CN102649186A - Micro-electrochemical machining method and device assisted by laser irradiation - Google Patents
Micro-electrochemical machining method and device assisted by laser irradiation Download PDFInfo
- Publication number
- CN102649186A CN102649186A CN2012101371368A CN201210137136A CN102649186A CN 102649186 A CN102649186 A CN 102649186A CN 2012101371368 A CN2012101371368 A CN 2012101371368A CN 201210137136 A CN201210137136 A CN 201210137136A CN 102649186 A CN102649186 A CN 102649186A
- Authority
- CN
- China
- Prior art keywords
- electrolyte
- workpiece
- micro
- laser
- machining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
The invention relates to a micro-electrochemical machining method and device assisted by laser irradiation, belonging to the technical field of electrochemical machining. The device comprises a base, a high-frequency narrow-pulse power supply, a laser system, an electrolyte circulating system, a workpiece fixing and moving control system, a cathode, a cathode fixing and moving control system, a working box and a computer. The method comprises the following steps that: in a machining process, a laser beam which is coaxial with the cathode transmits the working box and electrolyte from the lower side of the working box to irradiate the bottom of a workpiece machining region; a temperature gradient between the machining region and a liquid surface of the working box is kept through controlling a power density of the laser beam and circulating the electrolyte; a convective motion of the electrolyte is formed between a flow field of the machining region and a flow field of a non-machining region, so as to achieve the aims of continuously exchanging new and old electrolytes, transporting machined products and improving an electrolysis and corrosion speed of a workpiece material; and efficient, high-precision and high-stability machining of a metal material three-dimensional complicated microstructure by precise feeding movement of a workpiece and the cathode is realized.
Description
?
Technical field
The present invention relates to a kind of laser irradiation auxiliary micro-electrochemical machining processing method and device, belong to technical field of electrolysis processing.
Background technology
The micro-electrochemical machining process technology has noncontact,, finished surface irrelevant with material hardness intensity do not have advantages such as heat affected layer, no cutting force, thereby in the metal material micro-structural is processed, represented significant superiority.Especially under like some limit operation environment aspect the alloy material of performances such as desired high strength, high tenacity, high abrasion, high temperature resistant, shock-resistant and antifatigue, micro-electrochemical machining processing is paid much attention to and important and wide application prospect is arranged.With the aerospace industry is example, and microminiaturization, precision, lightweight are the main Characteristics of Development of its product, and these characteristics are all closely related with the micro-electrochemical machining process technology.
Germany Max Planck Gesellschaft (MPG) adopted the high-frequency narrow-pulse current electrolytic processing process in 2000; Make electrochemical dissolution locality mutability improve; Thereby realized the microfabrication of tens of micro-meter scale metal 3 D complex die cavities, started the beginning of micro-electrochemical machining processing technology.After this, country such as the U.S., European Union, Japan, Korea S is numerous and confused to be imitated, and the micro-electrochemical machining process technology has been carried out a large amount of research, has obtained considerable progress.In the macro-scale electrochemical machining process; Machining gap between workpiece anode and tool cathode is generally in 0.1mm～1mm scope; Through rational flow Field Design; Electrolyte is flowed from the machining gap high speed, and (6m/s～30m/s), take away lysate can stablize the electrochemical dissolution of anode workpiece and carries out.But at the micro-electrochemical machining manufacture field; The tool cathode size is between several microns to tens of microns; Add the pole clearance (about 10-20 μ m) that must keep small man-hour; Generally adopt quiet liquid processing mode, promptly in process, do not carry out the new and old exchange of electrolyte in machining area flow field, and the electrolysis of anode workpiece erosion is lower except that speed.Therefore, there is following weak point in high-frequency narrow-pulse current micro-electrochemical machining processing technology: the Electrolyzed Processing product is difficult for discharging, and is easy to take place alluvial and adheres to, thereby cause short circuit; The electrolyte stream field condition is unstable, influences the raising of process stability and machining accuracy.
In order to overcome the weak point in the above-mentioned micro-electrochemical machining processing technology; In the prior art; A kind of comparatively common processing method adopts rotatablely moving of fine negative electrode to reach the purpose of upgrading with electrolyte that is uniformly distributed with of flow field, stirring and processing zone, promotion elaboration products; But its defective is: the processing for revolution class formation characteristic has certain effect, is not suitable for the complicate three dimension microstructure processing and manufacturing; The run-out error of negative electrode rotating shaft is unfavorable to the control of machining accuracy.In the prior art; Also has a kind of common processing method; Promptly in fine negative electrode normal process feeding process, periodically high speed lifting and decline negative electrode utilize cathode deposition period to move back and forth the swabbing action that the flow field, pole clearance is produced and promote electrolyte flow, transport elaboration products; Its defective is: in negative electrode lifting campaign, need to interrupt electrolytic process, reduced working (machining) efficiency; Because the existence of side machining gap, the negative electrode lifting is restricted the suction effect in machining area flow field.
Thermal convection current is a kind of common phenomenon of occurring in nature.One to chute in, heated base is also cooled off the top, can be to chute top and bottom formation temperature difference △ T.After convection current trench bottom fluid element was heated, it is big that its volume becomes, and density reduces, and under buoyancy, the hot-fluid volume elements rises and the decline of cold flow volume elements.Along with △ T increases gradually, the groove inner fluid demonstrates stream mode, and can form large-scale circulation.1999, the researcher of Princeton university utilized 90 ℃～25 ℃ thermograde, in the minute yardstick pipeline, had realized the perpendicular flow of liquid, showed that thermograde can flow to minute to play guide effect.2011; The researcher of Britain and Holland has analyzed pulse laser beam and has seen through the temperature field distribution situation after electrolyte shines alloy material; The result shows; The laser irradiation zone in the about 1.4mm width range of illuminated laser spot material internal radially, forming about 100 ℃ thermograde, forms about 70 ℃ thermograde in the electrolyte scope of the about 1mm height in illuminated laser spot axial direction top in time several seconds.
Summary of the invention
The object of the present invention is to provide the micro-electrochemical machining processing technology device and the processing method of a kind of efficient, high accuracy and high processing stability.
The micro-electrochemical machining processing method that a kind of laser irradiation is auxiliary; It is characterized in that; Adopting high-frequency narrow-pulse current to carry out in the micro-electrochemical machining process, utilizes the focussed laser beam coaxial, transmissive operation case and electrolyte below the work box and bottom the irradiation workpiece with negative electrode; Make the workpiece bottom temp raise and heat is conducted to the Electrolyzed Processing zone, thereby strengthen the electrolysis of machining area, the electrolysis erosion that improves workpiece material removes speed; Meanwhile; Through circulating of electrolyte; Keep the thermograde between workpiece bottom and the work box electrolyte inside liquid level; Thermograde forms continuous electrolyte convective motion between machining area flow field and non-machining area flow field between 80 ℃-20 ℃, realize the transporting continuously of continuous renewal, elaboration products of new and old electrolyte; By the interlock feeding of X, Y, Z axle micro-displacement platform, realize efficient, the high accuracy and the high stability processing of metal material three-dimensional complex micro structure.
A kind of device of realizing the micro-electrochemical machining processing method that said laser irradiation is auxiliary comprises pedestal, high-frequency narrow-pulse power supply, electrolyte circulation system, workpiece is fixing with kinetic control system, negative electrode, negative electrode is fixing and kinetic control system, work box, computer; It is characterized in that: this device also comprises laser system; This laser system is made up of laser instrument, closed optical path and light beam focusing block; Wherein the light beam focusing block is positioned at work box below, and the laser beam that is produced can shine the bottom of workpiece from work box below transmissive operation case and electrolyte; The laser beam wavelength of laser instrument output is continuous wave or impulse wave in the 400-600nm scope; The coaxial installation of laser beam of above-mentioned negative electrode and light beam focusing block output.Above-mentioned work box bottom is by the material that can see through above-mentioned laser beam.The laser beam that laser instrument produced can be from work box below transmissive operation case and electrolyte and shine the bottom of workpiece.
Beneficial effect of the present invention: the auxiliary micro-electrochemical machining processing unit (plant) of the laser irradiation among the present invention is custom-designed for realizing the auxiliary micro-electrochemical machining processing technology of laser irradiation; Adopt wavelength in the 400-600nm scope, the focussed laser beam of continuous wave or impulse wave is heating source; Work box is by the material that can see through above-mentioned laser beam; In high-frequency narrow-pulse current micro-electrochemical machining process; Focussed laser beam transmissive operation case and electrolyte heat the bottom of workpiece area to be machined; Because the laser beam of above-mentioned wavelength can transmission electrolyte; Its spot diameter can be limited in the minute yardstick scope; Heat is concentrated; The work metal material has higher absorptivity to the laser beam of 400-600nm wavelength, thereby can heat the electrolyte flow field of minute yardstick machining area through the good heat-conductive characteristic of workpiece material.The rising of machining area electrolyte flow field temperature, the electrolysis erosion that can effectively improve machined material removes speed, thereby promotes the efficient of micro-electrochemical machining processing; And the circulation through electrolyte; Can keep the thermograde between machining area flow field and the work box liquid level; Form the electrolyte convective motion between machining area flow field and the non-machining area flow field; Reach the purpose that transports elaboration products continuously, upgrades electrolyte, thereby improve the stability and the machining accuracy of micro-electrochemical machining process.Entire processing apparatus is simple in structure, machined parameters is easy to the integrated control of computer, is suitable for efficient, the high accuracy and the high stability processing of metal material three-dimensional complex micro structure.
The micro-electrochemical machining processing unit (plant) that said laser irradiation is auxiliary is characterized in that: said base is made up of horizontal base and vertical pedestal; Above-mentioned workpiece is fixing to be fixed with kinetic control system, work box and all is installed on the vertical pedestal with kinetic control system, negative electrode; Above-mentioned light beam focusing block is installed on the horizontal base.This kind device, simple in structure, each arrangements of components is orderly.
Description of drawings
Fig. 1 is the three-dimensional structure sketch map of the auxiliary micro-electrochemical machining processing unit (plant) of laser irradiation of the present invention;
Fig. 2 is the auxiliary micro-electrochemical machining processing method principle schematic of laser irradiation of the present invention;
Fig. 3 is the side view of the auxiliary micro-electrochemical machining processing unit (plant) structure of laser irradiation of the present invention;
Fig. 4 is the front view of the auxiliary micro-electrochemical machining processing unit (plant) structure of laser irradiation of the present invention;
Label title among the figure: 1, computer, 2, the workpiece insulation board, 3, work piece holder, 4, the high-frequency narrow-pulse power supply, 5, XY axle installing rack, 6, pedestal; 7, Z axle rapid movement motor, 8, the motor installing rack, 9, guide rail, 10, leading screw, 11, Z axle installing plate; 12, slide block, 13, the cathode fixture installing rack, 14, Z axle micro-displacement platform, 15, the cathode insulation plate, 16, cathode fixture; 17, negative electrode, 18, workpiece, 19, work box, 20, the work box installing rack, 21, laser beam; 22, laser instrument, 23, closed optical path, 24, the light beam focusing block, 25, positioning fixture, 26, X axle micro-displacement platform; 27, Y axle micro-displacement platform, 28, electrolytic bath, 29, liquid back pipe, 30, infusion pump, 31, choke valve, 32, feed tube.
The specific embodiment
Ask for an interview Fig. 1, and combine Fig. 2, the auxiliary micro-electrochemical machining processing method of laser irradiation of the present invention is to utilize above-mentioned processing unit (plant), and workpiece 18 is fixed on the work piece holder 3, in work box 19, injects electrolyte; The positive pole of high-frequency narrow-pulse power supply 4 is connect on the work piece holder 3, make workpiece 18 positively chargeds, the negative pole of high-frequency narrow-pulse power supply 4 is connect on the cathode fixture 16, make that negative electrode 17 is electronegative; When utilizing electrochemistry anodic solution principle to remove workpiece material, with the coaxial laser beam 21 of negative electrode from work box 19 below transmissive operation case 19 and electrolyte, the bottom of the machining area of irradiation workpiece 18; Laser beam 21 is converted into heat energy after being absorbed by workpiece 18, and through the good heat-conductive characteristic of metal material, flow field, heat processed zone through the circulation of electrolyte, forms the thermograde that continues between machining area flow field and work box liquid level; Because the rising of machining area electrolyte flow field temperature, the electrolysis erosion that has effectively improved machined material removes speed, thereby has promoted the efficient of high-frequency narrow-pulse micro-electrochemical machining processing; And the lasting existence of thermograde between machining area flow field and the work box liquid level; Form the electrolyte convective motion between machining area flow field and the non-machining area flow field; The purpose of realize transporting elaboration products continuously, upgrading electrolyte, thereby the stability and the machining accuracy of raising micro-electrochemical machining process; By means of the three-axis accurate of X axle micro-displacement platform 26, Y axle micro-displacement platform 27, Z axle micro-displacement platform 14 interlock feeding, realize efficient, the high accuracy and the high stability Electrolyzed Processing of metal material three-dimensional complex micro structure.
Ask for an interview Fig. 1; And referring to Fig. 3 and Fig. 4, the auxiliary micro-electrochemical machining processing unit (plant) of laser irradiation of the present invention comprises pedestal 6, high-frequency narrow-pulse power supply 4, laser system, electrolyte circulation system, workpiece is fixed and kinetic control system, negative electrode, negative electrode fix and kinetic control system, work box 19, computer 1.
Laser system in the processing unit (plant) comprises laser instrument 22, closed optical path 23, light beam focusing block 24; Light beam focusing block 24 inside are equipped with optical components such as beam expanding lens, condenser lens and are fixed on the horizontal base of pedestal 6 of work box 19 belows the laser beam 21 of its output and negative electrode 17 coaxial installations through positioning fixture 25.In the micro-electrochemical machining process; Described laser instrument 22 output continuous waves or impulse wave, the laser beam of wavelength in the 400-600nm scope; Get into light beam focusing block 24 and restraint, focus on back output through closed optical path 23 through expansion; The laser beam 21 of output can be from the bottom transmissive operation case 19 and the electrolyte of work box 19, directly bottom the irradiation workpiece.
Electrolyte circulation system in the processing unit (plant) comprises electrolytic bath 28, liquid back pipe 29, choke valve 31, feed tube 32 and infusion pump 30, is used for the cooling that circulates of electrolyte to work box 19.Described liquid back pipe 29 is connected with fluid joint on the work box 19, and feed tube 32 is connected with liquid inlet joint on the work box 19, and infusion pump 30 is a microinfusion pump.In the electrochemical machining process; The liquid outlet of electrolyte from work box 19 gets into the electrolytic bath 28 through liquid back pipe 29, choke valve 31; After supercooling, be transported to work box 19 from feed tube 32, infusion pump 30, choke valve 31 is used to regulate that electrolyte returns flow quantity and infusion pump 30 flows balance each other.
Workpiece in the processing unit (plant) is fixed and kinetic control system, comprises workpiece insulation board 2, work piece holder 3, displacement platform installing rack 5, X axle micro-displacement platform 26, Y axle micro-displacement platform, workpiece 18, work box 19 and work box installing rack 20.The side of described work box 19 is fixed on the vertical pedestal of pedestal 6 through work box installing rack 20, makes laser beam 21 to inject from work box 19 bottoms; X axle micro-displacement platform 26 is fixed on the vertical pedestal of pedestal 6 with Y axle micro-displacement platform 27 through displacement platform installing rack 5; Workpiece 18 connects with X axle micro-displacement platform 26 and Y axle micro-displacement platform 27 through work piece holder 3, workpiece insulation board 2, realizes the precision feeding motion of workpiece on X, Y direction;
Negative electrode in the processing unit (plant) is fixed and kinetic control system, comprises rapid movement motor 7, motor installing rack 8, guide rail 9, leading screw 10, displacement platform installing plate 11, slide block 12, cathode fixture installing rack 13, Z axle micro-displacement platform 14, cathode insulation plate 15, cathode fixture 16 and negative electrode 17.Negative electrode 17 connects through cathode fixture 16, cathode insulation plate 15 and cathode fixture installing rack 13 and Z axle micro-displacement platform 14, realizes the precision feeding motion of negative electrode 19 on the Z direction; 14 of Z axle micro-displacement platforms constitute the fast feed campaign of negative electrode 19 in the Z direction through displacement platform installing plate 11, slide block 12, guide rail 9, leading screw 10 and 7 connections of Z axle fast moving motor, make things convenient for preparations such as negative electrode clamping, clamping workpiece;
Z axle fast moving motor 7 in the processing unit (plant), Z axle micro-displacement platform 14, X axle micro-displacement platform 26, Y axle micro-displacement platform 27 are by computer 1 control that links; Realize the three-axis accurate interlock feeding between workpiece 18 and the negative electrode 17, guaranteed the working ability of complicate three dimension microstructure.
Claims (3)
1. the auxiliary micro-electrochemical machining processing method of a laser irradiation; It is characterized in that: adopting high-frequency narrow-pulse current to carry out in the micro-electrochemical machining process; Utilize the focussed laser beam coaxial with negative electrode; Transmissive operation case and electrolyte from work box below and irradiation workpiece bottom; Make the workpiece bottom temp raise and heat is conducted to the Electrolyzed Processing zone,, keep thermograde between workpiece bottom and the work box electrolyte inside liquid level between 80 ℃-20 ℃ through circulating of electrolyte; Between machining area flow field and non-machining area flow field, form continuous electrolyte convective motion; The electrolysis erosion that transports, improves workpiece material continuously that reaches continuous exchange, the elaboration products of new and old electrolyte removes the purpose of speed, by the feed motion of workpiece and negative electrode, realizes efficient, the high accuracy and the high stability processing of metal material three-dimensional complex micro structure.
2. device of realizing the micro-electrochemical machining processing method that the said laser irradiation of claim 1 is auxiliary comprises pedestal (6), high-frequency narrow-pulse power supply (4), electrolyte circulation system, workpiece is fixing with kinetic control system, negative electrode (17), negative electrode is fixing and kinetic control system, work box (19), computer (1);
It is characterized in that:
This device also comprises laser system, and this laser system is made up of laser instrument (22), closed optical path (23) and light beam focusing block (24), and wherein light beam focusing block (24) is positioned at work box (19) below; The laser beam wavelength of laser instrument (22) output is continuous wave or impulse wave in the 400-600nm scope;
The coaxial installation of laser beam (21) of above-mentioned negative electrode (17) and light beam focusing block (24) output;
Above-mentioned work box (19) bottom is by the material that can see through above-mentioned laser beam.
3. the micro-electrochemical machining processing unit (plant) auxiliary according to the said laser irradiation of claim 2 is characterized in that:
Said base (6) is made up of horizontal base and vertical pedestal;
Above-mentioned workpiece is fixing to be fixed with kinetic control system, work box (19) and all is installed on the vertical pedestal with kinetic control system, negative electrode;
Above-mentioned light beam focusing block (24) is installed on the horizontal base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101371368A CN102649186A (en) | 2012-05-07 | 2012-05-07 | Micro-electrochemical machining method and device assisted by laser irradiation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101371368A CN102649186A (en) | 2012-05-07 | 2012-05-07 | Micro-electrochemical machining method and device assisted by laser irradiation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102649186A true CN102649186A (en) | 2012-08-29 |
Family
ID=46691396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012101371368A Pending CN102649186A (en) | 2012-05-07 | 2012-05-07 | Micro-electrochemical machining method and device assisted by laser irradiation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102649186A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103706901A (en) * | 2013-12-30 | 2014-04-09 | 江苏大学 | Method and device for machining micro annular grooves through hollow laser and electrolysis in combined mode |
| CN106424987A (en) * | 2016-12-06 | 2017-02-22 | 江苏大学 | Method and device for coaxial combined machining with tubular electrode discharging and laser irradiation |
| CN106735866A (en) * | 2016-12-27 | 2017-05-31 | 江苏大学 | The apparatus and method that dorsad multifocal dot laser and electrochemical copolymerization process semi-conducting material |
| CN107962263A (en) * | 2017-11-16 | 2018-04-27 | 中国科学院宁波材料技术与工程研究所 | Laser and electrolysis combined machining method and its device |
| CN107971592A (en) * | 2017-11-16 | 2018-05-01 | 中国科学院宁波材料技术与工程研究所 | Laser intervenes electrochemical micromachining method and its device |
| CN108213957A (en) * | 2017-12-28 | 2018-06-29 | 中国科学院宁波材料技术与工程研究所 | The compound wire-electrode cutting and processing method of micro-electrochemical machining laser and device |
| CN108746895A (en) * | 2018-05-29 | 2018-11-06 | 江苏大学 | A kind of cutter device of laser electrolysis |
| CN109732199A (en) * | 2019-02-25 | 2019-05-10 | 江苏大学 | A kind of semiconductor material laser electrochemistry is backwards to collaboration micro-processing method and device |
| CN111360345A (en) * | 2020-03-25 | 2020-07-03 | 苏州大学 | Processing method for forming microstructure on surface of workpiece and control system |
| CN113967769A (en) * | 2021-10-29 | 2022-01-25 | 上海交通大学 | Method for machining metal-based silicon carbide through photocatalysis-assisted electrolysis milling |
| CN114346337A (en) * | 2022-01-21 | 2022-04-15 | 江苏大学 | Abrasive particle assisted laser electrolysis self-coupling cooperative alignment punching method and system |
| CN115194271A (en) * | 2022-08-23 | 2022-10-18 | 深圳技术大学 | Laser and electrochemical composite polishing device for 3D printed metal component |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2736087Y (en) * | 2004-03-31 | 2005-10-26 | 广东工业大学 | Three dimensional superfine generating electrochemical machining device |
| CN1919514A (en) * | 2006-09-18 | 2007-02-28 | 南京航空航天大学 | Spraying liquid bunch electrolysis-laser composite processing method and apparatus thereof |
| CN101249580A (en) * | 2008-03-14 | 2008-08-27 | 江苏大学 | Electrochemistry-laser mask focusing micro etch method for processing and device thereof |
| US20090194512A1 (en) * | 2008-02-01 | 2009-08-06 | Contrel Technology Co., Ltd. | Multi-function machine |
| CN202591769U (en) * | 2012-05-07 | 2012-12-12 | 南京航空航天大学 | Laser irradiation-aided electrolytic micromachining device |
-
2012
- 2012-05-07 CN CN2012101371368A patent/CN102649186A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2736087Y (en) * | 2004-03-31 | 2005-10-26 | 广东工业大学 | Three dimensional superfine generating electrochemical machining device |
| CN1919514A (en) * | 2006-09-18 | 2007-02-28 | 南京航空航天大学 | Spraying liquid bunch electrolysis-laser composite processing method and apparatus thereof |
| US20090194512A1 (en) * | 2008-02-01 | 2009-08-06 | Contrel Technology Co., Ltd. | Multi-function machine |
| CN101249580A (en) * | 2008-03-14 | 2008-08-27 | 江苏大学 | Electrochemistry-laser mask focusing micro etch method for processing and device thereof |
| CN202591769U (en) * | 2012-05-07 | 2012-12-12 | 南京航空航天大学 | Laser irradiation-aided electrolytic micromachining device |
Non-Patent Citations (2)
| Title |
|---|
| 《中国优秀硕士学位论文全文数据库》 20110301 李昞晖 《电解射流-激光复合加工技术基础研究》 第1、2、29、30、38-41页 1-3 , * |
| 李昞晖: "《电解射流—激光复合加工技术基础研究》", 《中国优秀硕士学位论文全文数据库》, 1 March 2011 (2011-03-01) * |
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103706901B (en) * | 2013-12-30 | 2016-03-02 | 江苏大学 | A kind of hollow laser combines the method and apparatus processing miniature annular groove with electrolysis |
| CN103706901A (en) * | 2013-12-30 | 2014-04-09 | 江苏大学 | Method and device for machining micro annular grooves through hollow laser and electrolysis in combined mode |
| CN106424987B (en) * | 2016-12-06 | 2018-10-09 | 江苏大学 | The coaxial combined machining method and device that pipe electrode electric discharge is irradiated with laser |
| CN106424987A (en) * | 2016-12-06 | 2017-02-22 | 江苏大学 | Method and device for coaxial combined machining with tubular electrode discharging and laser irradiation |
| CN106735866A (en) * | 2016-12-27 | 2017-05-31 | 江苏大学 | The apparatus and method that dorsad multifocal dot laser and electrochemical copolymerization process semi-conducting material |
| CN107971592B (en) * | 2017-11-16 | 2019-07-09 | 中国科学院宁波材料技术与工程研究所 | Laser intervenes electrochemical micromachining method and device thereof |
| CN107971592A (en) * | 2017-11-16 | 2018-05-01 | 中国科学院宁波材料技术与工程研究所 | Laser intervenes electrochemical micromachining method and its device |
| CN107962263A (en) * | 2017-11-16 | 2018-04-27 | 中国科学院宁波材料技术与工程研究所 | Laser and electrolysis combined machining method and its device |
| CN107962263B (en) * | 2017-11-16 | 2019-07-09 | 中国科学院宁波材料技术与工程研究所 | Laser and electrolysis combined machining method and its device |
| CN108213957A (en) * | 2017-12-28 | 2018-06-29 | 中国科学院宁波材料技术与工程研究所 | The compound wire-electrode cutting and processing method of micro-electrochemical machining laser and device |
| CN108746895A (en) * | 2018-05-29 | 2018-11-06 | 江苏大学 | A kind of cutter device of laser electrolysis |
| CN109732199B (en) * | 2019-02-25 | 2020-11-20 | 江苏大学 | Semiconductor material laser electrochemical back cooperative micromachining method and device |
| CN109732199A (en) * | 2019-02-25 | 2019-05-10 | 江苏大学 | A kind of semiconductor material laser electrochemistry is backwards to collaboration micro-processing method and device |
| CN111360345A (en) * | 2020-03-25 | 2020-07-03 | 苏州大学 | Processing method for forming microstructure on surface of workpiece and control system |
| CN111360345B (en) * | 2020-03-25 | 2021-08-27 | 苏州大学 | Processing method for forming microstructure on surface of workpiece and control system |
| CN113967769A (en) * | 2021-10-29 | 2022-01-25 | 上海交通大学 | Method for machining metal-based silicon carbide through photocatalysis-assisted electrolysis milling |
| CN113967769B (en) * | 2021-10-29 | 2023-02-28 | 上海交通大学 | Method for milling and grinding metal-based silicon carbide by photocatalysis-assisted electrolysis |
| CN114346337A (en) * | 2022-01-21 | 2022-04-15 | 江苏大学 | Abrasive particle assisted laser electrolysis self-coupling cooperative alignment punching method and system |
| CN114346337B (en) * | 2022-01-21 | 2024-05-14 | 江苏大学 | Abrasive particle-assisted laser electrolysis self-coupling collaborative alignment punching method and system |
| CN115194271A (en) * | 2022-08-23 | 2022-10-18 | 深圳技术大学 | Laser and electrochemical composite polishing device for 3D printed metal component |
| CN115194271B (en) * | 2022-08-23 | 2024-05-03 | 深圳技术大学 | Laser and electrochemical composite polishing device for 3D printing metal component |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102649186A (en) | Micro-electrochemical machining method and device assisted by laser irradiation | |
| CN109913919B (en) | Processing method and device for preparing micro-nano two-dimensional structure on surface of workpiece | |
| CN202591769U (en) | Laser irradiation-aided electrolytic micromachining device | |
| CN106270844B (en) | Microgap is electrolysed auxiliary laser fine machining method and device | |
| CN102794516B (en) | Blisk blade profile subtle electrochemical machining electrode and machining method | |
| CN105479173B (en) | The synchronous complex machining device of micropore laser-high temeperature chemistry and processing method | |
| CN103590076A (en) | Laser-reinforced electrodeposition rapid-prototyping processing apparatus and method | |
| CN103590080A (en) | Laser-reinforced jet-electrodeposition rapid-prototyping processing apparatus and method | |
| CN101259549A (en) | Electrolytic machining technique and device for small bore diameter inner wall surface fine groove | |
| CN103317234A (en) | Laser induced low pressure jet flow combined etching processing method and device | |
| CN101545121A (en) | Method and device for electron beam electroforming rapid prototyping | |
| CN104289775B (en) | Electrode compound motion is electrolysed cutting method | |
| CN103920954B (en) | Clamp for ultrasonic disturbance electrolyte micro-hole electrolytic machining | |
| CN108655592A (en) | A kind of sound-magnetic coupling energy field auxiliary laser perforating device and method | |
| CN113481555A (en) | Method and device for performing localized electrodeposition repair on inner wall of material by using laser composite electrochemical technology | |
| CN105195903A (en) | Laser microjet processing device for perforating turbine blade | |
| Jingtao et al. | Improving profile accuracy and surface quality of blisk by electrochemical machining with a micro inter-electrode gap | |
| CN204221153U (en) | A kind of fixture of ultrasonic disturbance electrolyte micropore Electrolyzed Processing | |
| CN110625272B (en) | Device and method for assisting laser processing of low-taper micropores by using chemically etched ice layer | |
| CN102794517A (en) | Electrode for processing electrolytic slot of blisk and processing method | |
| Wang et al. | Investigation on pulse-vibration electrochemical machining of parallel micro-grooves | |
| CN110936021A (en) | Scanning type laser composite chemical polishing device and method | |
| CN108788352A (en) | Line electrode workpiece friction speed compound motion wire electrochemical micro-machining method | |
| CN116021101A (en) | Laser electrochemical machining method for copper microstructure machining | |
| CN203593801U (en) | Laser strengthening electro-deposition rapid prototyping processing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120829 |