CN106735871A - Liquid auxiliary laser processing method and device - Google Patents
Liquid auxiliary laser processing method and device Download PDFInfo
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- CN106735871A CN106735871A CN201710038812.9A CN201710038812A CN106735871A CN 106735871 A CN106735871 A CN 106735871A CN 201710038812 A CN201710038812 A CN 201710038812A CN 106735871 A CN106735871 A CN 106735871A
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- auxiliary laser
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
Fluid present invention auxiliary laser processing method is related to technical field of laser processing with device, its purpose is to provide a kind of liquid auxiliary laser processing method with quick scan function, there is provided a kind of liquid auxiliary laser processing unit (plant) simultaneously, water before relative helps laser processing technology, possess that machining resolution is higher, sweep speed faster, the advantages of conveniently can carrying out complex pattern and process.A kind of liquid auxiliary laser processing method of the present invention, comprises the following steps：Step a, laser transmitting laser beam, the laser beam is directed into scanning system；Step b, with fluid coupling behind the scanned system change path of the laser beam and focusing；Step c, nozzle is entered after the laser beam and fluid coupling, is together projected to workpiece to be processed from nozzle with liquid.
Description
Technical field
The present invention relates to technical field of laser processing, more particularly to a kind of liquid auxiliary laser processing method and device.
Background technology
Laser Processing carries out microfabrication, cutting, welding and punching etc. to material using laser beam, using increasingly extensive.
Conventional laser processing carries out dry-type processing in atmosphere, and when pulsewidth is larger, processing usually produces sputtering, slag, heat affected area, micro-
The defects such as crackle, have impact on application of the conventional pulsed laser device in high-end laser assisted microprocessing field.Even in fact, psec
With femtosecond laser processing, due to accumulation of heat effect, big depth dry-type Laser Processing still can produce very important heat affecting
Area, produces very formidable mass defect in the processing of the heat-sensitive materials such as single-crystal metal.
It is the heat affecting for preferably overcoming dry laser to process, SYNOVA companies of Switzerland have been invented laser and laminar flow of water phase
With reference to Water Jet Guided Laser Micrometer-Nanometer Processing Technology (referring to international monopoly WO95/32834), the technology by laser pass through tiny nozzle coupling
Close into laminar flow water column, the total reflection transmission of light is realized in air.Due to the cooling effect of current, hot shadow during pulse laser machining
Sound suppressed well, also with to focus on it is insensitive the characteristics of, laminar flow water column can be long up to 50 millimeters, to including fragility material
Expect to be succeeded in the retrofit of interior multiclass material.It is that liquid nuclear optical fibre is laser machined that water helps the another kind of technology of Laser Processing
Technology (referring to U.S. GE house journal US7211763B2), the technology uses hollow conduit, and the refractive index of conduit is less than center
Liquid medium, therefore, laser transmission in a liquid can be totally reflected, as solid core optical fiber is the same.The technology is broken
High intensity laser beam energy transmission limit, optical fiber can grow more than 300 millimeters, and laser power density can exceed 4GW/cm2, due to
It is the constraint of solid tube wall, optical fiber can go deep into narrow regions and be laser machined.The technology projects equivalent after current in atmosphere
In SYNOVA technologies, but its solid tube wall makes its processing more facilitate.
Above-mentioned water helps laser processing technology to solve the heat affecting problem of pulse laser machining, but exists compared to dry-type processing
The stability of some distinct disadvantages, i.e. laser coupled is limited to nozzle diameter, too major diameter, and laser intensity is not enough, is difficult to realize
Effectively processing；Diameter is too small, and easily nozzle is injured during laser coupled, and reliability is not good.Therefore, water helps the water Shu Zhi of Laser Processing
Footpath is general in 50~200um, and machining resolution is low, it is difficult to reliably improve.In addition, above-mentioned water helps Laser Processing to belong to single-point adding
Work, needs three axles of collocation, the multiaxial motion platform such as five axles to complete during processing large area complicated shape, due to mass inertia, very
Difficulty realizes sweep speeds more than 2 meter per seconds, and the high-frequency advantage of short-pulse laser is difficult to bring into play.Comparatively, dry type
Laser Processing can easily break through 20 micron dimension resolution ratio, and the sweep speed of 10 meter per seconds is realized with scanning galvanometer, realize complicated
The rapid processing of pattern.
The problems such as Laser Processing reliability is not high, resolution ratio meets with bottleneck, processed complex degree is limited is helped to solve current water,
Need badly and further reform current water and help laser processing technology.
The content of the invention
Based on this, the present invention provides a kind of liquid auxiliary laser processing method with quick scan function, while providing
A kind of liquid auxiliary laser processing unit (plant), it is relative before water help laser processing technology, possess that machining resolution is higher, scanning speed
Degree faster, the advantages of conveniently can carrying out complex pattern and process.
A kind of liquid auxiliary laser processing method, comprises the following steps：Step a, laser transmitting laser beam, the laser
Beam is directed into scanning system；Step b, with fluid coupling behind the scanned system change path of the laser beam and focusing；Step
Rapid c, nozzle is entered after the laser beam and fluid coupling, is together projected to workpiece to be processed from nozzle with liquid.
Wherein in one embodiment, in step a, before laser transmitting laser beam, laser beam focal length is adjusted, make processing stand
On laser beam foucing.
Wherein in one embodiment, also including step d, adjustment workpiece to be processed is moved with certain movement track, until
Workpiece to be processed obtains required shape.
A kind of liquid auxiliary laser processing unit (plant), including for launch the laser of laser beam, light liquid coupling mechanism and
The liquid delivery system being connected with light liquid coupling mechanism, it is characterised in that also including be arranged at laser and light liquid coupler it
Between and the scanning system that is connected with light liquid coupler with laser, the laser beam that the laser sends enters the scanning system
System, enters the smooth liquid coupling mechanism and fluid coupling, finally with liquid one after changing path and focusing by the scanning system
Rise from the nozzle of the smooth liquid coupling mechanism and project.
Wherein in one embodiment, the scanning system is laser galvanometer scanning system, is internally provided with least two
Galvanometer piece, for controlling, laser beam is moved in X, Y both direction or control laser beam is moved in tri- directions of X, Y, Z.
Wherein in one embodiment, the galvanometer piece is plane reflection eyeglass or prismatic lens.
Wherein in one embodiment, the sweep speed of the scanning system is 0~1000m/s.
Wherein in one embodiment, the liquid auxiliary laser processing unit (plant) also includes fixed focus adjusting mechanism, described solid
Focusing mechanism of setting the tone is arranged between scanning system and light liquid coupling mechanism and is connected with scanning system and light liquid coupling mechanism, institute
Stating fixed focus adjusting mechanism includes multidirectional adjustment mechanism, the relative position for adjusting the smooth liquid coupling mechanism and scanning system.
Wherein in one embodiment, the multidirectional adjustment mechanism can be in X, Y, Z-direction and A, B anglec of rotation direction five
The relative position of light liquid coupling mechanism and scanning system is adjusted in the individual free degree；Wherein, X, Y, A, B four direction free degree are used for
Make that light liquid coupling mechanism keeps and scanning system is coaxial, the Z-direction free degree is used to adjusting light liquid coupling mechanism and scanning system
Distance, that is, adjust the focal length of laser beam.
Wherein in one embodiment, the fixed focus adjusting mechanism also includes fixed plate, and the scanning system is by described
Fixed plate is connected with the smooth liquid coupling mechanism, and the multidirectional adjustment mechanism is connected with the fixed plate.
Wherein in one embodiment, the liquid auxiliary laser processing unit (plant) also includes fixed focus adjusting mechanism, described solid
Focusing mechanism of setting the tone includes fixed plate, and the scanning system is fixedly connected by the fixed plate with the smooth liquid coupling mechanism, shape
Into an entirety.
Wherein in one embodiment, the liquid auxiliary laser processing unit (plant) also includes light path system, the light path system
Unite and enter the scanning system for conducting the laser beam of the laser transmitting.
Wherein in one embodiment, the light path system includes optical fiber or optical mirror slip.
Wherein in one embodiment, the liquid auxiliary laser processing unit (plant) also includes liquid case system, the liquid case system
Unite for collecting the waste liquid after the processing of liquid auxiliary laser.
Wherein in one embodiment, the liquid auxiliary laser processing unit (plant) also includes the motion work for placing workpiece
Make platform, the motion workbench is relative with light liquid coupling mechanism and can be moved relative to light liquid coupling mechanism.
Wherein in one embodiment, the smooth liquid coupling mechanism also includes diaphragm, cavity and feed flow joint, the confession
Liquid joint is connected with the liquid delivery system, and laser beam can enter the cavity through diaphragm, enter with from feed flow joint
After the liquid for entering is coupled in cavity, projected from nozzle together.
Wherein in one embodiment, the liquid delivery system includes pressurized tank, pump, gas pressure generator, described
Pump and gas pressure generator are connected with the pressurized tank respectively, and the pressurized tank is connected with the smooth liquid coupling mechanism.
Wherein in one embodiment, air inlet, inlet and liquid outlet are provided with the pressurized tank, air inlet passes through
Tracheae is connected with gas pressure generator, and inlet is connected by pipe joint with pump, from pump to pumping liquid in pressurized tank, goes out
The mouth of a river is connected by pipe joint with pressure gauge, flowmeter, is connected with light liquid coupling mechanism eventually through pipe joint.
Wherein in one embodiment, the liquid of the liquid auxiliary laser processing unit (plant) is the pure of the guide-lighting requirement of satisfaction
Water, acid solution, aqueous slkali or salt solution.
Wherein in one embodiment, the nozzle is removable installed on the smooth liquid coupling mechanism.
Wherein in one embodiment, the cross sectional shape of the nozzle is circle, nozzle inside diameter scope be 0.5mm~
10mm。
Wherein in one embodiment, the cross sectional shape of the nozzle is rectangle.
Wherein in one embodiment, the laser is 355~1064 nano wave lengths.
Scanning system is set between aforesaid liquid auxiliary laser processing unit (plant) laser and light liquid coupler, with scanning work(
Can, nozzle diameter can be far longer than laser spot diameter, meet the transmission requirement of scanning machining laser beam, the liquid of certain pressure
Body sprays along nozzle, forms the current containing for focusing on laser beam, and the focus characteristics of laser do not rely on optical fiber or equivalent optical fiber
Total reflection, but focusing and partial sweep in liquid medium, therefore, all size that can be realized in dry-type processing is differentiated
Rate, can also be realized by the liquid auxiliary laser processing unit (plant) under the technology；The sweep speed that can be realized in dry type scanning is obtained
To keep, while obtaining current cooling and the help washed away, optical channel is helped to maintain.
Brief description of the drawings
Fig. 1 is the structural representation of fluid present invention auxiliary laser processing unit (plant)；
Fig. 2 is the nozzle cross-section schematic shapes of fluid present invention auxiliary laser processing unit (plant)；
Fig. 3 is the circular hole (left side) that fluid present invention auxiliary laser processing unit (plant) and method are processed and adds in conventional laser air
The comparison diagram of the circular hole (right side) of work.
Specific embodiment
Refering to Fig. 1, fluid present invention auxiliary laser processing unit (plant), it includes laser 11, light path system 21, scanning system
31st, light liquid coupling mechanism, fixed focus adjusting mechanism 51, liquid delivery system, motion workbench 71 and liquid case system.Liquid of the present invention
The liquid of body auxiliary laser processing unit (plant) can be to meet guide-lighting desired water, acid solution, aqueous slkali or salt solution etc., the present invention compared with
The liquid of good embodiment is preferably pure water, therefore light liquid coupling mechanism is light water coincidence mechanism 41, and liquid delivery system is water
Supply system 60, liquid case system is cistern system 81.
Laser 11 is used to produce laser beam 12, and laser 11 is 355~1064 nano wave lengths, any pulsewidth, preferably 532
Nanometer green glow.
Light path system 21 is made up of optical fiber or optical mirror slip, and scan function system 31 is entered for conducting laser beam 12.
In order to reduce the transmission loss of laser, laser 11 and scan function system 31 can also be joined directly together, what laser 11 sent
Laser beam 12 is directly conducted into scanning system 31, without setting light path system 21.
Scanning system 31 is laser galvanometer scanning system, and laser beam 12 enters scanning system 31, changed by scanning system 31
Enter light liquid coupling mechanism and fluid coupling after path and focusing.Scanning system 31 is internally provided with least two galvanometer pieces, shakes
Eyeglass can be plane mirror or prism, for controlling laser beam 12 to be moved or control laser beam 12 in X, Y both direction
In tri- direction motions of X, Y, Z.Preferably two plane reflection eyeglasses, are revolved at a high speed by two internal reflecting optics along axle
Turn, the path of laser beam 12 is changed on request.Scanning system can do low-velocity scanning or high-velocity scanning, and its sweep speed can be
0~1000m/s.
Light water coincidence mechanism 41 includes water chamber 43, and upper cover plate 46 is set on water chamber 43, and upper cover plate 46 passes through stud 47
Outer wall with water chamber 43 is connected, and diaphragm is set on upper cover plate 46, and diaphragm is sheet glass 42, and the side of water chamber 43 sets
Put water supply joint 44 to be connected with water supply system, nozzle 45 is set in water chamber bottom.Laser beam 12 enters through sheet glass 42
Light water coincidence mechanism 41 after water chamber 43 is coupled, ejects from nozzle 45 together with the water entered from water supply joint 44.
Fixed focus adjusting mechanism 51 be arranged between scanning system 31 and light liquid coupling mechanism 41 and with scanning system 31 and light
Liquid coupling mechanism 41 is connected, and it includes fixed plate 53 and multidirectional adjustment mechanism.Scanning system 31 is by fixed plate 53 and light water coupling
Close mechanism 41 to connect, multidirectional adjustment mechanism is connected with fixed plate.Wherein, multidirectional adjustment mechanism includes X-direction, Y-direction, Z-direction
Adjustment mechanism 52 and A, B rotating angle adjusting mechanism 54, five frees degree of X, Y, Z, A, B are used to adjust the and of light water coincidence mechanism 41
The relative position of scanning system 31, wherein tetra- frees degree of X, Y, A, B keep and scanning system for Shi Guang water coincidences mechanism 41
31 is coaxial, and the Z-direction free degree is used to adjust the distance of light water coincidence mechanism 41 and scanning system 31, you can to adjust laser beam
Focal length.
In order that the structure and volume of device of the invention are more compact, scanning system 31, light water coincidence mechanism 41, fixation
Focus adjusting mechanism 51 can be an entirety, or after solidifying structural parameters and choose optimal value, save fixed focus adjusting mechanism 51
In multidirectional adjustment mechanism.
Water supply system 60 is by pressurized tank 61, water pump 62, gas pressure generator 63, pressure gauge 64, flowmeter 65, water pipe
Joint 69 is constituted.Air inlet 66, water inlet 67, delivery port 68 are disposed with pressurized tank 61.Air inlet 66 is gentle by tracheae 70
Body pressure generator 63 is connected.Water inlet 67 is connected by water pipe head 69 with water pump 62, from water pump 62 to pump in pressurized tank 61
Enter water.Delivery port 68 is connected by water pipe head 69 with pressure gauge 64, flowmeter 65, eventually through water pipe head 69 and light water coupling
The water supply joint 44 for closing mechanism 41 is connected.
Motion workbench 71 and workpiece to be processed 72 are connected, and drive workpiece to be processed 72 to be transported according to the movement locus for setting
It is dynamic.
Cistern system 81 includes water tank and discharge outlet, for collecting the waste water after liquid auxiliary laser is processed and excluding.
In the present embodiment, nozzle can be adjusted and change, and can be replaced by the spray of different inner diameters and cross sectional shape
Mouth, the shape of nozzle segment can be automated and is adjusted.As shown in Fig. 2 the cross sectional shape of nozzle 45 can be round section
Shape 95, it is preferable that nozzle inside diameter is 0.5mm~10mm.Chosen when being generally used due to the internal diameter of nozzle larger 2mm~
10mm, so the difficulty of light water coincidence helps laser processing technology far below the water based on the coupling of small nozzle, can for a long time keep whole
The reliability of individual system.Contrastively, current water helps Laser Processing due to relying on total reflection effect, optical fiber or equivalent optical fiber it is straight
Footpath is general within 200 microns, to ensure enough laser intensities.Scanning galvanometer 31 controls laser beam 12 in circular section shape
The special-shaped figure 96 of filling scanning one in 91.
As shown in Fig. 2 the cross sectional shape of nozzle 45 can also be square cross-sectional shaped 93.Scan function system 31 is controlled
One triangle 94 of filling scanning in square cross-sectional shaped 93 of laser beam 12.
As shown in Fig. 2 the cross sectional shape of nozzle 45 can also be rectangular cross-section 91, rectangle can be slit shape
Shape.Scan function system 31 controls one rectangular pattern 92 of filling scanning in rectangular cross-section 95 of laser beam 12.
The processing method of aforesaid liquid auxiliary laser processing unit (plant), comprises the following steps：
(1) fixed focus adjusting mechanism 51 is adjusted before workpiece to be processed 72 is processed, makes Jiao of liquid auxiliary laser processing unit (plant)
Away from being adjusted to suitable position and be fixed up.
(2) formal to start to process workpiece, the connection workpiece to be processed 72 of motion workbench 71 simultaneously moves to required processing
Position, while making processing stand be in the focus of liquid auxiliary laser.
(3) water supply system 60 is started working, and the water with certain pressure enters the water chamber of light water coincidence mechanism 41, from
Ejected as a laminar flow at nozzle.
(4) laser 11 is started working, and laser beam enters scanning system 31 by light path system 21, is penetrated from scanning system 31
The sheet glass 42 of the laser beam transparent light liquid coupling mechanism 41 for going out is projected after entering water chamber 43 and fluid coupling from nozzle 45.
(5) scanning system 31 controls multiple galvanometer pieces of inside to act, and carries out laser quick scanning in nozzle cross-section
Laser Processing.
(6) the connection workpiece to be processed of motion workbench 71 is moved with certain movement locus, until processing workpiece obtains institute
The shape of needs.
As shown in figure 3, the circular hole (left side) processed using the present apparatus and method and the circular hole processed in conventional laser air
(right side) contrasts as shown in the figure, it can be seen that the bore edges of the present apparatus and method processing are neat, radian is accurate, almost without hot shadow
Area is rung, and the circular hole processed in conventional laser air has slag and thermal deformation.
In the present embodiment, the water beam projected from nozzle is not re-used as water beam optical fiber, and the focus characteristics of laser do not rely on water
The total reflection of beam, therefore laser total reflection nozzle diameter can set large-size, be far longer than laser spot diameter, such as 0.5-
10mm diameter nozzles are exported, and meet the transmission requirement of scanning machining laser beam.The liquid runs down nozzle of certain pressure sprays, and is formed
The current for focusing on laser beam contain, and the focus characteristics of laser do not rely on the total reflection of water beam, but the focusing in liquid medium
And partial sweep, therefore, all size resolution ratio that can be realized in dry-type processing can also be realized in the present embodiment；Dry type is swept
Retouch the middle sweep speed that can be realized to be maintained, while in the presence of current are cooled down and washed away, optical channel can be kept, greatly
It is big to reduce heat affected area.
Embodiment described above only expresses several embodiments of the invention, and its description is more specific and detailed, but simultaneously
Therefore the limitation to the scope of the claims of the present invention can not be interpreted as.It should be pointed out that for one of ordinary skill in the art
For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to guarantor of the invention
Shield scope.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (23)
1. a kind of liquid auxiliary laser processing method, it is characterised in that comprise the following steps：
Step a, laser transmitting laser beam, the laser beam is directed into scanning system；
Step b, with fluid coupling behind the scanned system change path of the laser beam and focusing；
Step c, nozzle is entered after the laser beam and fluid coupling, is together projected to workpiece to be processed from nozzle with liquid.
2. liquid auxiliary laser processing method according to claim 1, it is characterised in that in step a, laser transmitting swashs
Before light beam, laser beam focal length is adjusted, processing stand is on laser beam foucing.
3. liquid auxiliary laser processing method according to claim 1, it is characterised in that also including step d, adjusts to be added
Work workpiece is moved with certain movement track, until workpiece to be processed obtains required shape.
4. a kind of liquid auxiliary laser processing unit (plant), including for launch the laser of laser beam, light liquid coupling mechanism and with
The connected liquid delivery system of light liquid coupling mechanism, it is characterised in that also including being arranged between laser and light liquid coupler,
And the scanning system being connected with light liquid coupler with laser, the laser beam that the laser sends enter the scanning system,
Path is changed and after focusing on into the smooth liquid coupling mechanism and fluid coupling by the scanning system, finally together with liquid from
The nozzle of the smooth liquid coupling mechanism is projected.
5. liquid auxiliary laser processing unit (plant) according to claim 4, it is characterised in that the scanning system is shaken for laser
Scarnning mirror system, is internally provided with least two galvanometer pieces, and for controlling, laser beam is moved in X, Y both direction or control swashs
Light beam is in tri- direction motions of X, Y, Z.
6. liquid auxiliary laser processing unit (plant) according to claim 4, it is characterised in that the galvanometer piece is plane reflection
Eyeglass or prismatic lens.
7. liquid auxiliary laser processing unit (plant) according to claim 4, it is characterised in that the scanning speed of the scanning system
It is 0~1000m/s to spend.
8. liquid auxiliary laser processing unit (plant) according to claim 4, it is characterised in that the liquid auxiliary laser processing
Device also includes fixed focus adjusting mechanism, the fixed focus adjusting mechanism be arranged between scanning system and light liquid coupling mechanism and with
Scanning system and light liquid coupling mechanism are connected, and the fixed focus adjusting mechanism includes multidirectional adjustment mechanism, for adjusting the smooth liquid
The relative position of coupling mechanism and scanning system.
9. liquid auxiliary laser processing unit (plant) according to claim 8, it is characterised in that the multidirectional adjustment mechanism can
The relative position of light liquid coupling mechanism and scanning system is adjusted in X, Y, Z-direction and five, A, B anglec of rotation direction free degree；
Wherein, X, Y, A, B four direction free degree are used to make the holding of light liquid coupling mechanism and scanning system coaxial, Z-direction free degree use
In regulation light liquid coupling mechanism and the distance of scanning system, that is, adjust the focal length of laser beam.
10. liquid auxiliary laser processing unit (plant) according to claim 8 or claim 9, it is characterised in that the fixed focus adjusting mechanism
Also include fixed plate, the scanning system is connected by the fixed plate with the smooth liquid coupling mechanism, the multidirectional adjustment machine
Structure is connected with the fixed plate.
11. liquid auxiliary laser processing unit (plant)s according to claim 4, it is characterised in that the liquid auxiliary laser adds
Frock is put and also include fixed focus adjusting mechanism, and the fixed focus adjusting mechanism includes fixed plate, and the scanning system is by the fixation
Plate is fixedly connected with the smooth liquid coupling mechanism, forms an entirety.
12. liquid auxiliary laser processing unit (plant)s according to claim 4, it is characterised in that the liquid auxiliary laser adds
Frock is put also includes light path system, and the laser beam that the light path system is used to conduct the laser transmitting enters the scanning system
System.
13. liquid auxiliary laser processing unit (plant)s according to claim 12, it is characterised in that the light path system includes light
Fine or optical mirror slip.
14. liquid auxiliary laser processing unit (plant)s according to claim 4, it is characterised in that the liquid auxiliary laser adds
Frock is put also includes liquid case system, and the liquid case system is used to collect the waste liquid after the processing of liquid auxiliary laser.
15. liquid auxiliary laser processing unit (plant)s according to claim 4, it is characterised in that the liquid auxiliary laser adds
Frock puts the motion workbench also included for placing workpiece, and the motion workbench is relative with light liquid coupling mechanism and energy is relative
In the motion of light liquid coupling mechanism.
16. liquid auxiliary laser processing unit (plant)s according to claim 4, it is characterised in that the smooth liquid coupling mechanism is also
Including diaphragm, cavity and feed flow joint, the feed flow joint is connected with the liquid delivery system, and laser beam can pass through window
Mouth piece enters the cavity, after being coupled in cavity with the liquid entered from feed flow joint, is projected from nozzle together.
17. liquid auxiliary laser processing unit (plant)s according to claim 4, it is characterised in that the liquid delivery system bag
Pressurized tank, pump, gas pressure generator are included, the pump and gas pressure generator are connected with the pressurized tank respectively, the pressure
Power tank is connected with the smooth liquid coupling mechanism.
18. liquid auxiliary laser processing unit (plant)s according to claim 17, it is characterised in that be provided with the pressurized tank
Air inlet, inlet and liquid outlet, air inlet are connected by tracheae with gas pressure generator, inlet by pipe joint with
Pump is connected, and from pump to pumping liquid in pressurized tank, delivery port is connected by pipe joint with pressure gauge, flowmeter, eventually through
Pipe joint is connected with light liquid coupling mechanism.
19. liquid auxiliary laser processing unit (plant)s according to claim 4, it is characterised in that the liquid auxiliary laser adds
The liquid that frock is put is to meet guide-lighting desired pure water, acid solution, aqueous slkali or salt solution.
20. liquid auxiliary laser processing unit (plant)s according to claim 4, it is characterised in that the nozzle removably sets
It is placed on the smooth liquid coupling mechanism.
21. liquid auxiliary laser processing unit (plant)s according to claim 4, it is characterised in that the cross sectional shape of the nozzle
It is circle, nozzle inside diameter scope is 0.5mm~10mm.
22. liquid auxiliary laser processing unit (plant)s according to claim 4, it is characterised in that the cross sectional shape of the nozzle
It is rectangle.
23. liquid auxiliary laser processing unit (plant)s according to claim 4, it is characterised in that the laser be 355~
1064 nano wave lengths.
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| CN201710038812.9A CN106735871B (en) | 2017-01-19 | 2017-01-19 | Liquid auxiliary laser processing method and device |
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|---|---|---|---|
| CN201710038812.9A CN106735871B (en) | 2017-01-19 | 2017-01-19 | Liquid auxiliary laser processing method and device |
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| CN106735871B CN106735871B (en) | 2019-05-17 |
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| CN107962263A (en) * | 2017-11-16 | 2018-04-27 | 中国科学院宁波材料技术与工程研究所 | Laser and electrolysis combined machining method and its device |
| CN107971592A (en) * | 2017-11-16 | 2018-05-01 | 中国科学院宁波材料技术与工程研究所 | Laser intervenes electrochemical micromachining method and its device |
| CN108031986A (en) * | 2017-12-29 | 2018-05-15 | 苏州德龙激光股份有限公司 | Devices and methods therefor based on ultrashort pulse Water Jet Guided Laser processing diamond |
| CN109514080A (en) * | 2018-12-11 | 2019-03-26 | 中国科学院宁波材料技术与工程研究所 | High power Water Jet Guided Laser processing unit (plant) and system |
| CN109866028A (en) * | 2019-04-19 | 2019-06-11 | 山东大学 | A kind of jet stream constraint femtosecond laser ultra-precision processing system and method |
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| CN109866028A (en) * | 2019-04-19 | 2019-06-11 | 山东大学 | A kind of jet stream constraint femtosecond laser ultra-precision processing system and method |
| CN110227884A (en) * | 2019-05-08 | 2019-09-13 | 桂林电子科技大学 | Water Jet Guided Laser system of processing and method based on salt free ligands light path design |
| CN110625268A (en) * | 2019-08-26 | 2019-12-31 | 石狮市云帆工业设计有限公司 | Wafer cutting equipment |
| CN112823993A (en) * | 2019-11-19 | 2021-05-21 | 中国科学院宁波材料技术与工程研究所 | Laser and electric beam combined machining device |
| CN112823993B (en) * | 2019-11-19 | 2022-04-29 | 中国科学院宁波材料技术与工程研究所 | Laser and electric beam combined machining device |
| CN112824004A (en) * | 2019-11-20 | 2021-05-21 | 中国科学院宁波材料技术与工程研究所 | Composite water-assisted laser processing system and processing method thereof |
| CN112475613A (en) * | 2020-11-06 | 2021-03-12 | 中国科学院上海光学精密机械研究所 | Laser processing device for water-gas coaxial auxiliary galvanometer scanning |
| CN112658446A (en) * | 2020-12-10 | 2021-04-16 | 中国科学院宁波材料技术与工程研究所 | Laser-induced plasma micro-machining device and method |
| CN114012268A (en) * | 2021-10-13 | 2022-02-08 | 浙江师范大学 | Photovoltaic synergistic microstructure ultraviolet laser processing device and method |
| CN114669884A (en) * | 2022-05-16 | 2022-06-28 | 郑州磨料磨具磨削研究所有限公司 | Laser processing diamond flattening device and method based on horizontal liquid level regulation |
| CN114669884B (en) * | 2022-05-16 | 2024-02-02 | 郑州磨料磨具磨削研究所有限公司 | Device and method for flattening laser processing diamond based on horizontal liquid level regulation and control |
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