to the machining area of workpiece to be processed by tool-electrode；Electrochemical micromachining is carried out after powering on, tool-electrode is fed to workpiece to be processed, obtains object construction.In method and laser intervention electrochemical micromachining device in the application, laser beam is transmitted to deeper machining area by liquid nuclear optical fibre to be totally reflected, it realizes laser energy field and couples the high efficiency processing, it can be achieved that big aspect ratio fine structure with the big depth of electrical-chemistry method.
Description
Technical field
This application involves a kind of laser to intervene electrochemical micromachining method and device thereof, belongs to electrochemical micromachining field.
Background technique
With the development of science and technology, big aspect ratio microstructure is in aerospace, precision die, MEMS
(MEMS), the fields such as accurate medical treatment, weaponry are widely used.Electrochemical micromachining removes workpiece in the form of an ion
Material has many advantages, such as that machining surface integrity is good, rapidoprint type is wide, tool cathode is lossless, in micro processing field
Show wide application prospect.
Electrochemical micromachining is based on Anodic solution principle and removes workpiece material, by controlling the electrolytic etching zone of influence
The processing of micro-nano-scale structure, locality and controllability with higher are realized to control the removal precision of material in domain.It is fine
Electrolyzed Processing includes template PET microfiber, constraint etching oxidant layer processing, electro-hydraulic beam microfabrication, the fine electricity of ultrashort pulse
Solution processing and wire electrochemical micro-machining etc.；There is electrochemical micromachining tool-electrode not contact with workpiece, electrodeless loss,
It is not limited and the advantages such as machined surface quality by machined material mechanical property, suitable for processing the small metal of scale or partly leading
Body minisize structure and part.
Currently, electrochemical micromachining has processable the problems such as aspect ratio is limited, processing efficiency is relatively low, fine electricity is limited
Application of the solution processing in precise fine manufacturing field.The feed rate of tool-electrode is generally less than 1 μ during electrochemical micromachining
M/s, much smaller than processing technologies such as machining, electrical discharge machinings.Limit of the Precision of Micro-ECM by dispersion corrosion electric current
System, dispersion corrosion electric current influence area is bigger, and electrical-chemistry method locality and precision are lower.To improve electrochemical micromachining effect
Rate is generally taken and improves the methods of electrical parameter (such as machining voltage and concentration of electrolyte) or electrode vibration.But electrical-chemistry method
The raising of efficiency is usually associated with the enhancing of dispersion corrosion effect, leads to the reduction of machining accuracy.Domestic and foreign scholars propose work
The methods of part surface mask film covering plate, ultrashort pulse electric current and tool-electrode side insulation, to improve PET microfiber side
The precision of method.Using tool-electrode side insulation method, the precision of electrochemical micromachining can be effectively improved, but at present there is also
Processing efficiency is lower, and the problems such as protrusion is arranged at machining area bottom.In addition, depth when electrochemical micromachining big aspect ratio fine structure
Machining area the problems such as processing efficiency is lower, limits the raising of electrochemical micromachining aspect ratio there are feed flow difficulty.
Summary of the invention
According to the one aspect of the application, a kind of laser intervention electrochemical micromachining method is provided, this method, which utilizes, to swash
Light photo-thermal effect improves electrochemical micromachining aspect ratio and efficiency.
The laser intervenes electrochemical micromachining method, at least includes the following steps:
(1) tool-electrode and workpiece to be processed are connect with the cathode of power supply and anode respectively；
(2) laser and electrolyte are transmitted to the machining area of workpiece to be processed by tool-electrode；
(3) electrochemical micromachining is carried out after powering on, tool-electrode is fed to workpiece to be processed, obtains object construction；
Wherein, the tool-electrode is located at the top of workpiece to be processed.
Preferably, the structure of tool-electrode described in step (1) are as follows: inside is liquid nuclear optical fibre, and outer layer is package liquid core light
Fine metal catheter；
The laser and electrolyte are transmitted to the machining area of workpiece to be processed by liquid nuclear optical fibre.
Preferably, the cathode of the metal catheter of the tool-electrode and power supply connects.The liquid nuclear optical fibre is coaxially located at institute
It states in metal catheter.
Preferably, the end of the liquid nuclear optical fibre is higher than metal catheter end.To prevent from processing using electrolytic etching effect
Region generates bulge-structure.
Preferably, the cross sectional shape of the liquid nuclear optical fibre, metal catheter is selected from ellipse, round or polygon.To
To the special-shaped tool-electrode for processing big aspect ratio profiled holes.
Preferably, the polygon is selected from triangle, rectangle, square, pentagon or hexagon.
Preferably, the laser injects the entrance center of the liquid nuclear optical fibre of tool-electrode with certain incidence angle, to be all-trans
The form penetrated is transmitted to the machining area of workpiece to be processed；The electrolyte with certain flow velocity and pressure by liquid nuclear optical fibre inside
Flow into machining area.
Preferably, the liquid nuclear optical fibre includes the material system by light refractive index lower than the light refractive index of the electrolyte
Standby obtained capillary；
The material of the metal catheter is selected from least one of stainless steel, titanium alloy；Wherein, the metal catheter is interior
Diameter is 150~1100 μm, and outer diameter is 200~1200 μm.
The material of the metal catheter is further selected from other conductive metal materials.
Preferably, the liquid nuclear optical fibre is the capillary that material that light refractive index is 1.29 is prepared；Wherein, liquid core
The internal diameter of optical fiber is 100~1000 μm, and outer diameter is 150~1100 μm.
Preferably, the liquid nuclear optical fibre is the capillary made of material of the refractive index lower than electrolyte, and material is beauty
The research and development of E.I.Du Pont Company, stateAF 2400, light refractive index are about n1=1.29.Wherein, liquid nuclear optical fibre internal diameter 100~
1000 μm, 150~1100 μm of outer diameter.
Preferably, the outside of the metal catheter carries out insulation processing.
Preferably, laser described in step (2) is focused before entering tool electrode；The electrolyte is passivity electricity
Liquid is solved, forms passivation layer on workpiece to be processed surface.
Preferably, the electrolyte is molten using the stronger passivity electrolyte of oxidisability, such as sulfuric acid, sodium nitrate, sodium chlorate
Liquid forms uniform, fine and close passivation layer in workpiece surface.
Preferably, the voltage during electrochemical micromachining described in step (3) between tool-electrode and workpiece to be processed
Amplitude is 5~20V, and frequency is 10~100KHz.
It is further preferred that during electrochemical micromachining described in step (3) between tool-electrode and workpiece to be processed
Voltage magnitude be 5~20V, frequency be 10~30KHz.
Preferably, the concentration of electrolyte is 0.05~1.5mol/L during electrochemical micromachining described in step (3).
Preferably, the concentration of electrolyte is 0.05~0.3mol/L during electrochemical micromachining described in step (3).
Preferably, electrolyte is flowing electrolyte during electrochemical micromachining described in step (3).
Preferably, the flow of electrolyte is 0.01~0.8m during electrochemical micromachining described in step (3)3/h。
It is further preferred that the flow of electrolyte is 0.1~0.5m during electrochemical micromachining described in step (3)3/
h。
Preferably, the pressure of electrolyte is 0.1~0.5MPa during electrochemical micromachining described in step (3).
Preferably, the real-time change of electric current in process is detected during the electrochemical micromachining by digital oscilloscope
Change.
Preferably, the tool-electrode end and be 0.2~1mm with the initial manufacture gap of workpiece to be processed.
With the increase of working depth in traditional light electrolysis process, the feeding of tool-electrode hastens rate generation centainly
The decline of degree, not only reduced by only the efficiency of light electrolysis processing, but also make the aspect ratio of workpiece to be processed limited, Bu Nengman
Foot production needs.Meanwhile with the increase of working depth, deep processing region will appear feed flow difficulty, machining area bottom has
The problems such as raised.Meanwhile can have the drawbacks such as taper, local pyrexia that processing generates in existing laser processing procedure, wherein
The photo-thermal effect of stimulated light causes in laser processing procedure, and the factors such as region uneven heating influence.
It, will be in laser processing in order to overcome defect present in the aperture process with larger aspect ratio in the application
" photo-thermal effect " generated carries out compound with Electrolyzed Processing.It is creative by the exploration repeatedly and design of present inventor
Laser processing and light electrolysis processing are combined with the ad hoc fashion of the application, specifically:
Knot can be passed through in the technical solution of the application combination by laser machining the drawbacks such as the local pyrexia generated
Structure and control become the advantage for being conducive to light electrolysis processing.In a preferred approach, by design matching and power match, will swash
Instead the heating that light generates is obviously improved light electrolysis processing technology effect.
On the other hand, light electrolysis processes existing electrode and nearby subtracts that material is more significant, is difficult to go deep into processing, taper, needs
The problems such as electrolyte, does not only have a negative impact to laser treatment in the technical solution of the application combination, instead with
Laser cooperates so that deep hole is accelerated efficiently to quickly propel, and obtains depth, surface that laser processing can not obtain
Finish and extremely low taper.
The photo-thermal effect that will generate in laser processing procedure of technical solution creativeness in the application is tied with light electrolysis processing
It closes, not only overcomes the respective defect in light electrolysis processing and laser processing procedure, obtain laser processing, light electrolysis even two
Person's simple combination processes depth, high surface smoothness and the extremely low taper that all cannot achieve.Tool is realized simultaneously
The high efficiency processing of the big aspect ratio fine structure such as fast, Fine and Deep Hole with high accuracy of electrode feed speed.
Laser is coupled with electrolyte with certain forms in the application, realizes the compound of laser and Electrolyzed Processing.Together
When, by the restriction to laser energy and flow of electrolyte, processing efficiency is not only increased, and guarantor can be further realized
While holding machining area and persistently process, so that the temperature of electrolyte and conductivity increase, the electrolysis in Electrolyzed Processing region is allowed
Processing electric current density is in most favo(u)red state.
It is preferably carried out mode as one kind, the laser intervention electrochemical micromachining method at least includes the following steps:
1, liquid nuclear optical fibre is installed in the metal catheter of side insulation and forms tool-electrode；
2, tool-electrode is clamped in the top of workpieces processing, and reasonable set tool-electrode end and workpiece machining surface
Initial manufacture gap about 0.2~1mm；
3, electrolyte is with certain flow velocity and pressure by flowing into machining area inside liquid nuclear optical fibre；
4, adjustment laser beam injects liquid nuclear optical fibre entrance center, laser beam by condenser lens with certain incidence angle
The machining area of workpieces processing is transmitted in the form of total reflection；
5, tool-electrode interior metal conduit and workpieces processing are electrolysed the cathode and sun of processing power source with high-frequency impulse respectively
Pole connection, and pass through the real-time change of electric current in digital oscilloscope detection process；
6, tool-electrode is fed with certain feed rate to workpieces processing, and the tool-electrode based on liquid nuclear optical fibre can depth
Workpieces processing deep processing region is intervened, realizes the high efficiency processing of big aspect ratio fine structure.
Electrolyte is transmitted using liquid nuclear optical fibre in the method, and forms laser entirely at electrolysis liquid liquid nuclear optical fibre interface
Reflection, to realize total reflection transmission of the laser beam in liquid nuclear optical fibre.Liquid nuclear optical fibre is by refractive index lower than electrolyte
Capillary made of material, material are DuPont Corporation's research and developmentAF 2400, light refractive index are about n1=
1.29.Due to the light refractive index (n of electrolyte2=1.33) larger, when laser beam is with certain incidence angle directive liquid core light
When fine inner wall, laser beam forms total reflection at electrolysis liquid liquid nuclear optical fibre interface, and refracted light can not pass through liquid nuclear optical fibre material
Material.
In method in the application, laser beam is injected inside tool-electrode in liquid nuclear optical fibre by condenser lens, wherein
The light refractive index of liquid nuclear optical fibre material is less than the light refractive index of electrolyte, when laser beam is with certain incidence angle directive liquid
When nuclear optical fibre inner wall, laser beam forms total reflection at electrolysis liquid liquid nuclear optical fibre interface, and refracted light can not pass through liquid core light
Fiber material.Laser beam is transmitted in liquid nuclear optical fibre with "the" shape, therefore laser beam can transmit under total reflection effect
To deeper machining area.The metal catheter and workpieces processing wrapped up on the outside of liquid nuclear optical fibre is electrolysed processing electricity with high-frequency impulse respectively
The cathode in source is connected with anode, and workpiece material is removed under Anodic corrasion.Laser beam acts on workpiece surface
The local photo-thermal effect of generation increases the temperature of the electrolyte of machining area and conductivity, to improve electrochemical micromachining electricity
Current density, i.e. raising electrochemical micromachining efficiency.Meanwhile laser beam acts on photo-thermal effect caused by machining area and makes to process
The turbulent flow generated at workpiece and electrolyte interface can play microcell mixing effect, lead to the reduction of interface diffusion layer thickness, mitigate dense
Polarization is spent, increases Electrolyzed Processing zone current density, to improve Electrolyzed Processing efficiency.Electrolyzed Processing product and generation
Machining area is discharged under the drive of flowing electrolyte in bubble, and it is fine to accumulate on processing for electrolysate when preventing working depth larger
Structural base blocks machining area, is conducive to the stability for improving electrochemical micromachining.
Of the invention improves electrochemical micromachining aspect ratio and efficiency method based on photothermal laser effect, it is therefore intended that proposes
What insertion type laser and the compound deep hole machining method of electrolysis, comprehensive utilization Electrolyzed Processing and laser processing were generated in workpiece surface
Photo-thermal effect, the fine and close passivation layer generated using the photo-thermal effect real-time high-precision removal workpiece surface of liquid nuclear optical fibre laser, and
The region of passivation layer covering will not be by Electrolyzed Processing, to improve the locality of electrochemical micromachining.
Laser energy described in method is lower in the application, and the energy density of laser action and machining area is lower than 104W/
cm2, workpiece material can not directly remove by laser.The machining area temperature rise that laser action generates is conducive to electrochemical reaction interface
Exchange of particles rate, be conducive to improve Electrolyzed Processing efficiency.Workpiece material is removed under Anodic corrasion, by
Workpieces processing deep processing region can be got involved deeply in the tool-electrode based on liquid nuclear optical fibre, can realize big deep diameter using this method
High efficiency than fine structure is processed.
Electrolyte, with certain pressure and flow rate and direction machining area, is added by liquid nuclear optical fibre by side processing gap outflow
Work area domain.Metal catheter side insulation is conducive to the end that Electrolyzed Processing region is limited to metal catheter, reduces Electrolyzed Processing
Caused processing taper improves machining accuracy.Using laser beam in the total reflection effect of electrolyte and optical fibre interface in workpiece table
Face forms the equally distributed energy beam of energy, causes the photo-thermal effect of machining area workpiece surface, realizes laser energy field and electricity
Solve the ideal coupling of effect.Machining area is discharged rapidly under the drive of flow at high speed electrolyte in electrolysate, prevents processing deep
Electrolysate accumulates on processing type hole bottom blocking machining area when spending larger, leads to the generation of short circuit phenomenon, damage tool electricity
Pole and the decline for causing processing stability.
Described can be efficient by laser beam based on photothermal laser effect raising electrochemical micromachining aspect ratio and efficiency method
It is transmitted to compared with deep processing region, realizes high-precision, the processing without heat affected layer Fine and Deep Hole.Insertion type laser and electrolysis Compound Machining
Using the stronger passivity electrolyte of oxidisability, fine and close passivation layer easily is formed in workpiece surface, on the one hand protects the non-irradiated region of laser
Domain is not removed by Electrolyzed Processing, is conducive to improve Electrolyzed Processing locality, is improved Electrolyzed Processing precision；On the other hand help to change
Absorptivity of the kind workpiece surface to laser.In addition, it is further to form passivation layer in machined surface with the raising of working depth
It prevents and deep hole processing entrance is continued to process, be conducive to the taper for reducing deep hole processing, improve Precision of Micro-ECM.
Another aspect in the application, provides a kind of laser intervention electrochemical micromachining device, and described device is at least wrapped
It includes: electrolysis system, laser system；
Wherein, the electrolysis system includes at least: power supply, electrolyte, tool-electrode；
The electrolysis system carries out electrochemical micromachining under the laser intervention that laser system issues.
Preferably, the electrolysis system further includes ultra-filtration system and high-pressure metering pump.
Preferably, institute's electrolysis system further includes processing electric current detection system.
Preferably, institute's electrolysis system further includes oscillograph.
Preferably, described device further includes laser and electrolyte coupling device；The laser system includes laser, laser
Transmit optical path；Wherein, tool-electrode is connect with power cathode；The tool-electrode is installed on laser and electrolyte coupling device
End；The laser that the laser system issues is coupled by laser with electrolyte coupling device with electrolyte, realizes laser
The transmission of light beam and electrolyte.
The workpiece to be processed is connected with positive pole.
Preferably, the laser and electrolyte coupling device include at least: laser transmission module, electrolyte memory module.
The laser transmits the electrolyte in module transfer and electrolyte memory module by laser and is coupled into liquid nuclear optical fibre.
Preferably, the laser transmission module includes: high transparent glass (transmitance is greater than 90%).
Preferably, the coupling process of the laser and electrolyte are as follows: laser beam passes through high light transmission glass and electrolyte cavities
In body in electrolyte coupling feed liquor nuclear optical fibre；Wherein, electrolyte is flowed into the coupling of laser beam and electrolyte by electrolyte entrance
Device.The tool-electrode is connect by metal collet with the laser with electrolyte coupling device.
Preferably, the power supply is high frequency pulse power supply.
Preferably, the laser delivery optics include condenser lens.
Preferably, the laser is selected from gas laser, solid state laser or semiconductor laser.Further preferably
Ground, the laser are solid state laser.
Preferably, described device further includes displacement system, optical moving platform, liquid reserve tank；Wherein, institute's displacement system control
The motion profile of workpiece to be processed processed；Laser coupled of the optical moving platform for laser system to issue enters liquid nuclear optical fibre
Center；Electrolyte enters the liquid reserve tank after flowing through Electrolyzed Processing.
Preferably, institute's displacement system includes: motion module, control system；The workpiece to be processed is installed on movement mould
On block.
Preferably, the control system is industrial personal computer or computer；The motion module is triaxial movement platform, four axis fortune
Moving platform or 5-axis movement platform.
Preferably, described (the laser electrolysis Compound Machining based on the liquid nuclear optical fibre) device, including processing electric current detection system,
5-axis movement platform, optical moving platform, control system (industrial personal computer), solid state laser, optical transmission system, laser and liquid core
Fiber coupling system, ultra-filtration system etc..Electrolyte flows into laser and liquid core by high-pressure metering pump and ultra-filtration system
In fiber coupling system, and liquid nuclear optical fibre in tool-electrode is flowed into certain pressure and flow velocity.What solid state laser generated swashs
Light light beam is injected in laser and liquid nuclear optical fibre coupled system by optical transmission system, and laser beam is in liquid nuclear optical fibre to be all-trans
Penetrate the machining area for being transmitted to workpieces processing.Control system (industrial personal computer) passes through the movement of 5-axis movement platform courses workpieces processing
Track.
In described device use processing electric current detection system real-time detection processing electric current variation, detect the mutation of electric current with
It predicts short circuit phenomenon, prevents tool-electrode and workpiece from directly contacting, damage tool-electrode.Wherein, control system coordinates each system
System works normally, and controls the motion profile of workpiece, and handle the current signal of acquisition, is made a policy according to current signal.Work as inspection
When measuring short circuit phenomenon and occurring, high-frequency impulse is cut off in time and is electrolysed processing power source, and workpiece is made to retract certain gap.
Main control parameters of the present invention are laser beam energy density and Electrolyzed Processing parameter.Control laser beam acts on workpiece
The energy density of machining area is insufficient to allow workpiece material to melt, but photo-thermal effect caused by laser beam is conducive to passivation layer
Removal, the workpiece surface for not being passivated layer protection occur electrolytic etching effect, make the workpiece material in the region by ablation.Adjustment electricity
Machined parameters, including high-frequency impulse amplitude, frequency, concentration of electrolyte, processing gap etc. are solved, Electrolyzed Processing precision and effect are improved
Rate.
The interface geometry of liquid nuclear optical fibre and metal catheter may be designed as rectangle, triangle, ellipse, circle and polygon
Shape etc., be available for processing the special-shaped tool-electrode of big aspect ratio profiled holes, it can be achieved that big aspect ratio fine structure one
Secondary processing and forming.
The condition of related to numberical range can be independently selected from any point value in the numberical range in the application.
The beneficial effect that the application can generate includes:
1) laser provided herein intervenes electrochemical micromachining method, improves micro-electrochemical machining using photothermal laser effect
Process aspect ratio and efficiency.
2) laser provided herein intervenes electrochemical micromachining method, improve electrochemical micromachining locality,
Stability and precision.
3) laser provided herein intervenes electrochemical micromachining method, can obtain big aspect ratio fine structure, and
During the preparation process, the problem of feed flow in the prior art is difficult, and processing efficiency is low is overcome.
4) laser provided herein intervenes electrochemical micromachining device, easy to operate, it can be achieved that big aspect ratio is fine
The high efficiency of structure is processed.
Detailed description of the invention
Fig. 1 is a kind of laser electrolysis Compound Machining schematic diagram based on liquid nuclear optical fibre in the present invention；
Fig. 2 is a kind of liquid nuclear optical fibre schematic diagram in the present invention；
Fig. 3 is a kind of abnormal shape tool-electrode schematic diagram in the present invention；
Fig. 4 is a kind of laser electrolysis complex machining device composition schematic diagram based on liquid nuclear optical fibre in the present invention.Fig. 5 is this
Laser beam and liquid nuclear optical fibre are totally reflected coupling device in invention.
Component and reference signs list:
Specific embodiment
The application is described in detail below with reference to embodiment, but the application is not limited to these embodiments.
Unless otherwise instructed, the raw material in embodiments herein and catalyst are bought by commercial sources.
Wherein, liquid nuclear optical fibre is the capillary made of material of the refractive index lower than electrolyte, and material is Dupont
Company's research and developmentAF 2400, light refractive index are about n1=1.29.
1 laser of embodiment intervenes electrochemical micromachining
Electrochemical micromachining is carried out based on photothermal laser effect in the present embodiment, the schematic diagram being related to is as shown in Figure 1.Specifically
The following steps are included:
(1) liquid nuclear optical fibre 464 is installed in the metal catheter 462 of side insulation and forms tool-electrode；The liquid core light
Fibre is coaxially located in the metal catheter；
(2) tool-electrode is clamped in the top of workpieces processing 2, and reasonable set tool-electrode end and work pieces process table
The initial manufacture gap about 0.2mm in face；
(3) electrolyte 40 flows into laser and liquid nuclear optical fibre coupled system, then flows into liquid nuclear optical fibre 464 in tool-electrode
It is transmitted to machining area；
(4) adjustment laser beam 62 is by condenser lens 60 to inject 464 entrance center region of liquid nuclear optical fibre, laser beam
62 are transmitted to the machining area of workpieces processing 2 in the form of total reflection；
Wherein, the laser action and the energy density of machining area are 103W/cm2；
(5) metal catheter 462 of tool-electrode and workpieces processing 2 are electrolysed the cathode of processing power source 42 with high-frequency impulse respectively
It is connected with anode, and detects the real-time change of electric current in process by digital oscilloscope 44；
Wherein, the voltage magnitude between the tool-electrode and workpiece to be processed is 5V, frequency 10KHz.
Wherein, the material of the metal catheter is stainless steel；Internal diameter is 150 μm, and outer diameter is 200 μm.
The liquid nuclear optical fibre is the capillary that the material that light refractive index is 1.29 is prepared；Wherein, liquid nuclear optical fibre
Internal diameter is 100 μm, and outer diameter is 150 μm.
The electrolyte is the sodium nitrate solution of 0.1~1.5mol/L, and flow is 0.05~0.5m3/h。
According to Fig. 1, laser beam 62 is injected in liquid nuclear optical fibre 464 by condenser lens 60, and laser beam 62 is with complete
Transmission and reflection deep processing region into workpieces processing 2.The metal catheter 462 and workpieces processing 2 of 464 outer layer covers of liquid nuclear optical fibre
It connect with the cathode of high-frequency impulse electrolysis processing power source 42 and anode, and is added by the electrolysis of 44 real-time detection of digital oscilloscope respectively
Work curent change trend.Laser beam 62 acts on the photothermal laser effects region 02 on 2 surface of workpieces processing, makes processing district
The temperature and conductivity of domain partial electrolysis liquid 40 increase, and are conducive to remove the passivation near photothermal laser effects region 02
Layer 20, the workpiece surface workpiece material that unpassivated layer 20 is protected under Electrolyzed Processing effect by ablation, to improve electrolysis
The locality and precision of processing.The photo-thermal effect that laser beam 62 generates generates workpieces processing 2 and 40 interface of electrolyte
Turbulent flow plays microcell mixing effect, leads to the reduction of interface diffusion layer thickness, mitigates concentration polarization effect, increases Electrolyzed Processing region
Current density, to improve Electrolyzed Processing efficiency.Electrolyzed Processing product 08 and the bubble 06 generated are in the band for flowing electrolyte 40
Dynamic lower discharge machining area, electrolysate accumulates on processing type hole bottom blocking machining area when preventing working depth larger, mentions
The stability of high electrochemical micromachining.
Meanwhile industrial personal computer controls the motion profile of motion module by motion controller, since workpieces processing 2 is installed on fortune
On dynamic model block, therefore the motion profile of workpieces processing 2 can be controlled by control system precision.Tool based on liquid nuclear optical fibre
Electrode is installed on the end of laser Yu electrolyte coupling device 8, laser beam and electrolyte 40 and is coupled by laser with electrolyte
Device 8 realizes that total reflection of the laser beam at 40/ liquid nuclear optical fibre interface of electrolyte is transmitted.It is mobile by multiple freedom degree precision optical
Laser beam is accurately coupled feed liquor nuclear optical fibre center by platform.Electrolyte 40 flows into liquid reserve tank after flowing through electro-deposition region.
Fig. 2 is liquid nuclear optical fibre schematic diagram, and the focal length of condenser lens 60 is f, and the length of liquid nuclear optical fibre 464 is L.Laser beam
62 are injected in liquid nuclear optical fibre 464 by condenser lens 60 with coupling angle α, and laser beam 62 is on 464/ electrolyte of liquid nuclear optical fibre, 40 boundary
Face forms total reflection, and laser beam 62 is transmitted to the machining area of workpieces processing 2 with "the" shape.
Wherein, n1(1.29) and n2(1.33) be respectively liquid nuclear optical fibre and electrolyte light refractive index, when laser beam with
When certain incidence angle directive liquid nuclear optical fibre inner wall, laser beam forms total reflection at electrolysis liquid liquid nuclear optical fibre interface, reflects light
Line can not pass through liquid nuclear optical fibre material.α in figure1、α2、θ1、θ2Meet above-mentioned total reflection condition.
2 laser of embodiment intervenes electrochemical micromachining
The difference of laser intervention electrochemical micromachining and embodiment 1 in the present embodiment are as follows:
(3) electrolyte 40 flows into laser and liquid nuclear optical fibre coupling by high-pressure metering pump and ultra-filtration system by electrolyte
In collaboration system, and liquid nuclear optical fibre 464 in tool-electrode is flowed into certain pressure and flow velocity and is transmitted to machining area.
Voltage magnitude between the tool-electrode and workpiece to be processed is 15V, frequency 100KHz.
The electrolyte is the sodium nitrate solution of 0.05mol/L, flow 0.01m3/h。
Remaining operation is same as Example 1.
3 laser of embodiment intervenes electrochemical micromachining
The difference of laser intervention electrochemical micromachining and embodiment 1 in the present embodiment are as follows:
(3) electrolyte 40 flows into laser and liquid nuclear optical fibre coupling by high-pressure metering pump and ultra-filtration system by electrolyte
In collaboration system, and liquid nuclear optical fibre 464 in tool-electrode is flowed into certain pressure and flow velocity and is transmitted to machining area；
The pressure of the electrolyte is 0.1~0.5MPa；
(6) tool-electrode is fed with certain feed rate to workpieces processing 2, the tool-electrode based on liquid nuclear optical fibre 464
2 deep processing region of workpieces processing can be got involved deeply in, big aspect ratio fine structure is obtained.The tool-electrode and workpiece to be processed
Between voltage magnitude be 15V, frequency 30KHz.
Wherein, the material of the metal catheter is titanium alloy；Internal diameter is 1100 μm, and outer diameter is 1200 μm.
The liquid nuclear optical fibre is the capillary that the material that light refractive index is 1.29 is prepared；Wherein, liquid nuclear optical fibre
Internal diameter is 1000 μm, and outer diameter is 1100 μm.
The electrolyte is the sodium nitrate solution of 0.3mol/L, flow 0.8m3/h。
Remaining operation is same as Example 1.
4 laser of embodiment intervenes electrochemical micromachining
The difference of laser intervention electrochemical micromachining and embodiment 1 in the present embodiment are as follows:
(5) metal catheter 462 of tool-electrode and workpieces processing 2 are electrolysed the cathode of processing power source 42 with high-frequency impulse respectively
It is connected with anode, and detects the real-time change of electric current in process by digital oscilloscope 44；
Wherein, the voltage magnitude between the tool-electrode and workpiece to be processed is 20V, highest frequency 100KHz.
Remaining operation is same as Example 1.
5 laser of embodiment intervenes electrochemical micromachining
The difference of laser intervention electrochemical micromachining and embodiment 1 in the present embodiment are as follows:
(5) metal catheter 462 of tool-electrode and workpieces processing 2 are electrolysed the cathode of processing power source 42 with high-frequency impulse respectively
It is connected with anode, and detects the real-time change of electric current in process by digital oscilloscope 44；
Wherein, the material of the metal catheter is titanium alloy；Internal diameter is 800 μm, and outer diameter is 1000 μm.
The liquid nuclear optical fibre is the capillary that the material that light refractive index is 1.29 is prepared；Wherein, liquid nuclear optical fibre
Internal diameter is 700 μm, and outer diameter is 800 μm.
Remaining operation is same as Example 1.
6 laser of embodiment intervenes electrochemical micromachining device
Laser intervention electrochemical micromachining device in the present embodiment is as shown in Figure 4.
Fig. 4 is the laser electrolysis complex machining device composition schematic diagram based on liquid nuclear optical fibre, including processing electric current detection system
System 48, workpieces processing 2,5-axis movement platform 42, optical moving platform 12, control system (industrial personal computer) 102, is consolidated electrolyte 40
Body laser 64, optical transmission system 66, CCD vision system 68, laser and liquid nuclear optical fibre coupled system 8, ultra-filtration system
402, liquid storage device 404, tool-electrode 46, high-frequency impulse are electrolysed processing power source 42.
The laser and liquid nuclear optical fibre coupled system include: electrolyte entrance 80, electrolyte cavity 82, high light transmission glass 84
(transmitance is greater than 90%), seal washer 86, metal collet 88；As shown in Figure 5.Wherein, laser beam 62 passes through high light transmission glass
Glass 84 couples in feed liquor nuclear optical fibre with electrolyte in electrolyte cavity 82, and wherein electrolyte flows into laser beam by electrolyte entrance
With the coupling device of electrolyte, tool-electrode is connect by metal collet with coupling device；The seal washer is for sealing.
Described device carries out laser and intervenes electrochemical micromachining:
(1) tool-electrode is clamped in the top of workpieces processing 2, and reasonable set tool-electrode end and work pieces process table
The initial manufacture gap about 0.2mm in face；
(2) electrolyte 40 flows into laser and liquid nuclear optical fibre coupled system 8 by high-pressure metering pump and ultra-filtration system 402
In, and the liquid nuclear optical fibre in tool-electrode 46 is flowed into pressure and flow velocity, it is transmitted to machining area；
(3) adjustment laser beam 62 is by condenser lens 60 to inject 464 entrance center region of liquid nuclear optical fibre, laser beam
62 are transmitted to the machining area of workpieces processing 2 in the form of total reflection；
(4) metal catheter 462 of tool-electrode and workpieces processing 2 are electrolysed the cathode of processing power source 42 with high-frequency impulse respectively
It is connected with anode, and detects the real-time change of electric current in process by digital oscilloscope 44；
(5) industrial personal computer 102 controls the motion profile of motion module (5-axis movement platform) 100 by motion controller, by
It is installed on 5-axis movement platform 100 in workpieces processing 2, therefore the accurate control workpieces processing 2 of industrial personal computer 102 can be passed through
Motion profile.Tool-electrode based on liquid nuclear optical fibre is installed on laser and electrolyte coupling device 8 by CCD vision system 68
End, laser beam and electrolyte 40 realize laser beam in 40/ liquid core light of electrolyte by laser and electrolyte coupling device 8
The total reflection at fine interface is transmitted.Laser beam is accurately coupled to feed liquor nuclear optical fibre by multiple freedom degree precision optical mobile platform 12
Center.Electrolyte 40 flows into liquid reserve tank 404 after flowing through electro-deposition region.
Wherein, the material of the metal catheter is stainless steel；Internal diameter is 150 μm, outer diameter 200.
The liquid nuclear optical fibre is the capillary that the material that light refractive index is 1.29 is prepared；Wherein, liquid nuclear optical fibre
Internal diameter is 100 μm, and outer diameter is 150 μm.
Wherein, the tool-electrode 8 is made of the metal catheter of liquid nuclear optical fibre, package liquid nuclear optical fibre, on the outside of metal catheter
Carry out insulation processing.
7 laser of embodiment intervenes electrochemical micromachining device
Laser intervention electrochemical micromachining device and the difference of embodiment 6 in the present embodiment is as follows.
The processing electric current detection system is oscillograph；The optical transmission system is condenser lens.
Remaining is the same as embodiment 6.
Described device can intervene electrochemical micromachining method by the laser any in 1~embodiment of embodiment 5
Obtain the fine structure of big aspect ratio.
The above is only several embodiments of the application, not does any type of limitation to the application, although this Shen
Please disclosed as above with preferred embodiment, however not to limit the application, any person skilled in the art is not taking off
In the range of technical scheme, a little variation or modification are made using the technology contents of the disclosure above and is equal to
Case study on implementation is imitated, is belonged in technical proposal scope.
Claims (16)
1. a kind of laser intervenes electrochemical micromachining method, which is characterized in that at least include the following steps:
(1) tool-electrode and workpiece to be processed are connect with the cathode of power supply and anode respectively；
(2) laser and electrolyte are transmitted to the machining area of workpiece to be processed by tool-electrode；
(3) electrochemical micromachining is carried out after powering on, tool-electrode is fed to workpiece to be processed, obtains object construction；
Wherein, the tool-electrode is located at the top of workpiece to be processed；
The structure of tool-electrode described in step (1) are as follows: inside is liquid nuclear optical fibre, and outer layer is that the metal of package liquid nuclear optical fibre is led
Pipe；
The laser and electrolyte are transmitted to the machining area of workpiece to be processed by liquid nuclear optical fibre；
The electrolyte passes through liquid nuclear optical fibre internal transmission to machining area；
The laser injects liquid nuclear optical fibre, by being transmitted to machining area in liquid nuclear optical fibre inner wall/electrolyte interface total reflection；
The electrolyte is passivity electrolyte, forms passivation layer on the workpiece to be processed surface.
2. the method according to claim 1, wherein the end of the liquid nuclear optical fibre is higher than metal catheter end.
3. the method according to claim 1, wherein the cross sectional shape of the liquid nuclear optical fibre, metal catheter is selected from
Ellipse, round or polygon.
4. the method according to claim 1, wherein the liquid nuclear optical fibre includes by light refractive index lower than described
The capillary that the material of the light refractive index of electrolyte is prepared；
The material of the metal catheter is selected from least one of stainless steel, titanium alloy；Wherein, the internal diameter of the metal catheter is
150~1100 μm, outer diameter is 200~1200 μm.
5. according to the method described in claim 4, it is characterized in that, the liquid nuclear optical fibre is the material that light refractive index is 1.29
The capillary being prepared；Wherein, the internal diameter of liquid nuclear optical fibre is 100~1000 μm, and outer diameter is 150~1100 μm.
6. according to the method described in claim 4, it is characterized in that, the outside of the metal catheter carries out insulation processing.
7. the method according to claim 1, wherein laser described in step (2) is before entering tool electrode
It is focused；
The electrolyte is passivity electrolyte, forms passivation layer on workpiece to be processed surface.
8. the method according to claim 1, wherein tool during electrochemical micromachining described in step (3)
Voltage magnitude between electrode and workpiece to be processed is 5~20V, and frequency is 10~100KHz.
9. the method according to claim 1, wherein the tool-electrode end and initial with workpiece to be processed
Processing gap is 0.2~1mm.
10. a kind of laser intervenes electrochemical micromachining device, which is characterized in that described device includes at least:
Electrolysis system, laser system；
Wherein, the electrolysis system includes at least: power supply, electrolyte, tool-electrode；
The electrolysis system carries out electrochemical micromachining under the laser intervention that laser system issues；
The structure of the tool-electrode are as follows: inside is liquid nuclear optical fibre, and outer layer is the metal catheter for wrapping up liquid nuclear optical fibre；
The laser and electrolyte are transmitted to the machining area of workpiece to be processed by liquid nuclear optical fibre.
11. device according to claim 10, which is characterized in that described device further includes that laser couples dress with electrolyte
It sets；
The laser system includes laser, laser delivery optics；
Wherein, tool-electrode is connect with power cathode；The tool-electrode is installed on the end of laser Yu electrolyte coupling device；
The laser that the laser system issues is coupled by laser with electrolyte coupling device with electrolyte, realizes laser light
The transmission of beam and electrolyte.
12. device according to claim 11, which is characterized in that the power supply is high frequency pulse power supply.
13. device according to claim 11, which is characterized in that the laser delivery optics include condenser lens.
14. device described in any one of 0 to 13 according to claim 1, which is characterized in that described device further includes displacement system
System, optical moving platform, liquid reserve tank；
Wherein, the motion profile of institute's displacement system control workpiece to be processed；
Laser coupled of the optical moving platform for laser system to issue enters liquid nuclear optical fibre center；
Electrolyte enters the liquid reserve tank after flowing through Electrolyzed Processing.
15. device according to claim 14, which is characterized in that institute's displacement system includes: motion module, control system
System；The workpiece to be processed is installed in motion module.
16. device according to claim 15, which is characterized in that the control system is industrial personal computer or computer；
The motion module is triaxial movement platform, four axes motion platform or 5-axis movement platform.
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