CN112823993B - Laser and electric beam combined machining device - Google Patents
Laser and electric beam combined machining device Download PDFInfo
- Publication number
- CN112823993B CN112823993B CN201911136136.4A CN201911136136A CN112823993B CN 112823993 B CN112823993 B CN 112823993B CN 201911136136 A CN201911136136 A CN 201911136136A CN 112823993 B CN112823993 B CN 112823993B
- Authority
- CN
- China
- Prior art keywords
- laser
- electrolyte
- cathode
- main body
- tubular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H5/00—Combined machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H11/00—Auxiliary apparatus or details, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1423—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the flow carrying an electric current
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a laser and electric beam combined machining device, belongs to the technical field of micro and precise machining, and can solve the problem of high difficulty in manufacturing tool electrodes in the existing laser and electrolytic combined machining technology. The device comprises: a tubular body having a cathode disposed therein; the anode and the cathode of the power supply are respectively connected with the workpiece to be processed and the cathode; a laser emitting unit for emitting a laser beam into the central hole of the tubular body; the laser beam and the electrolyte are coupled and transmitted to a processing area of the workpiece to be processed through the central hole of the tubular main body, so that the workpiece to be processed and the cathode form a conductive path through the electrolyte; the optical refractive index of the tube wall of the tubular main body is larger than that of the electrolyte, and the optical refractive index of the electrolyte is larger than that of the medium on the outer side of the tube wall. The invention is used for processing fine and precise structures.
Description
Technical Field
The invention relates to a laser and electric liquid beam combined machining device, and belongs to the technical field of micro and precision machining.
Background
In recent years, with the continuous development of advanced manufacturing technology, new processing technology is continuously developed, the laser and electrolytic combined processing technology is a novel combined processing technology which has high laser processing efficiency and high electrolytic jet flow surface quality, and is characterized in that a recast layer, residual stress and microcracks generated by laser processing are eliminated on line by means of electrolytic jet flow processing, and meanwhile, the thermal effect caused by laser irradiation processing areas can improve the electrolyte conductivity of a processing area, reduce the activation energy of electrochemical reaction and improve the processing efficiency of electrolytic processing. According to the characteristics, the laser and electrolysis combined machining technology has the advantages of no recast layer on the machined surface, no mechanical stress, good adaptability of the machined material and the like, and is widely applied to the fields of fine and precise machining.
In the existing laser and electrolysis combined machining technology, when a workpiece structure with a larger depth is machined, a laser intervention type micro-electrolysis machining method based on a liquid core optical fiber tubular electrode is generally adopted, laser energy is efficiently conducted to a machining gap of the end face of the tubular electrode through a laser total reflection effect in the tubular electrode, synchronous coupling of an electrochemical energy field and the laser energy field in the machining gap of the end face of the tubular electrode is realized, and the machining of the structure with the larger depth can be realized along with the feeding of the tubular electrode. However, the tubular electrode in the prior art generally comprises an insulating layer, a conductive layer and a constraint layer, and the tubular electrode is complex in structure, needs a special low-refractive-index fluorine-containing chloride material as the constraint layer, and is difficult to obtain, so that the preparation difficulty of the existing tubular electrode is high.
Disclosure of Invention
The invention provides a laser and electric liquid beam combined machining device which can solve the problem that a tool electrode in the existing laser and electrolysis combined machining technology is difficult to prepare.
The invention provides a laser and electric liquid beam combined processing device, which comprises: a tubular body having a cathode disposed therein; the anode and the cathode of the power supply are respectively connected with a workpiece to be processed and the cathode; a laser emitting unit for emitting a laser beam into the central hole of the tubular body; the laser beam and the electrolyte are coupled and then transmitted to a processing area of the workpiece to be processed through a central hole of the tubular main body, so that the workpiece to be processed and the cathode form a conductive path through the electrolyte; the optical refractive index of the tube wall of the tubular main body is larger than that of the electrolyte, and the optical refractive index of the electrolyte is larger than that of the medium on the outer side of the tube wall.
Optionally, the tubular body comprises a flared end; the cathode is disposed within the flared end.
Optionally, the cathode is annular or spiral; the laser beam passes through a central hole of the cathode.
Optionally, the device further comprises a clamp, the clamp is connected with the pipe wall of the flared end, and the clamp is used for fixing the position of the tubular main body.
Optionally, the laser emission unit includes a laser, an optical shaping component and a focusing component; the laser is used for emitting laser beams to the optical shaping assembly; the optical shaping component is used for shaping the laser beam; the focusing element is for focusing the shaped laser beam at the constriction of the tubular body.
Optionally, the apparatus further includes a control unit, and the control unit is configured to control the power supply and the laser to be turned on or off.
Optionally, the device further comprises a current sensor and/or a pressure sensor; the current sensor is arranged in the conductive path and used for detecting the current in the conductive path; the pressure sensor is arranged on the electrolyte flow passage and used for detecting the electrolyte pressure in the tubular main body; correspondingly, the control unit is specifically configured to: and controlling the power supply and the laser to be switched on or off according to the current change condition in the conductive path and/or the electrolyte pressure change condition in the tubular main body.
Optionally, the control unit is further configured to control a motion trajectory of the tubular body and/or the workpiece.
Optionally, the laser emission unit further includes a light collecting element and a dichroic beam splitter; the dichroic spectroscope is arranged on an optical path between the optical shaping assembly and the focusing piece and is used for reflecting the laser beam emitted from the optical shaping assembly to the focusing piece; the light collection element is configured to receive transmitted light from the dichroic beamsplitter.
Optionally, the tubular body is a glass capillary tube.
The invention can produce the beneficial effects that:
1) the laser and electric liquid beam composite processing device provided by the invention has the advantages that the cathode is arranged in the tubular main body, and the positive and negative poles of the power supply are respectively connected with the processing workpiece and the cathode, a laser emitting unit is used for emitting laser beams into the central hole of the tubular main body, meanwhile, the electrolyte flows into the processing area from the inner hole of the tubular main body, because the optical refractive index of the tube wall of the tubular main body is larger than that of the electrolyte, and the optical refractive index of the electrolyte is larger than that of the medium at the outer side of the tube wall, the laser can be fully emitted in the tubular main body, so that the laser beam and the electrolyte are coupled to form 'water-guided laser' which is transmitted to a processing area of a workpiece to be processed, as the processing workpiece and the cathode can form a conductive path through the electrolyte, the processing can be carried out by synchronously compounding the water-guided laser and the electrochemistry so as to obtain a target structure. Compared with the prior art in which the tubular electrode comprises the insulating layer, the conducting layer and the constraint layer, the structure is complex, and a special low-refractive-index fluorine-containing chloride material is needed as the constraint layer, the tubular main body of the device is only provided with one layer, the cathode is arranged in the tubular main body, the synchronous compounding of water-guided laser and electrochemistry can be realized, the special low-refractive-index fluorine-containing chloride material is not needed as the constraint layer, the structure is simple, and the device is easy to prepare.
2) This application adopts the glass capillary as the tubulose main part, because the optical refractive index of glass capillary is greater than the refracting index of electrolyte, the optical refractive index of electrolyte is greater than the optical refractive index of the outside medium of pipe wall again, laser can take place full transmission in the tubulose main part, make laser beam and electrolyte coupling form "water and lead laser" and transmit to the processing region of treating the processing work piece, in order to realize water and lead laser and the synchronous combined machining of electrochemistry, the problem that the tool electrode preparation degree of difficulty is big among the prior art has been solved, machining efficiency has been improved greatly.
3) According to the laser and electric liquid beam combined machining device provided by the invention, the current sensor is arranged on the conductive passage and/or the pressure sensor is arranged on the electrolyte runner and is respectively used for detecting the current in the conductive passage in the machining process and the electrolyte pressure in the tubular main body in the machining process, when the current time value of the detected current or electrolyte pressure is smaller than the last time value, the machined workpiece is judged to be punched through, and the laser beam is closed at the moment. This application comes real-time judgement processing state through the real-time detection to electric current and pressure, can in time adjust work piece motion parameter like this, avoids appearing the short circuit in the processing and processes the back injury scheduling problem, has improved the stability of course of working.
Drawings
FIG. 1 is a schematic diagram of a laser-electric fluid beam hybrid cooperative processing technique provided for an embodiment of the present invention;
FIG. 2 is a transmission optical simulation of a laser beam in a tubular body provided for an embodiment of the present invention;
FIG. 3 is an optical simulation result of laser energy distribution at the center section of the end face of the tubular body provided by the embodiment of the present invention;
FIG. 4 is an optical simulation result of laser energy distribution at the end face of the tubular body provided by the embodiment of the present invention;
fig. 5 is a schematic diagram of a laser-electric liquid beam combined machining device provided for the embodiment of the invention.
Detailed Description
The present invention will be described in detail with reference to examples, but the present invention is not limited to these examples.
The laser and electric-hydraulic beam combined processing device provided by the embodiment of the invention comprises a tubular main body 1, wherein a cathode 2 is arranged in the tubular main body 1; the anode and the cathode of the power supply 3 are respectively connected with the workpiece 4 to be processed and the cathode 2; a laser emitting unit for emitting a laser beam 5 into the central hole of the tubular body 1; the laser beam 5 is coupled with the electrolyte and then transmitted to a processing area of the workpiece to be processed through a central hole of the tubular main body, so that the workpiece to be processed 4 and the cathode 2 form a conductive path through the electrolyte; the optical refractive index of the tube wall of the tubular main body 1 is greater than that of the electrolyte, and the optical refractive index of the electrolyte is greater than that of the medium outside the tube wall.
Wherein, the medium outside the tube wall of the tubular main body 1 is generally air; the material of the tubular main body 1 is not limited in the embodiment of the invention, as long as the optical refractive index of the tube wall of the tubular main body 1 is greater than that of the electrolyte, and the optical refractive index of the electrolyte is greater than that of the medium on the outer side of the tube wall; the voltage of the power supply 3 is 100-900V, and the frequency of the power supply 3 is 1000Hz-50 KHz; the workpiece 4 can be made of stainless steel, high-temperature alloy, titanium alloy and intermetallic compound, but the invention is not limited to this; the electrolyte 6 can be various salt solutions, acidic solutions or mixed solutions, such as NaNO3Solution, NaCl solution, HCl solution, NaCl + HCl mixed solution, etc., the invention does not limit this, and the electrolyte pressure is 0.2-4 MPa; the specific arrangement position of the cathode 2 is not limited.
In practical application, the tubular body 1 is arranged right above a workpiece 4 to be machined, an initial machining gap between the tail end of the tubular body 1 and the machining surface of the workpiece 4 is set to be 0.2-1 mm, the distance between the tail end of the tubular body 1 and the machining surface of the workpiece 4 is determined through a micro-force sensor, and when the stress on the tubular body 1 is detected, the tail end of the tubular body 1 is considered to be in contact with the workpiece.
The positive pole and the negative pole of a power supply 3 are respectively connected with a workpiece 4 to be processed and a cathode 2, a laser emitting unit is utilized to emit a laser beam 5 into a central hole of a tubular main body 1, meanwhile, electrolyte flows into a processing area from the inner hole of the tubular main body 1, because the optical refractive index of the tube wall of the tubular main body 1 is greater than that of the electrolyte, and the optical refractive index of the electrolyte is greater than that of a medium outside the tube wall, as shown in figure 2, the laser beam 5 can be fully emitted in the tubular main body 1, so that the laser beam 5 and the electrolyte are coupled to form 'water-guided laser' and are transmitted to an end face processing gap of the tubular main body 1, when the tubular main body 1 is fed to the workpiece 4, the processed workpiece 4 and the cathode 2 form a conductive path through the electrolyte, the processing can be synchronously combined with electrochemistry by utilizing the water-guided laser, the laser processing can directly remove workpiece materials and can also raise the temperature of a processing area, the electrolytic machining speed is improved, the electrolyte can etch the machined workpiece 4 and can synchronously remove a heat affected zone, a recasting layer and the like generated by laser machining, and the surface integrity and machining precision of the machined structure are improved, so that a high-quality target structure is obtained.
Compared with the prior art in which the tubular electrode comprises the insulating layer, the conducting layer and the constraint layer, the structure is complex, and a special low-refractive-index fluorine-containing chloride material is needed as the constraint layer, the tubular main body 1 of the application only has one layer, the cathode 2 is arranged in the tubular main body 1, the synchronous compounding of water-guided laser and electrochemistry can be realized, the special low-refractive-index fluorine-containing chloride material is not needed as the constraint layer to conduct laser, and the structure is simple and easy to prepare.
In the laser and electric-hydraulic beam combined machining device provided by the embodiment of the invention, as shown in fig. 1, a tubular main body 1 comprises a flared end, and a cathode is arranged in the flared end. The cathode is annular or spiral, and the laser beam passes through the central hole of the cathode.
Wherein, the shape of the tubular main body 1 can be funnel-shaped, and comprises a flared end and a thin-mouthed end.
In practical application, the upper end of the tubular main body 1 is a flared end, the tail end is a thin-mouthed end, and the annular or spiral cathode 2 is arranged in the flared end of the tubular main body 1, so that the laser beam 5 can pass through a central hole of the cathode.
The laser and electric-hydraulic beam combined machining device provided by the embodiment of the invention further comprises a clamp 6, wherein the clamp 6 is connected with the pipe wall at the flared end of the tubular main body 1 and is used for fixing the position of the tubular main body 1.
In practical application, the outer wall of the flared end of the tubular main body 1 is also provided with a clamp 6, the clamp 6 is connected with the pipe wall of the flared end through an adhesive and is used for fixing the position of the tubular main body 1, and the upper part of the clamp 6 is provided with a transparent window which can enable the laser beam 5 to pass through the transparent window and pass through the central hole of the cathode 2 so as to process the workpiece 4.
The laser emission unit of the laser and electro-hydraulic beam combined machining device comprises a laser 7, an optical shaping assembly 8 and a focusing piece 10, wherein the laser 7 emits a laser beam 5 to the optical shaping assembly 8, then the optical shaping assembly 8 shapes the laser beam 5, and finally the focusing piece 10 focuses the shaped laser beam 5 on the necking part of the tubular main body 1.
The wavelength of the laser 7 may be 1064nm or 532nm, and the type of the laser 7 may be a semiconductor laser, a solid laser, or a gas laser, which is not limited in the present invention;
the laser and electric-hydraulic beam combined processing device provided by the embodiment of the invention further comprises: and a control unit 13 for controlling the power supply 3 and the laser 7 to be turned on or off.
In practical applications, the control unit 13 is typically an industrial personal computer.
As shown in fig. 5, the laser and electric-hydraulic beam combined processing apparatus provided in the embodiment of the present invention further includes: a current sensor and/or a pressure sensor; the current sensor is arranged in the conductive path and used for detecting the current in the conductive path; the pressure sensor is arranged on the electrolyte flow channel and used for detecting the pressure of the electrolyte in the tubular main body 1; the control unit 13 is specifically configured to: the power supply 3 and the laser 7 are controlled to be turned on or off according to the change of the current in the conductive path and/or the change of the pressure of the electrolyte in the tubular body 1.
In practical application, the control unit detects the change of the processing current in real time through the current sensor 16 and the data acquisition card 12, detects the change of the electrolyte pressure in the tubular main body 1 through the pressure sensor, and detects the current in the conductive path and the electrolyte pressure in the tubular main body 1 in the processing process respectively by arranging the current sensor 16 on the conductive path and/or arranging the pressure sensor on the electrolyte flow channel, when the current time value of the detected current or electrolyte pressure is smaller than the last time value, the processing workpiece 4 is judged to be penetrated, and the laser beam 5 is closed at the moment. The machining state is judged in real time through the real-time detection of the current and the pressure, so that the motion parameters of the workpiece 4 can be adjusted in time, the problems of short circuit, machining back damage and the like in machining are avoided, and the stability of the machining process is improved.
The control unit 13 of the laser and electric-hydraulic beam combined machining device provided by the embodiment of the invention is also used for controlling the motion track of the tubular main body 1 and/or the workpiece 4, as shown in fig. 5.
In practical application, the control unit 13 controls the multi-dimensional motion platform 15 through the motion control card 14 to realize the control of the motion track of the tubular body 1 and/or the workpiece 4.
The laser emission unit of the laser and electric-hydraulic beam combined processing device provided by the embodiment of the invention further comprises a light ray collecting piece 11 and a dichroic spectroscope 9 as shown in fig. 5; the dichroic beam splitter 9 is arranged on an optical path between the optical shaping assembly 8 and the focusing member 10 and used for reflecting the laser beam emitted from the optical shaping assembly 8 to the focusing member 10; the light collection member 11 is for receiving the transmitted light from the dichroic beam splitter 9.
The light collection element 11 is typically a CCD vision system.
In practical application, a laser 7 emits a laser beam 5 to an optical shaping component 8, then the optical shaping component 8 shapes the laser beam 5, the shaped laser beam 5 is reflected to a focusing part 10 through a dichroic beam splitter 9 and focused on a necking part of a tubular main body 1, meanwhile, the shaped laser beam 5 is received by a light collecting part 11 through the dichroic beam splitter 9, and the focus of the laser beam 5 is adjusted to the central position of the tubular main body 1 through the light collecting part 11 and a multi-dimensional moving platform 15 for processing a workpiece 4.
The tubular main body 1 of the laser and electro-hydraulic beam combined machining device provided by the embodiment of the invention is a glass capillary.
The optical refractive index of the glass capillary is larger than that of the electrolyte, the optical refractive index of the electrolyte is larger than that of the medium on the outer side of the tube wall, laser beams 5 and the electrolyte can be directly restrained and coupled in the glass capillary to form 'water-guided laser' and the 'water-guided laser' is transmitted to a processing area of a workpiece 4 to be processed, the optical simulation result of laser energy distribution on the end face of the tubular main body is shown in figures 3-4, along with the feeding of the tubular main body, so that the synchronous composite processing of the water-guided laser and the electrochemistry is realized, the problem of high difficulty in manufacturing tool electrodes in the prior art is solved, and the processing efficiency is greatly improved.
The above embodiments are described in detail, and although the present invention has been described with reference to preferred embodiments, it should be understood that the present invention is not limited thereto, and various changes and modifications can be made by those skilled in the art without departing from the scope of the present invention.
Claims (9)
1. A laser and electric liquid beam combined machining apparatus, characterized in that the apparatus comprises:
a tubular body having a cathode disposed therein;
the anode and the cathode of the power supply are respectively connected with a workpiece to be processed and the cathode;
a laser emitting unit for emitting a laser beam into the central hole of the tubular body;
the laser beam and the electrolyte are coupled and then transmitted to a processing area of the workpiece to be processed through a central hole of the tubular main body, so that the workpiece to be processed and the cathode form a conductive path through the electrolyte;
the optical refractive index of the tube wall of the tubular main body is larger than that of the electrolyte, and the optical refractive index of the electrolyte is larger than that of the medium on the outer side of the tube wall; the tubular main body is a glass capillary tube; the medium on the outer side of the pipe wall of the tubular main body is air.
2. The processing device as in claim 1, wherein the tubular body comprises a flared end; the cathode is disposed within the flared end.
3. A processing device as claimed in claim 1 or 2, characterized in that the cathode is annular or spiral-shaped; the laser beam passes through a central hole of the cathode.
4. The machining device of claim 2, further comprising a clamp coupled to a wall of the flared end, the clamp configured to fix a position of the tubular body.
5. The machining device according to claim 2, wherein the laser emitting unit includes a laser, an optical shaping component, and a focusing member;
the laser is used for emitting laser beams to the optical shaping assembly;
the optical shaping component is used for shaping the laser beam;
the focusing element is for focusing the shaped laser beam at the constriction of the tubular body.
6. A processing device according to claim 5, characterized in that the device further comprises a control unit for controlling the power supply and the laser to be switched on or off.
7. Machining device according to claim 6, characterized in that the device further comprises a current sensor and/or a pressure sensor;
the current sensor is arranged in the conductive path and used for detecting the current in the conductive path;
the pressure sensor is arranged on the electrolyte flow passage and used for detecting the electrolyte pressure in the tubular main body;
correspondingly, the control unit is specifically configured to: and controlling the power supply and the laser to be switched on or off according to the current change condition in the conductive path and/or the electrolyte pressure change condition in the tubular main body.
8. A machining device according to claim 6, characterized in that the control unit is also adapted to control the movement trajectory of the tubular body and/or the workpiece.
9. The processing apparatus as claimed in claim 5, wherein the laser emitting unit further comprises a light collecting member and a dichroic beam splitter;
the dichroic spectroscope is arranged on an optical path between the optical shaping assembly and the focusing piece and is used for reflecting the laser beam emitted from the optical shaping assembly to the focusing piece;
the light collection element is configured to receive transmitted light from the dichroic beamsplitter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911136136.4A CN112823993B (en) | 2019-11-19 | 2019-11-19 | Laser and electric beam combined machining device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911136136.4A CN112823993B (en) | 2019-11-19 | 2019-11-19 | Laser and electric beam combined machining device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112823993A CN112823993A (en) | 2021-05-21 |
| CN112823993B true CN112823993B (en) | 2022-04-29 |
Family
ID=75906749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911136136.4A Active CN112823993B (en) | 2019-11-19 | 2019-11-19 | Laser and electric beam combined machining device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112823993B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113843460B (en) * | 2021-09-22 | 2023-05-16 | 清华大学 | Photo-electro-hydraulic coupling conductive pipe electrode for laser electrolytic composite processing |
| CN113909596A (en) * | 2021-10-27 | 2022-01-11 | 上海交通大学 | Multi-gas film cooling hole laser-assisted glass capillary tube electrolysis parallel processing device |
| CN114147304A (en) * | 2021-10-27 | 2022-03-08 | 上海交通大学 | Laser-assisted glass capillary tube electrolytic composite processing method |
| CN114346339B (en) * | 2022-01-28 | 2024-01-30 | 温州大学激光与光电智能制造研究院 | Ultrasonic-assisted laser and electrochemical composite multi-energy field collaborative processing system and method |
| CN118141510A (en) * | 2024-03-21 | 2024-06-07 | 武汉大学 | Medical water guide laser system |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005078049A (en) * | 2003-09-04 | 2005-03-24 | Fuji Xerox Co Ltd | Manufacturing method of micro lens array |
| CN106735871A (en) * | 2017-01-19 | 2017-05-31 | 中国科学院宁波材料技术与工程研究所 | Liquid auxiliary laser processing method and device |
| CN107962263A (en) * | 2017-11-16 | 2018-04-27 | 中国科学院宁波材料技术与工程研究所 | Laser and electrolysis combined machining method and its device |
| CN107971592A (en) * | 2017-11-16 | 2018-05-01 | 中国科学院宁波材料技术与工程研究所 | Laser intervenes electrochemical micromachining method and its device |
| CN108613926A (en) * | 2016-12-13 | 2018-10-02 | 北京邮电大学 | Capillary interferes measurement experiment device |
| CN108746895A (en) * | 2018-05-29 | 2018-11-06 | 江苏大学 | A kind of cutter device of laser electrolysis |
| CN109277691A (en) * | 2018-11-14 | 2019-01-29 | 中国科学院宁波材料技术与工程研究所 | A kind of synchronous laser of multi-electrode and electrolysis complex machining device |
| CN109514080A (en) * | 2018-12-11 | 2019-03-26 | 中国科学院宁波材料技术与工程研究所 | High power Water Jet Guided Laser processing unit (plant) and system |
-
2019
- 2019-11-19 CN CN201911136136.4A patent/CN112823993B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005078049A (en) * | 2003-09-04 | 2005-03-24 | Fuji Xerox Co Ltd | Manufacturing method of micro lens array |
| CN108613926A (en) * | 2016-12-13 | 2018-10-02 | 北京邮电大学 | Capillary interferes measurement experiment device |
| CN106735871A (en) * | 2017-01-19 | 2017-05-31 | 中国科学院宁波材料技术与工程研究所 | Liquid auxiliary laser processing method and device |
| CN107962263A (en) * | 2017-11-16 | 2018-04-27 | 中国科学院宁波材料技术与工程研究所 | Laser and electrolysis combined machining method and its device |
| CN107971592A (en) * | 2017-11-16 | 2018-05-01 | 中国科学院宁波材料技术与工程研究所 | Laser intervenes electrochemical micromachining method and its device |
| CN108746895A (en) * | 2018-05-29 | 2018-11-06 | 江苏大学 | A kind of cutter device of laser electrolysis |
| CN109277691A (en) * | 2018-11-14 | 2019-01-29 | 中国科学院宁波材料技术与工程研究所 | A kind of synchronous laser of multi-electrode and electrolysis complex machining device |
| CN109514080A (en) * | 2018-12-11 | 2019-03-26 | 中国科学院宁波材料技术与工程研究所 | High power Water Jet Guided Laser processing unit (plant) and system |
Non-Patent Citations (1)
| Title |
|---|
| Fabrication of deep and small holes by synchronized laser and shaped tube electrochemical machining (Laser-STEM) hybrid process;Yufeng Wang等;《The International Journal of Advanced Manufacturing Technology》;20191107;第2721-2731页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112823993A (en) | 2021-05-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112823993B (en) | Laser and electric beam combined machining device | |
| CN107971592B (en) | Laser intervenes electrochemical micromachining method and device thereof | |
| CN108526627B (en) | Laser-electrochemical composite micromachining method and device for semiconductor material | |
| CN107962263B (en) | Laser and electrolysis combined machining method and its device | |
| CN109732199B (en) | Semiconductor material laser electrochemical back cooperative micromachining method and device | |
| CN106735866B (en) | Backwards to the device and method of multifocal dot laser and electrochemical copolymerization processing semiconductor material | |
| CN109277691B (en) | Multi-electrode synchronous laser and electrolysis combined machining device | |
| WO2016201761A1 (en) | Device and method for machining materials by combining electrochemical discharging and laser | |
| GB2537487A (en) | Electrochemical composite deposition machining method and apparatus using laser light tube as electrode | |
| CN106270844B (en) | Microgap is electrolysed auxiliary laser fine machining method and device | |
| CN112823992A (en) | Laser and electrolyte combined processing method and processing device thereof | |
| CN108655521A (en) | A kind of processing unit (plant) that piezoelectric ceramic vibration is synchronous with electrochemical discharge and method | |
| CN103706901B (en) | A kind of hollow laser combines the method and apparatus processing miniature annular groove with electrolysis | |
| CN105880833B (en) | The laser welding with filler wire method of one seed nucleus main pump housing | |
| CN107937939A (en) | Three-dimensional fine metal structure increases the manufacture method and its manufacture device of material | |
| US11992889B2 (en) | Method for preparing a cross-size micro-nano structure array | |
| CN108213957B (en) | The compound wire-electrode cutting and processing method of micro-electrochemical machining laser and device | |
| CN109097797A (en) | Metal increasing material manufacturing device and method based on local laser plating | |
| CN105880849A (en) | Micro-nano machining method and device for laser composite ejection liquid beam | |
| CN112658446A (en) | Laser-induced plasma micro-machining device and method | |
| CN113579380A (en) | Optical fiber laser and electrolytic coaxial synchronous composite processing device | |
| CN110385520A (en) | The micro- 304 stainless steel surface hydrophobicity micro-electrochemical machining complex machining process of texture of laser | |
| CN110280856A (en) | A kind of laser-electrochemical copolymerization perforating device and method using ultrasound vibration lens | |
| CN103028798A (en) | Method and system for continuous laser electrochemical metal micro-forming processing | |
| CN113146066A (en) | Laser electrolysis back collaborative group hole punching method and system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |