CN115488454B - Micro-channel electrolysis laser composite processing device - Google Patents
Micro-channel electrolysis laser composite processing device Download PDFInfo
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- CN115488454B CN115488454B CN202211070328.1A CN202211070328A CN115488454B CN 115488454 B CN115488454 B CN 115488454B CN 202211070328 A CN202211070328 A CN 202211070328A CN 115488454 B CN115488454 B CN 115488454B
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- 238000012545 processing Methods 0.000 title claims abstract description 58
- 239000002131 composite material Substances 0.000 title claims abstract description 34
- 238000005868 electrolysis reaction Methods 0.000 title claims abstract description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 28
- 230000007246 mechanism Effects 0.000 claims abstract description 25
- 238000003754 machining Methods 0.000 claims abstract description 23
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 16
- 229910052802 copper Inorganic materials 0.000 claims description 16
- 239000010949 copper Substances 0.000 claims description 16
- 239000003792 electrolyte Substances 0.000 claims description 14
- 238000003825 pressing Methods 0.000 claims description 9
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- 102100026388 L-amino-acid oxidase Human genes 0.000 description 2
- 101100233916 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) KAR5 gene Proteins 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
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- 239000002184 metal Substances 0.000 description 2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H5/00—Combined machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H11/00—Auxiliary apparatus or details, not otherwise provided for
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Abstract
Description
技术领域Technical Field
本发明涉及电解激光复合加工技术领域,尤其涉及一种微流道电解激光复合加工装置。The invention relates to the technical field of electrolytic laser composite processing, and in particular to a microchannel electrolytic laser composite processing device.
背景技术Background technique
电解加工是利用电解金属阳极溶解原理对工件进行加工,与其它加工方法相比,具有加工范围广、生产效率高、加工质量好、工具阴极无损耗及无宏观切削力等突出优点,在叶片型面加工、模具型腔加工、特殊齿轮加工等领域得到了广泛的应用,电解加工技术还便于实现多个微通道的一次性加工成型,能大大提高加工效率。在对微结构使用电解加工时,如何实现优质高效加工,发挥电解加工的优势是电解加工技术工程应用必须开展的研究内容。通过侧壁绝缘、掩膜等方式在一定程度上提高电解加工精度,但需要对阴极进行加工处理,而且传统掩膜电解加工需要在工件的表面覆盖一层光刻胶或掩蔽层(电绝缘),该技术对设备要求较高,每个工件都需要进行贴膜、曝光、显影等掩膜的制作工序,且无法重复利用。另外,大多数情况下掩膜加工时由于电解液静止,加工区内产物只能通过扩散、自然对流等完成转移,导致加工效率低、掩膜层易剥落。Electrolytic machining is the process of machining workpieces using the principle of electrolytic metal anode dissolution. Compared with other machining methods, it has the advantages of wide machining range, high production efficiency, good machining quality, no tool cathode loss and no macro-cutting force. It has been widely used in blade surface machining, mold cavity machining, special gear machining and other fields. Electrolytic machining technology is also convenient for realizing one-time machining and molding of multiple microchannels, which can greatly improve machining efficiency. When electrolytic machining is used for microstructures, how to achieve high-quality and efficient machining and give full play to the advantages of electrolytic machining is a research content that must be carried out in the engineering application of electrolytic machining technology. The accuracy of electrolytic machining can be improved to a certain extent by sidewall insulation, masking and other methods, but the cathode needs to be processed, and traditional mask electrolytic machining requires a layer of photoresist or masking layer (electrical insulation) to be covered on the surface of the workpiece. This technology has high requirements for equipment. Each workpiece needs to go through the mask making process such as film pasting, exposure, and development, and cannot be reused. In addition, in most cases, due to the static electrolyte during mask machining, the product in the processing area can only be transferred through diffusion, natural convection, etc., resulting in low machining efficiency and easy peeling of the mask layer.
为解决掩膜无法重复使用、加工效率低等问题,将激光表面改性技术引入到掩模的制作当中,再通过电解加工进行表面结构的加工,即电解激光复合加工技术。电解激光复合加工是电解加工与激光表面改性技术的结合,在工件材料表面进行激光改性形成掩膜层(改性层),在电解加工过程中对材料基体起到保护作用,有掩膜保护层的工件表面金属溶解缓慢或不溶解,而没有掩膜保护层区域快速发生电解腐蚀。In order to solve the problems of the mask not being reusable and low processing efficiency, laser surface modification technology is introduced into the production of the mask, and then the surface structure is processed by electrolytic processing, that is, electrolytic laser composite processing technology. Electrolytic laser composite processing is a combination of electrolytic processing and laser surface modification technology. Laser modification is performed on the surface of the workpiece material to form a mask layer (modified layer), which protects the material matrix during the electrolytic processing. The metal on the workpiece surface with the mask protection layer dissolves slowly or does not dissolve, while the area without the mask protection layer undergoes rapid electrolytic corrosion.
然而现有的激光复合电解加工设备多为专机,仅仅适用于一种或几种零件的加工,通用性较差。其中激光复合电解加工设备分为激光促进加工区电解和激光掩膜抑制非加工区电解,激光促进电解加工设备存在激光和电解液共路,不可避免存在激光功率衰减问题;而现有激光掩膜设备比较笨重,一旦安装好,后期移动和调平步骤也较为繁琐。However, most of the existing laser composite electrolytic processing equipment are special machines, which are only suitable for processing one or several parts and have poor versatility. Among them, laser composite electrolytic processing equipment is divided into laser-promoted electrolysis in the processing area and laser mask-inhibited electrolysis in the non-processing area. Laser-promoted electrolytic processing equipment has the common path of laser and electrolyte, which inevitably leads to the problem of laser power attenuation; and the existing laser mask equipment is relatively bulky. Once installed, the subsequent movement and leveling steps are also cumbersome.
发明内容Summary of the invention
基于背景技术中存在的技术问题,本发明提出了一种通用性强、装置移动和调整方便的微流道电解激光复合加工装置。Based on the technical problems existing in the background technology, the present invention proposes a micro-channel electrolysis laser composite processing device which has strong versatility and is convenient to move and adjust.
本发明提出的一种微流道电解激光复合加工装置,包括:The present invention provides a microchannel electrolytic laser composite processing device, comprising:
工作台;Workbench;
移动支撑机构,包括支撑件以及安装在支撑件底部并可带动支撑件在工作台上移动的移动件,支撑件上安装有水箱;The mobile support mechanism comprises a support member and a moving member installed at the bottom of the support member and capable of driving the support member to move on the workbench, wherein a water tank is installed on the support member;
阳极机构,安装在水箱内,阳极机构包括阳极件,阳极件设置有开放式流道且开放式流道内固定有工件,阳极件上连接有与工件接触的导电螺丝,水箱上安装有用于向开放式流道内引入电解液的入水管;an anode mechanism installed in the water tank, the anode mechanism comprising an anode member, the anode member being provided with an open flow channel in which a workpiece is fixed, the anode member being connected with a conductive screw in contact with the workpiece, and the water tank being provided with a water inlet pipe for introducing electrolyte into the open flow channel;
激光器,安装在工作台上并位于工件上方;A laser, mounted on a table and positioned above the workpiece;
阴极机构,阴极机构包括导电阴极片和驱动件,导电阴极片位于工件上方,驱动件安装在支撑件上并用于驱动导电阴极片在工件与激光器之间进行竖直方向、水平方向的移动。The cathode mechanism comprises a conductive cathode sheet and a driving member, wherein the conductive cathode sheet is located above the workpiece, and the driving member is installed on the supporting member and is used to drive the conductive cathode sheet to move vertically and horizontally between the workpiece and the laser.
优选的,阳极件包括阳极固定座和阳极活动座,工件固定在阳极固定座上,阳极活动座位于工件上方且阳极活动座固定在阳极固定座上,阳极活动座顶端开设有开放式流道且阳极固定座开设有与开放式流道连通的内流道,开放式流道底部与工件相对位置开设有连通槽,工件伸入到连通槽内且连通槽内设置有与工件抵紧的小回形垫片。Preferably, the anode component includes an anode fixed seat and an anode movable seat, the workpiece is fixed on the anode fixed seat, the anode movable seat is located above the workpiece and the anode movable seat is fixed on the anode fixed seat, an open flow channel is provided at the top of the anode movable seat and an inner flow channel connected to the open flow channel is provided on the anode fixed seat, a connecting groove is provided at the bottom of the open flow channel relative to the workpiece, the workpiece extends into the connecting groove and a small paper-shaped gasket is provided in the connecting groove to press against the workpiece.
优选的,阳极固定座上开设有固定槽,固定槽内设置有铜板,铜板上下两侧边缘均设置有大回形垫片,铜板下侧的大回形垫片与阳极固定座紧密压紧且其上侧的大回形垫片与阳极活动座紧密压紧,导电螺丝贯穿阳极固定座伸入到固定槽并与铜板接触,工件放置在铜板上;阳极固定座上围绕阳极活动座固定有多个抵压在阳极固定座上的压片。Preferably, a fixing groove is provided on the anode fixing seat, a copper plate is arranged in the fixing groove, large paper-shaped gaskets are arranged on the upper and lower edges of the copper plate, the large paper-shaped gasket on the lower side of the copper plate is tightly pressed against the anode fixing seat, and the large paper-shaped gasket on the upper side is tightly pressed against the anode movable seat, a conductive screw passes through the anode fixing seat and extends into the fixing groove and contacts the copper plate, and a workpiece is placed on the copper plate; a plurality of pressing plates are fixed on the anode fixing seat around the anode movable seat and are pressed against the anode fixing seat.
优选的,驱动件包括安装在支撑件上XZ轴平台,导电阴极片通过连接件安装在XZ轴平台的X轴向的滑块上。Preferably, the driving member comprises an XZ-axis platform mounted on the supporting member, and the conductive cathode sheet is mounted on a slider in the X-axis direction of the XZ-axis platform via a connecting member.
优选的,连接件包括阴极固定座和压板,阴极固定座固定在XZ轴平台的X轴向的滑块上,阴极固定座上设置有竖直相对布置的固定挡块、活动挡块且固定挡块与活动挡块之间的距离可调节,导电阴极片设置在固定挡块、活动挡块之间并由固定挡块、活动挡块夹紧,阴极固定座上位于导电阴极片上方位置还设置有与导电阴极片抵压的限位块;压板设置在导电阴极片远离阴极固定座一侧且压板设置抵压在导电阴极片上的凸块,压板通过螺栓固定在阴极固定座上;优选的,阴极固定座上开设有水平布置的活动槽,活动槽内滑动连接有活动块且活动块与活动挡块连接,活动槽内还设置有与活动块连接的第一压簧。Preferably, the connecting member includes a cathode fixing seat and a pressure plate, the cathode fixing seat is fixed on the slider in the X-axis direction of the XZ-axis platform, the cathode fixing seat is provided with a fixed stop block and a movable stop block arranged vertically opposite to each other, and the distance between the fixed stop block and the movable stop block is adjustable, the conductive cathode sheet is arranged between the fixed stop block and the movable stop block and clamped by the fixed stop block and the movable stop block, and a limit block is also provided on the cathode fixing seat above the conductive cathode sheet for pressing against the conductive cathode sheet; the pressure plate is arranged on the side of the conductive cathode sheet away from the cathode fixing seat and the pressure plate is provided with a protrusion pressed against the conductive cathode sheet, and the pressure plate is fixed to the cathode fixing seat by bolts; preferably, a horizontally arranged movable groove is opened on the cathode fixing seat, a movable block is slidably connected in the movable groove and the movable block is connected to the movable stop block, and a first compression spring connected to the movable block is also provided in the movable groove.
优选的,支撑件包括支撑框架,水箱固定在支撑框架上,支撑框架底部四角位置均安装有支撑滑道,支撑滑道内水平滑动安装有第一楔形块且支撑滑动内还垂直移动安装有第二楔形块,第一楔形块的楔形面与第二楔形块的楔形面可滑动接触,第一楔形块远离第二楔形块一端螺纹连接有螺杆且螺杆与支撑滑道螺纹连接,螺杆外端连接有旋钮,第二楔形块底端连接有竖直伸出到支撑滑道外的支撑柱且支撑柱与支撑滑道活动配合。Preferably, the support member includes a support frame, the water tank is fixed on the support frame, and support slides are installed at the four corners of the bottom of the support frame. A first wedge block is installed in the support slide for horizontal sliding movement, and a second wedge block is also installed in the support slide for vertical movement. The wedge surface of the first wedge block is slidably in contact with the wedge surface of the second wedge block. The first wedge block is threadedly connected to a screw at one end away from the second wedge block, and the screw is threadedly connected to the support slide, and a knob is connected to the outer end of the screw. The bottom end of the second wedge block is connected to a support column that vertically extends out of the support slide, and the support column and the support slide are movably cooperated.
优选的,移动件设置有四个且四个移动件分别设置在支撑件底部四角位置,移动件包括安装在支撑件上并延伸至支撑件侧部的弧形滑轨、转动件,弧形滑轨上滑动安装有支架上且支架上固定有万向轮,转动件用于驱动支架在弧形滑轨上滑动。Preferably, four movable parts are provided and the four movable parts are respectively arranged at the four corners of the bottom of the support part. The movable parts include an arc-shaped slide rail installed on the support part and extending to the side of the support part, and a rotating part. A bracket is slidably installed on the arc-shaped slide rail and a universal wheel is fixed on the bracket. The rotating part is used to drive the bracket to slide on the arc-shaped slide rail.
优选的,转动件包括安装板、直线电机、舵机、第一伸缩杆和第二伸缩杆,安装板安装在支撑件上,直线电机通过连接轴转动安装在安装板上且舵机固定安装在安装板上,直线电机的输出端连接有限制支架在弧形滑轨上滑动的挡臂,直线电机上还固定有凸台,舵机的输出轴上转动套装有第一套环、第二套环,第一套环、第二套环相互靠近一端均设置有棘部且两个棘部啮合,舵机的输出轴上套装有与第二套环抵压的第二压簧,第一伸缩杆固定端固定在第一套环上且其伸缩端与支架铰接,第二伸缩杆固定端固定在第二套环上且其伸缩端与凸台铰接。Preferably, the rotating member includes a mounting plate, a linear motor, a steering gear, a first telescopic rod and a second telescopic rod, the mounting plate is mounted on the support member, the linear motor is rotatably mounted on the mounting plate via a connecting shaft and the steering gear is fixedly mounted on the mounting plate, the output end of the linear motor is connected to a stop arm for limiting the bracket from sliding on the arc slide rail, a boss is also fixed on the linear motor, a first ring and a second ring are rotatably mounted on the output shaft of the steering gear, the first ring and the second ring are both provided with a ratchet portion at one end close to each other and the two ratchet portions are engaged, a second compression spring is mounted on the output shaft of the steering gear, the fixed end of the first telescopic rod is fixed on the first ring and its telescopic end is hinged to the bracket, the fixed end of the second telescopic rod is fixed on the second ring and its telescopic end is hinged to the boss.
优选的,移动支撑机构还包括安装在支撑件底部的抬起件,抬起件包括两个悬梁、两个支撑摆板和摆动件,两个悬梁在水箱下方水平相对布置且悬梁固定在支撑件底部,两个支撑摆板在两个悬梁之间且两个支撑摆板相对布置,支撑摆板两端均连接有转杆且两个转杆分别与两个悬梁转动连接,摆动件用于驱动两个支撑摆板转动。Preferably, the mobile support mechanism also includes a lifting member installed at the bottom of the support member, the lifting member includes two suspension beams, two support swing plates and a swing member, the two suspension beams are horizontally arranged opposite to each other below the water tank and the suspension beams are fixed to the bottom of the support member, the two support swing plates are between the two suspension beams and the two support swing plates are arranged opposite to each other, both ends of the support swing plates are connected with rotating rods and the two rotating rods are respectively rotatably connected to the two suspension beams, and the swing member is used to drive the two support swing plates to rotate.
优选的,摆动件包括减速电机、主动齿轮、两个从动齿轮,两个支撑摆板之间设置有安装梁,安装梁两端分别与两个悬梁连接,减速电机安装在安装梁上,减速电机的输出轴垂直设置且其输出轴与主动齿轮传动连接,主动齿轮两侧均设置有安装在安装梁上的连接座,连接座上滑动安装有水平布置的移动块,移动块设置有与主动齿轮啮合的第一齿条,移动块底部还设置有与第一齿条平行的第二齿条,两个从动齿轮分别与两个第二齿条啮合且从动齿轮位于主动齿轮两侧,从动齿轮的齿轮轴转动连接有固定在安装梁上的安装座且从动齿轮的齿轮轴固定连接有摆臂,摆臂远离从动齿轮一端转动连接有滑移连接环;两个支撑摆板上均固定有滑移柱,两个滑移连接环分别滑动套装在两个滑移柱上。Preferably, the swing member includes a reduction motor, a driving gear, and two driven gears. A mounting beam is provided between the two supporting swing plates, and two ends of the mounting beam are respectively connected to the two suspension beams. The reduction motor is installed on the mounting beam, and the output shaft of the reduction motor is vertically arranged and its output shaft is transmission-connected to the driving gear. Connecting seats installed on the mounting beam are provided on both sides of the driving gear, and a horizontally arranged moving block is slidably installed on the connecting seat. The moving block is provided with a first rack meshing with the driving gear, and a second rack parallel to the first rack is also provided at the bottom of the moving block. The two driven gears are respectively meshed with the two second racks and the driven gears are located on both sides of the driving gear, and the gear shaft of the driven gear is rotatably connected to a mounting seat fixed on the mounting beam and the gear shaft of the driven gear is fixedly connected to a swing arm, and the swing arm is rotatably connected to a sliding connecting ring at one end away from the driven gear; sliding columns are fixed on the two supporting swing plates, and the two sliding connecting rings are slidably mounted on the two sliding columns.
本发明提出的一种微流道电解激光复合加工装置,工件固定在阳极件的开放式流道内,此时激光器对工件上表面进行定域掩膜,电解液通过入水管流入开放式流道,使电解液在开放式流道内流动时能经过工件上表面;由驱动件驱动的导电阴极片移动到工件正上方,使导电阴极片与工件上表面间距达到设定值,此时开启激光器,同时导电阴极片沿着固定路线扫描实现电解激光复合加工;激光器对工件上表面进行定域掩膜后,导电阴极片水平扫描和垂直进给加工一次,通过多次掩膜,水平扫描与垂直进给加工,实现特定形状的定域电解加工。The present invention proposes a microchannel electrolytic laser composite processing device, in which a workpiece is fixed in an open channel of an anode component, and a laser performs local masking on the upper surface of the workpiece, and an electrolyte flows into the open channel through a water inlet pipe, so that the electrolyte can pass through the upper surface of the workpiece when flowing in the open channel; a conductive cathode sheet driven by a driving component moves to just above the workpiece, so that the distance between the conductive cathode sheet and the upper surface of the workpiece reaches a set value, and the laser is turned on at the same time, and the conductive cathode sheet scans along a fixed route to realize electrolytic laser composite processing; after the laser performs local masking on the upper surface of the workpiece, the conductive cathode sheet is horizontally scanned and vertically fed once, and localized electrolytic processing of a specific shape is realized through multiple masking, horizontal scanning and vertical feeding.
本发明通过在阳极件上设置开放式流道并设置可移动式阴极机构,达到了在不移动工件情况下,实现多次掩膜与扫描加工的定域电解加工效果,解决了掩膜加工中掩膜层步骤繁琐、成本高、多次定位精度差的问题;通过设置移动件及抬起件,达到了装置在移动状态和加工过程的切换效果,解决了装置移动问题;通过在支撑框架底部设置支撑滑动以及第一楔形块、第二楔形块、螺杆,方便装置的调平,解决了加工过程中工件表面水平难以调整的问题。The present invention achieves the effect of localized electrolytic processing of multiple masking and scanning processing without moving the workpiece by arranging an open flow channel on the anode part and arranging a movable cathode mechanism, thereby solving the problems of complicated mask layer steps, high cost and poor multiple positioning accuracy in mask processing; by arranging moving parts and lifting parts, the switching effect of the device between the moving state and the processing process is achieved, solving the problem of device movement; by arranging a supporting slide and a first wedge block, a second wedge block and a screw at the bottom of the supporting frame, the leveling of the device is facilitated, solving the problem of difficulty in adjusting the surface level of the workpiece during processing.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本发明提出的一种微流道电解激光复合加工装置的结构示意图;FIG1 is a schematic structural diagram of a microchannel electrolytic laser composite processing device proposed by the present invention;
图2为图1的侧视图;FIG2 is a side view of FIG1;
图3为本发明提出的一种微流道电解激光复合加工装置中阳极机构的结构示意图;FIG3 is a schematic structural diagram of an anode mechanism in a microchannel electrolytic laser composite processing device proposed by the present invention;
图4为图3的俯视图;FIG4 is a top view of FIG3 ;
图5为图4中A-A向剖视图;Fig. 5 is a cross-sectional view along the line A-A in Fig. 4;
图6为图4中B-B向剖视图;Fig. 6 is a cross-sectional view along the line B-B in Fig. 4;
图7为本发明提出的一种微流道电解激光复合加工装置中阳极活动座的结构示意图;FIG7 is a schematic structural diagram of an anode movable seat in a microchannel electrolytic laser composite processing device proposed by the present invention;
图8为本发明提出的一种微流道电解激光复合加工装置中连接件的结构示意图;FIG8 is a schematic structural diagram of a connector in a microchannel electrolytic laser composite processing device proposed by the present invention;
图9为本发明提出的一种微流道电解激光复合加工装置中连接件的部分结构图;FIG9 is a partial structural diagram of a connector in a microchannel electrolytic laser composite processing device proposed by the present invention;
图10为本发明提出的一种微流道电解激光复合加工装置中连接件的侧视图;FIG10 is a side view of a connector in a microchannel electrolytic laser composite processing device proposed by the present invention;
图11为本发明提出的一种微流道电解激光复合加工装置中连接件的剖视图;FIG11 is a cross-sectional view of a connector in a microchannel electrolytic laser composite processing device proposed by the present invention;
图12为本发明提出的一种微流道电解激光复合加工装置中移动支撑机构的结构示意图;FIG12 is a schematic structural diagram of a movable support mechanism in a microchannel electrolysis laser composite processing device proposed by the present invention;
图13为本发明提出的一种微流道电解激光复合加工装置中支撑滑道的结构示意图;FIG13 is a schematic structural diagram of a support slideway in a microchannel electrolytic laser composite processing device proposed by the present invention;
图14为本发明提出的一种微流道电解激光复合加工装置中支撑滑道的剖视图;FIG14 is a cross-sectional view of a support slideway in a microchannel electrolytic laser composite processing device proposed by the present invention;
图15本发明提出的一种微流道电解激光复合加工装置中移动件的结构示意图;FIG15 is a schematic structural diagram of a moving part in a microchannel electrolytic laser composite processing device proposed by the present invention;
图16本发明提出的一种微流道电解激光复合加工装置中抬起件的结构示意图;FIG16 is a schematic structural diagram of a lifting member in a microchannel electrolytic laser composite processing device proposed by the present invention;
图17本发明提出的一种微流道电解激光复合加工装置中抬起件的部分结构图。FIG. 17 is a partial structural diagram of a lifting member in a microchannel electrolysis laser composite processing device proposed by the present invention.
具体实施方式Detailed ways
为使本发明的上述目的、特征和优点能够更加明显易懂,下面结合说明书附图对本发明的具体实施方式做详细的说明,显然所描述的实施例是本发明的一部分实施例,而不是全部实施例。基于本发明中的实施例,本领域普通人员在没有做出创造性劳动前提下所获得的所有其他实施例,都应当属于本发明的保护的范围。In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below in conjunction with the drawings of the specification. Obviously, the described embodiments are part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary persons in the art without creative work should fall within the scope of protection of the present invention.
参照图1-图17,本发明提出一种微流道电解激光复合加工装置,包括:1 to 17 , the present invention provides a microchannel electrolytic laser composite processing device, comprising:
工作台100;Workbench 100;
移动支撑机构200,包括支撑件210以及安装在支撑件210底部并可带动支撑件210在工作台100上移动的移动件220,支撑件210上安装有水箱230,水箱230底部设置有排水口231;The mobile support mechanism 200 includes a support member 210 and a moving member 220 installed at the bottom of the support member 210 and capable of driving the support member 210 to move on the workbench 100. A water tank 230 is installed on the support member 210, and a drain port 231 is provided at the bottom of the water tank 230.
阳极机构300,安装在水箱230内,阳极机构300包括阳极件310,阳极件310设置有开放式流道311且开放式流道311内固定有工件400,阳极件310上连接有与工件400接触的导电螺丝320,水箱230上安装有用于向开放式流道311内引入电解液的入水管330;The anode mechanism 300 is installed in the water tank 230. The anode mechanism 300 includes an anode member 310. The anode member 310 is provided with an open flow channel 311. A workpiece 400 is fixed in the open flow channel 311. A conductive screw 320 in contact with the workpiece 400 is connected to the anode member 310. A water inlet pipe 330 for introducing electrolyte into the open flow channel 311 is installed on the water tank 230.
激光器500,安装在工作台100上并位于工件400上方;A laser 500 is mounted on the workbench 100 and is located above the workpiece 400;
阴极机构600,阴极机构600包括导电阴极片610和驱动件620,导电阴极片610位于工件400上方,驱动件620安装在支撑件210上并用于驱动导电阴极片610在工件400与激光器500之间进行竖直方向、水平方向的移动。The cathode mechanism 600 includes a conductive cathode sheet 610 and a driving member 620 . The conductive cathode sheet 610 is located above the workpiece 400 . The driving member 620 is installed on the support member 210 and is used to drive the conductive cathode sheet 610 to move vertically and horizontally between the workpiece 400 and the laser 500 .
本实施例中,工件400固定在阳极件的开放式流道311内,此时激光器500对工件400上表面进行定域掩膜,电解液通过入水管330流入开放式流道311,使电解液在开放式流道内流动时能经过工件400上表面;由驱动件620驱动的导电阴极片610移动到工件400正上方,使导电阴极片610与工件400上表面间距达到设定值,此时开启激光器500,同时导电阴极片610沿着固定路线扫描实现电解激光复合加工。激光器500对工件400上表面进行定域掩膜后,导电阴极片610水平扫描和垂直进给加工一次,通过多次掩膜,水平扫描与垂直进给加工,实现特定形状的定域电解加工。In this embodiment, the workpiece 400 is fixed in the open flow channel 311 of the anode member, and the laser 500 performs local masking on the upper surface of the workpiece 400. The electrolyte flows into the open flow channel 311 through the water inlet pipe 330, so that the electrolyte can pass through the upper surface of the workpiece 400 when flowing in the open flow channel; the conductive cathode sheet 610 driven by the driving member 620 moves to the top of the workpiece 400, so that the distance between the conductive cathode sheet 610 and the upper surface of the workpiece 400 reaches the set value, and the laser 500 is turned on at the same time, and the conductive cathode sheet 610 scans along a fixed route to realize electrolytic laser composite processing. After the laser 500 performs local masking on the upper surface of the workpiece 400, the conductive cathode sheet 610 performs horizontal scanning and vertical feeding processing once, and local electrolytic processing of a specific shape is realized through multiple masking, horizontal scanning and vertical feeding processing.
本实施例中,如图3-图7所示,阳极件310包括阳极固定座313和阳极活动座312,阳极固定座313下方设置有底座340且阳极固定座313通过多个六角螺柱与底座340连接。工件400固定在阳极固定座313上,阳极活动座312位于工件400上方,阳极活动座312顶端通过螺栓固定有挡板380且挡板380通过螺栓固定在阳极固定座313上,挡板380将阳极固定座313、阳极活动座312固定在一起且挡板380与阳极活动座312之间设置有垫片390。阳极活动座312顶端开设有开放式流道311且阳极固定座313开设有与开放式流道311连通的内流道314,开放式流道311底部与工件400相对位置开设有连通槽315,工件400伸入到连通槽315内且连通槽315内设置有与工件400抵紧的小回形垫片316。水箱230的排水口231位于开放式流道311的出口下方位置,。In this embodiment, as shown in FIGS. 3 to 7 , the anode member 310 includes an anode fixed seat 313 and an anode movable seat 312, a base 340 is provided below the anode fixed seat 313 and the anode fixed seat 313 is connected to the base 340 via a plurality of hexagonal studs. The workpiece 400 is fixed on the anode fixed seat 313, the anode movable seat 312 is located above the workpiece 400, a baffle 380 is fixed to the top of the anode movable seat 312 by bolts and the baffle 380 is fixed to the anode fixed seat 313 by bolts, the baffle 380 fixes the anode fixed seat 313 and the anode movable seat 312 together, and a gasket 390 is provided between the baffle 380 and the anode movable seat 312. An open channel 311 is provided at the top of the anode movable seat 312, and an inner channel 314 connected to the open channel 311 is provided at the anode fixed seat 313. A connecting groove 315 is provided at the bottom of the open channel 311 at a position opposite to the workpiece 400. The workpiece 400 extends into the connecting groove 315, and a small circular gasket 316 is provided in the connecting groove 315 to press against the workpiece 400. The drain port 231 of the water tank 230 is located below the outlet of the open channel 311.
如图2、图3所示,阳极固定座313上设置有与内流道314连通的宝塔转接头350,入水管330与宝塔转接头350连接,电解液通过入水管330流入宝塔转接头350,再从宝塔转接头350流入阳极固定座的内流道314,在由内流道314流入开放式流道311,电解液在连通槽315处能经过工件400上表面。入水管330上连接有压力表331,通过观测压力表331保证入口压力,以此来确定加工中电解液的流量和速度。As shown in Fig. 2 and Fig. 3, a pagoda adapter 350 connected to the inner flow channel 314 is provided on the anode fixing seat 313, and the water inlet pipe 330 is connected to the pagoda adapter 350. The electrolyte flows into the pagoda adapter 350 through the water inlet pipe 330, and then flows into the inner flow channel 314 of the anode fixing seat from the pagoda adapter 350, and then flows into the open flow channel 311 from the inner flow channel 314. The electrolyte can pass through the upper surface of the workpiece 400 at the connecting groove 315. A pressure gauge 331 is connected to the water inlet pipe 330. The inlet pressure is ensured by observing the pressure gauge 331, so as to determine the flow rate and speed of the electrolyte during processing.
进一步的,为方便固定工件400,如图5、图6所示,阳极固定座313上开设有固定槽,固定槽内设置有铜板317,铜板317上下两侧边缘均设置有大回形垫片318,铜板317下侧的大回形垫片318与阳极固定座313紧密压紧且其上侧的大回形垫片318与阳极活动座312紧密压紧,导电螺丝320贯穿阳极固定座313伸入到固定槽并与铜板317接触。如图5、图6所示,导电螺丝320上连接有阳极电线360,阳极固定座313底部安装有罩设在导电螺丝320、阳极电线360,外的保护罩370。工件400放置在铜板317上,阳极固定座313上围绕阳极活动座312固定有多个抵压在阳极固定座313上的压片319,压片319的设置,确保将阳极活动座312压紧在工件400上。Further, in order to facilitate the fixing of the workpiece 400, as shown in Fig. 5 and Fig. 6, a fixing groove is provided on the anode fixing seat 313, a copper plate 317 is provided in the fixing groove, large circular gaskets 318 are provided on the upper and lower edges of the copper plate 317, the large circular gasket 318 on the lower side of the copper plate 317 is tightly pressed against the anode fixing seat 313, and the large circular gasket 318 on the upper side is tightly pressed against the anode movable seat 312, and the conductive screw 320 penetrates the anode fixing seat 313 and extends into the fixing groove and contacts the copper plate 317. As shown in Fig. 5 and Fig. 6, the conductive screw 320 is connected to the anode wire 360, and a protective cover 370 is installed at the bottom of the anode fixing seat 313, which is provided on the conductive screw 320 and the anode wire 360 and outside. The workpiece 400 is placed on the copper plate 317 . A plurality of pressing plates 319 are fixed around the anode movable seat 312 on the anode fixed seat 313 . The arrangement of the pressing plates 319 ensures that the anode movable seat 312 is pressed tightly against the workpiece 400 .
更进一步的,驱动件620包括安装在支撑件210上XZ轴平台,导电阴极片610通过连接件630安装在XZ轴平台的X轴向的滑块上。具体地,如图8-图11所示,连接件630包括阴极固定座631和压板632,阴极固定座631固定在XZ轴平台的X轴向的滑块上,阴极固定座631上设置有竖直相对布置的固定挡块633、活动挡块634且固定挡块633与活动挡块634之间的距离可调节,导电阴极片610设置在固定挡块633、活动挡块634之间并由固定挡块633、活动挡块634夹紧,阴极固定座631上位于导电阴极片610上方位置还设置有与导电阴极片610抵压的限位块635;压板632设置在导电阴极片610远离阴极固定座631一侧且压板632设置抵压在导电阴极片610上的凸块636,压板632通过螺栓固定在阴极固定座631上。优选的,为方便更换导电阴极片610,阴极固定座631上开设有水平布置的活动槽637,活动槽637内滑动连接有活动块且活动块与活动挡块634连接,活动槽637内还设置有与活动块连接的第一压簧638。Furthermore, the driving member 620 includes an XZ-axis platform installed on the supporting member 210 , and the conductive cathode sheet 610 is installed on a slider in the X-axis direction of the XZ-axis platform through a connecting member 630 . Specifically, as shown in Figures 8 to 11, the connecting member 630 includes a cathode fixing seat 631 and a pressure plate 632. The cathode fixing seat 631 is fixed on the slider in the X-axis direction of the XZ-axis platform. The cathode fixing seat 631 is provided with a fixed stopper 633 and a movable stopper 634 arranged vertically opposite to each other, and the distance between the fixed stopper 633 and the movable stopper 634 is adjustable. The conductive cathode sheet 610 is arranged between the fixed stopper 633 and the movable stopper 634 and clamped by the fixed stopper 633 and the movable stopper 634. A limiting block 635 is also provided on the cathode fixing seat 631 above the conductive cathode sheet 610, which is pressed against the conductive cathode sheet 610; the pressure plate 632 is arranged on the side of the conductive cathode sheet 610 away from the cathode fixing seat 631, and the pressure plate 632 is provided with a protrusion 636 pressed against the conductive cathode sheet 610, and the pressure plate 632 is fixed to the cathode fixing seat 631 by bolts. Preferably, to facilitate replacement of the conductive cathode sheet 610 , a horizontally arranged movable groove 637 is provided on the cathode fixing seat 631 , a movable block is slidably connected in the movable groove 637 and the movable block is connected to the movable stopper 634 , and a first compression spring 638 connected to the movable block is also provided in the movable groove 637 .
如图11所示,为方便导电阴极片610的接电,在这里,阴极固定座631与导电阴极片610相对应位置开设有导电孔6311且阴极固定座631上开设有与导电孔6311连通的电线通道6312,阴极电线通过电线通道6312进入阴极固定座631的导电孔6311并与导电阴极片610接触导通。As shown in FIG. 11 , in order to facilitate the connection of the conductive cathode sheet 610, a conductive hole 6311 is provided at a position corresponding to the cathode fixing seat 631 and the conductive cathode sheet 610, and a wire channel 6312 connected to the conductive hole 6311 is provided on the cathode fixing seat 631. The cathode wire enters the conductive hole 6311 of the cathode fixing seat 631 through the wire channel 6312 and contacts and conducts with the conductive cathode sheet 610.
在一些实施例中,如图1、图2、图12-图14所示,支撑件210包括支撑框架211,水箱230固定在支撑框架211上,支撑框架211底部四角位置均安装有支撑滑道212,支撑滑道212内水平滑动安装有第一楔形块213且支撑滑动内还垂直移动安装有第二楔形块214,第一楔形块213的楔形面与第二楔形块214的楔形面可滑动接触,第一楔形块213远离第二楔形块214一端螺纹连接有螺杆215且螺杆215与支撑滑道212螺纹连接,螺杆215外端连接有旋钮,第二楔形块214底端连接有竖直伸出到支撑滑道212外的支撑柱216且支撑柱216与支撑滑道212活动配合。通过转动旋钮,从而使得螺杆215带动第一楔形块213水平移动,从而调节支撑柱216伸出支撑滑道212外的高度,支撑框架211四角位置的支撑柱216伸出支撑滑道212外的高度保持一致,可以保证装置加工时的水平。In some embodiments, as shown in Figures 1, 2, 12-14, the support member 210 includes a support frame 211, a water tank 230 is fixed on the support frame 211, and support slides 212 are installed at the four corners of the bottom of the support frame 211. A first wedge block 213 is installed in the support slide 212 for horizontal sliding movement, and a second wedge block 214 is also installed in the support slide for vertical movement. The wedge surface of the first wedge block 213 is slidably in contact with the wedge surface of the second wedge block 214. A screw 215 is threadedly connected to one end of the first wedge block 213 away from the second wedge block 214, and the screw 215 is threadedly connected to the support slide 212, and a knob is connected to the outer end of the screw 215. The bottom end of the second wedge block 214 is connected to a support column 216 that vertically extends out of the support slide 212, and the support column 216 is movably matched with the support slide 212. By turning the knob, the screw rod 215 drives the first wedge block 213 to move horizontally, thereby adjusting the height of the support column 216 extending out of the support slide 212. The height of the support columns 216 at the four corners of the support frame 211 extending out of the support slide 212 remains consistent, which can ensure the level of the device during processing.
在一些实施例中,如图1、图2、图15所示,移动件220设置有四个且四个移动件220分别设置在支撑框架211底部四角位置,移动件220包括安装在支撑框架211上并延伸至支撑框架211侧部的弧形滑轨221、转动件,弧形滑轨221上滑动安装有支架222上且支架222上固定有万向轮223,转动件用于驱动支架222在弧形滑轨221上滑动。万向轮223具有处于支撑框架211底部的第一位置状态以及处于支撑框架211侧部的第二位置状态;当万向轮223处于第一位置状态时,支撑柱216的高度小于万向轮223的高度,此时可以进行移动支撑机构的移动;当万向轮处于第二位置状态时,支撑柱与工作台接触对移动支撑机构进行支撑,方便工件的加工。In some embodiments, as shown in FIG. 1 , FIG. 2 , and FIG. 15 , four movable members 220 are provided and the four movable members 220 are respectively provided at the four corners of the bottom of the support frame 211. The movable member 220 includes an arc-shaped slide rail 221 installed on the support frame 211 and extending to the side of the support frame 211, and a rotating member. A bracket 222 is slidably installed on the arc-shaped slide rail 221 and a universal wheel 223 is fixed on the bracket 222. The rotating member is used to drive the bracket 222 to slide on the arc-shaped slide rail 221. The universal wheel 223 has a first position state at the bottom of the support frame 211 and a second position state at the side of the support frame 211; when the universal wheel 223 is in the first position state, the height of the support column 216 is less than the height of the universal wheel 223, and the mobile support mechanism can be moved at this time; when the universal wheel is in the second position state, the support column contacts the workbench to support the mobile support mechanism, which is convenient for processing the workpiece.
具体地,如图1、图2、图15所示,转动件包括安装板224、直线电机225、舵机226、第一伸缩杆227和第二伸缩杆228,安装板224安装在支撑件210上,直线电机225通过连接轴转动安装在安装板224上且舵机226固定安装在安装板224上,直线电机225的输出端连接有限制支架222在弧形滑轨221上滑动的挡臂229,直线电机225上还固定有凸台,舵机226的输出轴上转动套装有第一套环2261、第二套环2262,第一套环2261、第二套环2262相互靠近一端均设置有棘部且两个棘部啮合,舵机226的输出轴上套装有与第二套环2262抵压的第二压簧2263,第一伸缩杆227固定端固定在第一套环2261上且其伸缩端与支架222铰接,第二伸缩杆228固定端固定在第二套环2262上且其伸缩端与凸台铰接。舵机226转动,可以通过第一伸缩杆227、第二伸缩杆228分别带动支架222、直线电机225进行转动,直线电机225驱动挡臂229抵挡支架222移动,可以对万向轮223的状态进行限位固定Specifically, as shown in Figures 1, 2, and 15, the rotating member includes a mounting plate 224, a linear motor 225, a steering gear 226, a first telescopic rod 227, and a second telescopic rod 228. The mounting plate 224 is mounted on the support member 210, the linear motor 225 is rotatably mounted on the mounting plate 224 through a connecting shaft, and the steering gear 226 is fixedly mounted on the mounting plate 224. The output end of the linear motor 225 is connected to a stop arm 229 that limits the bracket 222 from sliding on the arc-shaped slide rail 221, and a boss is also fixed on the linear motor 225. The output shaft of the servo 226 is rotatably mounted with a first ring 2261 and a second ring 2262. The first ring 2261 and the second ring 2262 are both provided with a ratchet at one end close to each other and the two ratchet parts are meshed. The output shaft of the servo 226 is mounted with a second compression spring 2263 that presses against the second ring 2262. The fixed end of the first telescopic rod 227 is fixed to the first ring 2261 and its telescopic end is hinged to the bracket 222. The fixed end of the second telescopic rod 228 is fixed to the second ring 2262 and its telescopic end is hinged to the boss. The servo 226 rotates, and the bracket 222 and the linear motor 225 are driven to rotate by the first telescopic rod 227 and the second telescopic rod 228 respectively. The linear motor 225 drives the blocking arm 229 to resist the movement of the bracket 222, and the state of the universal wheel 223 can be limited and fixed.
在一些实施例中,如图12、图16、图17所示,移动支撑机构还包括安装在支撑件210底部的抬起件240,抬起件240包括两个悬梁241、两个支撑摆板242和摆动件,两个悬梁241在水箱230下方水平相对布置且悬梁241固定在支撑件210底部,两个支撑摆板242在两个悬梁241之间且两个支撑摆板242相对布置,支撑摆板242两端均连接有转杆且两个转杆分别与两个悬梁241转动连接,摆动件用于驱动两个支撑摆板242转动。In some embodiments, as shown in Figures 12, 16, and 17, the mobile support mechanism also includes a lifting member 240 installed at the bottom of the support member 210, and the lifting member 240 includes two suspension beams 241, two support swing plates 242 and a swing member. The two suspension beams 241 are horizontally arranged opposite to each other below the water tank 230 and the suspension beams 241 are fixed to the bottom of the support member 210, the two support swing plates 242 are between the two suspension beams 241 and the two support swing plates 242 are arranged opposite to each other, both ends of the support swing plates 242 are connected with rotating rods and the two rotating rods are respectively rotatably connected to the two suspension beams 241, and the swing member is used to drive the two support swing plates 242 to rotate.
具体地,如图12、图16、图17所示,摆动件包括减速电机243、主动齿轮244、两个从动齿轮245;两个支撑摆板242之间设置有安装梁246,安装梁246两端分别与两个悬梁241连接,减速电机243安装在安装梁246上,减速电机243的输出轴垂直设置且其输出轴与主动齿轮244传动连接,主动齿轮244两侧均设置有安装在安装梁246上的连接座247,连接座247上滑动安装有水平布置的移动块2410,移动块2410设置有与主动齿轮244啮合的第一齿条,移动块2410底部还设置有与第一齿条平行的第二齿条,两个从动齿轮245分别与两个第二齿条啮合且从动齿轮245位于主动齿轮244两侧,从动齿轮245的齿轮轴水平布置,从动齿轮245的齿轮轴转动连接有固定在安装梁246上的安装座且从动齿轮245的齿轮轴固定连接有摆臂248,摆臂248远离从动齿轮245一端转动连接有滑移连接环249;两个支撑摆板242上均固定有滑移柱2421,两个滑移连接环249分别滑动套装在两个滑移柱2421上;Specifically, as shown in Figures 12, 16 and 17, the swing member includes a reduction motor 243, a driving gear 244 and two driven gears 245; a mounting beam 246 is provided between the two supporting swing plates 242, and the two ends of the mounting beam 246 are respectively connected to the two suspension beams 241, the reduction motor 243 is mounted on the mounting beam 246, the output shaft of the reduction motor 243 is vertically arranged and its output shaft is transmission-connected with the driving gear 244, and connecting seats 247 installed on the mounting beam 246 are provided on both sides of the driving gear 244, and a horizontally arranged moving block 2410 is slidably installed on the connecting seat 247, and the moving block 2410 is provided with a meshing member engaged with the driving gear 244. The first rack, a second rack parallel to the first rack is also provided at the bottom of the moving block 2410, two driven gears 245 are respectively meshed with the two second racks and the driven gears 245 are located on both sides of the driving gear 244, the gear shaft of the driven gear 245 is arranged horizontally, the gear shaft of the driven gear 245 is rotatably connected to a mounting seat fixed on the mounting beam 246, and the gear shaft of the driven gear 245 is fixedly connected to a swing arm 248, and the swing arm 248 is rotatably connected to a sliding connection ring 249 at one end away from the driven gear 245; sliding columns 2421 are fixed on the two support swing plates 242, and the two sliding connection rings 249 are slidably sleeved on the two sliding columns 2421 respectively;
减速电机243启动带动主动齿轮244转动,主动齿轮244通过两侧的移动块2410分别带动两个从动齿轮245转动,从动齿轮245转动带动摆臂248摆动,从而带动支撑摆板242摆动。The reduction motor 243 is started to drive the driving gear 244 to rotate, and the driving gear 244 drives the two driven gears 245 to rotate respectively through the moving blocks 2410 on both sides. The rotation of the driven gear 245 drives the swing arm 248 to swing, thereby driving the supporting swing plate 242 to swing.
本发明工作原理:Working principle of the present invention:
运输状态时:万向轮223在支撑框架211的底部且被垂直状态的挡臂228限制移动,此时支撑柱216不与工作台100接触;In the transport state: the universal wheel 223 is at the bottom of the support frame 211 and is restricted from moving by the vertical stop arm 228, and the support column 216 is not in contact with the workbench 100;
从运输状态转到加工过程时:抬起件的减速电机243启动,通过主动齿轮244、从动齿轮245、移动块2410等部件带动两个支撑摆板242向下摆动,逐渐将支撑框架211抬起,接着直线电机225收回挡臂229,舵机驱动直线电机和万向轮转动到水平位置,同时直线电机225伸出挡臂229将万向轮223限制在水平方向;之后抬起件减速电机245反转,通过主动齿轮244、从动齿轮245、移动块2410等部件带动两个支撑摆板242向上移动,逐渐放下支撑框架211,此时支撑柱216与地面接触,通过支撑框架211底部四角位置的旋钮实现装置的调平,从而进入加工过程;When switching from the transport state to the processing process: the reduction motor 243 of the lifting part is started, and the two support swing plates 242 are driven to swing downward through the driving gear 244, the driven gear 245, the moving block 2410 and other components, and the support frame 211 is gradually lifted, then the linear motor 225 retracts the stop arm 229, and the servo drives the linear motor and the universal wheel to rotate to a horizontal position, and at the same time, the linear motor 225 extends the stop arm 229 to limit the universal wheel 223 in the horizontal direction; then the reduction motor 245 of the lifting part is reversed, and the two support swing plates 242 are driven to move upward through the driving gear 244, the driven gear 245, the moving block 2410 and other components, and the support frame 211 is gradually lowered. At this time, the support column 216 is in contact with the ground, and the device is leveled through the knobs at the four corners of the bottom of the support frame 211, thereby entering the processing process;
加工过程中:工件400固定在阳极固定座313内,此时激光头器500对工件400上表面进行定域掩膜,电解液通过入水管330、宝塔转接头350、内流道314流入开放式流道311,使电解液在开放式流道311内流动时能经过工件400上表面,通过观测压力表331保证入口压力;由XZ轴平台驱动的导电阴极片610移动到工件400正上方,使导电阴极片610与工件400上表面间距达到设定值,此时开启高频脉冲电源,使导电螺丝320、工件400、导电阴极片610与电源导通,同时导电阴极片610沿着固定路线扫描实现电解激光复合加工。During the processing: the workpiece 400 is fixed in the anode fixing seat 313, and the laser head 500 performs localized masking on the upper surface of the workpiece 400. The electrolyte flows into the open channel 311 through the water inlet pipe 330, the pagoda adapter 350, and the inner channel 314, so that the electrolyte can pass through the upper surface of the workpiece 400 when flowing in the open channel 311, and the inlet pressure is ensured by observing the pressure gauge 331; the conductive cathode plate 610 driven by the XZ axis platform moves to the top of the workpiece 400, so that the distance between the conductive cathode plate 610 and the upper surface of the workpiece 400 reaches the set value, and then the high-frequency pulse power supply is turned on to make the conductive screw 320, the workpiece 400, and the conductive cathode plate 610 conductive to the power supply, and at the same time, the conductive cathode plate 610 scans along a fixed route to realize electrolytic laser composite processing.
以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,根据本发明的技术方案及其发明构思加以等同替换或改变,都应涵盖在本发明的保护范围之内。The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.
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