CN103706901B - A kind of hollow laser combines the method and apparatus processing miniature annular groove with electrolysis - Google Patents
A kind of hollow laser combines the method and apparatus processing miniature annular groove with electrolysis Download PDFInfo
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- CN103706901B CN103706901B CN201310737195.3A CN201310737195A CN103706901B CN 103706901 B CN103706901 B CN 103706901B CN 201310737195 A CN201310737195 A CN 201310737195A CN 103706901 B CN103706901 B CN 103706901B
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Abstract
Patent of the present invention provides a kind of hollow laser to combine the method and apparatus processing miniature annular groove with electrolysis, relates to the electrochemical micromachining field of manufacturing technology.The present invention is using electro-conductive glass as tool cathode, and the critical decomposition voltage that laser irradiates lower Electrolyzed Processing reduces, and then carries out Electrolyzed Processing to irradiation area, becomes by laser the size that beam system controls annular machining area.The present invention adopts laser change beam system can change the size of cannelure within the specific limits as required, considerably improves flexibility and the flexibility of processing; Under the irradiation of laser, the critical decomposition voltage of its Electrolyzed Processing reduces, and realizes the Electrolyzed Processing of irradiation area, and then improves the machining accuracy of miniature annular groove, be applicable to the Micro-ring slot machining of various conductive metallic material.
Description
Technical field
The present invention relates to the electrochemical micromachining field of manufacturing technology, refer in particular to a kind of hollow laser and combine the method and apparatus processing miniature annular groove with electrolysis.
Background technology
Small groove structure is present in the fields such as household electrical appliance, instrument and meter and precision die.Its machining accuracy, crudy and working (machining) efficiency have a great impact the performance of product, quality and manufacturing cost.The processing of usual ordinary construction is mainly undertaken by machining, but microstructure is often smaller, and its required precision is higher, is difficult to reach required precision by machining.
The processing appearing as microstructure of Electrolyzed Processing provides a kind of channel.In practice, due to its have that instrument is lossless, production efficiency is high, machined surface quality, with the advantage such as material hardness is irrelevant, people can process the microstructure of various complexity by Electrolyzed Processing, greatly meet the instructions for uses such as daily electrical equipment, instrument and meter.
Chinese patent CN1919514A proposes a kind of spraying liquid bunch electrolysis-laser composite processing method and device thereof, while carrying out Laser Processing, spray the high velocity jet electrolyte bundle coaxial with laser beam, the electrolyte bundle be thus cathodically polarised cools laser processing zone, washes away and electrochemical dissolution, realizes removing recast layer in laser processing procedure.But this method is when laser beam is through electrolyte spray chamber, the portion of energy of laser can be absorbed by electrolyte, the refraction of electrolyte, scattering also can affect the conduction of light beam, and then inevitably cause the loss of laser energy, be difficult to realize the effective transmission of laser energy in electrical-chemistry method system.
Chinese patent CN1259598C proposes quasi-molecule electrochemistry method for manufacturing microstructure and device thereof, first the photoetching plate-making manufacture technics array microprobe electrode of integrated circuit is utilized, electrolyte is added between processed substrate and probe electrode, after energising, above probe electrode, machining area is irradiated with PRK, control electrochemical reaction, realize the micro-structural processing of substrate.The shortcoming of the method is that PRK will be blocked by electrode when irradiating downwards above probe electrode, and laser can only be irradiated to the gap not needing to process, and can not direct irradiation at working position.
Chinese patent CN10817108A proposes a kind of Optical Electro-Chemistry micro etch processing method and device of mask electrode, adopts and carry out photoresist as mask electrode on electro-conductive glass, under the irradiation of laser, carry out Optical Electro-Chemistry reaction, and then removes material.But the method can only change shape and the size of processing by photoetching technique, for the miniature annular groove of processing, optionally can not change the size of cannelure internal-and external diameter, not there is flexibility.
For the shortcoming that above micro-groove processing method exists, the present invention proposes a kind of processing method of miniature groove structure, in employing, space-variant beam system controls the size of annular machining area, light-struckly carries out Electrolyzed Processing swashing simultaneously, improves flexibility and the precision of Micro-ring slot machining.
Summary of the invention
The object of the invention is to be directed to the flexibility of Micro-ring slot machining and the shortcoming of precision deficiency, propose the hollow laser that a kind of precision is high, machining area controllability is good, surface quality is good, production efficiency is high and combine the method and apparatus processing miniature annular groove with electrolysis.Solid laser beam can be become the laser restrainting into hollow ring laser beam and become the size that beam system controls annular machining area by employing, makes the processing of annular groove have good flexibility and flexibility like this; While carrying out Electrolyzed Processing, laser irradiation is carried out to machining area, under the effect of laser, the activation energy of its electrochemical reaction is reduced, and then reducing its critical decomposition voltage, the electrochemical reaction in region to be processed is more easily occurred, and non-irradiated region does not then react substantially, and then improving region processing precision, the effect of laser blast wave simultaneously is also conducive to the discharge of electrolysate; Processing power source adopts Microsecond grade adjustable pulsed power supply, within interpulse period, electrolyte in its electrode gap is upgraded fully, and under the effect of pulse current, pressure wave is there is in gap, certain Vibratory Mixing effect is played to electrolyte, is conducive to the quick discharge of electrolysate, improve machining accuracy.
The invention process method is specially:
(1) adopt ITO electro-conductive glass as tool cathode.
(2) workpiece anode is fixed on the table, then tool cathode is fixed on the distance also keeping with it 5 ~ 10mm directly over workpiece anode region to be processed;
(3) workpiece anode is connected with the both positive and negative polarity of Microsecond grade adjustable pulsed power supply respectively with tool cathode;
(4) open micro pump and electrolyte in groove is transported to workpiece anode surface and flowing through of making it even and stable through filter, make the liquid level of electrolyte remain with the lower surface of tool-electrode in process and contact;
(5) by computer control system setting laser parameter, laser instrument receives the instruction that computer control system sends and gives off laser beam, and laser beam forms hollow ring laser after becoming the change bundle of beam system and zoom by laser; Again adjust workbench by digital control system accurately to locate region to be processed on hollow laser beam and workpiece, make hollow laser bundle be radiated at machining area;
(6) concrete power supply machined parameters is set according to the size of required miniature annular groove, and the laser that laser instrument exports all is set to suitable and identical frequency with the voltage that the pulse power exports, then start laser instrument and digital control system, and give the reaction gap that the certain feed speed of workbench makes to keep between instrument and workpiece 2 ~ 3mm; Connect Microsecond grade adjustable pulsed power supply simultaneously and carry out Electrolyzed Processing; In process, gather current signal by current sensor, carry out data processing by being input in computer after the data acquisition of data collecting card, Electrolyzed Processing state is judged.
(7) Electrolyzed Processing is cleared up the workpiece containing miniature annular groove after completing.
The device realizing the inventive method comprises laser-impact device and electrolytic machining device, and wherein laser-impact device is made up of computer control system, laser instrument and laser change beam system; Electrolytic machining device is made up of digital control system, electrolyte, filter, micro pump, current sensor, data collecting card, processing power source and workbench; By computer control system setting laser parameter, send instruction control laser instrument and give off laser beam, adjustment laser becomes beam system makes the laser beam being become hollow by its laser beam, is then radiated at workpiece anode surface through tool cathode and electrolyte layer; Workpiece anode and tool cathode are connected with the both positive and negative polarity of processing power source respectively; Open micro pump and electrolyte in groove is transported to workpiece anode surface by filter and flowing through of making it even and stable; Regulate the processing distance between workpiece anode and tool cathode by digital control system adjustment workbench, same adjusting operating platform makes the hollow laser bundle becoming bundle device through laser be radiated at region to be processed accurately; Utilize the current signal in current sensor collection processing loop, by data collecting card, analog signal is changed, be then input to computer control system and carry out data processing to judge machining state.
The beneficial effect that method and apparatus of the present invention can realize has:
(1) adopt the laser that can be hollow ring laser beam by solid laser beam change bundle to become the size that beam system controls annular machining area, make the processing of annular groove have good flexibility and flexibility like this;
(2) while carrying out Electrolyzed Processing, laser irradiation is carried out to machining area, under the effect of laser, the activation energy of its electrochemical reaction is reduced, and then reduce its critical decomposition voltage, electrochemical reaction is more easily occurred, and non-irradiated region does not then react substantially, and then improves machining accuracy; The effect of laser blast wave simultaneously is also conducive to the discharge of electrolysate.
(3) processing power source adopts Microsecond grade adjustable pulsed power supply, within interpulse period, electrolyte in its electrode gap is upgraded fully, and under the effect of pulse current, pressure wave is there is in gap, certain Vibratory Mixing effect is played to electrolyte, is conducive to the quick discharge of electrolysate, improve machining accuracy.
(4) precision of the present invention's processing is high, and machining area controllability is good, surface quality is good, production efficiency is high.
Accompanying drawing explanation
Fig. 1 is that hollow laser is combined with electrolysis and processed Micro-ring slot device schematic diagram.
Fig. 2 is that laser becomes beam system schematic diagram.
In figure: 1, laser instrument, 2, current sensor, 3, Microsecond grade adjustable pulsed power supply, 4, data collecting card, 5, Electrolyzed Processing workbench, 6, computer control system, 7, digital control system, 8, workpiece anode, 9, electrolyte, 10, tool cathode (electro-conductive glass), 11, filter, 12, micro pump, 13, laser becomes beam system, 14, positive axicon lens, 15, focus lamp, 16, negative axicon lens.
Detailed description of the invention
A kind of hollow laser of the present invention combine with electrolysis process miniature annular groove device as shown in Figure 1, be made up of laser-impact device and electrolytic machining device.Wherein laser-impact device is made up of computer control system, laser instrument and laser change beam system; Electrolytic machining device is made up of digital control system, electrolyte, filter, micro pump, current sensor, data collecting card, processing power source and workbench.
Implementation process of the present invention is explained below in conjunction with accompanying drawing 1 shown device.First adopt ITO electro-conductive glass as the electrode of Electrolyzed Processing, then workpiece anode 8 is fixed on the top of Electrolyzed Processing workbench 5, finally tool cathode 10 is fixed on the distance also keeping with it 5 ~ 10mm directly over workpiece anode 8; Workpiece anode 8 is connected with the both positive and negative polarity of Microsecond grade adjustable pulsed power supply 3 respectively with tool cathode 10 wire; Open micro pump 12 and the electrolyte 9 in electrolytic bath is transported to workpiece anode 8 surface and flowing through of making it even and stable by filter 11, make the liquid level of electrolyte remain with the lower surface of tool cathode 10 in process and contact; By computer control system 6 setting laser parameter, laser instrument 1 receives the instruction that computer control system 6 sends and gives off laser beam, and laser beam forms hollow ring laser beam after becoming the change bundle of beam system 13 and zoom by laser; The region to be processed again adjusted on workbench 5 pairs of hollow laser beams and workpiece anode 8 by digital control system 7 is accurately located, and makes hollow laser bundle be radiated at machining area; Concrete power supply machined parameters is set according to the size of required miniature annular groove, and the laser exported by laser instrument 1 is all set to suitable and identical frequency with the voltage that Microsecond grade adjustable pulsed power supply 3 exports, then laser instrument 1 and digital control system 7 is started, and give the certain feed speed of workbench 5, make the reaction gap keeping 2 ~ 3mm between tool cathode 10 and workpiece anode 8; Connect Microsecond grade adjustable pulsed power supply 3 simultaneously and carry out Electrolyzed Processing; In process, utilize Hall current sensor 2 to gather the current signal in processing loop, by data collecting card 4, gathered analog signal is changed, then be input to computer control system 6 and carry out data processing, judge machining state; After Electrolyzed Processing completes, the workpiece 8 containing miniature annular groove is cleared up.
Claims (5)
1. a hollow laser combines the method for processing miniature annular groove with electrolysis, it is characterized in that: adopt electro-conductive glass as tool cathode (10), the critical decomposition voltage that laser irradiates lower Electrolyzed Processing reduces, and then Electrolyzed Processing is carried out to irradiation area, become by laser the size that beam system (13) controls annular machining area; Its concrete steps are:
A () adopts electro-conductive glass as tool cathode (10);
B workpiece anode (8) is fixed on workbench (5) by (), then tool cathode (10) is fixed on the distance also keeping with it 5 ~ 10mm directly over workpiece anode (8) region to be processed;
C workpiece anode (8) is connected with the both positive and negative polarity of processing power source (3) with tool cathode (10) by () respectively;
What d () opened through filter (11), electrolyte in groove (9) is transported to that the surface of workpiece anode (8) makes it even and stable by micro pump (12) flows through, and the liquid level of electrolyte is remained with the lower surface of tool cathode (10) contact;
E () controls laser instrument (1) by computer control system (6) makes it give off laser beam, and solid laser beam forms hollow ring laser after becoming the change bundle of beam system (13) and zoom by laser; Again adjusting workbench (5) by digital control system (7) makes the region to be processed on hollow laser bundle and workpiece anode (8) accurately locate, and makes hollow laser bundle be radiated at machining area; The laser energy that laser instrument (1) sends is 0.1 ~ 1J, and wavelength is 1064nm, and pulse duration range is 0.1 ~ 10ns; Becoming through laser the hollow laser inside diameter ranges formed after beam system is Φ 0.001 ~ Φ 20mm, and external diametrical extent is Φ 0.001 ~ Φ 50mm;
F () sets the parameter of Electrolyzed Processing, connect processing power source (3) and carry out Electrolyzed Processing; Start laser instrument (1) and digital control system (7), adjustment workbench (5) makes the reaction gap keeping 2 ~ 3mm between tool cathode in process (10) and workpiece anode (8) simultaneously; Meanwhile, gather current signal by current sensor (2) to judge Electrolyzed Processing state;
G () Electrolyzed Processing completes after, workpiece is cleared up.
2. hollow laser according to claim 1 combines the method for processing miniature annular groove with electrolysis, it is characterized in that: described electro-conductive glass is ITO electro-conductive glass, is greater than 85% to the transmitance of laser, and resistivity is 1 ~ 5x10
-4Ω cm.
3. hollow laser according to claim 1 combines the method for processing miniature annular groove with electrolysis, it is characterized in that: described processing power source (3) is Microsecond grade adjustable pulsed power supply, its frequency range is 10 ~ 25kHz, and voltage range is 0.1 ~ 20V, and current range is 0.1 ~ 300A.
4. hollow laser according to claim 1 combines the method for processing miniature annular groove with electrolysis, it is characterized in that: the salting liquid that described electrolyte (9) is mass concentration 5% ~ 30%.
5. realize a kind of hollow laser according to claim 1 combines the method for processing miniature annular groove device with electrolysis, it is characterized in that: comprise laser-impact device and electrolytic machining device, described laser-impact device becomes beam system (13) by computer control system (6), laser instrument (1) and laser and forms; Electrolytic machining device is made up of computer control system (6), digital control system (7), electrolyte (9), filter (11), micro pump (12), processing power source (3), workbench (5), current sensor (2), data collecting card (4); Control laser instrument (1) by computer control system (6) and send laser, laser becomes beam system (13) and carries out the process of change bundle to it, and the laser light tool cathode (10) become after bundle is radiated on workpiece anode (8); Workpiece anode (8) is connected with the both positive and negative polarity of processing power source (3) respectively with tool cathode (10); Electrolyte (9) through filter (11) is transported to surface of the work by micro pump (12); By the distance in digital control system (7) adjustment workbench (5) and then adjustment process between workpiece anode (8) and tool cathode (10); Utilize the current signal in current sensor (2) collection processing loop, by data collecting card (4), analog signal is changed, be then input to computer control system (6) and carry out data processing, judge machining state.
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